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1 Leak detection BOC Edwards leak detectors Spectron 600 automatic portable leak detector and accessories 524 Spectron 300E portable leak detector and accessories 526 Spectron 5000 console leak detectors 528 Spectron 5000 accessories 531 QLD modular leak detector 532 GasCheck 3000, 3000is, 5000 and 5000is shop online: The dimension drawings in this section display both metric and imperial measurements. Imperial measurements are shown in brackets.

2 BOC EDWARDS LEAK DETECTORS with the customer s own control system. On-board intelligence allows the unit to be controlled through a PC and provides the facility for data collection and reporting. With their extended dynamic range the Spectron 5000 leak detectors are flexible, accommodating present and future requirements. QLD modular leak detector The QLD offers the performance of the 5000PLC in a modular leak detection system for complete integration into the production line. 522 Using the Spectron 5000 to check the internal foil seals on milk product containers. Expertise BOC Edwards leak detectors have been used successfully in all the applications listed here and many more. With over thirty years' experience in manufacturing leak detectors, BOC Edwards has the expertise to provide equipment to test anything that should be leak-tight to known specifications. BOC Edwards will work closely with customers to ensure that the leak detectors will enhance the production process and quality control. Custom-built instruments are built to suit customers' exact requirements. Installation, commissioning and servicing are carried out by factory trained engineers and on-site demonstrations of our transportable models can be arranged. Wide choice for all applications Spectron 600 portable leak detector BOC Edwards offers an easyto-use portable model to the leak detector range, the Spectron 600. This turbo-pumped leak detector is dual flow. In reverse flow it provides fast, quantitative leak detection and in direct flow it becomes a highly accurate, qualitative analytical tool. The Spectron 600 is available in three versions: the 600T, which has an oilsealed mechanical backing pump; the 600D, for those applications that require 100% oil-free leak detection; and the 600DS, a dry leak detector with a stainless steel enclosure, suitable for clean-room operation. The Spectron 600 is particularly suitable for semiconductor fabrication plant where oil-free operation is essential. The Spectron 600 incorporates a helium mass spectrometer, like the standard Spectron 5000, the QLD and the Spectron 300E. Spectron 300E The Spectron 300E is portable and is ideal for furnaces and other large process systems. Spectron 5000 The Spectron 5000 is available in five different models all designed to give consistent, reliable performance in continuous industrial applications. The models are: the general purpose 5000S; the metal-sealed 5000X for ultra-high vacuum; the 5000E-NL for use without liquid nitrogen; the 5000SF for fast testing of small, sealed devices; and the 5000PLC which is designed for use with a programable logic controller. The PLC can be supplied by BOC Edwards or the unit can be integrated Using the Spectron 5000 to leak check heat exchangers. Leak detection with other BOC Edwards instruments In applications where the highest sensitivity of the mass spectrometer leak detector is not required, or where the application demands the detection of a specific gas, BOC Edwards offers the GasCheck leak detectors. GasCheck The new GasCheck range provides automatic and direct display of gas leak rates. At the heart of these instruments is a sensor which can detect any gas that has a different thermal conductivity to that of air, which results in a highly sensitive instrument which is both reliable and compact. The GasChecks are battery operated, making them highly portable. The GasCheck 3000is and 5000is models are intrinsically safe for use in hazardous areas or for the detection of flammable gases. GasChecks detect and accurately display leak rates of gases in five different groups. Gases are grouped according to their responses, enabling selection of the most appropriate group for the application. Leak detection training BOC Edwards provides courses to train customers in leak detection and has been designated as an Accredited Training Establishment by the British Institute of Non-Destructive Testing for the Mass Spectrometer Leak Detection course.

3 APPLICATIONS Vacuum equipment Electronic valves, cathode ray tubes and lamps Semiconductor fabrication plant Laser tubes Refrigeration systems Satellites Cryogenic vessels Pacemakers Containers including those for food products and explosives Castings and other metal fabrications Bellows, valves and regulators Gas lines and cylinders Heating elements and thermostats Leadthroughs/seals Impregnation units Nuclear plants and accelerators Electron microscopes Scientific instruments Hydraulic and pneumatic systems Process plant, pressure vessels and components Hermetically sealed products including electronic devices Evaporators/condensers and heat exchangers Pumps and compressors Fuel tanks, gear boxes, radiators, safety systems and shock absorbers Ink jet printer ink cartridges Airbags LEAK DETECTION 523

4 SPECTRON 600 AUTOMATIC PORTABLE LEAK DETECTOR Auto Tune Alert The Auto Tune Alert reminds the user to tune the unit every 50 hours of use. Alternatively, the user can select Automatic Auto Tune, and every time the unit is switched on it performs an automatic tuning cycle as part of the start-up process. During the tuning cycle, voltages applied to the mass spectrometer are adjusted and optimized for peak sensitivity and performance. Calibration Check When testing components with a specified maximum leak rate or if the unit is in use for extended periods, it is advisable to periodically check that it is calibrated to the internal reference leak. This is done by pressing the CAL CHECK button. The unit then performs an independent calibration check without forcing an automatic re-tune cycle. The operator can then decide whether to accept, re-calibrate or re-tune. Competitive models automatically re-tune, giving no option to view the calibration value which creates uncertainty with respect to prior tests. Spectron 600D One-button start up - ready to test in less than 5 minutes Fully automatic operation, tuning and calibration Built-in test diagnostics quickly isolate faults Direct and Reverse flow in a single unit Optional remote control allows testing up to 30 metres from the leak detector Optional sniffer probe allows easy sniffing operation through a dedicated port RS-232 port for connection to automated control systems and personal computers Dual 90 magnetic sector mass spectrometer for the highest resolution Internal temperature-compensated calibrator, traceable to national standards Peak scan facility for positive identification of helium at any time during testing Internal vacuum valves tested for millions of cycles Turbo pump with sealed-for-life bearing One-button Auto Tune and Calibration If the operator decides to re-tune the unit, he/she presses the TUNE button. The calibrator valve opens to the mass spectrometer and the anode, filament DC, focus plates, grid and repeller voltages are automatically tuned. The calibrator valve closes and the amplifier offset and system background is recorded. The calibrator valve opens, the variables are subtracted and the amplifier gain adjusted to the temperature compensated calibrator value. Internal Calibrator The Spectron 600 has a built-in helium 4 calibrated leak, which delivers a specified leak in the range 1 x 10-8 to 3 x 10-8 mbar l s -1 air equivalent. Because leak rates change ± 3.3% ºC -1, the reference leak is temperature compensated and (to aid compliance with ISO-9000 and quality control procedures) it is traceable to NIST (US national standards organization, National Institute of Standards and Technology). We recommend that the leak is re-calibrated once a year and there is a quick disconnect for changing re-certified calibrators. 524 Features The Spectron 600 portable leak detectors have been designed to provide fast, accurate leak detection from the workshop to the clean-room. The Spectron 600T uses the latest in leak detector technology in an easyto-use, compact form. It can be operated in direct mode for high sensitivity and reverse mode for faster cycle times. The Spectron 600D features an oil-free diaphragm/molecular drag pump for applications which demand 100% dry leak detection. The Spectron 600DS is the 600D in a stainless steel enclosure with HEPA filters designed to conform to the most stringent clean-room standards. The Spectron 600 is a completely self-contained portable leak detector capable of working in a wide range of environments. All that is needed is a suitable electrical supply and a helium source (helium 3 or 4, any quality). When the unit is switched on it performs a self-diagnostic routine and all of the LEDs on the user panel are tested, the foreline area is pumped down and the turbo pump ramps-up to its rated speed. The system is ready to test in less than 5 minutes, with no operator intervention. For a leak detector to give reliable, repeatable results it is essential that it always performs at its optimum. The Spectron 600 incorporates several features designed to make it the most accurate leak detector available.

5 Mass Spectrometer Two identical magnetic fields (90 sectors) are used in the Spectron 600 s mass spectrometer to make sure that only helium ions reach the ion collector. This is a unique feature which gives the Spectron 600 a resolution (the ability of a mass spectrometer to separate ions of different mass/ charge ratios) of 14 - almost twice that of competing models. Roughing pump 600T 600D Secondary pump Size (height x width x depth) Weight 600T 600D Electrical supply 1.5 ft 3 min -1 2-stage rotary vane pump 16 ft 3 min -1 dual stage diaphragm/ molecular drag pump 60 l s -1 turbomolecular pump 381 x 521 x 356 mm 38.6 kg / 85 lb 43.6 kg / 96 lb 115V 60 Hz 10 A or 230 / 240V 50Hz 5 A 1 Performance determined in accordance with American Vacuum Society standards. N 158 (6.22) 228 (8.98) A B 432 (17.01) 381 (15.00) 446 (17.56) 527 (20.75) 277 (10.91) 356 (14.02) N Spectron 600T 230V, 50Hz D V, 60Hz D Spectron 600D 230V, 50Hz D V, 60Hz D Spectron 600DS 230V 50Hz D V, 60Hz D C A A Magnet B Source assembly C Collector assembly TECHNICAL DATA Time to test 600T < 8 s 600D < 6 s Sensitivity Direct 6 x mbar l s -1 Reverse, 600T 6 x mbar l s -1 1 Reverse, 600D 6 x 10-9 mbar l s -1 1 Response time Direct <2 Reverse <41 Leak range Standard 10-4 mbar l s -1 to 6 x mbar l s -1 With external pump 10 mbar l s -1 to 6 x mbar l s -1 Resolution (resolving power) 14 at mass 41 Maximum inlet pressure Gross Atmosphere, with external roughing pump Intermediate 0.96 mbar Fine 0.33 mbar Start-up time 600T 4½ min 600D 4 min Note: Appropriate electrical supply cable should be requested at time of order. ACCESSORIES Cart Standard cart Stainless steel cart Hand held remote Vacuum sniffer probe Hard travel case External roughing option kit Visco probe SPARES Maintenance kit 600T 600D Source rebuild kit Filament kit, box of 5 D D D D D D D D D D D LEAK DETECTION 525

6 SPECTRON 300E PORTABLE LEAK DETECTOR Process control module BOC Edwards experience and expertise has been employed to develop a control system based on the successful process control module used with the Spectron The system is simple to use at any level of control, with keylock facilities to prevent tampering, which is particularly important for a portable instrument. The alpha-numeric display has been made 50% larger for clearer viewing at a distance and there is a standard recorder output to enable a permanent record to be made. Unparalleled range The Spectron 300E is a complete unit which gives the best specification without having to buy extras. The massive, gross and fine test modes, all built into the unit, cover a range of 4000 to mbar l s -1 and the maximum intake pressure is one atmosphere. The minimum detectable leak rate is unaffected by the size of the backing pump. Clean-up time and stability are superior to other units. A larger roughing pump can be fitted to the trolley for rapid evacuation of larger volumes. This will not affect the sensitivity. Widest detection range 4000 to mbar l s -1 - finds both large and small leaks without costly accessories Stable signal - even at high sensitivity Fast - ready to operate within 5 minutes Easy operation - vacuum or overpressure testing Unique pumping system needs no liquid nitrogen Fast response with rapid Helium clean up Single handed leak detection - visco probe and spray probe can be fitted to hand-held read-out unit Rugged unit designed for industrial conditions BOC Edwards Spectron 300E portable makes possible fast, effective leak detection over the range 4000 to mbar l s -1 without liquid nitrogen. Together with the lightweight hand-held module, the Spectron 300E represents a simple to use, readily portable and reliable wide range leak detector. Portability The Specton 300E is a strong, rugged leak detector designed to operate in dirty industrial conditions as well as clean research areas. Spectron 300E features fold-down carrying handles but for those applications where the unit is likely to be in demand over a large site a specially designed trolley accessory is available. The trolley runs easily on large go anywhere wheels and features a handy lockable storage space for instruments, accessories and tools. Single handed leak detection The hand-held control module has been designed to be as small as possible yet give all the information and control an operator will need as far away as 25 m from the leak detector. BOC Edwards has also designed a visco probe and spray probe which can be fitted to the hand-held control module enabling single handed leak detection. The visco probe is pumped by the E2M1.5 backing pump interstage; no need for costly auxiliary pump. 526 Double pump system The Spectron 300E employs a unique double diffusion pump system for high performance combined with rugged reliability. One of the BOC Edwards E040 air cooled diffusion pumps continuously pumps the mass spectrometer head through a special restrictor. The other pumps the test piece. The high compression ratio achieved gives a fast response and very fast clean-up times unaffected by helium in the backing line. In addition, the sensitivity of the Spectron 300E is independent of the size of the backing pump used.

7 The hand-held control module features a linear 50 segment bar graph readout of leak rate with exponent for at a glance leak detection. The module will give an indication of valid test mode and there are four controls for manual/auto ranging and zeroing. There is also a socket for headphones for the audio output when working in noisy environments. When not in use the control module can be attached to the vacuum module so that its display/controls conveniently complement the controls on the front panel. Test recording A data logger can be connected to the RS232 port. Service and maintenance Thanks to the well thought out and easily accessible interior the Spectron 300E is simpler, easier and less costly to maintain than many other portable leak detector units. The mass spectrometer head will require little maintenance since it is kept clean by use of special techniques to reduce the contaminants entering the mass spectrometer chamber. Applications Typical applications for the Spectron 300E will be found at semiconductor production sites chemical and power plants vacuum furnace installations high energy physics establishments space simulation laboratories nuclear research centers refrigeration installations any type of industrial vacuum system TECHNICAL DATA Spectron 300E portable leak detector including rotary pump 220/240V, 1-phase, 50/60 Hz D V, 1-phase, 50/60 Hz D V, 1-phase, 50/60 Hz D ACCESSORIES Headphones D Trolley (without pump) D Vacuum sniffer probe D Visco probe D Spray probe MK II D Powder leak with isolation valve D Powder leaks for above: to mbar l s -1 (red) D to mbar l s -1 (blue) D to mbar l s -1 (yellow) D Quartz helium reference leak (typically mbar l s -1 ) D Trolley pump connection kit D Auxiliary pump connection kit D Hand-held unit extension lead 12.5m D Spares kit for 300E D Ion source D Spare filaments (pack of 2) D Preamplifier assembly D Minimum detectable leak rate (AVS) (air equivalent) mbar l s -1 Response time (blanked test port, 1 second except on most sensitive range) Range (using massive, gross and 4000 to mbar l s -1 fine test modes) Auto calibration with external reference leak Test port NW25 Backing/roughing pump E2M1.5 Masses 2, 3 and 4 Secondary pumps Two special EO40/55 air cooled with high helium compression Analog/recorder output 0-5V fsd Vacuum gauges Manifold pressure Pirani PRM10K Backing pressure Thermocouple High vacuum Pirani PRL10K Mass spectrometer Integral ion gauge Size 450H 600W 340D Valves Gross, test, roughing PV10EK Air admit, backing PV5EK Weight 45 kg / 99 lb Voltage variants 220/240V 50/60Hz 110V 50/60Hz 115V 50/60Hz Temperature range 12 C to 32 C Humidity 10-90% LEAK DETECTION 527

8 SPECTRON 5000 CONSOLE LEAK DETECTORS frequently used key-pads. Spectron 5000 can be operated from the console front panel or the process control module. The reliable leak detector for industry The rugged, reliable Spectron 5000 is designed to match industry requirements for rapid processing to specified standards, simple operation, high reliability with easy maintenance and low cost of ownership. The Spectron 5000S or the no liquid nitrogen 5000E-NL are suitable for all styles of vacuum leak detection and over-pressure applications using the sniffer probe accessory. For rapid cycling, the Spectron 5000S-SF is ideal for testing small sealed components. A special feature, called Rapid Reject, operates when the leak is so large that ordinary leak detectors would be overwhelmed and saturated with search gas. Spectron 5000 responds by immediately rejecting the part and terminating the test. This protects the unit, saves time and ensures that massively leaking parts are rejected before complete evacuation. 528 Choose from four standard Spectron 5000 leak detectors: All with dynamic range With or without liquid nitrogen Ultra high vacuum version Rapid cycling model User programable menus Modular design allows easy customizing Spectron 5000S For all industrial and general applications requiring vacuum leak detection from 900 down to mbar l s -1. It offers over-pressure leak detection down to 5 x 10-9 mbar l s -1 with the sniffer probe accessory. Spectron 5000X This is a variant of the 5000S for ultra high vacuum applications and where high helium ambient conditions are encountered, for example, in the testing of cryostats. The critical seals in the 5000X mass spectrometer are metal seals. Spectron 5000E-NL This unit is designed to give optimum performance where liquid nitrogen is not available. Sensitive down to 10-9 mbar l s -1 this model will usually be the most convenient detector for testing large dry systems. Spectron 5000S-SF This detector is optimized for fast, high throughput testing of small sealed devices like semiconductor devices, opto-electronics and quartz crystal packages. Spectron accessories Accessories include Gas Spray Probe, Visco and Vacuum Sniffer Probes, Quartz and Powder Reference leaks, communications connectors and extension leads. The optimized design of the Spectron 5000 ensures the best performance for all types of leak test. Spectron 5000 is the ideal unit for general leak proving and for pin-pointing and measuring the largest or smallest leaks. Easy-to-read displays on the process control module comprise a direct digital readout of leak rate supplemented by a clear analog bar graph and exponent display. The flip cover prevents accidental operation of the less... and for the laboratory The versatility of the Spectron 5000 makes it ideal for the wide variety of leak detection applications encountered in the laboratory. The Spectron 5000S is best for general applications requiring vacuum or over-pressure leak detection. For the very stringent specifications necessary, for example, in testing ultra high vacuum systems or components, the metal sealed Spectron 5000X offers a high sensitivity feature which enables leak detection down to 2 x mbar l s -1 with liquid nitrogen. The Spectron 5000X is also appropriate for operation in high helium ambient conditions encountered in the testing of cryostats, and also for hydrogen or helium 3 leak search. Chemical processing and metallurgical systems The Spectron 5000E-NL, which does not require liquid nitrogen, will usually be the most convenient model for leak testing vacuum furnaces and large systems characteristic of the process industries. Using the Visco probe accessory for over-pressure testing, leaks can be detected down to 3.5 x 10-7 mbar l s -1 up to 25 metres away from the main console unit. In applications with difficult access, we recommend the Spectron 300E portable detector, see page 526. Features Unrivalled leak measurement range The Spectron 5000 has four test modes which automatically span 14 decades from 900 to 2 x mbar l s -1 and provide direct readout of leak rate for massive, gross, fine and high sensitivity leaks. There is comprehensive dynamic overlap between leak test modes and testing can go down into the 10-9 mbar l s -1 range without liquid nitrogen. Leak rate units can be preselected from atm cc/s, mbar l s -1, Pa l s -1, Pa m 3 s -1, Torr l s -1, g yr -1, ppm concentration or mole s -1. Comprehensive operator displays For easy observation of leak rate, program options and diagnostics, there is a direct digital readout, with digital LED display of the exponent. There is also a clear analog bar graph readout. A continuous LED array indicates the current test mode (massive, gross, fine or high sensitivity).

9 Simple, single button testing After pressing the TEST button, the correct test mode and increasing sensitivity will be selected automatically to accommodate any inlet pressure from atmospheric pressure downwards. Leak rate is then displayed with audible signal if required. The unit can be pre-programed to give auto finish and auto vent. Alternatively, press FINISH to terminate the test. Modern communications interfacing Spectron 5000 meets requirements for computer links and test data traceability to meet international quality standards. Output ports are conveniently grouped on a panel at the rear of the console and comprise: High quality design and manufacture A combination of microprocessor monitoring and unique system design ensures that even in the event of accidental inlet of atmospheric pressure or power failure, the Spectron is protected automatically and returns to a ready-to-use condition. Spectron 5000 has been designed and built to meet very high standards including IEC1010, MIL STD810E, EN EMC emission and EN EMC immunity, together with all appropriate EU directives. The factory where Spectron 5000 is manufactured is certified to ISO9001. The Spectron 5000 has been subjected to extensive and stringent environmental testing to ensure that its performance and integrity are maintained under extreme operational or transport conditions. Link the RS232 port to a PC to allow remote operation of the Spectron Data can be imported into a spreadsheet for which BOC Edwards can provide customized Supervisory Control And Data Acquisition (SCADA) program based Windows software. Select and use the parallel command status port option to interface to your system controls. The PCSP has eight relay outputs (OK/prompt, Accept, Reject, Fine, Ready, Auxiliary, Gross, Massive) and eight opto-inputs (Finish, Test, Close down, Proceed, Stand-by, Calibrate, Peak, Zero). Select the printer port option to print data, calibration and test results directly from the Spectron Chart recorder output, available from the rear of the process control module. A headphones connection is also provided at the rear of the process control module, to allow the operator to hear the audio signal above ambient noise. Automated operation and rapid cycling The unit is preset for automatic start-up, tuning and calibration prior to leak testing, so the Spectron 5000 is ready for use at the start of a shift. The Spectron 5000S has a specially designed vacuum system giving a 6 second cycle time to fine leak test with a small volume. Response time in fine leak mode is less than one second. A 30 m 3 h 1 roughing pump can be fitted giving higher speed for rough pumping larger volumes. After each test the Spectron 5000S and 5000X automatically switches to high speed pumping to ensure the fastest clean-up time. Other features include: Single button start-up Automatic zero Automatic tuning Automatic calibration Automatic ranging Auto gas ballast Large work surface Spectron 5000 features roughing, testing and air admittance valves with a life of over 1 million cycles with 95% certainty level. A single machined block reduces the number of internal seals required, and reduces the background helium level due to the O ring permeation. Customer care Easy servicing To keep your leak detector in the best working condition, the Spectron 5000 is designed for easy and efficient servicing. Both side and front panels are easily removed for convenient access to the main components. Removal of the front panel allows immediate checking of the rotary pump oil levels. The worktop can also be removed for access. During production, the performance parameters of each unit are recorded. A copy of this record accompanies the product manual and acts as a performance reference for servicing. The serial number, build numbers and all the original parameters can be displayed on the process control. Self cleaning ion source The ion source is continuously heated to prevent contaminants being deposited in critical areas thus increasing the interval between source maintenance. Dual filaments The Spectron mass spectrometer is fitted with a self aligning dual filament ion source. If the working filament fails during a test, you simply change to the second filament by key-pad selection and complete the test. LEAK DETECTION 529

10 530 Oil mist filters are standard For user comfort and safety, oil mist filters are fitted to the rotary pumps as standard on all models. On-site recalibration Our service engineers can recalibrate the internal reference leak against a certified standard leak. The leak detector need not leave the site. International support BOC Edwards offers a range of service options including a service contract based on call-out servicing after a number of elapsed hours to ensure that Spectron 5000 units remain in top condition for the industrial user. TECHNICAL DATA All Spectron 5000 leak detectors have the following features: helium reference leak, process control module and communication ports. Other features of individual units are given below. Standard 5000S Features Fluoroelastomer seals NW40 test port Liquid nitrogen trap Detectable leak Massive 9 x x 10-4 mbar l s -1 Gross 9 x x 10-9 mbar l s -1 Fine 9 x x mbar l s -1 High sensitivity 9 x x mbar l s -1 Pumping system Rotary roughing E2M18 Rotary pump E2M1.5 Diffusion pump E203D Metal Sealed 5000X Features Metal seals NW40 test port Liquid nitrogen trap Detectable leak Massive 9 x x 10-4 mbar l s -1 Gross 9 x x 10-9 mbar l s -1 Fine 9 x x mbar l s -1 High sensitivity 9 x x mbar l s -1 Pumping system Rotary roughing E2M18 Rotary pump E2M1.5 Diffusion pump E203D SuperFast 5000S-SF Features Fluoroelastomer seals Rapid test Large flip-top chamber Liquid nitrogen trap Detectable leak Massive 9 x x 10-4 mbar l s -1 Gross 9 x x 10-8 mbar l s -1 Fine 9 x x mbar l s -1 Pumping system Rotary roughing E2M18 Rotary pump E2M1.5 Diffusion pump E203D No liquid nitrogen 5000E-NL Features Fluoroelastomer seals NW40 test ports Detectable leak Massive 9 x x 10-4 mbar l s -1 Gross 9 x x 10-9 mbar l s -1 Fine 9 x x mbar l s -1 Pumping system Rotary roughing E2M18 Rotary pump E2M1.5 Diffusion pumps E203D and EO50 Standard 5000S 115 V 60 Hz L V 50/60 Hz L V 50/60 Hz L V 50 Hz L Metal Sealed 5000X 115 V 60 Hz L V 50/60 Hz L V 50/60 Hz L V 50 Hz L SuperFast 5000S-SF 115 V 60 Hz L V 50/60 Hz L V 50/60 Hz L V 50 Hz L No liquid nitrogen 5000E-NL 115 V 60 Hz L V 50/60 Hz L V 50/60 Hz L V 50 Hz L SPARES Filaments spares (set of 2) Replacement ion source D D

11 SPECTRON 5000 ACCESSORIES GAS SPRAY PROBE A gas spray probe with pushbutton valve for use on evacuated test pieces. Supplied with 2 metres of plastic tube for connection to a pressure regulator on the gas cylinder. Gas spray probe (MkII) VACUUM SNIFFER PROBE Connected to the Spectron test port, this probe is for over-pressure testing. The response time is about 2 seconds and leaks down to mbar I s -1 can be located. Vacuum sniffer probe (NW40 connection) VISCO SNIFFER PROBE D D QUARTZ REFERENCE LEAK External reference leaks are used for calibrating leak rates and response times on large systems. Typical leak rate mbar l s -1 at 20 C (specified for each leak). Can be supplied with traceable calibration certificate (details on request). Quartz reference leak (NW40 connection) POWDER CHECK LEAKS Type Leak rate range (all individually calibrated) (mbar l s -1 ) Red to Blue to Yellow to Powder check leak (NW40) Red compressed powder leak Blue compressed powder leak Yellow compressed powder lead D D D D D STICK TEST CHAMBER Horizontally mounted in any orientation, the 36 mm diameter chamber allows multi-stick tests of integrated circuit packages mounted in carriers of up to 625 mm long. Closing the door starts the test cycle and a spring back plate assists unloading. Stick test chamber (for Spectron 5000S-SF) Stick test chamber adaptor kit (for Spectron 5000S-SF) D D The Visco Sniffer probe (three probe lengths and fittings supplied in a convenient pouch). For over pressure testing up to 25 metres away. On locating a leak, helium is rapidly transferred to a test port gas sampler under viscous flow. Sensitivity (3% fsd) mbar l s -1 Delay time 3 m 1 s 12 m 3 s 25 m 7 s Visco sniffer probe D TRAPPED VOLUME LEAK DETECTION (TVLD) BOC Edwards has developed patented testing of sealed items, such as airbag inflator canisters, using an accessory for Spectron which can be internally or externally mounted. TVLD is especially useful for rejecting sealed parts with large volume leaks prior to the conventional helium testing but it may not increase overall cycle times. Contact BOC Edwards for more details. Process control module extension lead (12 m) RS232 modem lead (5 m) RS232 IBM personal computer lead (5 m) Printer leads D D D D LEAK DETECTION 531

12 QLD MODULAR LEAK DETECTOR BOC Edwards QLD modular leak detection system is designed to provide fast, accurate and easy-to-control testing for high throughput production lines and other semi-automated leak testing applications. Developed through close collaboration with production line integrators and experienced manufacturing engineers, the QLD system uses BOC Edwards state-of-the-art vacuum components to provide flexible, reliable solutions to a wide range of leak testing applications in many industries: Automotive Air bag inflators Aeronautical Electrical Heat exchangers Electronics Chemical Refrigeration and air conditioning Food packaging Pharmaceutical and medical Electronics control module Standard 2U 19" wide enclosure, rack mountable Universal power compatibility Can be used remotely up to 5m from sampling module System electronics are housed in a standard 19" wide rack-mountable enclosure. This module can be installed up to 5m away from the sampling module, thereby allowing maximum flexibility in production line layout for the system builder or retrofit designer. In order to satisfy most power requirements, the QLD system is available with a universal power supply of V, 50/60 Hz. Roughing and backing modules Wide range of BOC Edwards pump options Dry option available All pumps sized to the application As a recognized technology leader in the design, manufacture and operation of vacuum pumps, BOC Edwards offers a full range of pumping solutions to satisfy the most challenging leak testing applications. From our small (3.4 to 8.4 ft 3 min -1, 5.8 to 14.2 m 3 h -1 ) RV pumps to our larger (12.1 to 172 ft 3 min -1, 20.5 to 292 m 3 h -1 ) EM pumps, BOC Edwards manufactures a performance and cost optimized solution to your most demanding roughing and backing pump requirements. In applications where oil-free pumps are required to inhibit helium background build-up, BOC Edwards dry pumps are the logical choice. With an installed base of more than 40,000 such pumps worldwide, BOC Edwards is the recognized leader in dry pump design, manufacture and operation. All ESDP-series dry pumps used in QLD systems satisfy the unique demands of leak detection and are backed by BOC Edwards extensive applications and field support networks. Sampling module Compact mass spectrometer/turbo pump module with choice of high vacuum pump Small footprint, flexible installation Fast cycling At the heart of the QLD system is BOC Edwards field proven mass spectrometer-based sampling module. Used to leak test nearly a billion parts to date, BOC Edwards ultra-stable electronics and unique self cleaning ion source have made this component an industry standard. The mass spectrometer head is coupled to an BOC Edwards EXT70 turbomolecular pump in a compact arrangement which allows easy integration into any production line. In applications where fastest cycle times are demanded, the sampling module can be configured with an EXT70H hybrid pump and mounted directly to the sample chamber in nearly any orientation. QLD s wide sampling range and fast response time makes it the modular system of choice for a wide range of industrial leak testing applications. 532 QLD sampling module.

13 Display and communication module BOC Edwards PLC-Link software provides direct PLC control of all system functions Display modules show system status and provide local operator control of key system functions Full range of system set-up, control and diagnostic screens On-line leak detection systems are often plagued by slow, inflexible, nonintuitive communications and control interfaces. BOC Edwards again pushes the state-of-the-art with its unique PLC-Link software. Designed to provide direct control of all leak detector functions and data communications via a programable logic controller, PLC-Link provides the fastest, most intuitive interface of any leak detector. Loaded into a PLC, the PLC-Link provides direct control of all leak detector functions (zero, peak, calibration, etc.) and direct access to real time data (leak rate, background level, etc.) via Allen-Bradley s Data Highway Plus network, Device Net, or similar products. PLC manufacturers display modules can be configured with a series of highly intuitive, user friendly screens which allow manual control of system functions and which provide real time display of system status, error conditions, data reports, and so forth. Options and accessories The QLD system is further optimized through the use of several configuration options and accessories: Massive Leak Mode A BOC Edwards innovation, this option allows leak testing to commence at near-atmospheric pressure, thereby providing early indication of large leaks and the ability to terminate the test before the system can be poisoned. Visco Probe Designed for use in overpressure applications, this accessory provides fast response and can be used up to 25 m away. Trapped Volume Module This patented system is used to verify the integrity of parts where large leaks and long queue times may combine to render a helium test inconclusive. It is also used to provide a quality check on the helium fill process and hardware. Local Display Module When plugged into the Electronics Control Module, this accessory provides local read out of leak rate. BOC Edwards PLC-Link software Available for most PLCs in flash EPROM, PCMCIA or floppy disk formats. TECHNICAL DATA Sensitivity mbar l s -1 Measurement limits Amplifier drift <0.3% fsd after warm up Noise <2.5% fsd after warm up Response time limits (for helium) 2 <0.5 seconds for Fine Test Start-up/close down times Warm-up time to Ready 2 minutes Time to Closed Down 20 seconds Maximum test pressure EXT70H <10 mbar EXT70 <0.5 mbar Maximum internal pressure 1500 mbar absolute Maximum surface temperature (at an ambient of 40 C) 70 C Vacuum unit Width 208 mm Depth (without EXT70 lead fitted) 300 mm Height (with MS head lead fitted) 435 mm Mass 12.5kg (27.5 lbs) Maximum acoustic noise emission <70 db (A) Electronics Control Module Width 430 mm Depth 240 mm Height 123 mm Front panel size (2U) mm Mass 5.8 kg (12.8 lbs) PLC dimensions On request Single phase power supply 90/253 V, 50/60 Hz Current with EXT70 pump operating 2.0 A Electrical supply (not supplied) IEC to EN / BS4491 Backing port NW16 1 Standard leak detection range with EXT70 2 measured in accordance with AVS standard 2.1 Design, installation and training In addition to state-of-the-art equipment, BOC Edwards offers something unique in the leak detector industry - peace of mind. Using the latest computer design and modelling techniques, our design and applications staff can assist in system configuration and operation. Our renowned Vacuum Training Center provides a broad range of practical, hands-on courses and our worldwide service organization is trained and equipped to provide rapid response to any requests. All QLD systems are fully assembled and tested by BOC Edwards and are shipped with all appropriate test data. Further, all systems use BOC Edwards vacuum components exclusively, thereby eliminating third-party equipment problems and ensuring high reliability and service support. Lastly, all BOC Edwards products are in compliance with CE mark certification requirements. All QLD systems are configured to meet application-specific requirements. The QLD selection matrix guides you through the choices of pump, display and communications. BOC Edwards staff will be pleased to advise you further. LEAK DETECTION 533

14 Turbomolecular pump 0 EXT70 1 EXT70H Mode 0 Fine 1 Massive and fine Voltage supply V V V L2 Roughing pump None 0 E2M18 1 E2M28 2 ESDP30A 3 Backing pump None 0 E2M18 1 E2M28 2 E2M1.5 3 ESDP12 4 Display None 0 ABPV550 1 Siemens 2 Mitsubishi 3 GE 4 Communications PLC link 0 AB5/04 1 Siemens 2 Mitsubishi 3 GE ACCESSORIES Massive kit D Trapped volume module kit D Handset D m electrical supply cable (no plug) D m extension cable for 19 inch rack D m turbo pump cable to 19 inch rack D Visco probe kit D Quartz leak (typically mbar l s -1 ) D Powder leak fitting kit D Compressed powder leak - RED D Compressed powder leak - BLUE D Compressed powder leak - YELLOW D PLC link software 1 D Panel view software 1 D If the PLC and Display Module are purchased from BOC Edwards, the software is pre-loaded. SPARES Filament spares (set of 2) Ion source replacement Ion source kit D D D

15 NEW GASCHECK 3000, 3000is, 5000 and 5000is APPLICATIONS GasCheck 3000is GasCheck 5000 Introduced as an enhanced replacement for the popular GasCheck B4 and B4is, the GasCheck 3000 and 3000is incorporate the following new fea- tures:- A new backlit dot matrix LCD for improved viewing in poor lighting. Leak rate indication by both flashing LED and sounder, for easier use in all environments. A new tactile keyboard with fewer keys, for improved feel and simpler use. Improved temperature stability for better performance in uncontrolled areas. The new GasCheck 5000 and 5000is incorporate, in addition to the above enhancements, the following features:- Fully user programable, including selectable units and alarm level, for maximum flexibility. Industrial leak detection of all gases The new GasCheck range provides automatic and direct display of gas leak rates. At the heart of these instruments is a sensor which can detect any gas that has a different thermal conductivity to that of air, resulting in a highly sensitive instrument which is both reliable and compact. GasChecks are battery operated, making them highly portable. The GasCheck 3000is and 5000is models are intrinsically safe for use in hazardous areas or for the detection of flammable gases. GasChecks detect and accurately display leak rates of gases in five different groups. Gases are grouped according to their responses, enabling selection of the most appropriate group for the application. Features Direct reading of leak rate Audio and visual signal Selection of 5 gas groups High sensitivity 2 x 10-5 ml s -1 He Fast response 1 second (typically) Peak hold facility Choice of units 3000 & 3000is ml s & 5000is ml min -1, ml s -1, ft 3 yr -1, ppm, sccm, mm 3 s -1 & mm 3 min -1 Fully user programable option 5000 & 5000is Data logging option 5000 & 5000is Intrinsically safe option available for hazardous T4 rated conditions 3000is & 5000is Typical applications are:- Leak detection of welds, joints, seams and gaskets on components that are pressurized with a traceable gas such as helium or carbon dioxide Valve emission evaluation to EPA (environmental protection agency) method 2.1 Leak testing refrigeration plants Safety checks on cylinders or aerosols Use in mass spectrometry and gas chromatography Leak detection of domestic and industrial combustible gas installations, equipment, meters, valves and controls (3000is and 5000is version only) Calibrated portable reference leaks Portable reference leaks may be used to calibrate GasChecks. These are refillable with helium or R4a, have a typical leak rate of 3 x 10-4 mbar l s -1 and are traceable to NAMAS standards. TECHNICAL DATA Detector Dual micro-volume thermal conductivity cell Minimum detectable limit 1 x 10-5 ml s -1 (17gyr -1, 760 ppm) R4a 2 x 10-5 ml s -1 Helium Response time Short probe <1 s Long probe 9 s Recovery time 1 s Batteries 4 off AA type alkaline Temperature range Operating 3000 & to 50 C 3000is & 5000is 0 to 40 C Storage -25 to 70 C Dimensions Length with 110 mm, short probe 385 mm Length with 300 mm, long probe 575 mm Storage case 420 x 320 x 97 mm Weight Unpacked 1.6 Kg (3.5 lbs) Packed 0.5 Kg (1.1 lbs) Standards Intrinsic safety EN 50014, EN (3000is & 5000is only) Electrical noise immunity EN 626, class B emissions GasCheck 3000 GasCheck 3000is GasCheck 5000 GasCheck 5000is ACCESSORIES Reference leak for R4a Reference leak for Helium SPARES Short probe Long probe Replacement battery holder Nozzle Nozzle (3000is and 5000is version only) D D D D Call for details Call for details D D D D D LEAK DETECTION 535

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