VacIon Plus 20. Outline Drawing. Technical Specifications
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1 VacIon Plus 20 Outline Drawing 2 3/4 " CFF (NW35) 152 (6.00) REF 24 (0.90) REF 133 (5.20) REF 82 (3.20) REF 224 (8.80) REF 121 (4.80) REF Dimensions: millimeters (inches) Technical Specifications StarCell Noble Diode Diode Nominal pumping speed for Nitrogen (*) (l/s) Operating life at 1x10-6 mbar (hours) 80,000 50,000 50,000 Maximum starting pressure (mbar) ² 5x10-2 ² 1x10-3 Ultimate pressure Below Inlet flange CFF (NW 35) AISI 304 ESR SST Maximum baking temperature ( C) 350 Weight, kg (Ibs) (with ferrite magnet) Net 7 (15), Shipping 11 (24) Weight, kg (Ibs) (with Sm-Co magnet) Net 5 (9), Shipping 8 (19) (*) Tested according to ISO/DIS
2 Ion Pumps VacIon Plus 20 - Pumping Speed vs Pressure 40 Pumping Speed (l/s) Pressure (mbar) Nitrogen unsaturated Diode Argon Nitrogen saturated unsaturated StarCell Diode Argon saturated StarCell Pumps Diodewith Ferrite magnets Diode without magnets Noble Diode with Ferrite magnets Noble Diode without magnets StarCell with Ferrite magnets StarCell with Co-Sm magnets StarCell without magnets Dual Controller See also pages One Pump Negative 120 V Two Pumps Negative 120 V One Pump Positive 120 V Two Pumps Positive 120 V One Pump Negative 220 V Two Pumps Negative 220 V One Pump Positive 220 V Two Pumps Positive 220 V MidiVac Controller See also pages Negative Single Output 120 V Negative Single Output 220 V Positive Single Output 120 V Positive Single Output 220 V MiniVac Controller See also page 31 MiniVac 120 V MiniVac 220 V Ordering Information HV Cables 4 m (13 ft.) long, with interlock m (23 ft.) long, with interlock m (33 ft.) long, with interlock m (66 ft.) long, with interlock Replacement Parts HV Feedthrough with interlock VacIon Plus 20 Diode Ferrite magnet assembly VacIon Plus 20 Noble Diode Ferrite magnet assembly VacIon Plus 20 StarCell Ferrite magnet assembly VacIon Plus 20 StarCell Co-Sm magnet assembly Heaters* 120 V Heaters* 220 V * To order heaters for replacement or upgrading of existing pumps, please contact your local Varian Vacuum Technologies representative. 2
3 VacIon Plus 40 Outline Drawing 2 3/4 " CFF (NW35) (8.56) REF 57 (2.24) REF 160 (6.30) REF 60 (2.36) REF 310 (12.20) REF 4 HOLES M (6.32) REF (5.37) REF Dimensions: millimeters (inches) Technical Specifications StarCell Noble Diode Diode Nominal pumping speed for Nitrogen (*) (l/s) Operating life at 1x10-6 mbar (hours) 80,000 50,000 50,000 Maximum starting pressure (mbar) ² 5x10-2 ² 1x10-3 Ultimate pressure Below Inlet flange CFF (NW 35) AISI 304 ESR SST Maximum baking temperature ( C) 350 Weight, kg (Ibs) 17 (37) (*) Tested according to ISO/DIS
4 Ion Pumps VacIon Plus 40 - Pumping Speed vs Pressure 60 Pumping Speed (l/s) Pressure (mbar) Nitrogen unsaturated Diode Argon saturated StarCell Pumps Diode Diode with additional CFF port Diode without magnets Noble Diode Noble Diode with additional CFF port Noble Diode without magnets StarCell StarCell with additional CFF port StarCell without magnets Dual Controller See also pages One Pump Negative 120 V One Pump Negative 220 V One Pump Positive 120 V One Pump Positive 220 V MidiVac Controller See also pages Negative Single Output 120 V Negative Single Output 220 V Positive Single Output 120 V Positive Single Output 220 V MiniVac Controller See also page 31 MiniVac 120 V MiniVac 220 V Ordering Information HV Cables 4 m (13 ft.) long, with interlock m (23 ft.) long, with interlock m (33 ft.) long, with interlock m (66 ft.) long, with interlock Replacement Parts HV Feedthrough with interlock Heaters* 120 V Heaters* 220 V * To order heaters for replacement or upgrading of existing pumps, please contact your local Varian Vacuum Technologies representative. 4
5 VacIon Plus 55 Outline Drawing 4 1/2 " CFF (NW63) (9.12) REF (2.80) REF 160 (6.30) REF 4 HOLES M6 60 (2.36) REF 310 (12.20) REF (6.32) REF (5.37) REF Dimensions: millimeters (inches) Technical Specifications StarCell Noble Diode Diode Nominal pumping speed for Nitrogen (*) (l/s) Operating life at 1x10-6 mbar (hours) 80,000 50,000 50,000 Maximum starting pressure (mbar) ² 5x10-2 ² 1x10-3 Ultimate pressure Below Inlet flange CFF (NW 63) AISI 304 ESR SST Maximum baking temperature ( C) 350 Weight, kg (Ibs) 18 (39) (*) Tested according to ISO/DIS
6 Ion Pumps VacIon Plus 55 - Pumping Speed vs Pressure 100 Pumping Speed (l/s) Pressure (mbar) Nitrogen unsaturated Diode Argon saturated StarCell Pumps Diode Diode with additional CFF port Diode without magnets Noble Diode Noble Diode with additional CFF port Noble Diode without magnets StarCell StarCell with additional CFF port StarCell without magnets Dual Controller See also pages One Pump Negative 120 V One Pump Negative 220 V One Pump Positive 120 V One Pump Positive 220 V MidiVac Controller See also pages Negative Single Output 120 V Negative Single Output 220 V Positive Single Output 120 V Positive Single Output 220 V MiniVac Controller See also page 31 MiniVac 120 V MiniVac 220 V Ordering Information Cables 4 m (13 ft.) long, with interlock m (23 ft.) long, with interlock m (33 ft.) long, with interlock m (66 ft.) long, with interlock Replacement Parts HV Feedthrough with interlock Heaters* 120 V Heaters* 220 V * To order heaters for replacement or upgrading of existing pumps, please contact your local Varian Vacuum Technologies representative. 6
7 VacIon Plus 75 Outline Drawing 6" CFF (NW100) (9.53) REF (3.21) REF 160 (6.30) REF 4 HOLES M6 60 (2.36) REF 310 (12.20) REF (6.32) REF (9.62) REF Dimensions: millimeters (inches) Technical Specifications StarCell Noble Diode Diode Nominal pumping speed for Nitrogen (*) (l/s) Operating life at 1x10-6 mbar (hours) 80,000 50,000 50,000 Maximum starting pressure (mbar) ² 5x10-2 ² 1x10-3 Ultimate pressure Below Inlet flange 6 CFF (NW 100) AISI 304 ESR SST Maximum baking temperature ( C) 350 Weight, kg (Ibs) 19 (42) (*) Tested according to ISO/DIS
8 Ion Pumps VacIon Plus 75 - Pumping Speed vs Pressure Pumping Speed (l/s) Pressure (mbar) Nitrogen unsaturated Diode Argon saturated StarCell Pumps Diode Diode with additional CFF port Diode without magnets Noble Diode Noble Diode with additional CFF port Noble Diode without magnets StarCell StarCell with additional CFF port StarCell without magnets Dual Controller See also pages One Pump Negative 120 V One Pump Negative 220 V One Pump Positive 120 V One Pump Positive 220 V MidiVac Controller See also pages Negative Single Output 120 V Negative Single Output 220 V Positive Single Output 120 V Positive Single Output 220 V MiniVac Controller See also page 31 MiniVac 120 V MiniVac 220 V Ordering Information HV Cables 4 m (13 ft.) long, with interlock m (23 ft.) long, with interlock m (33 ft.) long, with interlock m (66 ft.) long, with interlock Replacement Parts HV Feedthrough with interlock Heaters* 120 V Heaters* 220 V * To order heaters for replacement or upgrading of existing pumps, please contact your local Varian Vacuum Technologies representative. 8
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