Vacuum Module: Ejector System/Vacuum Pump System. For electronic components and precision components up to 100 g

Transcription

1 1 Vacuum Module: Ejector System/Vacuum Pump System For electronic components and precision components up to 100 g Modular design Customized application function through selection of module components. Compact size and lightweight (120 g with complete unit); well suitable for actuator mounting Ejector nozzle size: ø0.5 to ø1.0 (Suction flow: 5 to 22 l/min (ANR)) Ejector system Ejector system Ejector unit Filter unit Ejector unit Vacuum switch unit Filter Valve unit Ejector unit Filter unit Valve unit Ejector unit Single unit Complete unit Ejector unit Vacuum Pump system Valve unit Ejector unit Filter unit Valve unit Filter unit Vacuum switch unit Filter Single unit Valve unit Vacuum switch unit Valve unit Vacuum switch unit Filter Filter Complete unit Application Example Chip bonding Chip mounting Picking & placing miniature components Escorting printed matter

2 Vacuum Module: Ejector System/Vacuum Pump System 2 Modular Components Introduction System Ejector System Vacuum Pump System Component equipment Ejector unit 1 Valve unit ZX1-V Vacuum pressure switch unit Series ZS Suction filter unit ZX1-F Characteristics Nozzle diameter ø(mm) 0.5 Max. suction flow (l/min(anr)) Air consumption (l/min(anr)) Maximum vacuum pressure Exhaust release Component equipment Function Operation Power supply voltage Series Set pressure range Hysteresis Applicable pad dia. (mm) Supply voltage Operating pressure range to kpa Built-in silencer/manifold exhaust Individual exhaust port: (RC 1 8 ) Vacuum switch Adsorption confirmation switch 0 to 101 kpa 20 kpa to 101 kpa 3% or less ø2 to ø25 ø0.3 to ø VDC / N.C., N.O. Solenoid valve/air operated valve 3, 5, 6, 12, 24 VDC, 100, 110 VAC (50/60 Hz) Vacuum to 0.5 MPa to Vacuum switch Adsorption confirmation switch 0 to 101 kpa 20 kpa to 101 kpa 0.5 kpa ø2 to ø25 ø0.3 to ø VDC ZX ZR ZM ZH ZU ZL ZY ZQ ZF ZP ZCU AMJ Misc. Filtration 30 µm Unit Air supply port Vacuum pad connection port M5 (Standard)/M6 (Option) M5 (Standard)/M6 (Option) Common specifications Manifold Air supply port Exhaust port External pilot port Rc 1 8 Rc 1 8 M5 Stations Max. 8 units Refer to pages to for more detailed specifications for each unit. Refer to pages to for ejector system unit. Refer to pages for ejector system manifold. Refer to pages to for external vacuum supply system unit to Single unit Manifold Single unit Manifold Refer to page for external vacuum supply system manifold. Refer to pages to for units for replacement

3 Vacuum Module: Ejector System For details about certified products conforming to international standards, visit us at 3 How to Order Ejector unit Components Valve unit N.C. type Vacuum switch ZX1 10 unit Ejector unit nozzle dia. Ejector exhaust 1 K1 Combination of supply valve and release valve Pilot valve Voltage Electrical entry Light/Surge voltage suppressor Manual operation 5 L Z E C Vacuum switch unit Filter unit Vacuum switch Electrical entry PV/V port size Ejector unit Ejector unit Valve unit N.O. type Vacuum switch ZX K3 5 L Z E C unit Vacuum switch unit ZX E C Ejector unit Filter unit ZX F Ejector unit nozzle dia mm mm mm Ejector exhaust 1 With silencer 2 Port exhaust Rc Common exhaust (Manifold only) Valve unit/combination of supply valve and release valve Refer to Table (1) on page Pilot valve Caution When using the AC type, the DC solenoids are operated via a rectifier. Therefore, when using this type, make sure to combine the connector assembly equipped with a rectifier with the exclusive solenoids. Using other combinations could lead to burned coils or other types of malfunctions. Surge voltage suppressor Red Black Light/Surge voltage suppressor Using the DC type: Match the polarity of the connectors according to the + and marks on the connectors. Do not interchange the polarities to prevent the diodes or the switching elements from becoming burned. If lead wires are pre-connected, the red wire is + and the black wire is. Using the AC type: The AC type is not equipped with a surge voltage suppressor because the rectifier assembly prevents the generation of surge voltage Caution Diode Coil Coil DC: 1 W (With indicator light: 1.05 W) AC Y DC: 0.45 W (With indicator light: 0.5 W) 24 VDC and 12 VDC are applicable to 0.45 W. Voltage VAC 50/60 Hz VAC 50/60 Hz 5 24 VDC 6 12 VDC V 6 VDC S 5 VDC R 3 VDC Air operated (K6, K8, J3, J4, D3, D4) Applicable to plug connector. (Connector assembly with rectifier is attached.) Electrical entry L Lead wire length 0.3 m LN Without lead wire (Applicable to DC only) Plug LO Without connector connector M Lead wire length 0.3 m type MN Without lead wire (Applicable to DC only) MO Grommet type G H Without connector Lead wire length 0.3 m (Applicable to DC only) Lead wire length 0.6 m (Applicable to DC only) Air operated Note) In the case of K1 or J1 (combination of supply and release valves), M type plug connector can not be used. Refer to Table (2) on page for part number of lead wire with connector. Refer to page for ordering the manifold. Refer to page to for ordering a unit for replacement. Manual operation B PV/V port size Y Non-locking push type Locking slotted type M5 x 0.8 M6 x 1 (Option) Light/Surge voltage suppressor None Z With light/surge voltage suppressor S Vacuum switch electrical entry Grommet Lead wire length 0.6 m L type Lead wire length 3 m C Lead wire length 0.6 m CL Connector Lead wire length 3 m type CN Without connector (Without lead wire) Refer to Table (3) on page for part number of lead wire with connector. Vacuum switch unit/filter unit E Vacuum switch (For general purpose) PS Adsorption Nozzle dia. (ø0.3 to 0.7) confirmation PB switch Nozzle dia. (ø0.5 to 1.2) F Only suction filter With surge voltage suppressor With suction filter Vacuum digital pressure switch unit 21 2 outputs/without analog output D 22 2 outputs/with analog output kpa 23 1 output (with trouble detection)/without analog DP 24 1 output (with trouble detection)/with analog Note) Analog output is available only on grommet type. In the case of AC, S is not available.

4 Vacuum Module: Ejector System 4 Table (1) Valve Unit/Combination of Supply Valve and Release Valve Components Solenoid (N.C.) Solenoid (N.C.) Solenoid (N.O.) Solenoid (N.C.) Air operated (N.C.) External release Air operated (N.O.) Air operated (N.C.) Solenoid (N.C.) Solenoid (N.O.) None None Symbol K1 K3 K6 K8 J1 J2 Solenoid valve Air operated N.C. N.O. N.C. N.O. (VJ114) (VJ324) (ZX1A) (VJA324) Without valve module Air operated valve: Controlled by external 3 port valve. Weight (g)/k1: 82, K3: 132, K6: 58, K8: 132, J1: 77, J2: 100 External release: Directly released by external 2 port valve. Table (2) Valve Unit/Valve Plug Connector Assembly Connector ass'y part no. (For DC) VJ10 VJ10 VJ10 20 (For 100 VAC) 36 (For 110 VAC) 36 4A 1A 3A Lead wire length m (Standard) 0.6 m 1 m 1.5 m 2 m 2.5 m 3 m How to order If ordering vacuum module with 600 m or the longer lead wire, specify both vacuum module and connector assembly part numbers. Ordering example) ZX1051-K15LOZ-EC 1 pc. VJ A-6 2 pcs. None Solenoid valve N.C. (VJ114) N.C. (VJ314) (Refer to page for detailed specifications.) Air operated N.C. (VJA314) External release ZX1A None Table (3) Vacuum Switch/Plug Connector Assembly ZS 10 5A Note) If ordering a vacuum switch with 3 m lead wire, specify both the vacuum unit switch and the 3 m lead wire connector part numbers. Ordering example) ZX1051-K15LO- ECN 1 pc. VJ A-6 2 pcs. ZS-10-5A-50 1 pc. Lead wire length m 3 m 5 m ZX ZR ZM ZH ZU ZL ZY ZQ ZF ZP ZCU AMJ Misc. Ejector System/Recommended Model (The models below will have shorter deliveries.) Nozzle diameter (mm) ø0.5 ø0.7 ø1.0 Model ZX1051-K15LZ-EC ZX1051-K35MZ-EC ZX1071-K15LZ-EC ZX1071-K35MZ-EC ZX1101-K15LZ-EC ZX1101-K35MZ-EC Ejector unit exhaust type With silencer Combination (Pilot valve) N.C. (VJ114) N.O. (VJ324) N.C. (VJ114) N.O. (VJ324) N.C. (VJ114) N.O. (VJ324) (Direct operated) N.C. (VJ114) N.C. (VJ314) N.C. (VJ114) N.C. (VJ314) N.C. (VJ114) N.C. (VJ314) Solenoid valve rated voltage 24 VDC Lead wire electrical entry Plug connector type Light/Surge voltage suppressor With light/surge voltage supressor Vacuum switch unit General vacuum switch (ZSE) Vacuum switch electrical entry Connector type ZX1-K15LZ-E ZX1-K35MZ-E

5 5 Ejector System/Combination of Supply Valve and Release Valve Combination Symbol: K1 Release valve Supply valve An N.C. solenoid valve is used for the supply valve. Also, an N.C. solenoid valve is used for the vacuum release valve. Application: This combination is used for effecting control in accordance with electric signals. Combination Symbol: K8 Pilot port Release valve Pilot port Supply valve An air operated N.O. valve is used as the supply valve. An air operated N.C. valve is used for the vacuum release valve. Application: This combination is used for effecting control in accordance with electric signals. Because the supply valve is N.O., the pressure that is supplied to the ejector is not interrupted during a power outage; as a result, the state of suction can be maintained. This combination is used for preventing the workpieces from dropping during power outages. How to Operate Valve Condition 1. Work adsorption 2. Vacuum release 3. Operation stop (N.C.) Solenoid valve ON (N.C.) Solenoid valve ON How to Operate Valve Condition 1. Work adsorption 2. Vacuum release 3. Operation stop (N.O.) Air operated valve ON ON (N.C.) Air operated valve ON Combination Symbol: K3 Release valve Supply valve An N.O. solenoid valve is used for the supply valve. Also, an N.C. solenoid valve is used for the vacuum release valve. Application: This combination is used for effecting control in accordance with electric signals. Because the supply valve is N.O., the pressure that is supplied to the ejector is not interrupted during a power outage; as a result, the state of suction can be maintained. This combination is used for preventing the workpieces from dropping during power outages. Combination Symbol: J1 Supply valve An N.C. solenoid valve is used as the supply valve. A vacuum release valve is not used. Application: This combination is used for effecting control in accordance with electric signals. A vacuum release is effected by the intrusion of air between the silencer, pad, and the workpiece. This combination is used when there is no need to accelerate the vacuum release speed. How to Operate Valve Condition 1. Work adsorption 2. Vacuum release 3. Operation stop (N.O.) Solenoid valve ON ON (N.C.) Solenoid valve ON How to Operate Valve Condition 1. Work adsorption 2. Vacuum release 3. Operation stop (N.C.) Solenoid valve ON None Combination Symbol: K6 External release port Pilot port How to Operate Valve Condition 1. Work adsorption 2. Vacuum release 3. Operation stop An external 3 port valve must be provided to serve as the supply valve. Also, an external 2 port valve (vacuum valve) must be provided to serve as the vacuum release valve. Application: This combination is used for effecting control in accordance with electric signals. External 3 port valve ON External 2 port valve ON Combination Symbol: J2 How to Operate Valve Condition 1. Work adsorption 2. Vacuum release 3. Operation stop An N.O. solenoid valve is used as the supply valve. A vacuum release valve is not used. Application: This combination is used for effecting control in accordance with electric signals. Because the supply valve is N.O., the pressure that is supplied to the ejector is not interrupted during a power outage; as a result, the state of suction can be maintained. This combination is used for preventing the workpieces from dropping during power outages. A vacuum release is effected by the intrusion of air between the silencer, pad, and the workpiece. This type is used when there is no need to accelerate the vacuum release speed. (N.O.) Solenoid valve ON None

6 Vacuum Module: Ejector System 6 Ejector System/Construction ZX ZR ZM ZH Component Parts No. q w e r t y u i Note) Description Poppet valve assembly Release flow rate adjustment needle Manifold Vacuum switch Valve unit Interface plate Silencer case Filter case Material Stainless steel Aluminum Polycarbonate Table (1) How to Order Pilot Valves No. q w e r Components Solenoid valve Solenoid valve N.C. (VJ114) N.C. (VJ114) Solenoid valve Solenoid valve N.O. (VJ324) N.C. (VJ314) Air operated Air operated N.O. (VJA324) N.C. (VJA314) Note ZX1-PV-O ZSE2, ZSP1 ZX1-VA-D- (PV PS PD) Model ZX1-VJ114- Replacement Parts No. o ZX1-VJA K8 Air operated N.C. (ZX1A) ZX1A- K6 Table (2) How to Order Solenoid Valves ZX1 VJ114 5 ZX1 VJ Body option Pilot valve Individual exhaust Common exhaust for M main and pilot valves Note) In the case of N.C. type, indicate no symbol. (Individual exhaust for Pilot valve) Pilot valve Y Type of actuation N.C. (Normally closed) N.O. (Normally open) DC: 1 W (With indicator light: 1.05 W) AC DC: 0.45 W (With indicator light: 0.5 W) 24 VDC and 12 VDC are applicable to 0.45 W. Note) Screw length of VJ100 and VJ300 for series ZX is different from that of the standard model. <Screw length> VJ100 M1.7 x 15 VJ300 M1.7 x 22 L L Z Z Rated voltage VAC VAC 5 24 VDC 6 12 VDC V 6 VDC S 5 VDC R 3 VDC Applicable to plug connector!0!1 ZX1-VJ Manual override B Non-locking push type Locking slotted type Description Pilot valve Air operated Filter element Ejector assembly Material PVF Part no. Refer to Table (1), (2), (3). ZX1-FE Refer to Table (4). Note) Caution when handling filter case 1) The case is made of polycarbonate. Therefore, do not use with or expose it to the following chemicals: paint thinner, carbon tetrachloride, chloroform, acetic ester, aniline, cyclohexane, trichloroethylene, sulfuric acid, lactic acid, watersoluble cutting oil (alkalinic), etc. 2) Do not expose it to direct sunlight. Combination of supply and release valve K1, J1 K3, J2 Light/Surge voltage suppressor Without light/surge voltage suppressor S With surge voltage suppressor Z With light/surge voltage suppressor Electrical entry L Connector (0.3 m) LN Connector (w/o lead wire) LO Without connector M Connector (0.3 m) MN Connector (w/o lead wire) MO Without connector G Grommet (0.3 m) H Grommet (0.6 m) Note) In the case of ZX1- VJ114, M, MN and MO cannot be used. Table (3) How to Order Air Operated Valves ZX1A M3 Port size M3 M3 x 0.5 M5 M5 x 0.8 Pilot port/ External release port Table (4) How to Order Ejector Assembly ZX1 W D 05 1 Assembly no. Ejector unit nozzle dia mm mm Ejector type (Exhaust type) mm 1 With silencer 2 Port exhaust 3 Common exhaust An adapter should be attached to the assembly to be used as a unit. PV port and V port can be connected. Ejector assembly Caution Combination/ ZX-WD Used as a unit by attaching an adapter/ ZX-W- Turning the vacuum release flow volume adjustment needle clockwise reduces the vacuum release flow volume; the needle valve is fully closed when the needle stops turning. Turning the needle 2 full turns counterclockwise from the fully closed position renders the needle valve fully open. The needle will fall out if it is turned more than 4 full turns ZU ZL ZY ZQ ZF ZP ZCU AMJ Misc.

7 7 Ejector Unit Specifications Unit no. Nozzle dia. ø (mm) Max. suction flow (l/min (ANR)) Air consumption (l/min (ANR)) Maximum vacuum pressure Maximum operating pressure Supply pressure range Standard supply pressure Operating temperature range Ejector exhaust type Weight Standard accessory 1 ZX1-W05 2 ZX1-W ZX1-W kpa 0.7 MPa 0.2 to 0.55 MPa 0.45 MPa 5 to 50 C Code q Built-in silencer For single and manifold Code w Individual exhaust For single and manifold Built-in silencer: 35 g/port exhaust: 45 g Bracket B Codes q and w are corresponding to the suffixes in How to Order to indicate the exhaust method. Dimensions: ZX1-W 1 2 ZX1 W 05 1 Nozzle diameter mm mm mm How to Order PV, V port size M5 x 0.8 Y M6 x 1 (Option) Ejector exhaust 1 Silencer 2 Individual exhaust Rc 1 8 JIS Symbol Bracket B Standard accessory 8 (PD port) External release port plug Note 1) (P port) Air supply pressure port Air supply (55.4) 1 (or M6) Vacuum pad connection port Note 1) Remove the plug at external release. Note 2) Dimensions : For mounting bracket B

8 Vacuum Module: Ejector System 8 Flow Characteristics/Exhaust Characteristics ZX1-W05 Exhaust Characteristics Flow Characteristics [At 0.45 MPa] How to Read Flow Characteristics Graph Vacuum pressure (kpa) Vacuum pressure Air consumption Suction flow rate Suction flow rate (l/min (ANR)) Air consumption (l/min (ANR)) Vacuum pressure (kpa) Vacuum pressure ZX ZR ZM ZH ZU Suction flow rate ZL ZX1-W07 Exhaust Characteristics Vacuum pressure (kpa) ZX1-W10 Supply pressure (MPa) Vacuum pressure Air consumption Suction flow rate Supply pressure (MPa) Suction flow rate (l/min (ANR)) Air consumption (l/min (ANR)) Flow Characteristics Vacuum pressure (kpa) Suction flow rate (l/min (ANR)) Suction flow rate (l/min (ANR)) Flow characteristics are expressed in ejector vacuum pressure and suction flow. If suction flow rate changes, a change in vacuum pressure will also be expressed. Normally this relationship is expressed in ejector standard use. In graph, Pmax. is max. vacuum pressure and Qmax is max. suction flow. The valves are specified according to catalog use. Changes in vacuum pressure are expressed in the below order. 1. When ejector suction port is covered and made airtight, suction flow becomes 0 and vacuum pressure is at maximum value (Pmax). 2. When suction port is opened gradually, air can flow through, (air leakage), suction flow increases, but vacuum pressure decreases. (condition P1 and Q1) 3. When suction port is opened further, suction flow moves to maximum value (Qmax), but vacuum pressure is near 0. (atmospheric pressure). When vacuum port (vacuum piping) has no leakage, vacuum pressure becomes maximum, and vacuum pressure decreases as leakage increases. When leakage value is the same as max. suction flow, vacuum pressure is near 0. When ventirative or leaky work must be adsorbed, please note that vacuum pressure will not be high. ZY ZQ ZF ZP ZCU AMJ Misc. Exhaust Characteristics Vacuum pressure (kpa) Vacuum Vacuum pressure pressure pressure Air consumption Suction flow rate Suction flow rate(l/min (ANR)) Air consumption (l/min (ANR)) Flow Characteristics Vacuum pressure (kpa) Precautions Be sure to read before handling. Refer to pages to for Safety Instructions and Common Precautions on the products mentioned this catalog, and refer to page Caution Refer to to for the product selection in series ZX and the sizing program. Supply pressure (MPa) Suction flow rate(l/min (ANR))

9 9 Valve Unit: ZX1-VA Specifications Unit no. Components Operation Effective area (mm 2 ) (Cv factor) Operating pressure range Max.operating frequency Operating temperature range Interface plate symbol Standard accessory Solenoid Valve/Specifications ZX1-VA Vacuum supply valve Vacuum release valve Pilot operated Direct operated Solenoid valve Air operated Solenoid valve External Air operated N.C. N.C. N.O. N.C. N.O. N.C. release N.C. (VJ314) (VJ114) (VJA324) (ZX1A) (VJA324) (VJ114) (ZX1A) (VJA314) 3 (0.17) Main valve (0.004) (0.025) 0.3 to 0.6 MPa 5 Hz 5 to 50 C PV PS PD Bracket C VJ114 VJ314, VJ324 Rated voltage 24, 12, 6, 5, 3 VDC/100, 110 VAC (50/60 Hz) Electrical entry L plug connector, grommet L plug connector, M plug connector, grommet Light/Surge voltage suppressor With or Without Manual operation Non-locking push type/locking slotted type Applicable to plug connector; connector assembly with rectifier is attached. Model/Solenoid Valve [ ]: Weight (g) Model Solenoid valve N.C. (VJ114) Solenoid valve N.C. (VJ314) External release (ZX1A) Air operated N.C. (VJA314) None Refer to page for details. Solenoid valve N.C. (VJ114) K1 [82] K2 [73] J1 [77] Solenoid valve N.O. (VJ324) K3 [132] K4 [119] J2 [100] How to Order ZX1 VA K1 5 L Z Air operated N.C. (ZX1A) K5 [73] K6 [58] J3 [41] None D1 [77] D2 [100] D3 [41] D2 [100] A B System Ejector system External vacuum supply Combination of supply valve and release valve Pilot valve Rated voltage Manual override PV/V port size Light/Surge voltage suppressor Electrical entry

10 Vacuum Module: Ejector System 10 Connector Assembly for 100 VAC Connector assembly with rectifier attached. Connector Assembly with Rectifier Part No. VJ10 Valve Unit 36 A Rated voltage Symbol Rated voltage Lead wire color VAC 50/60 Hz Blue (2 pcs.) VAC 50/60 Hz (115 VAC 60 Hz) Gray (2 pcs.) Normally closed Normally open Pilot exhaust PE port (PE port) Air supply PV port Vacuum release D port Air supply release A port Manual override (Non-locking) Bracket C Standard accessory Release flow rate adjustment needle Interface plate Lead wire length Symbol L (mm) ø3 3 1 (PV port) Air supply pressure port ø3.6 (D port) Vacuum release port 35.4 (A port) Air supply release port (Mounting hole) ""30 Circuit diagram ZX ZR ZM ZH ZU ZL ZY ZQ ZF ZP ZCU AMJ Misc. (PE port) Manual override (Push and turn the locking type override) Manual override Release flow rate adjusting needle Interface plate Bracket C Standard accessory ø3.6 (D port) Vacuum release port Circuit diagram ø3 3 1 (PV port) Air supply pressure port Note) Dimensions : For mounting bracket C : For mounting spacer. 5.4 (V port) Air supply release port

11 11 Suction Filter Unit: ZX1-F Specifications Unit no. Operating pressure range Operating temperature range Filtration efficiency Element Weight ZX1-F Vacuum to 0.5 MPa 5 to 50 C 30 µm PVF 35 g Note) If not operated within the specified range of pressure and temperature, trouble may result. Filter JIS Symbol ø Filter (62) OUT port 2-ø3.5 IN port Pitch = Bracket A (Standard accessory) 4 11 Note) Dimensions : For A mounting bracket. Filter case Caution 1. The case is made of polycarbonate. Therefore, do not use it with or expose it to the following chemicals: paint thinner, carbon tetrachloride, chloroform, acetic ester, aniline, cyclohexane, trichloroethylene, sulfuric acid, lactic acid, water-soluble cutting oil (alkalinic), etc. 2. Do not expose it to direct sunlight

12 Vacuum Module: Ejector System 12 Vacuum Pressure Switch Unit/Vacuum Pressure Switch: ZSE2-0X Quick response: 10 ms Compact size: 39H x 20W x 15D (except the connecting portion) Improved wiring: connector type Uses a carrier diffusion semiconductor pressure sensor Pressure detector (A carrier diffusion semiconductor pressure sensor is used.) Sensor chip Filter case Caution 1. The case is made of polycarbonate. Therefore, do not use it with or expose it to the following chemicals: paint thinner, carbon tetrachloride, chloroform, acetic ester, aniline, cyclohexane, trichloroethylene, sulfuric acid, lactic acid, water-soluble cutting oil (alkalinic), etc. 2. Do not expose it to direct sunlight. Vacuum pressure setting Caution Observe the following precautions when setting the vacuum pressure. Lightly turn the screwdriver with your fingertips. To prevent damage to the trimmer groove, do not use a screwdriver that has a large grip or a tip that does not fit in the trimmer groove. Vacuum Pressure Switch Unit no. Fluid Set pressure range Hysteresis Accuracy Voltage Port size How to Order ZSE2-0X Air 0 to 101 kpa 3% Full span or less ±3% Full span (5 to 40 C) ±5% Full span (0 to 60 C) 12 to 24 VDC (Ripple ±10% or less ) M5 x 0.8 Weight 50 g Output Open collector 30 V/80 ma Indicator light Light at ON state Current consumption 17 ma or less (24 VDC, at ON state) Operating temperature range 0 to 60 C Max. operating pressure 0.2 MPa When using ejector system, instantaneous pressure up to 0.5 MPa will not damage the switch. Note) If not operated within the specified range of pressure of temperature, trouble may be result. Wiring ZSE2 connection Switch Main circuit of switch ZSE2 Y 0X 15 PV, V port size How to Set Vacuum Pressure ZSE2 Pressure setting trimmer selects the ON pressure. Clockwise rotation increases high vacuum set point. Pressure setting trimmer Brown Black Blue Load M5 x 0.8 M6 x 1 (Option) Connection with PLC at negative COM terminal Switch Main circuit of switch Indicator light Piping specifications Grommet (0.6 m) L Grommet (3 m) C Connector (0.6 m) CL Connector (3 m) CN Without connector High vacuum Brown Black Blue When using the switch to confirm correct adsorption, the set pressure should be as low as possible. But not so low that a false confirmation signal is given when adsorption is incomplete. Supply pressure Set pressure Atmospheric pressure 0 Input terminal Reliable adsorption Unstable adsorption No adsorption ZX ZR ZM ZH ZU ZL ZY ZQ ZF ZP ZCU AMJ Misc

13 13 Vacuum Pressure Switch Unit/Vacuum Pressure Switch: ZSE2-0X Guidelines for Use of Vacuum Pressure Switch Unit System circuit for work adsorption Ejector style External vacuum supply style Vacuum line Set pressure To use for picking verification, set a vacuum pressure that can pick the workpiece without fail. In some situations, the switch could turn ON even if the picking is not complete. Using a small diameter picking nozzle A nozzle that is used for picking electronic parts or small precision parts could be even smaller than ø2. If the nozzle diameter is approximately ø1, the pressure difference between ON and becomes smaller, depending on the capacity of the ejector or the vacuum pump. In such a case, it is necessary to use the picking verification switch ZSP1, which provides a small hysteresis and high precision. On the other hand, an ejector with a large picking capacity will not be able to detect properly, so an ejector with an appropriate capacity must be used. Furthermore, it is necessary to stabilize the pressure of the ejector and the vacuum pump. External vacuum supply system Supply line 2 port valve Air suction filter Vacuum pressure switch Vacuum line 2 port valve Air suction filter Vacuum pressure switch Using multiple pressure switches with a single vacuum source If a single vacuum source is divided so that vacuum switches can be used on individual lines, the vacuum pressure might not come within the values set with the switches because the pressure of the vacuum source fluctuates depending on the number of picks and non-picks. Especially, because pressure fluctuation exerts a great influence when picking with a small diameter nozzle, the countermeasures described below must be provided. Vacuum pressure reduction valve (Vacuum adjusting valve) Tank Needle valve Vacuum source Vacuum pressure switch Pad Workpiece Adjust the needle valve to reduce the pressure fluctuation between picking and non-picking. Stabilize the source pressure by providing a tank and a vacuum regulator. Provide a vacuum switch valve to individual lines. Thus, in case of an error, each valve can be turned to minimize the influences on other pads. Vacuum Pressure Switch: ZSE2-0X-15 JIS Symbol Connector: ZSE2-0X-15C Pressure setting trimmer Pressure setting trimmer Lead wire length Connector Vacuum supply port M5 x 0.8 Vacuum pad connecting port M5 x 0.8 Adapter Remove the adapter when mounted on the ejector. 2-ø3.3 mounting hole 2-ø3.3 mounting hole

14 Vacuum Module: Ejector System 14 Vacuum Pressure Switch Unit/Vacuum Pressure Switch: ZSE3-0X Built-in failure prediction output function If the attainable amount of vacuum reduces due to a decrease in performance caused by clogging of the silencer of the vacuum system (ejectors), cracked pads, or the leakage of the vacuum pipes, this function quickly detects the abnormal condition and outputs a signal to halt the system. Two independent pressure settings possible This feature is well suited for applications that require 2 separate pressure outputs due to a change in the vacuum suction pad diameters, or for applications that require 2 pressure verifications to effect line changes in the positive pressure line. Comprehensive self diagnosis function Overcurrent detection function Overvoltage detection function Data error LCD indication: Error indicated on LCD Operation indicator light: Red light flashes during a malfunction Data saving function Even if the power is cut off, the settings are stored for 100,000 hours (approximately 11 years) in the exclusive IC (EEPROM). Vacuum Pressure Switch Unit no. Fluid Set pressure range Hysteresis mode Hysteresis Window comparator mode Accuracy Operating voltage Port size ZSE3-0X Air, Non corrosive gas 101 to 0 kpa Variable (3 digits or more) Fixed (3 digits) ±1% F.S. or less 12 to 24 VDC (Ripple ±10% or less) M5 x 0.8 Weight 50 g Indicator light Light at ON state Current consumption 25 ma or less Operating temperature range 0 to 60 C Max. operating pressure 0.2 MPa Wiring Wiring example General connection methed Brown Main circuit Connection with PLC At negative COM terminal Brown Main circuit LED green LEC red LED green LEC red Gray Load (Analog output) Black Load White Blue Gray (Analog output) Black White Blue 12 to 24 V 12 to 24 V Input terminal Input terminal ZX ZR ZM ZH ZU ZL ZY ZQ ZF ZP ZCU AMJ Misc. Filter case Caution 1. The case is made of polycarbonate. Therefore, do not use it with or expose it to the following chemicals: paint thinner, carbon tetrachloride, chloroform, acetic ester, aniline, cyclohexane, trichloroethylene, sulfuric acid, lactic acid, water-soluble cutting oil (alkalinic), etc. 2. Do not expose it to direct sunlight. ZSE3 Output specifications How to Set Vacuum Pressure Refer to Best Pneumatics Vol.16. How to Order Guidelines for Use of Vacuum Pressure Switch Unit Refer to page X 21 NPN open collector, double output Without analog output NPN open collector, double output With analog output NPN open collector 1 output/trouble detection/ Without analog output NPN open collector 1 output/trouble detection/ With analog output Wiring specifications Grommet (0.6 m) L Grommet (3 m) C Connector (0.6 m) CL Connector (3 m) CN Without connector Note) Analog output is available only for grommet type

15 15 Vacuum Pressure Switch Unit/Vacuum Pressure Switch: ZSE3-0X Vacuum Pressure Switch/ZSE3-0X-21, 22, 23, 24 Grommet: ZSE3-0X- Connector: ZSE3-0X-C RESET button SET button DOWN button UP button RESET button SET button DOWN button UP button Lead wire length Lead wire length Vacuum supply port OX: M5 x 0.8 OXY: M6 x ø3.3 mounting hole Vacuum pad connecting port OX: M5 x 0.8 OXY: M6 x 1.0 Vacuum supply port 2-ø3.3 mounting hole Vacuum pad connecting port OX: M5 x 0.8 OX: M5 x 0.8 OXY: M6 x 1.0 OXY: M6 x

16 Vacuum Module: Ejector System 16 Vacuum Pressure Switch Unit/Adsorption Confirmation Switch: ZSP1- S B Small diameter nozzle/ø0.3 to ø1.2 With suction filter Improved wiring: connector type Uses a carrier diffusion semiconductor pressure sensor Filter case Caution Adsorption confirmation switch Adsorption nozzle ø0.3 to ø1.2 Chip parts (mm 2 ) 1. The case is made of polycarbonate. Therefore, do not use it with or expose it to the following chemicals: paint thinner, carbon tetrachloride, chloroform, acetic ester, aniline, cyclohexane, trichloroethylene, sulfuric acid, lactic acid, water-soluble cutting oil (alkalinic), etc. 2. Do not expose it to direct sunlight. Other caution Caution It might not be possible to successfully pick a workpiece if a picking nozzle or a picking pad that is out of the applicable range is used. Adsorption Confirmation Switch Specifications Unit no. Fluid Operating pressure range Applicable adsorption nozzle dia. Hysteresis Internal orifice Circuit and Wiring ZSP1-S ZSP1-B Air 20 kpa to 101 kpa ø0.3 to ø0.7 (Refer to Graph (1).) ø0.5 to ø1.2 (Refer to Graph (2).) 0.5 kpa ø0.5 ø0.8 Weight62 g Voltage12 to 24 VDC (Ripple ±10% or less) OutputOpen collector 30 V/80 ma Indicator lightlight at ON state Current consumption17 ma (24 VDC, at ON state) Operating temperature range0 to 60 C Port sizem5 x 0.8 Note) If not operated within the specified range of pressure and temperature, trouble may result. Applicable Adsorption Nozzle Supply pressure and nozzle diameter are expressed in the graphs below. Graph (1)/ZSP1-S Supply pressure (kpa) Applicable nozzle range Pneumatic Circuit and Principle Vacuum source Nozzle diameter (mm) Wiring is the same as ZSE2. ZSP1 Model Symbol Applicable model S Applicable nozzle dia. ø0.3 to ø0.7 B Applicable nozzle dia. ø0.5 to ø1.2 Main circuit of switch Pressure sensor How to Order Graph (2)/ZSP1-B Supply pressure (kpa) Adsorption nozzle (ø0.3 to ø1.2) S 0X 15 PV, V port size M5 x 0.8 Y M6 x 1 (Option) Applicable nozzle range Nozzle diameter (mm) Comprised of a pneumatically operated bridge circuit, this function puts the S4 picking nozzle into the non-picking state, and uses the S2 adjustment needle to balance (P1 P2) the pressure that is applied to the pressure sensor. The small pressure difference (P2 P1) that is created when a part is picked by the (S4) picking nozzle and is detected by the pressure sensor. Piping specifications Grommet (0.6 m) L Grommet (3 m) C Connector (0.6 m) CL Connector (3 m) Brown lead wire Connected to positive COM for main circuit. Output Black lead wire Lead is connected. (PLC or relay) ZX ZR ZM ZH ZU ZL ZY ZQ ZF ZP ZCU AMJ Misc. Blue lead wire Connected to power source GND terminal

17 17 Vacuum Pressure Switch Unit/Adsorption Confirmation Switch: ZSP1- S B Hysteresis Hysteresis is the difference in pressure when the output signal is ON and. The pressure to be set is the ON pressure. High vacuum Set pressure Atmospheric pressure 0 Hysteresis How to Set Adsorption Confirmation Needle 1. Apply a vacuum and current. Turn the adjusting needle clockwise until it stops, thus fully closing the needle valve. 2. Without attaching a workpiece to the picking nozzle, turn the adjusting needle counterclockwise and verify the position in which the indicator light turns ON. 3. From the state described in step w, turn back the adjusting needle clockwise 1/4 turn to 1 full turn. Adjusting needle fully open Right Left Indicator light: ON 1/4 to 1 rotation Right Indicator light: 4. Pick a workpiece with the nozzle and readjust the adjusting needle so that the indicator light turns ON when the nozzle has picked the workpiece successfully. Adjusting needle Indicator light Adsorption Confirmation Switch: ZSP1-0X-15 Connector: ZSP1-0X-15 (Release to atmospheric pressure) Pressure sensor Adjusting needle Adjusting needle Circuit diagram Lead wire length Connector Lead wire length Vacuum supply port M5 x 0.8 Adsorption nozzle piping port M5 x ø3.3 mounting hole Adapter 2-ø3.3 mounting hole Note) Remove the adapter when mounted on the ejector

18 Without Valve Unit Configuration and combination Ejector unit Model ZX1 Vacuum switch (ZSE2) ZX1-E (PD port) External release port plug Note 1) (P port) Air supply pressure port Vacuum switch (ZSE2) Adsorption confirmation switch (ZSP1) Filter unit (F) E P 31.6 F Adsorption confirmation switch (ZSP1) ZX1-P + Pressure setting trimmer Vacuum switch (ZSE2) Ejector + Silencer Note 1) Remove the plug at external release. Note 2) Dimensions : For mounting bracket A : For mounting spacer 1. Filter unit (F) ZX1-F Ejector exhaust Air supply PV port Spacer 1 (For side mounting) Filter 51 ø Filter Vacuum switch unit Ejector unit 2-ø3.3 mounting hole Vacuum pad connection port 15.5 Vacuum Module: Ejector System Vacuum pad connection V port Bracket A (Standard accessory) 18 Circuit diagram (Circuits other than those with vacuum switch are shown as below.) Vacuum switch (E) Adsorption confirmation switch (P) Pressure sensor Filter unit (F) (Release to atmospheric pressure) ø ZX ZR ZM ZH ZU ZL ZY ZQ ZF ZP ZCU AMJ Misc. Adjustment needle Ejector + Silencer Bracket A (Standard accessory) Adsorption confirmation switch (ZSP1) Ejector + Silencer ø Filter Filter (Mounting hole) Vacuum pad connection port (62) 15.5 Bracket A (Standard accessory)

19 Valve Unit: Type K1 Vacuum switch (ZSE2) Configuration and combination Vacuum switch (ZSE3) Ejector unit + Valve unit (K1) + Adsorption confirmation switch (ZSP1) Filter unit (F) Without switch and filter Model ZX1 K1 E D P F Pilot exhaust PE port Ejector exhaust Air supply PV port Vacuum pad connection V port Circuit diagram (Circuits other than those with vacuum switch are shown as below.) Vacuum switch (E) 19 Vacuum switch (ZSE2) ZX1-K1-E Adsorption confirmation switch (P) Spacer 1 (For side mounting) Pressure sensor (Release to atmospheric pressure) Manual override (Non-locking) Pressure setting trimmer 1 Filter unit (F) Ejector + Silencer ø Without switch and filter Vacuum switch Interface plate Release flow rate adjusting needle 2-ø3.3 mounting hole (68.6) M3 (PE port) (PV port) Air supply pressure port 15.5 Bracket A (Standard accessory) 4 18 (V port) Vacuum pad connection port Note) Dimensions : For mounting bracket A : For mounting spacer

20 Vacuum Module: Ejector System 20 Vacuum switch (ZSE3) ZX1-K1-D Adsorption confirmation switch (ZSP1) ZX1-K1-P Spacer 1: ZX1-S1 ZX Manual override (Non-locking) Exhaust port DOWN button UP button 10 Spacer 1 (For side mounting) Adjustment needle ZR ZM RESET button SET button ø ø ZH ZU Interface plate (PE port) Release flow rate adjusting needle (PV port) Air supply pressure port Pitch = 10 2-ø3.3 (V port) Vacuum pad connection port M2.5 x 63 Phillips screw Adsorption confirmation switch Adsorption nozzle piping port M5 x 0.8 (or M6 x 1) 2-ø3.3 mounting hole ZL ZY ZQ ZF ZP ZCU AMJ Filter unit ZX1-K1-F Without switch and filter ZX1-K1 Misc ø Bracket B (Standard accessory) 8 2-ø3.6 Filter (Mounting hole) 2-ø (V port) Vacuum pad connection port

21 21 Valve Unit: Type K3 Configuration and combination Ejector unit + Valve unit (K3) + Model ZX1 K3 Vacuum switch (ZSE2) Adsorption confirmation switch (ZSP1) Filter unit (F) Without switch and filter E P F Pilot exhaust PE port Ejector exhaust Air supply PV port Vacuum pad connection V port Circuit diagram (Circuits other than those with vacuum switch are shown as below.) Vacuum switch (E) Vacuum switch (ZSE2) ZX1-K3-E Adsorption confirmation switch (P) (Release to atmospheric pressure) Pressure sensor Spacer 1 (For side mounting) Pressure setting trimmer 1 Filter unit (F) Manual override (Push and turn the locking type override) Ejector + Silencer 1 ø Without switch and filter Manual override Vacuum switch Interface plate Release flow rate adjusting needle (82.5) (PE port) (PV port) Air supply pressure port 2-ø3.3 Mounting holes Bracket A (Standard accessory) 18 4 (V port) Vacuum pad connection port Note) Dimensions : For mounting bracket A : For mounting spacer

22 Vacuum Module: Ejector System 22 Adsorption confirmation switch (ZSP1) ZX1-K3-P Spacer 1: ZX1-S1 Filter unit (F) ZX-K3-F Adjusting needle ø Adsorption confirmation switch 2-ø3.3 Mounting hole Adsorption nozzle piping port M5 x 0.8 (or M6) 15.5 Bracket A (Standard accessory) Without switch and filter ZX1-K ZX ZR ZM ZH ZU ZL ZY ZQ ZF ZP ZCU AMJ Misc Bracket B (Standard accessory) ø Filter unit (V port) Vacuum pad connection port

23 Valve Unit: Type K6 Configuration and combination Ejector unit + Valve unit (K6) + Vacuum switch (ZSE2) Adsorption confirmation switch (ZSP1) Filter unit (F) Without switch and filter External release air supply Pilot air supply Pilot exhaust PE port Air supply PV port Ejector exhaust Vacuum pad connection V port 23 Model ZX1 K6 E P F External release port Pilot port Circuit diagram (Circuits other than those with vacuum switch are shown as below.) Vacuum switch (E) Vacuum switch (ZSE2) ZX1 - K6- E Adsorption confirmation switch (P) Spacer 1 (For side mounting) Pressure sensor (Release to atmospheric pressure) M5 x 0.8 Pilot port Pressure setting trimmer Filter unit (F) M5 x 0.8 External release port Vacuum switch 1 10 ø Without switch and filter Air operated External release Vacuum switch Interface plate (PE port) Release flow rate adjusting needle (PV port) Air supply pressure port Pitch = 10 2-ø3.3 Mounting hole 15.5 Bracket A (Standard accessory) 4 18 (63.5) (V port) Vacuum pad connection port Note) Dimensions : For mounting bracket B : For mounting spacer

24 Vacuum Module: Ejector System 24 Adsorption confirmation switch (ZSP1) ZX1-K6-P Spacer 1: ZX1-S1 Adjusting needle ZX ZR ZM ø ZH ZU Adsorption confirmation switch ZL ZY 2-ø3.3 Mounting hole Adsorption nozzle piping port M5 x 0.8 (or M6 x 1) 15.5 Bracket A (Standard accessory) 4 18 (63.5) ZQ ZF ZP ZCU AMJ Filter unit (F) ZX1--K6-F Without switch and filter ZX1-K6 Misc. Spacer 1 (For side mounting) ø3.6 Filter unit Bracket B (Standard accessory) (Mounting hole) 1 (V port) Vacuum pad connection port

25 Valve Unit: Type K8 Configuration and combination Ejector unit + Valve unit (K8) + Vacuum switch (ZSE2) Adsorption confirmation switch (ZSP1) Filter unit (F) Without switch and filter Air supply for supply valve pilot Air supply for release valve pilot Pilot exhaust PE port Air supply PV port Ejector exhaust Vacuum pad connection V port 25 Model ZX1 K8 E P F Pilot port Pilot port Circuit diagram (Circuits other than those with vacuum switch are shown as below.) Vacuum switch (E) Vacuum switch (ZSE2) ZX1-K8-E Adsorption confirmation switch (P) M3 x 0.5 ( pilot port) Pressure setting trimmer Spacer 1 (For side mounting) Pressure sensor Filter unit (F) (Release to atmospheric pressure) M3 x 0.5 ( pilot port) ø3.6 (Mounting hole) Without switch and filter Vacuum switch N.O. (Air operated VJA324) Manual override (Non-locking) (PE port) (Air operated VJA314) Release flow rate adjusting needle Interface plate (PV port) Air supply pressure port 2-ø3.3 Mounting hole 15.5 Bracket A (Standard accessory) (V port) Vacuum pad connection port Note) Dimensions : For mounting bracket A : For mounting spacer

26 41 1 Vacuum Module: Ejector System 26 Adsorption confirmation switch (ZSP1) ZX1-K8-P Spacer 1: ZX1-S Adjusting needle ø Adsorption confirmation switch ZX ZR ZM ZH ZU ZL ZY ZQ ZF 2-ø3.3 Mounting hole 15.5 Bracket A (Standard accessory) 4 18 (V port) Adsorption nozzle piping port ZP ZCU AMJ Misc. Filter unit (F) ZX1-K8-F Without switch and filter ZX1-K ø3.6 Filter Bracket B (Standard accessory) 8 (V port) Vacuum pad connection port (Mounting hole)

27 Valve Unit: Type J1 Vacuum switch (ZSE2) Configuration and combination Adsorption confirmation switch (ZSP1) Ejector unit + Valve unit (J1) + Filter unit (F) Without switch and filter Pilot exhaust PE port Ejector exhaust Air supply PV port Vacuum pad connection V port 27 Model ZX1 J1 E P F Circuit diagram (Circuits other than those with vacuum switch are shown as below.) Vacuum switch (E) Vacuum switch (ZSE2) ZX1-J1-E Adsorption confirmation switch (P) Manual override (Non-locking) Pressure setting trimmer Spacer 1 (For side mounting) Pressure sensor Filter unit (F) (Release to atmospheric pressure) Ejector + Silencer ø (Mounting 17.6 hole) Without switch and filter Vacuum switch Interface plate Release flow rate adjusting needle 2-ø3.3 Mounting hole (68.6) (PE port) (PV port) Air supply pressure port Bracket A (Standard accessory) 4 (V port) Vacuum pad connection port Note) Dimensions : For mounting bracket A : For mounting spacer

28 41 1 Vacuum Module: Ejector System 28 Adsorption confirmation switch (ZSP1) ZX1-J1-P Spacer 1: ZX1-S1 Adjusting needle ZX ZR ZM ø ZH ZU ZL Adsorption confirmation switch ZY ZQ Adsorption nozzle piping port M5 x 0.8 (or M6 x 1) ZF ZP ZCU 2-ø3.3 Mounting hole AMJ Filter unit (F) ZX1-J1-F Without switch and filter ZX1-J1 Misc ø Bracket B (Standard accessory) 8 Filter unit (V port) Vacuum pad connection port (Mounting hole)

29 Valve Unit: Type J2 Vacuum switch (ZSE2) Configuration and combination Adsorption confirmation switch (ZSP1) Ejector unit + Valve unit (J2) + Filter unit (F) Without switch and filter Pilot exhaust PE port Ejector exhaust Air supply PV port Vacuum pad connection V port 29 Model ZX1 J2 E P F Circuit diagram (Circuits other than those with vacuum switch are shown as below.) Vacuum switch (E) Vacuum switch (ZSE2) ZX1-J2-E Adsorption confirmation switch (P) Pressure sensor (Release to atmospheric pressure) Manual override (Push and turn the locking type override) Pressure setting trimmer Spacer 1 (For side mounting) Filter unit (F) ø3.6 Without switch and filter N.O. Manual override Vacuum switch (PE port) Release flow rate adjusting needle Interface plate (82.5) (PV port) Air supply pressure port 2-ø3.3 Mounting holes Bracket A (Standard accessory) 4 (V port) Vacuum pad connection port Note) Dimensions : For mounting bracket A : For mounting spacer

30 Vacuum Module: Ejector System 30 Adsorption confirmation switch (ZSP1) ZX1-J2-P Adjusting needle Filter unit (F) ZX1-J2-F Spacer 1 (For side mounting) ø Adsorption nozzle piping port M5 x 0.8 (or M6) 2-ø3.3 Mounting hole Bracket A (Standard accessory) Without switch and filter ZX1-J2 Spacer 1: ZX1-S1 ZX ZR ZM ZH ZU ZL ZY ZQ ZF ZP ZCU AMJ Misc Bracket B (Standard accessory) ø3.6 Filter 35.4 (Mounting hole) (V port) Vacuum pad connection port

31 31 Ejector System/Manifold Specifications Function Max. number of units Function 8 units Supply air from PV port of manifold for common supply. When Using Individual Spacer R1 Function Standard Specifications Port PV port EXH port Weight Separates air supply from manifold and allows units to be used one by one. Port size Function Rc 1 8 Air supply Rc 1 8 Common exhaust 1 station: 73 g (50 g per additional station) Note 1) PD port: Blank Note 2) Exhaust air from both sides for 4 or more stations of ZX1103 manifold. Air Supply Manifold Left side Right side Supply port location PV PS PV PS L (Left) R (Right) B (Both sides) : Supply : Plugged (EXH port is released to atmospheric pressure.) Note) Blank plugs are attached to all ports of each valve unit. Port Manifold Specification Sheet When ordering the manifold type of series ZX, use the manifold specification sheet on page When Using Individual Spacer R1 It functions as a single unit. Air is supplied from PV port of valve unit. PE port is released to atmospheric pressure. Other ports are plugged. Note) When using individual spacer R1, other valves should be provided with dummy spacer R16. Functions are the same with the standard; common supply from the manifold. How to Order Manifold Indicate the vacuum module, blank plate and individual spacer below the manifold base part number. <Manifold base> <Individual spacer> ZZX1 06 R ZX1 R1 1 Stations Thread of supply and exhaust valve Rc F 08 8 G T NPTF (Ordering example) ZXX106-R 1 pc. (Manifold base) ZX1101-K15LZ-EC 5 pcs. (Vacuum single unit) ZX1-BM1 1 pc. (Blank plate) First station from the valve side Supply port location R Right side (PV port on the right side) L Left side (PV port on the left side) B Both sides (PV port on both sides) 1 Viewed from the front side of valve unit, confirm the port location on the right and/or left side. 2 EXH ports are released to atmospheric pressure in both sides. Plugs are always attached to PD ports and all ports of the valve unit. Arrangement (First station from the right end of the valve side is station 1.) All stations 1 Station 1 only 8 Station 8 only When spacers are mounted alternately, specify them together. (Ordering example) If installed on station 1 and station 3: ZZX106-R 1 pc. ZX1101-K15LZ-EL 6 pcs. ZX1-R1-1 ZX1-R1-3 ZX1-R16 4 pcs

32 Vacuum Module: Ejector System 32 Manifold/System Circuit Example When not using individual air pressure supply When using individual air pressure supply Left Left ZX PV: Air supply port PS: supply pressure port PD: Air supply port for release valve PE: Pilot exhaust port EXH: Common exhaust port <System circuit example> Right Common exhaust Common air supply Dummy spacer R16 side Pilot exhaust Individual air supply <System circuit example> Individual spacer R1 side Dummy spacer R16 Right Individual spacer R1 Common exhaust Common air supply ZR ZM ZH ZU ZL ZY ZQ ZF ZP ZCU AMJ Misc. Dummy spacer R16 Individual spacer R

33 33 Ejector System Manifold Common EXH port Common air supply PV port Manual override (Push and turn the locking type override.) Manual override (Simply turn the locking type override.) Body (Air operated type) End plate Manifold base 4-ø5.5 mounting holes Exhaust adapter Adjusting needle Adsorption confirmation switch Pitch = 21 (Pilot port) (External release port) Adapter D Individual spacer R1 Pressure setting trimmer Vacuum switch Filter Adapter B Silencer + Ejector (VJ314) (Normally closed) (VJ324M) (Normally open) Manual override (Simply turn the locking type override.) (VJ114) (Normally closed) (VJ114) (Normally closed) Release flow rate adjusting needle (PD port) Pitch = 21 (PV port) Individual air supply port Common EXH port (PV port) Individual air supply port Symbol Stations 1 L1 33 L2 45 L (mm)

34 Vacuum Module: Ejector System 34 (In the case of individual air pressure supply) System circuit example B cross section (Standard) (Option) (In the case of individual vacuum pressure supply) ZX Individual spacer R1 ZR Individual spacer R1 ZM ZH Dummy spacer R16 Dummy spacer R16 Individual spacer R1 Pressure sensor Individual air supply port PV Dummy spacer R16 Pressure sensor ZU ZL ZY Pilot exhaust port (PE port) A cross section External release port Pilot port Individual spacer R1 Dummy spacer R16 External release port Pilot port Individual spacer R1 ZQ ZF ZP ZCU AMJ Individual air supply port PV Adapter D Individual air supply port PV Adapter D Misc. Pitch = 21 Individual air supply port (PV port) Individual air supply port (PV port) M5 x 0.8 (or M6) Vacuum pad connection (or M6) port (V port) Vacuum pad connection port (V port) Pitch = 21 M5 x 0.8 M5 x 0.8 (or M6) Adsorption nozzle piping port

35 Ejector System Vacuum pad connection V port Vacuum pad connection V port Manifold: Type K1 35 Common EXH port Common air supply PV port Type K1 ZZX1- ZX1-K1L-E- 4-ø5.5 mounting hole Pressure setting trimmer Manual override Pitch 10 Manifold base End plate Ejector + Silencer Supply valve Release flow rate adjusting needle Lead wire length 300 Vacuum switch Filter unit Pitch = 21 Common EXH port (PV port) Common air supply pressure port Symbol Stations 1 L1 33 L2 45 L (mm)

36 Vacuum Module: Ejector System 36 Circuit diagram ZX ZR ZM ZH ZU ZL ZY ZQ ZF ZP ZCU AMJ Misc. Vacuum pad connection port M5 x 0.8 (or M6) Pitch =

37 Ejector System Vacuum pad connection V port Vacuum pad connection V port Manifold: Type K3 37 Common EXH port Common air supply PV port Type K3 ZZX1- ZX1-K3-E- 4-ø5.5 mounting hole Pressure setting trimmer Manual override (Push and turn the locking type override.) Pitch = 21 Manifold base End plate Ejector + Silencer Manual override Release flow rate adjusting needle Lead wire length 300 Vacuum switch Filter unit Pitch = 21 Common EXH port (PV port) Common air supply pressure port Symbol Stations 1 L1 33 L2 45 L (mm)

38 Vacuum Module: Ejector System 38 Circuit diagram ZX ZR ZM ZH ZU ZL ZY ZQ ZF ZP ZCU AMJ Misc. Vacuum pad connection port M5 x 0.8 (or M6) Pitch =

39 39 Vacuum Module: Vacuum Pump System How to Order Valve unit N.C. type Components Vacuum switch unit ZX100 K1 Combination of supply valve and release valve Pilot valve Voltage Electrical entry Light/Surge voltage suppressor Manual operation Vacuum switch unit Filter unit Vacuum switch Electrical entry 5 L Z E C PV/V port size Valve unit N.O. type Vacuum switch unit ZX100 K3 5 L Z E C Valve unit N.C. type L LN LO M MN MO G H Filter unit ZX100 K1 Valve unit/combination of supply valve and release valve Refer to Table (1) on page Pilot valve Caution When using the AC type, the DC solenoids are operated via a rectifier. Therefore, when using this type, make sure to combine the connector assembly equipped with a rectifier with the exclusive solenoids. Using other combinations could lead to burned coils or other types of malfunctions. Refer to page for ordering the manifold. Refer to page to 65 for ordering a unit for replacement. Plug connector type Grommet type DC: 1 W (With indicator light: 1.05 W) AC Y DC: 0.45 W (With indicator light: 0.5 W) 24 VDC and 12 VDC are applicable to 0.45 W. Note) In the case of K1 (combination of supply and release valves), M type plug connector can not be used. Refer to Table (2) on page for part number of lead wire with connector. Voltage VAC 50/60 Hz VAC 50/60 Hz 5 24 VDC 6 12 VDC V 6 VDC S 5 VDC R 3 VDC Air operated (K6, K8, J3, J4, D3, D4) Applicable to plug connector. (Connector assembly with rectifier is attached.) Electrical entry 5 L Z Lead wire length 0.3 m Without lead wire (Applicable to DC only) Without connector Lead wire length 0.3 m Without lead wire (Applicable to DC only) Without connector Lead wire length 0.3 m (Applicable to DC only) Lead wire length 0.6 m (Applicable to DC only) Air operated F Manual operation B PV/V port size Y Non-locking push type Locking slotted type Light/Surge voltage suppressor None Z With light/surge voltage suppressor S With surge voltage suppressor Caution M5 x 0.8 M6 x 1 (Option) Vacuum switch unit/filter unit E PS PB F Vacuum switch electrical entry L C CL CN Grommet type Connector type Lead wire length 0.6 m Lead wire length 3 m Lead wire length 0.6 m Lead wire length 3 m Without connector (Without lead wire) Vacuum switch (For general purpose) Adsorption Nozzle dia. (ø0.3 to 0.7) confirmation switch Nozzle dia. (ø0.5 to 1.2) Only suction filter Vacuum digital pressure switch unit D DP Surge voltage suppressor Red Black Diode Coil Light/Surge voltage suppressor Refer to Table (3) on page for part number of lead wire with connector. With suction filter 21 2 outputs/without analog output 22 2 outputs/with analog output kpa 23 1 output (with trouble detection)/without analog 24 1 output (with trouble detection)/with analog Note) Analog output is available on grommet type only. Coil In the case of AC, S is not available. Using the DC type: Match the polarity of the connectors according to the + and marks on the connectors. Do not interchange the polarities to prevent the diodes or the switching elements from becoming burned. If lead wires are pre-connected, the red wire is + and the black wire is. Using the AC type: The AC type is not equipped with a surge voltage suppressor because the rectifier assembly prevents the generation of surge voltage

40 Vacuum Module: Vacuum Pump System 40 Table (1) Valve Unit/Combination of Supply Valve and Release Valve Solenoid (N.C.) Solenoid (N.O.) Air operated (N.O.) Air operated (N.O.) Components Solenoid (N.C.) Solenoid (N.C.) External release Air operated (N.C.) Table (2) Valve Unit/Valve Plug Connector Assembly Connector assemby part no. (For DC) VJ A 6 (For 100 VAC) VJ10 VJ (For 110 VAC) 36 1A 3A 6 6 Lead wire length 0.3 m (Standard) 0.6 m 1 m 1.5 m 2 m 2.5 m 3 m Symbol K1 K3 K6 K8 Solenoid valve Air operated N.O. N.C. (VJ324) (ZX1A) N.C. (VJ114) How to order If ordering vacuum module with 600 m or the longer lead wire, specify both vacuum module and connector assemby part numbers. Ordering example) ZX100-K15LOZ-EC 1 pc. VJ A-6 2 pcs. N.O. (VJA324) None Solenoid valve N.C. (VJ114) Without valve module N.C. (VJ314) Air operated N.C. (VJA314) Table (3) Vacuum Switch/Plug Connector Assembly ZS (Refer to page for details specifications.) A Lead wire length 0.6 m 3 m 5 m Note) If ordering switch with 5 m lead wire, specify both switch and lead wire with connector part numbers. Ordering example) ZX100-K150Z-ECN 1 pc. VJ A-6 2 pcs. ZS-10-5A-50 1 pc. External release ZX1A None ZX ZR ZM ZH ZU ZL ZY ZQ ZF ZP ZCU AMJ Misc. Vacuum Pump System/Recommended Model (The models below will have faster delivery.) Model (Pilot valve) N.C. ZX100-K15LZ-F (VJ114) N.C. ZX100-K15LZ-EC (VJ114) N.O. ZX100-K35MZ-EC (VJ324) The above models are for short delivery. Combination (Direct operated) N.C. (VJ114) N.C. (VJ114) N.C. (VJ314) Solenoid valve rated voltage Lead wire electrical entry Light/Surge voltage suppressor Vacuum switch unit /Filter unit Vacuum switch electrical entry Suction filter (ZX1-F) With Plug light/surge 24 VDC connector voltage Connector type type suppressor Vacuum switch (ZSE) ZX100-K15LZ-E ZX100-K35MZ-E

41 41 Vacuum Pump System/Combination of Supply Valve and Release Valve Combination Symbol: K1 An N.C. solenoid valve is used for the supply valve. Also, an N.C. solenoid valve is used for the vacuum release valve. Application: This combination is used for effecting control in accordance with electric signals. Combination Symbol: K6 An external 3 port valve must be provided to serve as the supply valve. Also, an external 2 port valve (vacuum valve) must be provided to serve as the vacuum release valve. Application: This combination is used for effecting control in accordance with electric signals. External release port Pilot port How to Operate Valve Condition 1. Work adsorption 2. Vacuum release 3. Operation stop Solenoid valve ON Solenoid valve ON How to Operate Valve Condition 1. Work adsorption 2. Vacuum release 3. Operation stop Solenoid valve ON Solenoid valve ON Combination Symbol: K3 An N.O. solenoid valve is used for the supply valve. Also, an N.C. solenoid valve is used for the vacuum release valve. Application: This combination is used for effecting control in accordance with electric signals. Because the supply valve is N.O., the pressure that is supplied to the ejector is not interrupted during a power outage; as a result, the state of suction can be maintained. This combination is used for preventing the workpieces from dropping during power outages. Combination Symbol: K8 An air operated N.O. valve is used as the supply valve. An air operated N.C. valve is used for the vacuum release valve. Application: This combination is used for effecting control in accordance with electric signals. Because the supply valve is N.O., the pressure that is supplied to the ejector is not interrupted during a power outage; as a result, the state of suction can be maintained. This type is used for preventing the workpieces from dropping during Pilot port Pilot port How to Operate Valve Condition 1. Work adsorption 2. Vacuum release 3. Operation stop Solenoid valve ON ON Solenoid valve ON How to Operate Valve Condition 1. Work adsorption 2. Vacuum release 3. Operation stop Air operated valve ON ON Air operated valve ON

42 Vacuum Module: Vacuum Pump System 42 Vacuum Pump System/Construction Component Parts No. q w e r t y u i Note) Description Poppet valve assembly Release flow rate adjusting needle Manifold base Vacuum switch Valve unit Interface plate Return spring Filter case Material Stainless steel Aluminum Stainless steel Polycarbonate Note ZX1-PV-O ZSE2, ZSP1 ZX1-VB-D- (PV)/(PS PD) Replacement Parts No. o!0 Description Pilot valve Filter element Material PVF Part no. Refer to Table (2), (3). ZX1-FE Note) Caution when handling filter case 1. The case is made of polycarbonate. Therefore, do not use it with or expose it to the following chemicals: paint thinner, carbon tetrachloride, chloroform, acetic ester, aniline, cyclohexane, trichloroethylene, sulfuric acid, lactic acid, watersoluble cutting oil (alkalinic), etc. 2. Do not expose it to direct sunlight. ZX ZR ZM ZH ZU ZL ZY ZQ ZF ZP ZCU AMJ Misc. Table (1) How to Order Pilot Valves No Component equipment Solenoid valve Solenoid valve N.C. (VJ114) N.C. (VJ114) Solenoid valve Solenoid valve N.O. (VJ324) N.C. (VJ314) Air operated Air operated N.O. (VJA324) N.C. (VJA314) Solenoid valve Air operated Air operated Solenoid valve Model ZX1-VJ114- ZX1-VJ ZX1-VJA Table (2) How to Order Solenoid Valves Type of actuation 1 2 N.C. (Normally closed) N.O. (Normally open) Pilot valve DC: 1 W (With indicator light: 1.05 W) AC DC: 0.45 W Y (With indicator light: 0.5 W) Combination of supply and release valve K1, J1 K3, J2 K6 No. 2 and 3 models only are applicable. Indicate each part number. ZX1-VJ114 5 ZX1-VJ Body option Pilot valve Individual exhaust Common exhaust for M main and pilot valves Note) In the case of N.C. type, indicate no symbol. (Individual exhaust for Pilot valve) 24 VDC and 12 VDC are applicable to 0.45 W. Note) Screw length of VJ100 and VJ300 for series ZX is different from that of the standard model. <Screw length> VJ100 M1.7 x 15 L L Z Z Table (3) How to Order Air Operated Valves ZX1A M3 Caution Port size M3 M3 x 0.5 M5 M5 x 0.8 Turning the vacuum release flow volume adjusting needle clockwise reduces the vacuum release flow volume; the needle valve is fully closed when the needle stops turning. Turning the needle 2 full turns counterclockwise from the fully closed position renders the needle valve fully open. The needle will fall out if it is turned more than 4 full turns. Light/Surge voltage suppressor Without light/surge voltage suppressor S With surge voltage suppressor Z With light/surge voltage suppressor Rated voltage VAC VAC 5 24 VDC 6 12 VDC V 6 VDC S 5 VDC R 3 VDC Applicable to plug connector Pilot port/external release port Manual override B Non-locking push type Locking slotted type Electrical entry L Connector (0.3 m) LN Connector (W/o lead wire) LO Without connector M Connector (0.3 m) MN Connector (W/o lead wire) MO Without connector G Grommet (0.3 m) H Grommet (0.6 m) Note) In the case of ZX1- VJ114, M, MN and MO cannot be used

43 43 Valve Unit: ZX1-VB Refer to page for details. Specifications Unit no. Components Operation Effective area (mm 2 ) (Cv factor) Operating pressure range Max. operating frequency Operating temperature range Interface plate symbol Standard accessory ZX1-VB Vacuum switch valve Vacuum release valve Pilot type Direct operated type Solenoid valve Air operated Solenoid valve External Air N.C. N.O. N.C. N.O. N.C. N.C. release operated (VJ114) (VJ324) (ZX1A) (VJA324) (VJ114) (VJ314) (ZX1A) (VJA314) 3 (0.17) Main valve to 0.6 MPa 5 Hz 5 to 50 C (PV) / (PS PD) Bracket B/Spacer 2 Pilot exhaust PE port Vacuum switch valve air supply PS port Vacuum supply PV port Vacuum pad connection A port K1 (Normally closed) Pilot exhaust PE port Vacuum supply PV port Vacuum switch valve air supply PS port Vacuum pad connection A port K3 (Normally open) Manual override Manual override (Push and turn (Non-locking) Bracket B the locking type Bracket B (Standard override.) accessory) (Standard accessory) Supply valve Release flow rate N.O. Manual override adjusting needle (PE port) (PS port) Air supply port for vacuum switch valve Interface plate (PV port) Vacuum supply pressure port (A port) Vacuum pad connection port (PE port) (PS port) Air supply port for vacuum switch valve Release flow rate adjusting needle Interface plate (PV port) Vacuum supply pressure port (V port) Vacuum pad connection port 83.9 Note) Dimensions : For mounting bracket B : For mounting spacer

44 Vacuum Module: Vacuum Pump System 44 Suction Filter Unit: ZX1-F Refer to page for details. Vacuum Pressure Switch High speed response/10 ms Uses a carrier diffusion semiconductor pressure sensor Adsorption Confirmation Switch Suitable for small size adsorption nozzle/ø0.3 to ø1.2 With suction filter Improved wiring: connector type Uses a carrier diffusion semiconductor pressure sensor Specifications Vacuum Pressure Switch Unit/ZSE2, ZSE3, ZSP1 Unit no. ZX1-F Operating pressure range Vacuum to 0.5 MPa Operating temperature range 5 to 50 C Filtration efficiency 30 µm Element PVF Weight 35 g Note) If not operated within the specified range of pressure and temperature, trouble may be caused. Vacuum Pressure Switch Specifications Unit no. ZSE2-0X ZSE3-0X Fluid Set pressure range Hysteresis Accuracy Voltage Port size Air 0 to 101 kpa 3% Full span or less 12 to 24 VDC (Ripple ±10% or less) M5 x 0.8 ±3% Full span (5 to 40 C) ±1% ±5% Full span (0 to 60 C) Full span Note) If not operated within the specified range of pressure and temperature, trouble may be caused. Adsorption Confirmation Switch Specifications Unit no. Fluid Operating pressure range Applicable adsorption nozzle dia. Hysteresis Internal orifice Filter case Caution 1. The case is made of polycarbonate. Therefore, do not use it with or expose it to the following chemicals: paint thinner, carbon tetrachloride, chloroform, acetic ester, aniline, cyclohexane, trichloroethylene, sulfuric acid, lactic acid, water-soluble cutting oil (alkalinic), etc. 2. Do not expose it to direct sunlight. Refer to page to for details. Refer to Best Pneumatics Vol.16 for details. ZSP1-S ZSP1-B Air 20 to 101 kpa ø0.3 to ø0.7 ø0.5 to ø kpa ø0.5 ø0.8 ZX ZR ZM ZH ZU ZL ZY ZQ ZF ZP ZCU AMJ Misc. Other caution Caution It might not be possible to successfully pick a workpiece if a picking nozzle or a picking pad that is out of the applicable range is used

45 45 Valve Unit: Type K1 Configuration and combination Valve unit (K1) + Model ZX100 K1 Vacuum switch (ZSE2) Vacuum switch (ZSE3) Adsorption confirmation switch (ZSP1) Filter unit (F) E D P F Pilot exhaust PE port Vacuum switch valve air supply PS port Vacuum supply PV port Vacuum pad connection V port Circuit diagram (Circuits other than those with vacuum switch are shown as below.) Vacuum switch (E) Vacuum switch (ZSE2) ZX100-K1-E Adsorption confirmation switch (P) Spacer 1 (For side mounting) Pressure sensor (Release to atmospheric pressure) Manual override Pressure setting trimmer Filter unit (F) ø Vacuum switch (PD port) Interface plate Release flow rate adjusting needle (Mounting hole) (68.6) (PE port) (PS port) Air supply port for vacuum Pitch = 10 switch valve (PV port) Vacuum supply pressure port 15.5 Bracket A (Standard accessory) 4 Vacuum pad connection port Note) Dimensions : For mounting bracket A : For mounting spacer

46 Vacuum Module: Vacuum Pump System 46 Vacuum switch (ZSE3) ZX100-K1-D Adsorption confirmation switch (ZSP1) ZX100-K1-P Adjustment needle Spacer 1: ZX1-S1 ZX Manual override (Non-locking) DOWN button UP button RESET button SET button Spacer 1 (For side mounting) ø ø ø3.6 ZR ZM ZH ZU (N.C.) Interface plate (PE port) (N.C.) Release flow rate adjustment needle Air supply pressure port (M3, PS port) Pitch = 10 (PV port) Vacuum supply pressure port M5 (V port) Vacuum pad connection port M2.5 x 51 Phillips screw Bracket A (Standard accessory) Adsorption confirmation switch Adsorption nozzle piping port M5 x 0.8 (or M6 x 1) 2-ø3.3 mounting hole ZL ZY ZQ ZF ZP ZCU AMJ Misc. Filter unit (F) ZX100-K1-F ø Filter

47 Valve Unit: Type K3 Configuration and combination Valve unit (K3) + Model ZX100 E K3 P F Vacuum switch (ZSE2) Adsorption confirmation switch (ZSP1) Filter unit (F) Pilot exhaust PE port Vacuum switch valve air supply PS port Vacuum supply PV port Vacuum pad connection V port Circuit diagram (Circuits other than those with vacuum switch are shown as below.) 47 Vacuum switch (E) Vacuum switch (ZSE2) ZX100-K3-E Pressure setting trimmer Spacer 1 (For side mounting) Adsorption confirmation switch (P) Pressure sensor (Release to atmospheric pressure) Filter unit (F) Manual override (Push and turn the locking type override.) 1 10 ø N.O. Vacuum switch Manual override Interface plate (PE port) Release flow rate adjusting needle (PS port) Air supply port for vacuum switch valve (PV port) Vacuum supply pressure port (82.5) 2-ø3.3 mounting hole Bracket A (V port) (Standard accessory) Vacuum pad connection port Note) Dimensions : For mounting bracket A : For mounting spacer

48 41 1 Vacuum Module: Vacuum Pump System 48 Adsorption confirmation switch (ZSP1) ZX100-K3-P Filter unit (F) ZX100-K3-F Adjustment needle 1 10 ø Adsorption confirmation switch ø3.3 mounting hole Spacer 1: ZX1-S1 Adsorption nozzle piping port M5 x 0.8 (or M6) 15.5 ø3.6 Bracket A (Standard accessory) ZX ZR ZM ZH ZU ZL ZY ZQ ZF ZP ZCU AMJ Misc ø Filter unit (Mounting hole)

49 Valve Unit: Type K6 Configuration and combination Valve unit (K6) + Model K6 ZX100 Vacuum switch (ZSE2) Adsorption confirmation switch (ZSP1) Filter unit (F) E P F Pilot air supply Pilot exhaust PE port Vacuum supply PV port External release air supply External release port Vacuum pad connection V port Circuit diagram (Circuits other than those with vacuum switch are shown as below.) 49 Pilot port Vacuum switch (E) Vacuum switch (ZSE2) ZX100-K6-E Spacer 1 (For side mounting) Adsorption confirmation switch (P) M5 x 0.8 Pilot port Pressure setting trimmer 51 Pressure sensor (Release to atmospheric pressure) M5 x 0.8 External release port 41 1 Filter unit (F) Vacuum switch ø Vacuum switch Air operated External release Release flow rate adjusting needle Interface plate (63.5) (PE port) (PV port) Vacuum supply pressure port 2-ø3.3 Mounting hole Bracket A (Standard accessory) 4 (V port) Vacuum pad connection port Note) Dimensions : For mounting bracket A : For mounting spacer

50 Vacuum Module: Vacuum Pump System 50 Adsorption confirmation switch (ZSP1) ZX100-K6-P Adjusting needle Spacer 1: ZX1-S ZX ZR ø ø3.6 ZM ZH ZU Adsorption confirmation switch ZL ZY ZQ 2-ø3.3 Mounting hole Adsorption nozzle piping port M5 x 0.8 (or M6 x 1) 15.5 Bracket A (Standard accessory) 4 18 (63.5) ZF ZP ZCU AMJ Misc. Filter unit (F) ZX100-K6-F ø3.6 Filter unit (Mounting hole)

51 Valve Unit: Type K8 Configuration and combination Valve unit (K8) + Model ZX100 K8 Vacuum switch (ZSE2) Adsorption confirmation switch (ZSP1) Filter unit (F) E P F Air supply for supply valve pilot Pilot exhaust PE port Vacuum switch valve air supply PS port Pilot port Vacuum supply PV port Air supply for release valve pilot Vacuum pad connection V port Circuit diagram (Circuits other than those with vacuum switch are shown as below.) 51 Pilot port Vacuum switch (E) Vacuum switch (ZSE2) ZX100-K8-E Adsorption confirmation switch (P) M3 x 0.5 (Pilot port for supply valve) Pressure setting trimmer Spacer 1 (For side mounting) Pressure sensor Filter unit (F) (Release to atmospheric pressure) M3 x 0.5 (Pilot port for release valve) 1 10 ø Vacuum switch N.O. (Air operated VJA324) Manual override (Non-locking) Interface plate (Air operated VJA314) Release flow rate adjusting needle (PS port) Air supply port for vacuum switch valve (PE port) (PV port) Vacuum supply pressure port 2-ø3.3 Mounting hole Bracket A (Standard accessory) 4 (V port) Vacuum pad connection port Note) Dimensions : For mounting bracket A : For mounting spacer

52 Vacuum Module: Vacuum Pump System 52 Adsorption confirmation switch (ZSP1) ZX100-K8-P Spacer 1: ZX1-S1 Adjusting needle 1 10 ø Adsorption confirmation switch ø3.3 Mounting hole 15.5 Bracket A (Standard accessory) ø (V port) Adsorption nozzle piping port ZX ZR ZM ZH ZU ZL ZY ZQ ZF ZP ZCU AMJ Misc. Filter unit (F) ZX100-K8-F ø Filter unit

53 53 Vacuum Pump System/Manifold Specifications Function Max. number of units Function 8 units Vacuum supply from PV port of the manifold is common supply. Air supply from PS port is common supply. When Using Individual Spacer R1 Function Specifications Port PV port PS port EXH port Weight Separates air supply from manifold and makes units be used one by one. Port size Function Rc 1 8 External vacuum pump connection M5 Air supply for vacuum valve Rc 1 8 Common exhaust 1 station: 73 g (50 g per additional station) Note 1) PD port: Blank Note 2) Vacuum from both sides of PV port for 6 or more stations of ZX100 external vacuum pump manifold. Manifold Specification Sheet When ordering the manifold type of series ZX, use the manifold specification sheet on page Air Supply Manifold Left side Right side Supply port location PV PS PV PS L R B : Vacuum supply from PV port : Air supply from PS port : Plugged Note) All ports for each valve unit are provided with plugs. Port When Using Individual Spacer R1 It functions as a single unit. Vacuum is supplied from PV port of valve unit. PE port is released to atmospheric pressure. Other ports are plugged. How to Order Manifold Indicate the vacuum module, blank plate and individual spacer below the manifold base part number. <Manifold base> ZZX1 06 R <Individual spacer> ZX1 R1 1 Stations Thread of supply and exhaust valve Rc F G T NPTF Supply port location Supply port Air Supply Symbol location 1 Vacuum supply Air supply R L Right side Left side PV port on PV port on PS port on PS port on the right side the left side the right side the left side B Both sides PV port PS port on on both sides both sides 1 Viewed from the front side of valve unit, confirm the port location on the right and/or left side. 2 EXH ports are released to atmospheric pressure in both sides. Plugs are always attached to PD ports and all ports of the valve unit. (Ordering example) ZZX106-R 1 pc. (Manifold base) ZX100-K15LZ-EC 5 pcs. (Vacuum single unit) ZX-BM1 1 pc. (Blank plate) Arrangement (First station from the right end of the valve side is station 1.) All stations 1 Station 1 only 8 Station 8 only When spacers are mounted alternately, specify them together. (Ordering example) If mounted on station 1 and station 3: ZZX106-R 1 pc. ZX100-K15LZ-EC 6 pcs. ZX1-R1-1 ZX1-R1-3 ZX1-R16 4 pcs

54 Vacuum Module: Vacuum Pump System 54 Manifold/System Circuit Example When not using individual air pressure supply When using individual air pressure supply Left PV: Vacuum supply port PS: Air supply port for vacuum valve PD: Air supply port for release valve PE: Pilot exhaust port EXH: Common exhaust port <System circuit example> Right Common exhaust Common air supply for vacuum valve Common vacuum supply Left Dummy spacer R16 side Pilot exhaust Air supply for vacuum valve Individual vacuum supply <System circuit example> Individual spacer R1 side Dummy spacer R16 Individual spacer R1 Dummy spacer R16 Right Common exhaust Common air supply for vacuum valve Common vacuum supply ZX ZR ZM ZH ZU ZL ZY ZQ ZF ZP ZCU AMJ Misc. Individual spacer R

55 55 Vacuum Pump System Manifold Common EXH Common air supply for vacuum valve Common vacuum supply End plate Manifold base 4-ø5.5 mounting hole Adjustment needle Manual override (Push and turn the locking type override.) Manual override (Simply turn the Body (Air operated type) locking type override.) (Pilot port) (External release port) Adsorption confirmation switch ZSP1 Pitch = 21 Pressure setting trimmer Vacuum switch ZSE2 Filter Adapter B Adapter D Individual spacer R1 (VJ314) (Normally closed) (VJ324M) (Normally open) Manual override (Simply turn the locking type override.) (VJ114) (Normally closed) (VJ114) (Normally closed) Release flow rate adjustment needle (PD port) Pitch = 21 Individual vacuum supply port (PV port) Common EXH port Common supply port for vacuum switch valve (PS port) Common vacuum supply port (PV port) Symbol Stations 1 L1 33 L2 45 L (mm)

56 Vacuum Module: Vacuum Pump System 56 (In the case of individual air pressure supply) B cross section System circuit example (Standard) (Option) (In the case of individual vacuum pressure supply) Individual spacer R1 Individual spacer R1 ZX ZR Dummy spacer R16 Dummy spacer R16 Individual spacer R1 Pressure sensor Individual vacuum supply port Dummy spacer R16 Pressure sensor ZM ZH ZU ZL A cross section ZY ZQ Dummy spacer R16 ZF External release port External release port ZP Pilot port Pilot port ZCU AMJ Pitch = 21 Individual air supply port (PV port) Individual vacuum supply port (PV port) Individual spacer R1 Individual vacuum supply port PV Adapter D Individual spacer R1 Individual vacuum supply port Adapter D Misc. M5 x 0.8 (or M6) Vacuum pad connection port (V port) M5 x 0.8 (or M6) Vacuum pad connection port (V port) Pitch = 21 M5 x 0.8 (or M6) Adsorption nozzle piping port

57 Vacuum Pump System Manifold: Type K1 Vacuum pad connection V port Vacuum pad connection V port 57 Common EXH Common air supply for vacuum valve Common vacuum supply Type K1 ZZX1- ZX100-K1L-E- 4-ø5.5 mounting hole Pressure setting trimmer Manual override Pitch 10 Pitch = 21 Manifold base End plate Lead wire length 300 Vacuum switch Filter unit Release flow rate adjusting needle Pitch = 21 Common EXH port (PS port) Common supply port for vacuum valve (PV port) Common vacuum supply port Symbol Stations 1 L1 33 L2 45 L (mm)

58 Vacuum Module: Vacuum Pump System 58 Circuit diagram ZX ZR ZM ZH ZU ZL ZY ZQ ZF ZP ZCU AMJ Misc. Vacuum pad connection port M5 x 0.8 (or M6) Pitch =

59 Vacuum Pump System Manifold: Type K3 Vacuum pad connection V port Vacuum pad connection V port 59 Common EXH port Common air supply for vacuum valve PS port Common vacuum supply PV port Type K3 ZZX1- ZX100-K3-E- 4-ø5.5 mounting hole Pressure setting trimmer Manual override (Push and turn the locking type override.) Pitch = 21 Manifold base End plate VJ324M Manual override VJ314 Vacuum switch Release flow rate adjusting needle Filter unit Pitch = 21 Common EXH port (PS port) Common supply port for vacuum switch valve (PV port) Common vacuum supply port Symbol Stations 1 L1 33 L2 45 L (mm)