SOP FOR FEP CENTURA TOOL

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Garry Blair
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SOP FOR FEP CENTURA TOOL Check list before starting the tool from facility : CDA Pressure Chiller

cylinder for system FEP Tool start-up procedure : 1. ON main Breaker 2. EMO CKTS ON 3.

Log in system User Name : -------------- Password :----------------- 6. Turn ON Load Lock pump.

1 SOP FOR FEP CENTURA TOOL Check list before starting the tool from facility : CDA Pressure Chiller temp. for child water Heat Exchanger operation (water level, alarm) Exhaust Fan Should be ON Purge cylinder for system FEP Tool start-up procedure : 1. ON main Breaker 2. EMO CKTS ON 3. MACH CKTS ON from main controller 4. DC power ON from VME controller 5. Log in system User Name : Password : Turn ON Load Lock pump. (Pump down both load locks (LLA and LLB) and put ONLINE for use) 7. Turn ON Buffer pump and put Buffer chamber Online. LOAD LOCK PUMP BUFFER PUMP

CHAMBER A (DPN CHAMBER) 1. Turn ON chamber A (DPN ) pump.

Pump down chamber by opening roughing valve. 4.

5. Turn ON TURBO pump (wait till TURBO at speed ) 6.

Once TURBO comes at speed condition open Isolation valve

2 CHAMBER A (DPN CHAMBER) 1. Turn ON chamber A (DPN ) pump. 2. Take lift release position (If Required) 3. Pump down chamber by opening roughing valve. 4. Pump down chamber till chamber pressure reach mtorr range. 5. Turn ON TURBO pump (wait till TURBO at speed ) 6. Close roughing valve. 7. Once TURBO comes at speed condition open Isolation valve and pump down chamber thru TURBO. 8. Put chamber ONLINE for process. Isolation Valve Turbo PUMP Roughing Valve

CHAMBER B (POLYGEN CHAMBER) 1. Turn ON chamber B (Polygen) pump. Wait till fore line pressure come down at 50-100 m Toor range. 2.

Wait till chamber pump down at mtorr range. 5. Set heater temperature as per recipe.(if Required ) 6.

3 CHAMBER B (POLYGEN CHAMBER) 1. Turn ON chamber B (Polygen) pump. Wait till fore line pressure come down at m Toor range. 2. Take lift release position (If Required) 3. Pump down chamber by opening Isolation valve. 4. Wait till chamber pump down at mtorr range. 5. Set heater temperature as per recipe.(if Required ) 6. Once heater reach at set temperature then put chamber ONLINE for process. NOTE : Please do not set TEMPERTURE without chamber pump down. PUMP Isolation Lift Home Temp. Set Put Chamber ONLINE from

CHAMBER C (RTP CHAMBER) 1. Make sure Load Lock Pump is ON. 2.

(Pump will be ON automatic, No need to ON pump manually.) 3.

Put Chamber from COLD idle to HOT idle and wait for 60 sec. 5.

sec. 6. After waiting 60 sec. chamber will be ready for process.

4 CHAMBER C (RTP CHAMBER) 1. Make sure Load Lock Pump is ON. 2. If quartz pressure (DOME pressure) is ok then put chamber ONLINE. (Pump will be ON automatic, No need to ON pump manually.) 3. After pumping chamber C (RTP) chamber will show COLD idle. 4. Put Chamber from COLD idle to HOT idle and wait for 60 sec. 5. Then put chamber from HOT idle to ACTIVE idle and wait for 60 sec. 6. After waiting 60 sec. chamber will be ready for process. Put Chamber ONLINE from here and change chamber statues (like from COLD to HOT and from HOT to ACTIVE) Quartz window Pressure Observe time hear

CHAMBER D (HIGH_K CHAMBER) 1. Turn ON chamber B (Polygen) pump. Wait till fore line pressure come down at 50-100 m Toor range. 2.

Set heater temperature as per recipe.(if Required ) 6. Put LDS ONLINE.

5 CHAMBER D (HIGH_K CHAMBER) 1. Turn ON chamber B (Polygen) pump. Wait till fore line pressure come down at m Toor range. 2. Take lift release position (If Required) 3. Pump down chamber by opening Isolation valve. 4. Wait till chamber pump down at mtorr range. 5. Set heater temperature as per recipe.(if Required ) 6. Put LDS ONLINE.(Before putting LDS ONLINE make sure HE gas, N2 carry gas is connected) 7. Once heater reach at set temperature then chamber will be ready for process. PUMP Isolation Valve Heater Lift Temp. Set Put Chamber ONLINE from

6 FEP Tool SHUT-DOWN procedure : CHAMBER A (DPN ) 1. Put chamber OFFLINE. 2. Close Isolation valve. 3. Put Turbo pump OFF.(Wait till turbo goes to mode) 4. Shut OFF roughing pump. CHAMBER B (POLYGEN) 1. Put chamber OFFLINE. 2. Set heater temp at ZERO. (Wait till heater ramp down up to below 100 C.)If required. 3. Close Isolation valve. 4. Shut OFF roughing pump. CHAMBER C (RTP) 1. Put chamber OFFLINE (Chamber will be goes ACTIVE idle to Hot idle then from HOT idle to COLD idle automatic. 2. Pump will be shut OFF automatic. 3. For safety stand point keep RTP roughing pump MCB OFF from MCB cabinet. CHAMBER D (HIGH-K) 1. Put Chamber OFFLINE. (LDS Will go OFFLINE automatic.) 2. Set heater temp at ZERO. (Wait till heater ramp down up to below 100 C.)If required 3. Close Isolation valve. 4. Shut OFF roughing pump. MAINFRAME SHUTOFF PROCUDURE : 1. Put both load lock chamber OFFLINE. 2. SHUT OFF LOAD LOCK roughing pump. 3. Put Buffer chamber OFFLINE.(wait till PVC valve close) 4. Shot OFF Buffer roughing pump. 5. Turn OFF DC power from VME controller. 6. Turn OFF MACHINE circuit from main controller. 7. Turn OFF MAIN BREAKER from main controller.

Plasma-Therm 790 RIE (Reactive Ion Etcher) Basic Operation Guide

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