Process Equipment Division Overview

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Dorthy Baker
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1 Process Equipment Division Overview

2 Enabling Technology for a Better World The Kurt J. Lesker Company is a leading global provider of high-quality vacuum products and thin film deposition systems with an established tradition of service and attention to detail. Drawing from a comprehensive list of products and services, KJLC has long believed and behaved in ways that demonstrate industry-standard-setting responsibility and responsiveness to its customers. Every phone call is answered by a KJLC team member. Every product issue receives immediate and complete attention until it is resolved. Experienced employees continually make themselves available to those seeking information and guidance. KJLC sees every customer interaction as an opportunity to deepen valued relationships. KJLC, founded in 1954 as a regional distributor of vacuum components, has grown into a worldwide manufacturer/distributor of a comprehensive range of vacuum components, pumps, thin film deposition equipment, materials, and complete thin film process tools backed by innovative designs and responsive customer service. Working with an attentive eye toward quality, environmental stewardship of resources, and customer satisfaction, KJLC serves the research and development market at both the academic and commercial levels, as well as providing vacuum products and services to industry on a global scale. Following successful expansions into Canada and the United Kingdom, KJLC has continued to reach out globally, highlighted by the newest location in Shanghai, China. Four Focused Divisions As a manufacturer and distributor of all things vacuum, focus is crucial. KJLC has developed the following divisions to provide dedicated focus on the unique challenges each application requires. Quality provider of standard & custom vacuum chambers Over thirty years of experience Manufacturing by Vacuum Experts Full range of over 14,000 vacuum products Global stocking strategy for reliable delivery times Superior customer service Global customer applications and process support centers The industry s most comprehensive offering of innovative, technology driven thin film deposition sources Process enabling thin film deposition systems for ALD, sputtering, evaporation, and organic materials All products fully supported by our worldwide network of factory service centers and factory authorized service centers Full line of sputtering targets, boats, crucibles, filaments, and evaporants Extensive list of pure elements, precious metals, compounds, and alloys Advanced metal oxide ceramic materials and mixtures In-house bonding and reclaim services USA: salesus@lesker.com

Industry Leading Service & Support Customer Service 24 hour global support Over 25 years

consultation available Loaner program prevents downtime Global distribution centers offering

leak detectors and residual gas analyzers (RGAs) are used to ensure proper leak rates and

Vacuum baking capability up to 250 C Alpha Step 200 profilometers 4-point probe XLS-100

analysis Expert Training Training facilities in U.S., U.K.

3 Industry Leading Service & Support Customer Service 24 hour global support Over 25 years experience building and servicing vacuum deposition systems and components On-site consultation available Loaner program prevents downtime Global distribution centers offering over 14,000 vacuum components for timely replacements and repairs Precision Testing Helium leak detectors and residual gas analyzers (RGAs) are used to ensure proper leak rates and vacuum quality. Vacuum baking capability up to 250 C Alpha Step 200 profilometers 4-point probe XLS-100 elipsometer Inspection, rebuilding, cleaning, magnetic field mapping, and field strength analysis Expert Training Training facilities in U.S., U.K., and China Available training in our office, on-site, or remotely Topics include: Vacuum Science Basics, Deposition Techniques, Recipe Writing, and more Europe: saleseu@lesker.com Asia: saleschina@lesker.com

Recent Innovations Continuous Improv 75 PRO-Line Thin Film Deposition System Fully enclosed zero clean room footprint

touch-screen or recipe-controlled, PC based process automation Turbomolecular or optional cryogenic high vacuum

frame of the system Push button automated wafer/sample loading drawer Front loading drawer assembly with a

4 Recent Innovations Continuous Improv 75 PRO-Line Thin Film Deposition System Fully enclosed zero clean room footprint or optional open frame design Box 304 stainless steel chamber with aluminum door and large viewport Manual touch-screen or recipe-controlled, PC based process automation Turbomolecular or optional cryogenic high vacuum pumping Featuring the LAS-150 ZERO footprint Load Lock Turbo pump and all appropriate gauging is located within the frame of the system Push button automated wafer/sample loading drawer Front loading drawer assembly with a fullyautomated high precision motion control transfer arm Compatible with substrates up to 6'' (150mm) USA: salesus@lesker.com

ement eklipse System Control Software Kurt J. Lesker Company eklipse TM Controls Software is utilized on every PRO Line System. The eklipse control platform utilizes a.

5 ement eklipse System Control Software Kurt J. Lesker Company eklipse TM Controls Software is utilized on every PRO Line System. The eklipse control platform utilizes a.net application running on a Windows 7/8 PC for its User Interface and Recipe Editor. Equipment automation is accomplished via a standalone Real Time Controller. System control is completely independent of the PC. Safety interlocks, vacuum operation, film growth, and wafer manipulation are all executed by the controller. TM Isoflux Inverted Magnetron Sputtering Sources Isoflux inverted magnetrons, also known as hollow cathode magnetrons, use cylindrical targets to surround the substrate with coating material. Ideally suited to coat complex, 3-dimensional shapes, wires, fibers, and many other substrates Allows entire 3-dimensional items to be coated in one run without the need for rotation Improved overall system efficiency Dedicated Isoflux system platforms This control platform was developed by KJLC s global engineering team and is supported by KJLC s global service center. Our industry leading website is the most comprehensive e-commerce and vacuum science information portal available online. Lesker.com is a virtual encyclopedia of vacuum knowledge with technical information on general vacuum topics and our catalog of products. KJLC makes ordering online easy, whether it is one of our thousands of in-stock items or a custom configured vacuum chamber. Europe: saleseu@lesker.com Asia: saleschina@lesker.com

Physical Vapor Deposition PVD Platforms Nano 36 Series KJLC s most affordable system platform, designed specifically with the entry- to mid-level user in mind.

PVD Series The PVD series of platforms is the workhorse of our systems fleet, incorporating a modular design that can be configured for a variety of thin film

Four standard platforms (PVD 75, PVD 225, PVD 250, and PVD 500) with various chamber size, frame, and options Standard configurations compatible with up to 11

6 Physical Vapor Deposition PVD Platforms Nano 36 Series KJLC s most affordable system platform, designed specifically with the entry- to mid-level user in mind. Typically used in the university and government lab R&D environment. Thermal evaporation or magnetron sputtering deposition techniques available. PVD Series The PVD series of platforms is the workhorse of our systems fleet, incorporating a modular design that can be configured for a variety of thin film deposition applications. Four standard platforms (PVD 75, PVD 225, PVD 250, and PVD 500) with various chamber size, frame, and options Standard configurations compatible with up to 11 OD substrates; custom configurations up to 20 OD substrates, up to 1000 C heating, cooling, and biasing options available. Single wafer load lock option available on the PVD 75 PRO Line platform. eklipse TM system control software options available USA: salesus@lesker.com

Isoflux Series Isoflux Hollow Cathode Magnetron sputtering sources Cylindrical targets surround the substrate with coating material Up to 75% target utilization Patented cathode designs Conformal 3D

7 Isoflux Series Isoflux Hollow Cathode Magnetron sputtering sources Cylindrical targets surround the substrate with coating material Up to 75% target utilization Patented cathode designs Conformal 3D coatings Inverted magnetron sources CMS Series Versatile thin film deposition system platform for advanced materials research and development. Comprised of two standard platforms: CMS-18 and CMS-24. Up to 4 HV or 5 UHV magnetron sputtering sources and a linear multi-pocket UHV electron beam evaporation source (multi-technique options available). Standard configurations compatible with up to 8 OD substrates; custom configurations available, with up to 1000 C heating, cooling, and biasing options available. Single or multi-wafer load lock option available. Europe: saleseu@lesker.com Asia: saleschina@lesker.com

Atomic Layer Deposition ALD Tools ALD Series KJLC offers two standard ALD platforms: ALD150LE

ALD150LE enables purely thermal atomic layer deposition.

Hydrocarbon, Fomblin -prepped, or dry rough pumping, oil filtration, and condensate trap

8 Atomic Layer Deposition ALD Tools ALD Series KJLC offers two standard ALD platforms: ALD150LE and ALD150LX. Typically used in the university and government lab R&D environment. ALD150LE enables purely thermal atomic layer deposition. ALD150LX facilitates thermal and plasma enhanced atomic layer deposition. Hydrocarbon, Fomblin -prepped, or dry rough pumping, oil filtration, and condensate trap options available. Standard configuration compatible with up to 6'' OD substrates, up to 500 C heating, and a glove box option. USA: salesus@lesker.com

Organic Material Deposition SPECTROS SPECTROS Series Three standard organic material deposition platforms: MiniSpectros, Spectros and SuperSpectros Easy source and substrate

SuperSPECTROS Full computer control with recipe functions Co/Multi-Deposition of organic sources Host to Dopant ratio of 100:1 or better for organic sources Rate Control

9 Organic Material Deposition SPECTROS SPECTROS Series Three standard organic material deposition platforms: MiniSpectros, Spectros and SuperSpectros Easy source and substrate access with glovebox compatible flange Precision substrate masking Rear hinged or sliding door Substrate size up to 200mm x 200mm Optional wedge tool in SPECTROS and SuperSPECTROS Full computer control with recipe functions Co/Multi-Deposition of organic sources Host to Dopant ratio of 100:1 or better for organic sources Rate Control Resolution 0.1 A/sec Optional co-deposition of thermal sources Optional load locks available Optional glove box Europe: saleseu@lesker.com Asia: saleschina@lesker.com

10 Automated Robotic Cluster Tools Unparalleled Experience Typically used in the university and government lab R&D environment. Incorporate a central robotic sample transfer system enabling connection of up to 8 process modules. Multi-chamber capability for device fabrication, thin film deposition and analysis, GMR magnetic films R&D/production, and organic electronics. Magnetron sputtering, thermal evaporation, electron beam evaporation, organic materials evaporation, and atomic layer deposition techniques available. Standard configurations compatible with up to 8 x 8 square substrates; sample heating, cooling, bias, and cleaning options available. USA: salesus@lesker.com

World Class Engineering The experienced engineers and designers of the Process Equipment Division help lead the development of products, systems, and services to meet the ever-evolving demands of

11 World Class Engineering The experienced engineers and designers of the Process Equipment Division help lead the development of products, systems, and services to meet the ever-evolving demands of vacuum customers in advanced research and industrial positions around the world. Operating from a mindset dedicated to making our customers more productive and successful, the Process Equipment Division offers custom vacuum system solutions a legacy of fresh thinking that expands KJLC s scope of products to all production and research projects. Europe: saleseu@lesker.com Asia: saleschina@lesker.com

12 GLOBAL VACUUM PRODUCT LINES Vacuum Valves & Hardware Flanges, Components, Fasteners, & Seals Gate & Angle Valves OFHC Copper & Other Variety of Gaskets Bellows, Tubing, & Weld Fittings Semiconductor, PV, & FPD Process Valves Full Line of VAT Valves Feedthroughs Power & High Voltage Viewports (Optical Feedthrough) USB, Coaxial & Instrumentation Thermocouple Ceramic Breaks Liquid, Gas & Cryogen (LN 2 ) Vacuum Pumps & Accessories New & Remanufactured Rotary Vane & Piston Scroll & Diaphragm Screw & Roots Turbo & Diffusion Cryogenic & Ion Traps & Filters Complete Offering of Pump Repair Services Vacuum Fluids Full Line of Mechanical Pump Oils Fomblin PFPE - Inert PFPE Galden PFPE - Heat Transfer Fluid Vacuum Greases, Sealants, & Solvents Pump Oil with R/O Additives Silicon Diffusion Pump Oils Pump Oil Recycling Pressure Measurement Analog & Digital Active Gauges Pressure Indicators & Controllers Wide-Range Gauges Multi-Gauge Controllers Replacement Gauge Tubes Sample Manipulation & Motion Rotary & Linear Motion Linear Positioners Wobble Sticks & Port Aligners XYZ Manipulators Multi-Axis Manipulators Sample Transfer Probes Sample Heating & Rotation Motion Control Sample Distribution Center Vacuum Services Full Line Pump Repair/Rebuild Services Pump Oil Recycling Technical Information Technical Consulting Decontamination Magnetron Cathode Service Contract Manufacturing Deposition Sources TORUS Magnetron Sputtering Sources HiPIMS Sputtering Sources Electron Beam Evaporation Organic Material Evaporation Electron Beam Sources Ion Sources Thermal Evaporation Sources Pulsed Filtered Cathodic Arc Source Inverted Cylindrical Magnetron Sputtering Sources Process Instrumentation Film Thickness Mass Flow Controllers Capacitance Manometers RF & DC Power Supplies Pulsed DC Power Supplies HiPIMS Power Supplies Power Supplies for Evaporation System Components & Custom Engineered Solutions Turnkey & Partial Build Solutions Comprehensive Engineering Design Support Chambers, Frames, & Mounting Structures High Temperature & Bakeout Heater Assemblies Heater Power Supplies Substrate Load Locks & Transfer Vessels Vacuum Systems Thin Film Deposition Systems: Sputtering Systems, Evaporation Systems Cluster Tools Box Coaters PVD 75 PRO Line LAB Line Combinatorial Systems Organic Material Deposition Systems Atomic Layer Deposition (ALD) PEALD Drum Coaters In-line Coating Systems Isoflux Systems Deposition Materials Sputtering Targets Precious Metals & Reclaim Evaporation Pieces Thermal Evaporation Sources E-Beam Crucible Liners Bonding Service Backing Plates Vacuum Chambers & Components Standard SS Cylindrical, D-Shaped, Spherical, & Box Chambers Standard Pyrex Glass Bell Jars & Cylinders Standard Building Blocks to Customize Your System Custom Chambers Array of Finishes & Materials Easily Build Your Own Chamber with the Custom Chamber Builder Online Cooling Options including Hydra~Cool TM Manufacturing & Fabrication State-of-the-Art CNC Machining Mechanical, Manufacturing, & Industrial Engineering Computer Based Scheduling & Routing CAD, CAM, & FEA Software Coordinate Measuring Machine Inspection (CMM) UHV Compatible Cleaning Process We have a network of representatives around the world ready to service the international vacuum community. Visit our website to find the representative nearest you, or contact our International Sales Department. Fomblin and Galden are registered trademarks of Solvay Solexis. TORUS is a registered trademark of Kurt J. Lesker Company. VAT is a registered trademark of VAT. Pyrex is a registered trademark of Corning Inc

Kurt J. Lesker in the Cryogenic Community. Dr. Glynn Dyson Cryogenics Cluster Day 19 th September 2014

Kurt J. Lesker in the Cryogenic Community Dr. Glynn Dyson 19 th September 2014 Overview Introduction to the Kurt J. Lesker Company (KJLC) KJLC in the Cryogenic Community Deposition Methods Axxis Coating