Kurt J. Lesker in the Cryogenic Community. Dr. Glynn Dyson Cryogenics Cluster Day 19 th September 2014
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1 Kurt J. Lesker in the Cryogenic Community Dr. Glynn Dyson 19 th September 2014
2 Overview Introduction to the Kurt J. Lesker Company (KJLC) KJLC in the Cryogenic Community Deposition Methods Axxis Coating System Other Application Areas Tec66 Vacuum Cluster
3 Introduction to the Kurt J. Lesker Company
4 Business Divisions
5 One Stop Shop KJLC is one-stop shop to enable its customers to create, maintain, monitor and execute processes in a vacuum Vacuum chambers Vacuum pumps Vacuum gauges Fittings, hoses, valves Deposition sources Deposition materials
6 Vacuum is a Means to an End Create a vacuum so you can.. Coat something, deposit a thin film Increase mean free pathway Impede heat transfer Reduce oxidation or chemical reaction Evacuate lighting products
7 KLJC in the Cryogenic Community Use cryo pumps Supply of vacuum parts Supply of coating equipment to deposit thin film superconducting devices which rely on the cryogenic community for cryostats (eg Josephson junctions)
8 Deposition Methods and Needs Magnetron sputtering ebeam Customers typically use sputtering to deposit superconducting Josephson junction devices Needs to be deposited at glancing angle Our solution to this: the Axxis coating system ebeam Source Magnetron Source
9 Axxis Coating System
10 Typical Applications Multi-Technique Thin Film Depositions (Sputter, e-beam or thermal, ion source) Glancing Angle Depositions (GLAD, structured films) Nb / Al Superconducting circuits
11 Process Chamber Horizontal Cylinder 304 stainless steel horizontal cylinder 18 diameter x 18 deep Aluminum o-ring sealed front door Welded domed back Six radial 8 CF process ports Extruded aluminum frame Instrument rack attached to frame
12 Substrate Fixture Flat Plate Fixture Mounted to back of chamber Motorized rotation of substrate Motorized indexing of substrate port to port & substrate tilt
13 Evaporation Source Chamber Box shaped 304 stainless steel 12 wide x 12 deep x 12 high Hinged aluminum front access door Rectangular viewport with replaceable shield Mirror for indirect viewing of melt
14 Electron Beam Evaporation Source Electron Beam Evaporation Source Module 4-pocket, 8cc e-beam evaporation source 5.5 kw power supply Programmable sweep control Pneumatically actuated source shutter Deposition shielding Related Options: Quartz crystal deposition controller Single or dual, standard or shuttered crystal head
15 Magnetron Sputtering Sources Torus Magnetron sources Up to three 3 Torus 2, 3 or 4 magnetron sources Up to 5 sputter sources without LL or evaporation chamber Pneumatic deposition shutters Mounted to process chamber on an 8 CF full nipple
16 Sputtering Sources and Substrate Holder
17 Application Areas
18 Vacuum Cluster Industry cluster established in and around Hastings Raise awareness and promote vacuum industry Worked with Sussex Coast College to develop Vacuum training course for employees in industrial sector Tec66 Conference Talks - Photonics, Nano Electronics, Organic Electronics 35+ exhibitors 27 th October 2014 Hastings
19 Thank you for Listening Kurt J. Lesker Company Ltd. 15/16 Burgess Road Hastings East Sussex TN35 4NR UK Tel: +44 (0) Mob: +44 (0) Skype: kjlc.glynnd
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