SPECIFICATION SHEET. SLC-1615 (for low concentration) SLC-1625 (for high concentration) SILICA ANALYZER

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ISO-14001 ISO-9001 SPECIFICATION SHEET SILICA ANALYZER Model: SLC-1605 (for very low concentration) SLC-1615 (for low concentration) SLC-1625 (for high concentration) This equipment is used for high accuracy measurement of silica (SiO2) concentration in pure and ultra pure water used for VLSI manufacture or as boiler feed water. The Molybdenum-blue measurement method is employed. Three versions are available according to the required measurement range. The following ranges are available, very low concentration, low concentration and high concentration. Both the microprocessor controller and analyzer are housed in a self-standing cabinet, providing ease of operation and maintenance. FEATURES Measurement of very low concentration 0~10ppb. SLC-1605 measures very low concentration with an accuracy (repeatability) within +/-2% FS. No generation of corrosive gas, and simple technique for reagent supplying. Ascorbic acid is used as the reducing agent, not sulfonic acid with irritating odor. The liquid system is a sealed type. Long-life colorimeter light source. The semi-conductor light source has a very long service life. It does not normally require replacement during the life of the instrument. Wide range measurement covering from ultra pure water to city water. Three models are available. For very low concentration, low concentration and high concentration. For each model, two ranges can be designated for each flow path. The auto-range system automatically switches the range according to the measured value. Wide range for measurement cycle setting. Freely set between 5 minutes and 999 minutes. Multi-stream measurement Up to four streams can be automatically switched successively. Connection to external computer. The analysis results can be transmitted as a serial signal in RS- 232C format. Calibration with standard solution required only once every 6 months. Auto calibration function is available as an option. STANDARD SPECIFICATIONS Product Silica analyzer Silica analyzer Silica analyzer name (for very low (for low (for high concentration) concentration) concentration) Model SLC-1605 SLC-1615 SLC-1625 Meas. Ultra pure water, Boiler water, Raw water for pure object pure water pure water water production, city water Meas. 2 ranges between 2 ranges between 2 ranges between range 0~10ppb and 0~50ppb and 0~5ppm and 0~500ppb 0~5,000ppb 0~50ppm (automatically (automatically (automatically switched) switched) switched) Display : LCD 40 characters x 2 lines (with back light) Measurement Method : Intermittent absorptiometry with Molybdenum blue Measurement Cycle : Freely set between 5 min. and 999 min. (Please consult with DKK-TOA when sample contains phosphoric acid) Measurement Flow Path : 1~4 (To be specified) Automatic Calibration Repeatability Sample Conditions Flow rate Pressure Temperature : Zero..Auto zero : +/-2%FS (with minimum meas. time of 10 min.) : 0.2~2L/min. : 10~200kPa : 10~40 o C Ambient Temperature/ Humidity Construction Output Alarms Other Contact Outputs Interface Power Requirements Power Consumption Instrument Air Dimensions Weight Paint Color OPTION : 10~40 o C, max. 85%RH (no condensing) : Indoor installation : Isolated from input, 4~20mA DC (max. load 600Ω ), hold output, 1 circuit/path or 1 circuit with channel marker : Power cut-off signal, under maintenance signal, abnormal concentration signal, other common alarm signals (colorimeter abnormality, sample cut-off, abnormal calibration curve) Contents of common alarm signals are indicated on the LCD, and printed by the printer (optional). All alarm signals are transmitted to a common set of terminals. Voltage-free contact output (20VA, 110V AC or less) : Range signal (closed contact with high range) Voltage-free contact output (20VA, 110V AC or less) : RS-232C : 100V AC +/-10%, 50/60Hz : Approx. 500VA : Pressure 0.4~0.7MPa (normal usage 0.5NL/min., purge usage 4NL/min.) : 470(W) x 600(D) x 1450(H)mm : Approx. 100kg : Munsell 5Y7/1 acid-proof painting Calibration with standard solution required only once every 6 months. One of the following auto calibration functions is available as an option. 1. Automatic calibration by standard solution 2. Simple span calibration with colored glass filter RELATED EQUIPMENT Printer (optional) Anti-freezing heater (opt.) : Dot-matrix, impact type 40 digits/line : Integration in the analyzer is possible (120W) Model: SLC-1605/1615/1625 - Silica Analyzer - Issue: SLC1605/1615/1625-0403-R1 Page 1

PRINCIPLE OF OPERATION (Sampling) To reduce the measurement delay time, the sample is continuously flowing in the sample filter (SF) of each stream. At the time of sampling, only the valve of the measured stream opens for filtration. The filtrated sample is transferred to the reaction cell as the sample for the color developing reaction. MEASUREMENT SYSTEM DIAGRAM (Reaction) Ammonium molybdate is added to the sample to produce silicomolybdic acid. Then tartaric acid is added to the sample to mask phosphoric acid, and the silicomolybdic acid is reduced to molybdenum blue using ascorbic acid. This solution is transferred to the colorimeter to measure its absorbance at a wave length of 860nm. The silica concentration is automatically calculated with the use of the previously prepared calibration curve. DIMENSIONS Page 2 Model: SLC-1605/1615/1625 - Silica Analyzer - Issue: SLC1605/1615/1625-0403-R1

TERMINAL CONNECTIONS Model: SLC-1605/1615/1625 - Silica Analyzer - Issue: SLC1605/1615/1625-0403-R1 Page 3

DATA COMMUNICATION SPECIFICATIONS Page 4 Model: SLC-1605/1615/1625 - Silica Analyzer - Issue: SLC1605/1615/1625-0403-R1

PRODUCT CODE Model: SLC-1605/1615/1625 - Silica Analyzer - Issue: SLC1605/1615/1625-0403-R1 Page 5

PRODUCT CODE DKK-TOA CORPORATION Do not operate products before consulting instruction manual. International Operations: DKK-TOA Corporation 29-10, 1-Chome, Takadanobaba, Shinjuku-ku, Tokyo 169-8648 Japan Tel: +81-3-3202-0225 Fax: +81-3-3202-5685 Representative Office (Europe): DKK-TOA European Representative St. Johns Innovation Centre, Cowley Rd., Cambridge CB4 0WS UK. Tel : +44 (0)1223-526471 Fax : +44 (0)1223-709239 http://www.toadkk.co.jp Information and specifications are for a typical system and are subject to change without notice. Page 6 Model: SLC-1605/1615/1625 - Silica Analyzer - Issue: SLC1605/1615/1625-0403-R1