Technical Committee on Semiconductor and Related Facilities

Transcription

1 National Fire Protection Association 1 Batterymarch Park, Quincy, MA Phone: Fax: Technical Committee on Semiconductor and Related Facilities NFPA 318, First Draft Meeting Agenda (A2017) () October 20, :00 PM EST Teleconference / Web Meeting 1. Call to Order 1:00pm EST 2. Attendance 3. Review Agenda 4. NFPA Staff Liaison Presentation and Review of Key Dates in Current Cycle 5. Chairman Comments 6. Approval of Previous Meeting Minutes 7. Discuss Draft and provide responses to Public Inputs for NFPA Generate Committee Inputs for NFPA 318 (if necessary) 9. Unfinished Business 10. New Business 11. Next Meeting 12. Adjourn Meeting

2 Address List No Phone Semiconductor and Related Facilities 10/19/2015 Audrey Goldstein Rick Guevara Chair Technology Risk Consulting Services, LLC 58 Mustang Court Danville, CA SE 7/12/2001 John G. Ronan Secretary Micron Technology, Inc South Federal Way, MS 555 PO Box 6 Boise, ID Alternate: Bobbie L. Smith U 7/24/1997 Bernard Argo Sandia National Laboratories/USDOE 05 El Cielo Los Lunas, NM E 03/07/2013 Robert J. Ballard Victaulic Company of America PO Box 31 Easton, PA Fire Suppression Systems Association M 03/03/2014 Alastair R. Brown Rushbrook Consultants, Ltd. 216 West George Street Glasgow, G2 2PQ Scotland SE 7/12/2001 Allan Cose Intertek Testing Services 1365 Wilson Court Menlo Park, CA RT 10/28/2014 Richard Ffrench FM Global 270 Central Avenue Johnston, RI I 10/28/2014 Amanda Gonzalez Global Foundries, Inc. 400 Stonebreak Road Extension Admin 2, Mailstop 5 Malta, NY Alternate: Stephen L. Fox U 08/17/2015 Younghoon Joo Samsung F&M Insurance 50, Eulji-Ro, Jung-Gu, 6th Floor, Samsung Building Seoul, South Korea I 10/23/2013 Steven W. Joseph Xtralis, Inc SW Foothill Drive Portland, OR M 08/17/2015 Scott R. Lang M 08/11/2014 Honeywell International System Sensor Division 3825 Ohio Avenue St. Charles, IL National Electrical Manufacturers Association Alternate: Phil Mazzurco Richard M. Lattanzio Spansion, Inc East Ben White Blvd., M/S 582 Austin, TX U 1/18/2001 1

3 Address List No Phone Semiconductor and Related Facilities 10/19/2015 Audrey Goldstein Randy Luckman Global Asset Protection Services 340 Cortez Court El Dorado Hills, CA Alternate: Bryan K. Powell I 7/12/2001 Thomas L. Multer Reliable Automatic Sprinkler Company, Inc Smith Grove Road Liberty, SC National Fire Sprinkler Association Alternate: Ricky R. Jackson M 1/18/2001 Eugene Y. Ngai Chemically Speaking LLC 26 Casper Berger Road Whitehouse Station, NJ SE 08/09/2012 David A. Quadrini Consultant 7723 Fallmeadow Dallas, TX SE 7/1/1997 Rodney D. Randall Zurich Services Corporation 525 Market Street, Suite 2900 San Francisco, CA I 10/1/1996 Gordon C. Robbins Texas Instruments, Inc. 319 Fallen Leaf Lane McKinney, TX U 08/09/2012 Charles F. Rowe Global Risk Consultants Corporation 1152 Longford Road Bartlett, IL SE 3/21/2006 Scott E. Swanson Intel Corporation 2501 NW 229th Avenue Hillsboro, OR Alternate: Mark W. Slight U 3/21/2006 Randell T. Thompson American International Group, Inc. (AIG) Commercial Property North America 600 North Pearl Street, Suite 700 Dallas, TX Alternate: Bruce H. Clarke I 3/4/2008 Steven R. Trammell SE 4/28/2000 Environmental and Occupational Risk Management, Inc. (EORM) 111 East Morningside, Suite 206 South Padre Island, TX Jeffrey S. Tubbs Arup 955 Massachusetts Avenue Suite 402 Cambridge, MA Alternate: Josh Yacknowitz SE 03/07/2013 Joshua C. Vogel US Department of Defense 1220 Jo Apter Place New Windsor, MD U 4/3/2003 Derek A. White JENSEN HUGHES 3610 Commerce Drive, Suite 817 Baltimore, MD Alternate: Jeffrey S. Grove SE 1/17/1997 Matthew T. Wyman Koetter Fire Protection International Inc Olympic Drive Dallas, TX M 7/23/2008 2

4 Address List No Phone Semiconductor and Related Facilities 10/19/2015 Audrey Goldstein Dwayne E. Sloan Voting Alternate UL LLC 12 Laboratory Drive PO Box Research Triangle Park, NC RT 3/4/2009 Bruce H. Clarke Alternate American International Group, Inc. (AIG) 8606 Driscoll Court Charlotte, NC : Randell T. Thompson I 10/28/2014 Stephen L. Fox Alternate Global Foundries Inc. 7 Hermes Road Malta, NY : Amanda Gonzalez U 1/12/2000 Jeffrey S. Grove Alternate JENSEN HUGHES 376 East Warm Springs Road, Suite 210 Las Vegas, NV : Derek A. White SE 3/4/2008 Ricky R. Jackson Alternate Northstar Fire Protection of Texas, Inc. 510 East Corporate Drive Suite 700 Lewisville, TX National Fire Sprinkler Association : Thomas L. Multer M 1/10/2008 Phil Mazzurco Alternate Siemens Industry, Inc. Building Technology Division Infrastructure & Cities 216 Windmill Court Bridgewater, NJ National Electrical Manufacturers Association : Scott R. Lang M 08/17/2015 Bryan K. Powell Alternate Global Asset Protection Services Lindsay Meadow Drive Mechanicsville, VA : Randy Luckman I 10/23/2013 Mark W. Slight Alternate Intel Corporation 2200 Mission College Boulevard Mailstop: RN6-68 Santa Clara, CA : Scott E. Swanson U 3/2/2010 Bobbie L. Smith Alternate Micron Technology, Inc South Federal Way Boise, ID : John G. Ronan U 3/2/2010 Josh Yacknowitz Alternate Arup 77 Water Street New York, NY : Jeffrey S. Tubbs SE 07/29/2013 Dennis H. Collins Member Emeritus PO Box 2428 Florence, OR SE 1/1/1988 Dennis Kirson Member Emeritus NAVFAC MIDLANT Little Creek Site Building 3165, Code Gator Boulevard, Suite 100 Norfolk, VA SE 1/1/1987 3

5 Address List No Phone Semiconductor and Related Facilities 10/19/2015 Audrey Goldstein Audrey Goldstein Staff Liaison National Fire Protection Association 1 Batterymarch Park Quincy, MA /14/2014 4

6 NFPA 318 Technical Committee on Semiconductor and Related Facilities Second Draft Meeting (2014) Adobe Connect Web Meeting and Teleconference Attendees: See attached attendance sheet September 11, AM- 11:40 AM EDT 1. NFPA Chair, Vinnie DeGiorgio, called the meeting to order at 10:05 AM EDT. 2. NFPA Staff Liaison, Chad Duffy, presented meeting protocols and key dates in the current revision cycle. 3. NFPA Chair, Vinnie DeGiorgio, presented comments thanking the committee members efforts during the rewrite exercise and discussed recent semiconductor fab fire loss in China. 4. The November 14 & 26, 2012, First Draft Meeting minutes were approved as presented. 5. The committee addressed Public Comments provided on the First Draft. Motions and discussions ensued. No significant issues resulted. 6. The committee reviewed any committee comments associated with the first draft. No significant issues resulted. 7. There were no issues raised for Unfinished Business. 8. New Business discussions focused on the recent fab fire in China. Loss details are still unknown. The committee agreed that future revisions of 318 may want to further address management of change, simple safety job reviews, and/or contractor training. A discussion around NFPA 56 and its relevance to NFPA 318 ensued. 9. Next meeting will be scheduled in the future. 10. Meeting adjourned at 11:40 AM EST, September 11, Minutes Respectfully Submitted by Rick Guevara

7

8

9 Public Input No. 2-NFPA [ Section No. 2.3 ] 2.3 Other Publications ANSI/ CGA Publications. Compressed Gas Association, George Carter Way, Suite 103, Chantilly, VA ANSI/ CGA G-13, Storage and Handling of Silane and Silane Mixtures, rd edition, ANSI/ 2 FM Publications. ANSI/ FM 4910, Standard for Global, 270 Central Avenue, P.O. BOX 7500, Johnston, RI FM Approval 4910, Cleanroom Materials Flammability Test Protocol, ANSI/ UL Publications. Underwriters Laboratories Inc., 333 Pfingsten Road, Northbrook, IL ANSI/ UL 723, Standard for Test for Surface Burning Characteristics of Building Materials, 2008, Revised ANSI/ UL 900, Standard for Air Filter Units, 2004, Revised ANSI/ UL 2360, Standard Test Method for Determining the Combustibility Characteristics of Plastics Used in Semiconductor Tool Construction, 2000, Revised ASME Publications. American Society of Mechanical Engineers, Three ASME International, Two Park Avenue, New York, NY ASME A A , Scheme for the Identifications of Piping Systems, 2007, Reaffirmed ASME B31.3, Process Piping, ASME Boiler and Pressure Vessel Code, ASTM Publications. ASTM International, 100 Barr Harbor Drive, P.O. Box C700, West Conshohocken, PA ASTM D 5 D5 /D5M, Standard Test Method for Penetration of Bituminous Materials, 2006 e ASTM E 84 E84, Standard Test Method for Surface Burning Characteristics of Building Materials, ASTM E 136 E136, Standard Test Method for Behavior of Materials in a Vertical Tube Furnace at 750 C, ISO Publications. International Organization for Standardization, 1, ch. de la Voie-Creuse, Case postale 56, CH-1211 Geneva 20, Switzerland.ISO ISO Central Secretariat, BIBC II, 8, Chemin de Blandonnet, CP 401, 1214 Vernier, Geneva Switzerland. ISO DIS , Cleanrooms and Associated Controlled Environments Part 1: Classification of Air Cleanliness By Particle Concentration, SEMI Publications. Semiconductor Equipment and Materials International, 3081 Zanker Road, San Jose, CA SEMI F1, Specification for Leak Integrity of High-Purity Gas Piping Systems and Components, SEMI S3-0306, Safety Guidelines for Process Liquid Heating Systems, of 32 7/8/ :32 PM

10 of 32 7/8/ :32 PM U.S. Government Publications. U.S. Government Printing Office, Washington, DC Title 29, Code of Federal Regulations, Part , Air Contaminants Other Publications. Merriam-Webster's Collegiate Dictionary, 11th edition, Merriam-Webster, Inc., Springfield, MA, Statement of Problem and Substantiation for Public Input Updated SDO addresses, standard numbers and standard editions. Related Public Inputs for This Document Related Input Public Input No. 3-NFPA [Section No. D.1.2] Relationship Submitter Information Verification Submitter Full Name: Aaron Adamczyk Organization: [ Specified ] Street Address: City: State: Zip: Submittal Date: Sat Mar 21 20:11:10 EDT 2015

11 of 32 7/8/ :32 PM Public Input No. 19-NFPA [ Section No ] ANSI/FM Publications. ANSI/FM 4910, Standard for Cleanroom Materials Flammability Test Protocol, Statement of Problem and Substantiation for Public Input date update Submitter Information Verification Submitter Full Name: MARCELO HIRSCHLER Organization: GBH INTERNATIONAL Street Address: City: State: Zip: Submittal Date: Mon Jul 06 17:34:21 EDT 2015

12 of 32 7/8/ :32 PM Public Input No. 4-NFPA [ Section No ] ANSI/UL Publications. Underwriters Laboratories Inc., 333 Pfingsten Road, Northbrook, IL ANSI/UL 723, Standard for Test for Surface Burning Characteristics of Building Materials, 2008, Revised ANSI/UL 900, Standard for Air Filter Units, 2004, Revised ANSI/UL 2360, Standard Test Method for Determining the Combustibility Characteristics of Plastics Used in Semiconductor Tool Construction, Statement of Problem and Substantiation for Public Input The proposed changes represent revisions/updated editions of UL Standards. Submitter Information Verification Submitter Full Name: RONALD FARR Organization: UL LLC Street Address: City: State: Zip: Submittal Date: Thu Jun 18 14:06:05 EDT 2015

13 of 32 7/8/ :32 PM Public Input No. 5-NFPA [ Section No ] ASTM Publications. ASTM International, 100 Barr Harbor Drive, P.O. Box C700, West Conshohocken, PA ASTM D 5, Standard Test Method for Penetration of Bituminous Materials, 2006 e1. ASTM E 84, Standard Test Method for Surface Burning Characteristics of Building Materials, a. ASTM E 136, Standard Test Method for Behavior of Materials in a Vertical Tube Furnace at 750 C, Statement of Problem and Substantiation for Public Input date update Submitter Information Verification Submitter Full Name: MARCELO HIRSCHLER Organization: GBH INTERNATIONAL Street Address: City: State: Zip: Submittal Date: Tue Jun 30 18:34:51 EDT 2015

14 of 32 7/8/ :32 PM Public Input No. 14-NFPA [ Section No ] Compressed Gas. A material, or mixture of materials, that (1) is a gas at 68 F (20 C) or less at an absolute pressure of 14.7 psi (101.3 kpa) and (2) has a boiling point of 68 F (20 C) or less at an absolute pressure of 14.7 psi (101.3 kpa) and that is liquefied, nonliquefied, adsorbed onto a solid porous material, or in solution, except those gases that have no other health or physical hazard properties are not considered to be compressed gases until the pressure in the packaging exceeds an absolute pressure of 40.6 psi (280 kpa) at 68 F (20 C). [55, 2013] Statement of Problem and Substantiation for Public Input In 3.3.4, adsorbed onto a solid porous material, was added to clarify that the gas in a Type 1 SAGS is classified as a compressed gas. NFPA 318 has extracted the compressed gas definition from NFPA 55. NFPA 55, and other standards, list toxic and highly toxic gases under compressed gases. In 318, states All (both Type 1 and Type 2) SAGS shall meet the requirements for gases found in this standard, except as provided in through The use of gases and compressed gases are used in different NFPA standards. When addressing the requirements for toxic and highly toxic gases the requirements listed for both gases and compressed gases should be followed. e that Praxair will also propose a TIA in NFPA 55 for the same change in the definition. This will allow the extract process from NFPA 55 to continue in NFPA 318 maintaining the same compressed gas definition found in NFPA 55. If the same proposed change is not adopted until NFPA 55:2019 edition, then 318 can extract the definition in its next cycle. e to NFPA Staff. I submitted 3 proposed changes. None of them showed my name, which is "Ronald Fuhrhop". It just has "not specified" and I could not change it. It only had my address (ronald_fuhrhop@praxair.com). I verified thet my profile had both my name, , address and company. I want to make sure that these three proposals are accepted and submitted to the Technical Committee for review. If there is anything that I need to do, please let me know. Submitter Information Verification Submitter Full Name: RONALD FUHRHOP Organization: Praxair Inc. Street Address: City: State: Zip: Submittal Date: Mon Jul 06 10:56:18 EDT 2015

15 of 32 7/8/ :32 PM Public Input No. 8-NFPA [ Section No ] * Exempt Amount per Control Area. The amount of hazardous material allowed to be stored, used, or handled in a control area as. A The exempt amount is set forth in NFPA 1, Fire Code, and NFPA 5000, Building Construction and Safety Code. The exempt amount per control area is based on the material state (solid, liquid, or gas) and the material storage or use conditions. Statement of Problem and Substantiation for Public Input This simply moves the reference to NFPA 1 and 5000 to the Annex in compliance with the Manual of Style. The second sentence is not really part of the definition but additional information. Related Public Inputs for This Document Related Input Public Input No. 9-NFPA [Section No [Excluding any Sub-Sections]] Relationship Submitter Information Verification Submitter Full Name: MARCELO HIRSCHLER Organization: GBH INTERNATIONAL Street Address: City: State: Zip: Submittal Date: Tue Jun 30 18:56:53 EDT 2015

16 of 32 7/8/ :32 PM Public Input No. 10-NFPA [ Section No ] * Hazardous Production Material. In semiconductor fabrication facilities, any solid, liquid, or gas that has a degree-of-hazard rating in health, flammability, or reactivity of Class 3 or 4 as. A Hazardous production materials are ranked by NFPA 704, Standard System for the Identification of the Hazards of Materials for Emergency Response. Statement of Problem and Substantiation for Public Input In order to comply with the NFPA Manual of Style, the reference to NFPA 704 is being moved to an annex note. A reference is also added into the body of the standard, in chapter 5. Related Public Inputs for This Document Related Input Public Input No. 11-NFPA [Chapter 5] Relationship Submitter Information Verification Submitter Full Name: MARCELO HIRSCHLER Organization: GBH INTERNATIONAL Street Address: City: State: Zip: Submittal Date: Tue Jun 30 19:09:53 EDT 2015

17 of 32 7/8/ :32 PM Public Input No. 12-NFPA [ Section No [Excluding any Sub-Sections] ] A material that has a fluidity greater than that of 300 penetration asphalt when tested in accordance with ASTM D 5, Standard Test Method for Penetration of Bituminous Materials. Unless otherwise specified, the term liquid includes melting point that is equal to or less than 68 F (20 C) and a boiling point that is greater than 68 F (20 C) and 14.7 psia (101.3 kpa). When not otherwise identified, the term liquid shall mean both flammable and combustible liquids. [NFPA 1] Statement of Problem and Substantiation for Public Input There is no need for the definition to deal with requirements based on bitumen penetration when it is easiest to simply extract a normal definition of liquid from NFPA 1, which does not contain references to other standards. Submitter Information Verification Submitter Full Name: MARCELO HIRSCHLER Organization: GBH INTERNATIONAL Street Address: City: State: Zip: Submittal Date: Tue Jun 30 19:28:39 EDT 2015

18 0 of 32 7/8/ :32 PM Public Input No. 7-NFPA [ Section No ] Noncombustible. In semiconductor fabrication facilities, a material that, in the form in which it is used and under the conditions anticipated, will not ignite, burn, support combustion, or release flammable vapors when subjected to fire or heat. Materials that are reported as passing ASTM E 136, Standard Test Method for Behavior of Materials in a Vertical Tube Furnace at 750 C, shall be considered noncombustible materials material. (see 4.3). Statement of Problem and Substantiation for Public Input This is being proposed for consistency with many other documents (including NFPA 1, 101, 5000, 90A, 220, etc) and for compliance with the Manual of Style, which prohibits requirements and references to codes and standards in definitions. The requirements are proposed to be moved to a new section 4.3 and extracted from NFPA 101. Related Public Inputs for This Document Related Input Public Input No. 6-NFPA [New Section after 4.2] Relationship Submitter Information Verification Submitter Full Name: MARCELO HIRSCHLER Organization: GBH INTERNATIONAL Street Address: City: State: Zip: Submittal Date: Tue Jun 30 18:52:53 EDT 2015

19 1 of 32 7/8/ :32 PM Public Input No. 6-NFPA [ New Section after 4.2 ] 4.3* Noncombustible material [NFPA 101; ] A material that complies with any of the following shall be considered a noncombustible material: (1)*A material that, in the form in which it is used and under the conditions anticipated, will not ignite, burn, support combustion, or release flammable vapors when subjected to fire or heat (2) A material that is reported as passing ASTM E 136, Standard Test Method for Behavior of Materials in a Vertical Tube Furnace at 750 Degrees C (3) A material that is reported as complying with the pass/fail criteria of ASTM E 136 when tested in accordance with the test method and procedure in ASTM E 2652, Standard Test Method for Behavior of Materials in a Tube Furnace with a Cone-shaped Airflow Stabilizer, at 750 Degrees C [NFPA 301; ] A.4.3 The provisions of 4.3 do not require inherently noncombustible materials to be tested in order to be classified as noncombustible materials. A.4.3 (1) Examples of such materials include steel, concrete, masonry, and glass. (Also, add ASTM E2652 (2012), Standard Test Method for Behavior of Materials in a Tube Furnace with a Cone-shaped Airflow Stabilizer, at 750 Degrees C, into Section 2 on referenced ASTM standards. ) Statement of Problem and Substantiation for Public Input This public input incorporates into NFPA 318 the same format as is used in NFPA 1, 101, 5000, 220, 90A and others and complies with the manual of style which prohibits definitions from containing requirements or references to specific codes or standards. This is associated also with the proposed reference, in the definitions section, simply to this section. Related Public Inputs for This Document Related Input Public Input No. 7-NFPA [Section No ] Relationship Submitter Information Verification Submitter Full Name: MARCELO HIRSCHLER Organization: GBH INTERNATIONAL Street Address: City: State: Zip: Submittal Date: Tue Jun 30 18:41:31 EDT 2015

20 Public Input No. 20-NFPA [ Section No. 4.4 ] 4.4 Fire Resistance Rating Fire resistance ratings shall be detemined in accordance with ASTM E119, Standard Test Methods for Fire Tests of Building Construction and Materials Fabrication areas shall be separated from each other by 1-hour fire resistance rated construction Fabrication areas shall be separated from adjacent occupancies by not less than 1-hour fire resistance rated construction and not less than the fire resistance rating required in NFPA 5000, Building Construction and Safety Code. (Also add ASTM E119, 2014, into chapter 2 on ASTM referenced standards) Statement of Problem and Substantiation for Public Input The actual fire test to be used to assess fire resistance rating needs to be stated in the standard. There are other tests for fire resistance ratings (ASTM E1539, UL 1709, ISO 834, etc.) and the one used by NFPA 5000 is ASTM E119 (NFPA used to have a test, namely NFPA 251) but it was withdrawn in favor of ASTM E119 (date, for addition into chapter 2): Submitter Information Verification Submitter Full Name: MARCELO HIRSCHLER Organization: GBH INTERNATIONAL Street Address: City: State: Zip: Submittal Date: Mon Jul 06 17:40:44 EDT of 32 7/8/ :32 PM

21 3 of 32 7/8/ :32 PM Public Input No. 11-NFPA [ Chapter 5 ] Chapter 5 Hazardous Materials General Provisions 5.1* Hazardous Chemicals Materials Classification. Hazardous Production Materials (HPM) shall be classified in accordance with NFPA 704, Standard System for the Identification of the Hazards of Materials for Emergency Response, and shall be defined by the following classes of chemicals or substances Physical Hazards. The following material categories shall be classified as physical hazards, and a material with a primary classification as a physical hazard can pose a health hazard: (1) Flammable and combustible liquids (2) Flammable solids and gases (3) Oxidizer materials (4) Pyrophoric liquids, gases, and solids (5) Unstable (reactive) materials (6) Water-reactive solids and liquids (7) Cryogenic fluids (8) Compressed gases Health Hazards. The following material categories shall be classified as health hazards, and a material with a primary classification as a health hazard can pose a physical hazard: (1) Highly toxic and toxic materials (2) Corrosive materials 5.2 HPM Risk Assesment This section shall apply to the management methodology used to identify, evaluate, and control the hazards involved in the processing and handling of flammable and combustible liquids. These hazards include, but are not to, preparation; separation; purification; and change of state, energy content, or composition Operations involving flammable and combustible liquids shall be reviewed to ensure that fire and explosion hazards are addressed by fire prevention, fire control, and emergency action plans. [30:6.4.1] Exception No. 1: Operations where liquids are used solely for on-site consumption as fuels. Exception No. 2: Operations where Class II or Class III liquids are stored in atmospheric tanks or transferred at temperatures below their flash points The fire hazards management review shall be repeated whenever the hazards leading to a fire or explosion change significantly. Conditions that shall require repeating a review shall include, but are not to, the following: (1) When changes occur in the materials in process (2) When changes occur in process equipment (3) When changes occur in process control (4) When changes occur in operating procedures or assignments

22 5.2.4 A written emergency action plan that is consistent with available equipment and personnel shall be established to respond to fires and related emergencies. This plan shall include the components contained in of NFPA 30, Flammable and Combustible Liquids Code. 5.3 Container Delivery * In new buildings, a service corridor shall be provided when necessary to transport hazardous chemicals from a liquid storage room, hazardous chemical room, or gas room or from the outside of a building to the perimeter wall of a fabrication area Hazardous chemicals shall be transported in approved chemical carts Hazardous chemicals shall not be dispensed or stored in exit access corridors * Chemical carts transporting or containing hazardous chemicals shall be designed so that the contents will be fully enclosed Chemical carts shall be capable of containing a spill from the largest single container transported, with a maximum individual container size of 20 L (5.3 gal) for liquids The capacity of carts used for the transportation of hazardous chemicals shall not exceed the following: (1) Liquids: 208 L (55 gal) (2) Solids: 227 kg (500 lb) (3) Compressed gases: 7 cylinders, up to 18 kg (40 lb) each (4) SAGS: 7 cylinders, up to 18 kg (40 lb) each Incompatible chemicals shall not be transported simultaneously on the same hazardous chemical cart The minimum clear width of a service corridor shall be 1524 mm (5 ft) or 838 mm (33 in.) wider than the widest cart or truck used in the service corridor, whichever is greater Service corridors shall not be used as a required means of egress The maximum quantities of hazardous chemicals transported in a service corridor at one time shall not exceed two times that set forth in Storage and Handling of Hazardous Chemicals. Storage and handling of hazardous chemicals shall comply with applicable NFPA standards, including the following: (1) NFPA 30, Flammable and Combustible Liquids Code (2) NFPA 55, Compressed Gases and Cryogenic Fluids Code (3) NFPA 70, National Electrical Code (4) NFPA 385, Standard for Tank Vehicles for Flammable and Combustible Liquids (5) NFPA 400, Hazardous Materials Code 5.5* Separation of Hazardous Chemicals. 4 of 32 7/8/ :32 PM

23 5 of 32 7/8/ :32 PM Hazardous chemicals stored in hazardous chemical rooms shall be separated from incompatible materials in accordance with Table 5.5. Table 5.5 Minimum Separation of Hazardous Production Materials (HPMs) Material Highly Toxic Toxic Acid Base Flammable Oxidizer Water- Reactive Pyrophoric Unstable (Reactive) Organic Peroxide Highly toxic NR 1 hr 1 hr 1 hr 1 hr 1 hr 1 hr 1 hr 1 hr Toxic NR S S S S S S S S Acid 1 hr S S S* S S S* S S Base 1 hr S S S S S S S S Flammable 1 hr S S* S S R S S S Oxidizer 1 hr S S S S S S* S S Waterreactive 1 hr S S S R S S S S Pyrophoric 1 hr S S* S S S* S S S Unstable (reactive) 1 hr S S S S S S S S Organic peroxide 1 hr S S S S S S S S NR = required. 1 hr = 1-hour fire resistance rated construction. S = Separation by a partial noncombustible partition extending not less than 457 mm (18 in.) above and to the sides of the stored material. R = Separate rooms, which are not required to have a fire resistance rating. e: HPM gases are required to be separated from HPM liquids and solids by 1-hour fire resistance rated construction or are required to be kept in approved gas cabinets. HPM gases also are required to be separated from gases in other HPM hazard categories as required by Table 5.5, or are required to be kept in approved gas cabinets. *Separation by not less than 6 m (20 ft) is permitted in lieu of a noncombustible partition Hazardous chemical rooms and gas rooms shall be separated from the fabrication area by not less than 2-hour fire resistance rated construction, with the fire resistance rating in accordance with NFPA 5000, Building Construction and Safety Code, Chapter

24 6 of 32 7/8/ :32 PM Hazardous chemicals in the fabrication area shall be to those needed for operations and maintenance and as required by and , with quantities not exceeding the limitations specified in Table The limits of Table shall be permitted to be exceeded, provided a submittal using alternative methods and materials is approved by the authority having jurisdiction (AHJ). Table Quantity Limits for Hazardous Materials in a Single Fabrication Area Hazard Category Physical Hazard Materials Combustible liquid Solids Liquids Gas kg/m 2 lb/ft 2 L/m 2 gal/ft 2 m NTP/m 2 Class II Class III-A Class III-B Combination Class I, II, and III-A Cryogenic NTP/ft 2 Flammable e b e b Oxidizing Flammable gas Gaseous e b e b Liquefied e b e b Flammable liquid Class I-A Class I-B Class I-C Combination Class I-A, I-B, and I-C Combination Class I, II, and III-A Flammable solid Organic peroxide Unclassified detonable e a e a e a e a Class I e a e a e a e a Class II Class III Class IV Class V Oxidizing gas Gaseous Liquefied Combination of gaseous and liquefied Oxidizer

25 7 of 32 7/8/ :32 PM Class 4 e a e a e a e a Class Class Class Combination oxidizer Class 1, 2, Pyrophoric e a e a es b and c es b and c Unstable reactive Class 4 e a e a e a e a e a e a Class e a e a Class e a e a Class 1 Water reactive Class 3 e b e b Class Class 1 Hazard Category Solids Liquids Gas kg/m 2 lb/ft 2 L/m 2 gal/ft 2 m NTP/m 2 3 NTP/ft 2 Health Hazard Materials Carcinogens Corrosives Highly toxics e b e b Irritants Sensitizers Other health hazards Toxics e b e b e: Hazardous materials within piping not to be included in the calculated quantities. a Quantity of hazardous materials in a single fabrication not to exceed exempt amounts in NFPA 1, Fire Code. b The aggregate quantity of flammable, pyrophoric, toxic, and highly toxic gases not to exceed a density limit of 0.2 ft 3 per ft 2 at NTP. c The aggregate quantity of pyrophoric gases in the building to the amounts for which detached storage is not required as set forth in NFPA 1, Fire Code

26 8 of 32 7/8/ :32 PM Quantities of hazardous chemicals shall be to those in use within the tool or the daily (24-hour) supply of chemicals needed, with quantities not exceeding the limitations specified in Table unless a risk assessment determines that a significant fire is unlikely to take place. Table Maximum Quantities of Hazardous Chemicals at a Workstation Hazardous Chemical Flammables, highly toxics, and pyrophorics and toxics combined a Gas Hazardous chemical flammables Corrosives a Highly toxics Oxidizers a Pyrophorics Toxics Unstable reactives Class 3 Water reactives Class 3 State Maximum Amount Combined aggregate volume of all cylinders at a work station shall not exceed an internal cylinder volume of 150 L (39.6 gal, or 5.29 ft 3 ). Liquid 56.8 L (15 gal) a, b Solid 2.3 kg (5 lb) a, b, Combined aggregate volume of all cylinders at a work station Gas shall not exceed an internal cylinder volume of 150 L (39.6 gal, or 5.29 ft 3 ). Liquid a, b L (100 gal) Solid 9.1 kg (20 lb) Liquid 56.8 L (15 gal) a Solid 2.3 kg (5 lb) a Combined aggregate volume of all cylinders at a work station Gas shall not exceed an internal cylinder volume of 150 L (39.6 gal, or 5.29 ft 3 ). Liquid a, b 45.4 L (12 gal) Solid a, b 9.1 kg (20 lb) Liquid c, d 20 L (5.3 gal) Liquid 56.8 L (15 gal) a, b Solid 2.3 kg (5 lb) a, b Liquid 20 L (5.3 gal) a, b, d Solid 2.3 kg (5 lb) a, b Liquid 1.9 L ( 0.5 gal) c a Allowable quantities increased 100 percent for use-closed systems operations. When note b also applies, the increase for both requirements is allowed. b Allowable quantities are allowed to be increased 100 percent when tools are constructed of materials that are listed or approved for use without internal fire extinguishing or suppression or internally protected with an approved automatic fire-extinguishing or suppression system. When note a also applies, the increase for both notes is allowed. c Only in tools that are internally protected with an approved automatic fire-extinguishing or fire protection system compatible with the reactivity of materials in use at the workstation. d 20 L is acceptable, it is more reflective of current practices for volumes of materials used at individual tools * The amounts in Table shall be permitted to be exceeded if a risk assessment is performed and approved by the AHJ.

27 Storage of hazardous chemicals in the fabrication area shall be within approved or listed storage cabinets, gas cabinets, or exhausted enclosures, or within a tool Hazardous chemical storage and dispensing rooms shall have mechanical exhaust ventilation as follows: (1) Mechanical exhaust ventilation shall be at a minimum rate of 0.31 m 3 /min m 2 (1 ft 3 /min ft 2 ) of floor area. (2) Exhaust and inlet openings shall be arranged to prevent accumulation of vapors Incompatible Storage Incompatible hazardous materials shall be separated from each other in accordance with NFPA 1, Fire Code Only inert gas shall be used for pressurization of gas-over-liquid delivery systems Containers of chemicals shall be labeled to identify their contents. 5.6 Systems, Equipment, and Processes. Systems, equipment, and processes utilized for storage, dispensing, use, or handling of hazardous materials shall be in accordance with through Design and Construction of Containers, Cylinders, and Tanks Containers, cylinders, and tanks shall be designed and constructed in accordance with approved standards Containers, cylinders, tanks, and other means used for containment of hazardous materials shall be of an approved type Piping, tubing, valves, and fittings conveying hazardous materials shall be designed and installed in accordance with approved standards and shall be in accordance with of 32 7/8/ :32 PM

28 0 of 32 7/8/ :32 PM * Design and Construction. Piping, tubing, valves, fittings, and related components used for hazardous materials shall be in accordance with the following: (1) Piping, tubing, valves, fittings, and related components shall be designed and fabricated from materials that are compatible with the material to be contained and shall be of adequate strength and durability to withstand the pressure, structural, and seismic stress and exposure to which they are subject. (2) Piping and tubing shall be identified in accordance with ASME A13.1, Scheme for the Identification of Piping Systems, to indicate the material conveyed. (3) Readily accessible manual valves or automatic remotely activated fail-safe emergency shutoff valves shall be installed on supply piping and tubing at the following locations: (4) The point of use (5) The tank, cylinder, or bulk source (6) Manual emergency shutoff valves and controls for remotely activated emergency shutoff valves shall be identified and the location shall be clearly visible, accessible, and indicated by means of a sign. (7) Backflow prevention or check valves shall be provided when the backflow of hazardous materials could create a hazardous condition or cause the unauthorized discharge of hazardous materials. (8) Where gases or liquids have a hazard ranking of health hazard Class 3 or 4, flammability Class 4, reactivity Class 3 or 4.in accordance with NFPA 704, Standard System for the Identification of the Hazards of Materials for Emergency Response, and are carried in pressurized piping above gauge pressure of 103 kpa (15 psi), an approved means of leak detection and emergency shutoff or excess flow control shall be provided. Where the piping originates from within a hazardous material storage room or area, the excess flow control shall be located within the storage room or area Hazard Chemical Storage Cabinets. Hazardous chemicals shall be stored within enclosed storage cabinets or workstations Within hazardous materials storage or dispensing rooms, enclosures shall not be required Incompatible chemicals shall not be stored in the same cabinet Storage cabinets shall be constructed of not less than 1.2 mm (18 gauge) steel Doors shall be self-closing and shall be provided with a latching device Approved safety containers shall be used to store flammable liquids Where needed for purity, glass or plastic containers shall be permitted for quantities of 4 L (1 gal) or less per individual container. 5.7 Supply Piping Supply piping for hazardous chemical liquids and gases shall be welded throughout, except for connections to the systems that are located within a ventilated enclosure if the material is a gas, or an approved method of drainage or containment shall be provided for connections if the material is a liquid Hazardous chemicals piping and tubing shall comply with ASME B31.3, Process Piping Supply piping for all liquids shall be hydrostatically tested to 150 percent of the maximum allowable working pressure for 2 hours with no visible leakage or loss of pressure. 5.8 Welding Welders and pipefitters shall be trained and qualified for the specific function they are performing.

29 1 of 32 7/8/ :32 PM 5.8.2* Thermoplastic welders for critical components shall be trained and qualified for the specific function they are performing. Statement of Problem and Substantiation for Public Input This just adds the reference to NFPA 704, relocated from the definitions chapter, to comply with the Manual of Style. Related Public Inputs for This Document Related Input Public Input No. 10-NFPA [Section No ] Relationship Submitter Information Verification Submitter Full Name: MARCELO HIRSCHLER Organization: GBH INTERNATIONAL Street Address: City: State: Zip: Submittal Date: Tue Jun 30 19:17:50 EDT 2015

30 2 of 32 7/8/ :32 PM Public Input No. 9-NFPA [ Section No [Excluding any Sub-Sections] ]

31 3 of 32 7/8/ :32 PM Hazardous chemicals in the fabrication area shall be to those needed for operations and maintenance and as required by and , with quantities not exceeding the limitations specified in Table 5.5.2, based on the exempt amounts per control area in NFPA 1, Fire Code, and NFPA 5000, Building Construction and Safety Code. The limits of Table shall be permitted to be exceeded, provided a submittal using alternative methods and materials is approved by the authority having jurisdiction (AHJ). Table Quantity Limits for Hazardous Materials in a Single Fabrication Area Hazard Category Physical Hazard Materials Combustible liquid Solids Liquids Gas kg/m 2 lb/ft 2 L/m 2 gal/ft 2 m NTP/m 2 Class II Class III-A Class III-B Combination Class I, II, and III-A Cryogenic NTP/ft 2 Flammable e b e b Oxidizing Flammable gas Gaseous e b e b Liquefied e b e b Flammable liquid Class I-A Class I-B Class I-C Combination Class I-A, I-B, and I-C Combination Class I, II, and III-A Flammable solid Organic peroxide Unclassified detonable e a e a e a e a Class I e a e a e a e a Class II Class III Class IV Class V Oxidizing gas Gaseous Liquefied Combination of gaseous and liquefied

32 4 of 32 7/8/ :32 PM Oxidizer Hazard Category Solids Liquids Gas kg/m 2 lb/ft 2 L/m 2 gal/ft 2 m NTP/m 2 Class 4 e a e a e a e a Class Class NTP/ft 2 Class Combination oxidizer Class 1, 2, Pyrophoric e a e a es b and c es b and c Unstable reactive Class 4 e a e a e a e a e a e a Class e a e a Class e a e a Class 1 Water reactive Class 3 e b e b Class Class 1 Health Hazard Materials Carcinogens Corrosives Highly toxics e b e b Irritants Sensitizers Other health hazards Toxics e b e b e: Hazardous materials within piping not to be included in the calculated quantities. a Quantity of hazardous materials in a single fabrication not to exceed exempt amounts in NFPA 1, Fire Code. b The aggregate quantity of flammable, pyrophoric, toxic, and highly toxic gases not to exceed a density limit of 0.2 ft 3 per ft 2 at NTP. c The aggregate quantity of pyrophoric gases in the building to the amounts for which detached storage is not required as set forth in NFPA 1, Fire Code.

33 5 of 32 7/8/ :32 PM Statement of Problem and Substantiation for Public Input This brings the requirements from into the body of the standard, to comply with the Manual of Style. Related Public Inputs for This Document Related Input Public Input No. 8-NFPA [Section No ] Relationship Submitter Information Verification Submitter Full Name: MARCELO HIRSCHLER Organization: GBH INTERNATIONAL Street Address: City: State: Zip: Submittal Date: Tue Jun 30 19:05:02 EDT 2015

34 6 of 32 7/8/ :32 PM Public Input No. 18-NFPA [ Section No ] Tools shall be constructed of noncombustible materials, except as permitted by or by Small parts within the tool such as knobs, buttons, electrical contacts, and terminal strips shall not be required to be of noncombustible materials * Materials listed, in accordance with the requirements contained in ANSI/FM 4910, Standard for Cleanroom Materials Flammability Test Protocol, or with the requirements contained in ANSI/UL 2360, Standard Test Method for Determining the Combustibility Characteristics of Plastics Used in Semiconductor Tool Construction, for use without internal fire detection and suppression shall be permitted to be used as an acceptable alternative to noncombustible materials, where process concerns or process chemicals require alternatives. Statement of Problem and Substantiation for Public Input Instead of having to go to the annex, the methods for approving materials as alternatives to non-combustible materials should be included in the body of the standard. The annex indicates that FM 4910 and UL 2360 are the tests used for listing such materials. Submitter Information Verification Submitter Full Name: MARCELO HIRSCHLER Organization: GBH INTERNATIONAL Street Address: City: State: Zip: Submittal Date: Mon Jul 06 17:26:27 EDT 2015

35 7 of 32 7/8/ :32 PM Public Input No. 15-NFPA [ Section No. A ] A A subatmospheric gas source (SAGS) reduces the risk and magnitude of gas releases. In a SAGS, a vacuum (subatmospheric) condition is required to induce gas flow from the cylinder. An accidental opening of the valve under atmospheric conditions will result in little or no gas release. In a Type 1 SAGS, gas is adsorbed on a medium (with internal pressure of less than kpa at 20 C and less than 300 kpa at 50 C as defined in the UN Model Regulations, i.e. positive pressure above 20 C) and is released under a vacuum condition. In a Type 2 SAGS, the pressure driver is mitigated via a normally closed internal valve that requires a vacuum condition to release the gas. Because of its improved built-in safety features, a SAGS should be used instead of standard high-pressure cylinder gas wherever process compatibility allows. Statement of Problem and Substantiation for Public Input In A , the sentence An accidental opening of the valve under atmospheric conditions will result in little or no gas release. was deleted because we should not include accident scenarios in a standard. The first sentence states (SAGS) reduces the risk an magnitude of gas releases. which implies improved safety without going into the many specific benefits and the many different accident scenarios. In A , the parenthetical text (with internal pressure of less than kpa at 20 C and less than 300 kpa at 50 C as defined in the UN Model Regulations, i.e. positive pressure above 20 C) was added in order to provide important information about Type 1 SAGS. Users should be aware that Type 1 SAGS can be above atmospheric pressure at higher temperatures, typically above 25 C. It is common for Type 1 to be above atmospheric pressure under normal storage, handling and use conditions. An accidental opening of the valve under atmospheric conditions and temperatures above 25 C, Type 1 will result in a puff of gas release followed by gas desorbing from the media. The definition in the UN Model regulations was referenced because it includes pressure and temperature values accepted by DOT and internationally. The statement i.e. positive pressure above 20 C makes the reader aware that Type 1 can be positive pressure at higher temperatures. Submitter Information Verification Submitter Full Name: RONALD FUHRHOP Organization: Praxair Inc. Street Address: City: State: Zip: Submittal Date: Mon Jul 06 11:00:05 EDT 2015

36 8 of 32 7/8/ :32 PM Public Input No. 16-NFPA [ Section No. A ] A A Type 1 SAGS has an inherent flow restriction because the cylinder s internal gas pressure is subatmospheric at 20 C. At temperatures typically above 25 C, the pressure will be above atmospheric. Statement of Problem and Substantiation for Public Input In A , the added language that makes the reader aware that Type 1 SAGS can be positive pressure at temperatures typically above 25 C. Users should be aware that positive pressure can exist and it should be addressed when evaluating release scenarios. It is common for Type 1 to be above atmospheric pressure under normal storage, handling and use conditions. An accidental opening of the valve under atmospheric conditions and temperatures above 25 C, Type 1 will result in a puff of gas release followed by gas desorbing from the media. Submitter Information Verification Submitter Full Name: RONALD FUHRHOP Organization: Praxair Inc. Street Address: City: State: Zip: Submittal Date: Mon Jul 06 11:10:28 EDT 2015

37 Public Input No. 3-NFPA [ Section No. D.1.2 ] D.1.2 Other Publications. D ANSI ASME Publications. American National Standards Institute, Inc., 25 West 43rd Street, 4th floor, ASME International, Two Park Avenue, New York, NY ANSI B31 ASME B31.3, Chemical Plant and Petroleum Refinery Power Piping, ANSI/ ISA S84.01, Application of Safety Instrumented Systems for the Process Industries, (Superseded by ISA P1 Functional Safety: Safety Instrumented Systems For The Process Industry Sector - Part 1: Framework, Definitions, System, Hardware And Software Requirements, 2004.) D ASTM Publications. ASTM International, 100 Barr Harbor Drive, P.O. Box C700, West Conshohocken, PA IEEE/ASTM SI 10, American National Standard for Use of the International System of Units (SI): The Modern Metric System, 2002 Metric Practice, 2010, Revised ASTM E 1354 E1354, Standard Test Method for Heat and Visible Smoke Release Rates for Materials and Products Using an Oxygen Consumption Calorimeter, ASTM E 2058 E2058, Standard Test Methods for Measurement of Synthetic Polymer Material Flammability Using a Fire Propagation Apparatus (FPA), D CGA Publications. Compressed Gas Association, George Carter Way, Chantilly, VA CGA G-13, Storage and Handling of Silane and Silane Mixtures, D FM Publications. FM Global, 1301 Atwood Avenue 270 Central Avenue, P.O. Box 7500, Johnston, RI FMApproval 4910, Clean Room Materials Flammability Test Protocol, September FMApproval 4922, Fume Exhaust Ducts or Fume and Smoke Exhaust Ducts, April D SEMI Publications. Semiconductor Equipment and Materials International, 3081 Zanker Road, San Jose, CA SEMI S2-0703a, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment, e. SEMI S14, Safety Guidelines for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing Equipment, D UL Publications. Underwriters Laboratories Inc., 333 Pfingsten Road, Northbrook, IL ANSI/ UL 2360, Standard Test Method for Determining the Combustibility Characteristics of Plastics Used in Semiconductor Tool Construction, 2000, Revised D U.S. Government Publications. U.S. Government Printing Office, Washington, DC Title 29, Code of Federal Regulations, Part , Air Contaminants. Title 49, Code of Federal Regulations, Part 173, Appendix A, Transportation. Statement of Problem and Substantiation for Public Input Referenced current SDO names, addresses, standard names and editions. Related Public Inputs for This Document 9 of 32 7/8/ :32 PM