Invisible Soil for Visible Profits Particle Monitoring on Surfaces. Surface Scan Probes for APCs LWS Solair 1100+, Solair 3100+, and Boulder

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1 1: SS SS T T (page 3) 2: XL.SS. SS T.IS T T (page 2) 50 T T (page 3) 30 T T (page 2) 5-7: XL.SS. 50T.IS (page 5) Possible and combination Boulder to Why surface particulate detection? In many branches of industry the manufacture of an ultra clean surface is crucial to the functionality and quality of the product. Particles have an impact on the overall effectiveness of process equipment, decreasing tool availability and increasing defects, reject rates and costs. Therefore avoiding particles on surfaces is an essential task of an effective quality assurance. The question is how to obtain reliable data giving evidence of the cleanliness of critical parts, work surface, process equipment etc.? The Solution CAT Surface Scan Probes hooked up to ordinary APCs With CAT scan systems the user can instantly assess the cleanliness of critical surfaces (e. g. supply chain QA) and the effectiveness of cleaning procedures. Its unique technology and portable design makes CAT scan systems the perfect tool Companies concerned with surface cleanliness. Benefits of CAT Surface Scan Probes Inspection of cleanliness before and after cleaning processes (work pieces, tools, equipment, cleanroom walls, floors, etc.). Qualification of processes Cleanliness qualification of incoming and outgoing materials Reduction of down times (e. g. maintenance circles) Reduction of defect and reject rates and hence increase of productivity Page 1 / 7

2 CAT PRODUCTS 1: 1: 2: 2: 3: 3: 4: 4: SS 50 SS 50TT XL.SS. 50T.IS SS 30 T P 50 P T 50 T P 30 P T 30 T Major pros Online Direct Rapid Non destructive Eliminating in contrast to alternative techniques the human error Antistatic design (10-9 Ω) Ionisation unit available Available material qualities (PB = Probe body / FP = Faceplate) Stainless steel for PB STANDARD PEEK for PB & FP STANDARD Tecaform for PB & FP Teflon for PB & FP Delrin for PB & FP Aluminium (usual quality or anodized) for PB & FP Vespel for PB & FP SURCHARGE Extract of reference list 2007 / 2008 Page 2 / 7

3 Prices and Specifications of 12 mm Surface Scan Probe P.12.P (0.1µm) Line Item # Product Description 010 P.12.P Surface Scan Probe P.12.P Probe and faceplate material: PEEK (extremely stable regarding outgasing) Faceplate diameter: 12 mm Demountable faceplate (exchange recommended every 6 to 12 mths.) F Finish for 0.1 µm counting for P.12.P (e.g. internal electro polished SS cladding) 012 MK.12.1 Maintenance kit including exchange faceplate and exchange tube 013 ION Ionisation unit for in line installation (down to 0.3 µm) 014 BOX.SCAN Trolley for APC and scan probe fitted with handles and heavy duty foam Catia snapshots (similar/close to final surface scan probe): Page 3 / 7

4 Prices and Specifications of 30 mm Surface Scan Probes P.30.P (0.1µm) and SS.30.P (0.1µm) Line Item # Product Description Picture 020 P.30.P Surface Scan Probe P.30.P Material probe / faceplate: PEEK (stable regarding outgasing) Faceplate diameter: 30 mm 021 SS.30.P Surface Scan Probe SS.30.P Material probe / faceplate: Stainless steel / PEEK Probe diameter: 30 mm F Finish for 0.1 µm counting for P.30.P and SS.30.P (e.g. internal electro polished stainless steel cladding) 023 MK.30.1 Maintenance kit including exchange faceplate and exchange tube 024 ION0.3 Ionisation unit for in line installation (down to 0.3 µm) 025 BOX.SCAN Trolley for APC and scan probe fitted with handles and heavy duty foam Page 4 / 7

5 Prices and Specifications of 50 mm Surface Scan Probes P.50.P (0.1µm) and SS.50.P (0.1µm) Line Item # Product Description Picture 030 P.50.P Surface Scan Probe P.50.P Material probe / faceplate: PEEK (stable regarding outgasing) Faceplate diameter: 50 mm 031 SS.30.P Surface Scan Probe SS.50.P Material probe / faceplate: Stainless steel / PEEK Probe diameter: 50 mm F Finish for 0.1 µm counting for P.50.P and SS.50.P (e.g. internal electro polished stainless steel cladding) 033 MK.50.1 Maintenance kit including exchange faceplate and exchange tube 034 ION0.3 Ionisation unit for in line installation (down to 0.3 µm) 035 BOX.SCAN Trolley for APC and scan probe fitted with handles and heavy duty foam Page 5 / 7

6 Prices and Specifications of Surface Scan Probes with integrated sensor (XL.P.50.P.IS) Line Item # Product Description Picture(s) 040 XL.P.50P.IS Surface Scanprobe XL.P.50P.IS * Surface Scanprobe XL SS 50 T IS for detection and analysis of particle deposits on surfaces * IS = Sensor is part of probe and not of the APC (see right) Material quality: Stainless steel, synthetic material Standard Probe measuring diameter: 30 mm or 50 mm Standard sensitivity range: 0.3, 0.5, 1.0, 3.0, 5.0, 10.0 µm Optional sensitivity range: 5, 10, 25, 40, 50 and 100 µm Delivery includes: Probe body & faceplate, laser diode as part of the scan probe, micro switch for external Start/Stop, antistatic tubing, interface cable, user manual. Ultra sonic cleaning of all assembly parts Assembly of the Sensor unit and tubing of the sensor Electrical assembly Sensor testing and quality approval F Finish for 0.1 µm counting for XL.P.50.P.IS (e.g. internal electro polished stainless steel cladding) 042 MK.50.1 Maintenance kit including exchange faceplate and exchange tube 043 ION0.3 Ionisation unit for in line installation (down to 0.3 µm) 044 BOX.SCAN Trolley for APC and scan probe fitted with handles and heavy duty foam Benefit of XL.SS T.IS scan probes Laser diode is placed directly inside the scan probe and not in (PATENT PENDING) the APC Transport distance from particle removal on surface to laser diode shortened to a minimum. Thus particle counts are up and particle losses are down both to an overall optimum. Page 6 / 7

7 Prices and Specifications of Surface Scan Probes with integrated sensor (SS.50.T.XTRA) Line Item # Product Description Picture(s) 050 SS XTRA Surface Scan Probe SS XTRA Customized scan probe for detection and analysis of particles on micro devices (e. g. micro engines, micro electronic circuit boards, micro cameras, etc.) Material quality: Stainless steel, synthetic material Standard Probe measuring diameter: 30 mm or 50 mm Standard sensitivity range: 0.3, 0.5, 1.0, 3.0, 5.0, 10.0 µm Optional sensitivity range: 5, 10, 25, 40, 50 and 100 µm Possible upgrade of sensitivity to 0.1 µm (see below pos.) Demountable faceplate (exchange recom. every 6-12 mths.) Delivery includes: Customized lower probe section (hemi- sphere), fixations in stainless steel, customized probe body and faceplate, micro switch for external Start/Stop, tubing, antistatic (Bev-a-liner), interface cable, user manual. Benefit of SS XTRA scan probes Direct and online detection and analysis of particles on micro devices: Micro engines, Micro electronic circuit boards, Micro cameras, Etc F Finish for 0.1 µm counting for SS XTRA (e.g. internal Electro polished stainless steel cladding) 052 MK.50.1 Maintenance kit including exchange faceplate and exchange tube 053 ION0.3 Ionisation unit for in line installation (down to 0.3 µm) 054 BOX.SCAN Trolley for APC and scan probe fitted with handles and heavy duty foam Page 7 / 7