Life Safety Network. Intelligent solutions for advanced requirements

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1 Life Safety Network Intelligent solutions for advanced requirements

2 Life Safety Network Features: Maximum flexibility in design, project change and online expansion Safe communication Elimination of the cable highways Minimum cost for installation Minimum cost for maintenance Remote control Comprehensive system As a successful supplier of gas detection systems, Honeywell Analytics also offers complete Life Safety Network solutions for semiconductor FABs. Sensing devices are strategically installed around the facility to monitor potentially dangerous situations and initiate safety actions. (Exhaust Gas Detection) VMB/ Distribution Comet (Exhaust Gas Detection) Control Room Clean Room Potentially dangerous situations in a FAB are: Toxic gas leaks Chemical spills in sumps Double containment leaks Exhaust flow failures Liquid leaks Pressure drops Active EMOs Fire signals Tool troubles Earthquakes, etc. Furthermore, the Honeywell Analytics Life Safety Network interfaces with tools such as chemical dispense modules, chemical valve boxes, gas cabinets, valve manifold boxes and production tools. Honeywell Analytics utilises a decentralised Life Safety Network based on the LonWorks technology with intelligent network nodes for the communication platform between the sensing devices and actors. All Honeywell Analytics network components are especially designed, developed and produced by Honeywell Analytics with a very high standard of safety features. Comet (Exhaust Gas Detection) Sub FAB (Ambient Gas Detection) The network structure is designed for a fail-safe operation and offers the advantage of placing sensing or acting devices close to the point where life safety signals need to be integrated or a shut down needs to be initiated.

3 FAB Overview All relevant life safety signals can be easily monitored and analysed by our intelligent network system components. Digital and analogue input modules analyse incoming signals and send messages to the corresponding relay output modules in order to activate actions. utilises a unique, intelligent electrochemical sensor for the detection of toxic, corrosive and combustible gases. Each features complete programmability and sends a message to any relay output module in the network. The Comet is a cost efficient solution for gas detection when a read-out of the concentration is not necessarily required. As it can be mounted directly on the exhaust line, a sensor extension is not required. The Web DVS provides data visualisation for sub-systems and specific areas of the network. All Life Safety Network information is made centrally available in the control room by our Data Visualisation Software (DVS). Life safety components are represented by active icons, exactly positioned in on-screen facility drawings. The DVS allows for a quick and simple tracking of any event and provides data archiving of all life safety signals. Honeywell Analytics Life Safety Network also interfaces with the Facility Control and Management Systems (FCMS). The idisplay offers a status overview of the gas room or specific area. The idisplay provides information of different inputs and outputs coming from Satellites, digital or analogue input modules or relay output modules. Possible Input and Output Signals in Honeywell Analytics Life Safety Network Clean Room Area: Gas Cabinet Area: Inputs Outputs Inputs Outputs Gas detection Shut down gas supply (, Comet) (Gas stick in VMB) Liquid leak detection Activate strobes Tool trouble Activate horns VMB Area: Inputs Outputs Gas detection Shut down valves (, Comet) Activate strobes 4-20 ma weight scale Activate horns Cabinet trouble Pressure detection UV detection Flow detection EMO Gas detection Valve shut down (, Comet) (stick and main valve) Pressure detection Liquid leak detection VMB trouble Cont FCMS Interface Web DVS Control and Maintenance Station Ethernet Remote Control and Maintenance Station Phone Line Modem Interface

4 Clean Room Exhaust Gas Detection Tool Trouble Liquid Leak Controller Exhaust Gas Detection Distribution Pressure Detection Stick Valve Shutdown Valve Shutdown Main Valve Shutdown Liquid Leak Detection rol Room Sub FAB Flow Detection UV Detection Pressure Detection Exhaust Gas Detection Ambient Gas Detection PH 3 HBr Shut Down Valve B 2 H 6 CI2 Cabinet Trouble H 2 HF NH 3SiH4 HCI AsH mA Weight Scale Level Switch

5 FAB Overview Continued System Information The effective service to integrate Honeywell Analytics Life Safety Network system integration Honeywell Analytics comprehensive know-how and long years of experience in life safety system design, combined with innovative solutions, enable our Integration department to provide high-level integration services to the semiconductor Industry. Systems integration designs, installs and tests complete life safety systems based on the customer s individual requirements. Accurate planning, flexibility and continual consultation with the customer assure the on-time completion of the project. Experienced systems integration engineers are based in various locations to successfully manage projects worldwide. Endorsements and Accreditations The project status overview assures the on-time completion of the project Complete Life Safety Network idisplay Sensors I/O Modules DVS 9650 Web DVS Point-of-Use detector utilises Honeywell Analytics intelligent sensors in order to detect a wide range of corrosive, toxic and combustible gases. Can be combined with Extractive Module XT and Pyrolyzer Module XT to fit other detection requirements. The idisplay allows the visualisation of all our Life Safety Network components, giving the operator fast and reliable data on all tool or process related signals. Intelligent sensors are available for a wide range of toxic, corrosive and combustible gases. I/O Modules are interfaces to external sensors and actors. Honeywell Analytics also offers SBS modules in order to identify device or loop failure, and router modules for managing the network traffic. Honeywell Analytics software allows for the visualisation, management and storage of any event occurring in the life safety system. The Web DVS offers a status overview of life safety inputs and outputs for a specific area of the network.

6 Our Product Range Fixed Gas Monitoring Honeywell Analytics offers a wide range of fixed gas detection solutions for a diverse array of industries and applications including: Commercial properties, industrial applications, semiconductor manufacturers, energy plants and petrochemical sites. Detection of flammable, oxygen and toxic gases (including exotics) Innovative use of 4 core sensing technologies paper tape, electrochemical cell, catalytic bead and infrared Capability to detect down to Parts Per Billion (ppb) or Percent by Volume (%v/v) Cost effective regulatory compliance solutions Portable Gas Monitoring When it comes to personal protection from gas hazards, Honeywell Analytics has a wide range of reliable solutions ideally suited for use in confined or enclosed spaces. These include: Detection of flammable, oxygen and toxic gases Single gas personal monitors worn by the individual Multi-gas portable gas monitors used for confined space entry and regulatory compliance Multi-gas transportable monitors used for temporary protection of area during site construction and maintenance activities Technical Services At Honeywell Analytics, we believe in the value of great service and customer care. Our key commitment is providing complete and total customer satisfaction. Here are just a few of the services we can offer: Full technical support Expert team on hand to answer questions and queries Fully equipped workshops to ensure quick turnaround on repairs Comprehensive service engineer network Training on product use and maintenance Mobile calibration service Customised programmes of preventative/corrective maintenance Extended warranties on products Find out more Contact Honeywell Analytics: Europe, Middle East, Africa Life Safety Distribution AG Wilstrasse 11-U31 CH-8610 Uster Switzerland Tel: +41 (0) Fax: +41 (0) gasdetection@honeywell.com Americas Honeywell Analytics Distribution, Inc. 405 Barclay Blvd. Lincolnshire, IL USA Tel: Toll free: Fax: detectgas@honeywell.com Asia Pacific Honeywell Analytics Asia Pacific #508, Kolon Science Valley (1) Guro-Dong, Guro-Gu Seoul, , Korea Tel: +82 (0) Fax: +82 (0) analytics.ap@honeywell.com Technical Services ha.emea.service@honeywell.com Please Note: While every effort has been made to ensure accuracy in this publication, no responsibility can be accepted for errors or omissions. Data may change, as well as legislation, and you are strongly advised to obtain copies of the most recently issued regulations, standards, and guidelines. This publication is not intended to form the basis of a contract. H_Life Safety Network_DS01040_V1_EMEA 09/ Honeywell Analytics 12169

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