Vacuum Technology Inc. Vacuum Technology Inc. Super Purified Glove Box Gas Purification System

Transcription

1 Vacuum Technology Inc. Super Purified Glove Box Gas Purification System Vacuum Technology Inc. 15 Great Republic Drive, Unit #4 Gloucester, Massachusetts USA Toll-free: Phone: Fax: Website: Business card

2 About Us Vacuum Technology Inc. is a US based manufacturer that is committed to developing innovative products for clients around the world. With its North American facility in Gloucester, Massachusetts USA, VTi offers Super Purified Glove Boxes, Gas Purification Systems as well as ancillary products and accessories. In addition to the standard product lines, we are proud of our technical team s ability to work together with our clients to create custom solutions. VTi s high-quality products and dedicated service has been put in place to gain respect throughout the world-wide marketplace. Through collaboration with various international market-leading manufacturers and through comprehensive technology sharing with Mikrouna (over fifteen years of Glove Box experience), VTi integrates research, manufacturing, sales and customer service with the goal of becoming a world-class leading company. Vacuum Technology, Inc. will continue to develop innovative and high-quality products while providing excellent service in order to fulfill our Mission Statement: Achieving social goals through advancing technology. * Achieving Social Goals Through Advancing Technology Product Features High Capacity Purifier Rapid removal of H2O and O2; Attainable purity: H20 1ppm, O2 1ppm; Long interval between generations. PLC Control and HMI Automatic Purging, Circulation, Regeneration, Pressure control; User Friendly Interface. Efficient Valve Design - Less connections means low leakage Various valves to be integrated into one valve-seat made of stainless steel, less pipe connector to reduce leakage. Long Life Moisture and Oxygen Analyzers P2O5 Moisture Sensor: Corrosion resistant, the sensor can be renewed by acid-cleaning when contaminated by HF or other corrosive atmosphere. ZrO2 Oxygen Sensor: Solid sensor, long life, to be exposed in the air without consumption. Components Sourced from Global Best in Class Suppliers Different Models From Single Workstation for R & D to multiple workstations for large scale production. on. Various Accessories can be integrated into the Glove Box Moisture and Oxygen Analyzers, Solvent Trap, Freezer, Heated Antechamber, Cold Well, Microscope Unit, Evaporator, Spin Coater, or many other configurations. Multiple Options are available to create custom solutions Wide Applications Lithium Battery Physical Chemistry OLED & PLED Organometallic Solar Cell Semi-Conductor Catalyst Material Handling Fine Chemicals Polymeric Materials Powder Metallurgy Special Welding Special Lamps Nuclear Technology Pharmaceutical Many other applications

3 Certificate Production Equipment Gantry CNC Machining Center CNC Turning Center Quality Commitment Production process control is under strict ISO9001 guidelines. QC covers incoming inspection, manufacturing process inspection and the final inspection before the Glove Box is shipped. CNC Press Brake Helium Mass Spectrometer Leak Detector ABB Welding Robot

4 Glovebox Gallery Glovebox Gallery Super(1220/750/900) Upure(1220/750/900) / Superstar(1220/750/900) Universal(1800/750/900) Universal(2440/750/900) Universal(1220/1000/900) Customized Glove Box with Refrigerator Customized Isolator Glove Box with a Rectangular ar Chamber Customized Glove Box for a Solar Energy Application Customized Glove Box for a Solar Energy Application Customized Glove Box for Sodium Battery Energy Storage / Welding Production Line

5 Glovebox Gallery Glovebox Gallery Customized Isolator Glove Box Customized Glove Box for a Robotic Welding Project Customized Isolator Glove Box for the Electrolyte Field for Electrolyte Field Glove Box for MOCVD Production Line for Auto Xenon HID Lamps Customized Glove Box for the Wireless Field Customized Glove Box for High Melting Metal / Tungsten Welding Customized Isolator Glove Box for the Pharmaceutical Industry Customized Glove Box for the Nuclear Field Specialized Glove Box for Lithium Battery Production

6 Type and Size Standard Glovebox Dimensions Standard Glovebox Items Type Super/Upure Universal Advanced mm(25.6in) mm(31.5in) mm(39.4in) Single 1220/750/ /750/ /750/900 mm(35.4in) mm(35.4in) mm(35.4in) Workstation Dimension mm L/W/H Double(side by side) Double(face to face) Tri-glove(side by side) Four(side by side) Four(face to face) 2440/750/ /750/ /1000/ /7500/ /750/ /750/ /1000/ /750/ /750/ /1000/ /7500/ /750/ /750/ /1000/900 Depth and height size mm(29.5in) mm(35.4in) mm(39.4in) mm(35.4in) mm(47.2in) mm(35.4in) Six(face to face) Eight(face to face) 3600/1000/ /1200/ /1000/ /1200/ /1000/ /1200/ /1000/ /1200/900 Twelve(face to face) Control unit 7320/1000/ /1000/900 Siemens S7 Siemens S7 Siemens S7 Length size Touch screen Purifier 7 Screen 7 Screen 7 Screen Single Single Double mm(48.0in) mm(23.6in) mm(70.9in), mm(59.1in) mm(23.6in) mm(96.0in) mm(23.6in) Blower 90m 3 /h 90/145/180m 3 /h 90/145/180m 3 /h Vacuum pump 8m 3 /h 8/12/16m 3 /h 8/12/16m 3 /h Moisture 1ppm 1ppm 1ppm Oxygen 1ppm 1ppm 1ppm Module combination Application R&D type For R & D in university and Laboratory Universal type For both R&D and small-scale production *Note:Upure is a special type of glove box, specially made for application of highly corrosive environment, such as Organic, Organometallic, Petrochemical etc. Production type For large-scale production mm(48.0in) mm(48.0in) mm(48.0in) mm(48.0in) mm(48.0in) mm(23.6in)

7 Specifications Glove Box Main Antechamber Specifications Box Material External surface Internal surface Inside dimension Sight Windows Inclined, Safety Glass, thickness 8mm(1/3 ) (Polycarbonate available) Gloves Ports POM(Polyoxymenthylen),double O-ring seal, 220mm(8.7 ) Diameter Gloves Butyl, 7 or 8 " cuff dia., thick, 32 long (other material and size available) Dust Filter 0.3μm, one gas inlet, one gas outlet Shelves Stainless steel type 304, thickness 3mm(1/8 ) White Paint(Brushed Stainless Steel available) Brushed Stainless Steel Modular length:1220mm/1500mm/1800mm/2440mm 48.0 /59.1 /70.9 /96.0 Modular depth: 750mm/1000mm/1200mm 29.5 /39.4 /47.2 Modular height:900mm 35.4 Stainless Steel material, built in 2 levels(adjustable shelves available) Size: Dia. 360mm(14.2 ) or 400mm(15.7 ), Length600mm (23.6 ) (other sizes available) Material: Stainless Steel type 304 External surface: White paint (Polished Stainless steel available) Internal surface: Brushed Stainless Steel Sliding tray: Stainless Steel type 304 Double door: Anodized Aluminum, 10 mm thick(2/5 ); Vertical operation with lifting mechanism(interlocked door available) Manometer: Operation: Mini Antechamber Analog display Touch Screen Automatic operation via solenoid valves Size: Dia. 150 mm (5.9 )or Dia.100mm(3.9 ), Length300mm(11.8 ) Material: Stainless Steel type 304 External surface: Paint white (Polished Stainless Steel available) Internal surface: Brushed Stainless Steel Box Light Fluorescent lamp,front and top mounted Feed-throughs KF40,1Electrical feed-through, 3~4 standby blind flanges (BNC, Signal, Liquid/Gas feed-throughs available) Double door: Manometer: Operation: Screw-lock (Interlocked double door available) Analog display Manual operation via hand valve

8 Specifications Specifications Gas Purification Unit System Control PLC and HMI Siemens S7 Touch Screen Siemens 7, color Purifier Function Container material Absorber material Attainable purity Airtight Seal Removal of H 2 O and O 2 Stainless Steel type kg Copper catalyst 4.5kg Molecular sieve Less than 1 ppm moisture and oxygen Features Box Pressure set Automatic control of Purging, Circulation Control, Regeneration, Pressure,as well as self-diagnosis, power failure re-start and password protection. between +/- 10mbar,over +/- 12mbar system automatic protection. Vacuum Pump Gas Circulation Working gas Nitrogen, Argon or Helium Encapsulated Blower 90m 3 /h(145m 3 /h or 180m 3 /h available) Regeneration Operation Regeneration Gas PLC automatically controlled Working gas mixed with Hydrogen(5-10%) 8m 3 /h or 12m 3 /h (16 m 3 /h available) Rotary vane pumpwith oil mist filter and Gas ballast control unit (Dry pump is available) Valves Main valves Electro-pneumatic angle valves DN 40 KF Control valves Integrated solenoid(brass)

9 Separate Gas Purification System Accessories Function Operation: Easy access to the glove box Control: Manual or PLC Power: 110V/50Hz or 220V/50Hz Working gas: Nitrogen, Argon or Helium Regeneration gas: Working gas mixed with Hydrogen(5~10%) Moisture Analyzer Items Type Mk100 Mk200 Mk300 Mk400 Mk500 Mk600 Oxygen Analyzer Measuring range: ppm ZrO2 Sensor: Solid sensor, long life, to be exposed in the air without consumption Measuring range 0 500ppm P2O5 Sensor: Corrosion resistant, the sensor can be renewed by acid-cleaning while contaminated by HF or other corrosive atmosphere Solvent Absorber To be built inside glove box, to absorb solvent vapour Absorbent: Activated carbon 2.3kg Purifier Single Double Single Double Single Double Main pipe DN40 DN40 DN50 DN50 DN63 DN63 Circulation capacity 90 m³ / h 90 m³ / h 145 m³ / h 145 m³ / h 180 m³ / h 180 m³ / h Copper catalyst 4.5 kg 2 x 4.5 kg 8 kg 2 x 8 kg 12 kg 2 x 12 kg Molecular sieve 4.5 kg 2 x 4.5 kg 8 kg 2 x 8 kg 12 kg 2 x12 kg Aviation Plug Electrical Feedthrough BNC Feedthrough Gas/Fluid Feedthrough

10 Accessories Accessories Microscope Unit Type: TV Microscope, 1/3" CCD colourful Magnification: Max. 300 times, continuously adjustable Monitor: PHLIP 17, with flexible support Up and Down lighting source: LED, ring Platform : Movable, easy to align the objective and lens centre Oil Mist Filter Prevent oil mist Applicable to all kinds of compact type rotary vane vacuum pump De-Electrostatic Unit Effectively remove localized static charges Effective ionization range: 12" Pulse rate and ionic balance controls allow for effective calibration and adjustment of the Counter SPI to give optimum ion balance and output Filter 0.30 μm, remove particles or filter pollutants Vacuum Angle Valve Body material: aluminum or stainless steel Bellows seal With the pilot valve Vacuum Rectangular Antechamber Vacuum to 100Pa Double door to be operated electrically or pneumatically Customized sizes Refrigerator Left-mounted, door inside of box Inner dimension : L W H=250mm 200mm 400mm Lowest temperature:-40 C (-55 C available) De-Dusting Unit With two filter, switchable Stainless steel shell Filter accuracy:3mm High performance circulation unit Main pipe Stainless steel DN40 Heated Antechamber Temperature range: Ambient temperature to 120 C With temperature controller Vacuum Plasma Sealing Unit For sealing of vacuum glass vessel First perform glass vessel s evacuating and gas-refilling then complete sealing in glove box

11 Accessories VACUUM SUBLIMATION EQUIPMENT Application Rectangular Chamber Customized sizes available The double door to be operated Solvent Purification System Applicable for solvent drying and purification by removing water, oxygen etc. Low purity grade industrial solvents can be purified into high purity grade The following solvents can be purified alone or together: Hydrocarbon compound such as benzene, ethane, Chlorine hydrocarbons such as ethylene dichloride, Dipolar non-protonic solvents such as acetonitril, dimethyl amide, nitromethane, Alcoholate such as methane, ethanol, butanol, Ethers (ether), esters, amines, carbonate and their derivatives Sublimation is the endothermic (absorbs energy) phase transition of a substance from solid state into the vapor phase without passing through the liquid phase. Based on this process organic opto-electronic materials can be purified to reach the high purity grades which is required to manufacture high-performance OLED devices and organic solar cells. Features Separate temperature control at four different zones Temperature curve free set and save Transparent tube design Liquid nitrogen trap Cold Well To to be built on the bottom of glove box Stainless steel well Size:. Dia 160mm, Deep 200mm, (customized size on request) DEWAR is filled with Liquid Nitrogen or Dry Ice coolant for low temperature work Vacuum Furnace Vertical or horizontal type Max temperature1200 C/2200 C Ultimate pressure:1x10-4 Pa/5 x10-6 Pa Dimension: to be customized on request Program-controlled temperature-rising and evacuating Cooling system failure protection Technical Data Ultimate vacuum pressure pa Max. heating temperature 600 C

12 Glove Box Integrated Evaporator Glovebox Integrated Vacuum Deposition System Application For the preparation of Metal Film, Semi-Conductor Film, Oxidizing Film as well as Organic Film. Applicable for R&D in the field of new material research before moving into large scale production. Technical Data Limit Pressure 6 x10-5 Pa Pumping time 40min (from atmosphere to 8 x 10-4 Pa) Substrate holder unit Organic evaporation source Thermal evaporation source FTM-V quartz crystal oscillation film thickness monitor Max. substrate size of 120*120mm. I piece With lifting mechanism, Up and down in range of 50mm With rotating mechanism, 5~30rpm, adjustable continuously Max. temperature on substrate, 300 C 2 Beam source furnaces, Single quartz crucible capacity 2cc Max. temperature -500 C, adjustable continuously 2 thermal evaporation boats, made up by 4 electrodes with water-cooling unit 10V, 300A, max. output power 3kW Thickness display range: 0--99μ9999Àº Application Organic electroluminescent display screen Preparation of High uniform film Synthesizing of semi-conductor material Deposition of refractory metal Technical Data Dimensions of pretreatment chamber(mm) Dimensions of organic and metal chamber(mm) Chamber material Substrate Ultimate vacuum pressure Number of organic deposition source Number of metal deposition source Distance from source to substrate(mm) Integrated Glove box with antechamber Ø H Ø H SUS 304 Size: 2-10 Running speed: 5-20rpm Temperature: 300 C pa 4-8sets, power: 600W 2-6sets, power: 2000W~5000W (adjustable) Size: mm H 2 O,O 2 less than 1ppm