Trace Moisture Analyzer for Inert, Passive,Toxic, and Corrosive Gases

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1 Trace Moisture Analyzer for Inert, Passive,Toxic, and Corrosive Gases

2 THE TIGER S TALE Tiger Optics is proud to announce a significant advance in moisture measurement for UHP inert, toxic, and corrosive gases. The MTO is the world s first commercially available gas analyzer incorporating Cavity Ring-Down Spectroscopy (CRDS). Based on this breakthrough technology, the MTO-1000/1001 offers state-of-the-art moisture detection down to parts-per-trillion levels in milliseconds, with absolute accuracy. Designed by experienced instrument engineers familiar with your applications, the MTO combines high technology with plug-and-play operation, very modest maintenance, freedom from calibration, and built-in capacity to measure up to four sample gases. Its powerful operating software is a story in itself. RIDE THE TIGER A laboratory secret until now, Tiger transformed CRDS into a workhorse ready to serve you. Based on a first principle of physics, Beer s Law, it uses absorption spectroscopy to select and to quantify moisture molecules in your sample gas. Since the signal generated relates directly to the moisture concentration, there is no need for calibration. More, because the MTO measures the time of light decay within the optical cell, the device is impervious to atmospheric conditions, unlike other laserbased techniques. With its corrosion-resistant flow system, robust design, flexible software, and advanced sensing technology, the MTO is the most versatile moisture analyzer available. A complete lab-in-a-box, it saves time, money, and space. The product of seven years of intensive research and development, the MTO puts you on the frontier of gas analysis for the 21st Century.

3 WHEN VERSATILITY IS A The MTO-1000 series lend themselves to a myriad of applications including: Semiconductor fabrication. As chip geometries continue to shrink and line widths narrow, moisture contamination becomes a more critical issue, given its negative impact on production yields. Thus, the requirement for superior gas quality has driven specifications to stringent levels of 1 ppb and below. The MTO meets and exceeds this challenge. Specialty gas production. Since the MTO employs a non-contact measurement technique (only the light "touches" the gas), moisture concentrations can now be quantified in a variety of previously elusive corrosive and reactive gases. Ultra-high-purity gas production. UHP gas production requires reliable instruments to quickly and repeatably measure trace levels of moisture in production runs. Sluggish and unreliable analytical equipment equals lost revenue opportunities. The MTO-1000 provides response time at the "speed of light". Since there are neither consumables nor need for calibration, downtime is minimized, which translates into enhanced plant utilization. Laboratory research and calibration. Fostered by national labs, Cavity Ring-Down Spectroscopy provides a reliable, repeatable, and absolute means to calibrate moisture content, as well as to conduct advanced research. The MTO-1000 represents a practical tool for challenging endeavors. Component and system testing. With its accuracy, millisecond response, and four-line capability, the MTO helps to expedite qualification of systems, components, and tools. It verifies purifier performance, helps correlate moisture content and product yield, and checks the validity of other instruments, such as APIMS. Other applications. Unique applications and circumstances can necessitate ppm to ppt moisture analysis in various industries, including pharmaceuticals, electric power, refrigeration, aerospace, chemicals and petrochemicals, and natural gas processing and transmission. MTO-1001 REAR PANEL UTILITY CONNECTIONS MTO-1000 SYSTEM CUTAWAY

4 WHEN UTILITY IS A Tiger s technical team understands your need for a durable, reliable, and low maintenance device that doesn t require a Ph.D. to operate. With the MTO, we engineered an electro-optic instrument that can withstand the hard knocks of instrument life. At the same time, we preserved the extraordinary sensitivity and speed of response associated with laser-based technology. Designed for field use, the MTO offers the following unique advantages: Ease of operation. Ready to use right from the factory, the MTO does not require special skills to start-up or to utilize its many features. Its menu-driven microprocessor control accesses a single-branched menu that allows you ready access to all variables, including start-up and shutdown procedures. Minimal maintenance. The MTO requires no calibration and very limited maintenance, with no moving parts, no consumables, and reliance upon a non-contact measurement technique. The MTO works when you need it the ultimate goal. Rack-mount configuration. The MTO-1000 s all-in-one box fits into a standard 19" rack, with the capacity to monitor up to four sample gases at a time. Insensitivity to pressure and temperature changes. While non-crds absorption spectroscopy must maintain the sample pressure with extreme accuracy for repeatable results, the MTO requires no such effort. According to the laws of physics, the MTO is unaffected by changes in the sample line pressure or temperature, based on the effect known as pressure broadening. Low power consumption. Thanks to its patented use of Continuous Wave (CW) lasers, the MTO has low power requirements with no sacrifice in laser lifetime. No pumps, heaters, or ionization sources are required. The low power consumption of the MTO-1000 makes it suitable for operation on an Uninterruptible Power Supply (UPS) for continuous monitoring even during power outages. Freedom from calibration. Because it relies on an absolute measurement principle, the MTO-1000 requires no cumbersome, time-consuming calibration procedures. Indeed, the MTO has a built-in function to perform a zero check, free of purifiers and costly purified gas. The MTO simply tunes the laser to a wavelength where no moisture absorption occurs, making the water "invisible". In this mode, the system can characterize all other sources of signal to serve as a baseline. The MTO then deducts the baseline from the measurements taken when the laser returns to its absorption peak. The zero check is initiated manually or programmed to occur at pre-determined intervals, depending on need. Portability. Built to sustain mechanical shocks, the MTO is ideal for portable carts in general and transport in particular. Plus, there s no need to stabilize, reset, calibrate or in any way reconfigure the MTO when you go from point to point. The unit continues to monitor in real-time, without delay. Service in real-time. Tiger Optics offers built-in diagnostic tools for on-line service and maintenance. The MTO constantly monitors all operating and measurement parameters. System events and faults are logged to the internal hard drive in the unit. Just provide Tiger Optics with access via the built-in ethernet connection through the Internet, and we ll check out your system from half-way around the world. Or, simply us your diagnostic files. Either way, you stay operational.

5 WHEN PERFORMANCE IS A The MTO-1000 delivers outstanding value, with the most competitive price for performance. It offers many advantages, including: Absolute technology. Based on measurement of light absorption in accordance with Beer s Law, CRDS provides a highly accurate and reliable quantification with no need for costly, time-consuming calibration. Parts-per-million (ppm) to parts-per-trillion (ppt) detection range. Wide dynamic range is achieved through automatic selection of appropriate spectral lines, with no need for calibration. Much longer pathlengths (~ 100 km) than traditional multipass cells ( m) enable ultra-low detection capability of 200 ppt without vacuum pumps. Instant response. Optimum real-time analysis capability is yours with measurements in seconds. Measurement in corrosives. A non-contact measurement technique, CRDS makes trace measurement of moisture in corrosives possible. The MTO s robust design makes it a reality. High selectivity. Based on absorption spectroscopy, CRDS attunes to the unique molecular "fingerprint" of moisture. This selectivity eliminates the background effects of other species found in the matrix gas. WHEN OPERATION IS A Tiger pairs powerful CRDS technology with the ultimate in electronics. From its easy-to-use touchscreen through its varied output options, the MTO-1000 combines ease of use with flexibility. Consider its: Large touch screen. With a 10.4" backlight Color VGA display, the MTO is easily read from various distances and angles. Using colors and large text, to convey information, you can easily gauge the instrument s performance. The universal colors, red for alarm and yellow for warning, readily convey the measurement level based on your alarm settings. Fluid operating software. Based on widely known Windows Operating Systems, all front panel controls are intuitive and easily accessed. Anyone familiar with a PC will instantly understand the MTO user interface. Dynamic diagnostics. With a full-featured interface, diagnostic information can be displayed in graphic form. From trend analysis to observation of each individual ringdown using our built-in virtual oscilloscope, determining system performance is easy and straightforward. Alarms and other set points. Each sample inlet has its own alarm and analog output. If you re monitoring multiple lines, there is no need to multiplex the outputs. You can independently configure each alarm relay and analog output. Each alarm setpoint and analog output is user-selectable throughout the operating range of the MTO. In addition to alarms for the sample inlet measurements, a system status alarm ensures that any system faults are easily detected and corrected.

6 SPECIFICATIONS A. GAS SAMPLE CONDITIONS Sample Inlet Pressure: psi ( bar) Flow rate: Up to 2 slm per inlet Sample Gases: MTO-1000 Inert and passive gases MTO-1001 Inert, toxic, corrosive, and passive gases Sample Line Temperature: Up to 60 ºC B. GAS FLOW SYSTEM Materials of Construction: Wetted Components: Gas Connections: Automatic Sampling System: MTO-1000 MTO L stainless steel (optional: Hastelloy ) 10 Ra surface finish Sample inlets & outlets-1/4" VCR One input Four inputs standard Leak-tested to: < 2x10-8 mbar l /sec Pneumatic Pressure (1001): psig, clean dry air 1/8" Press-to-lock C. ELECTRICAL Alarm Indicators: User programmable alarm setpoints Power Requirements: VAC 50/60 Hz Power Consumption: 200 Watts max. Output Signals: Recorder Isolated 4-20mA or 0-20 ma output per sample inlet Alarm Form-C relay per sample inlet Form-C relay for system fault (Laser status, flow status, ring-down status) User Interface: 10.4" color VGA display with touch screen, PS2 Mouse and Keyboard connections, 10BaseT Ethernet, USB, RS-232 D. DIMENSIONS Mounting: 14" x 19" x 29" Weight: 100 pounds PERFORMANCE Lowest Detection Limit: 200 ppt Sensitivity: 100 ppt Accuracy (greater of): 4% of reading or +/- 0.1 ppb Speed of Response (typical): Response to 50 ppb intrusion less than three minutes Operating Range: ppb Environmental Conditions: 10º 40º C Storage Temperature: -10ºC to 50ºC TECHNOLOGY Approvals: Method: CE: LVD & EMC approved Cavity Ring-Down Spectroscopy Patents: U.S. Patent # 5,528,040 U.S. Application # 09/998,518 WHEN MEASUREMENT IS A Founded in 2001, Tiger Optics brings you cutting-edge technology designed for field use. With sales and service support available worldwide, Tiger is ready to spring into action. Call us or contact your local representative for more information on the MTO-1000 today. UNITED STATES: 250 Titus Avenue, Warrington, PA ph: fax: EUROPE: Meeco/Europe Eikenstraat Hove, Belgium ph/fax: (32) ASIA: Meeco Asia / Pacific PTE,Ltd. 109 Kallang Way 2, Singapore ph: (65) fax: (65) contact@tigeroptics.com