AXCELIS NV-GSD-HE EQUIPMENT DATASHEET

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1 AXCELIS NV-GSD-HE Tool ID M9IHE101 OEM/Model AXCELIS NV-GSD-HE Serial Number Process IMPLANT - HE Vintage January, 1995 Wafer Size 200 mm AG Semiconductor Services sales@agsemiconductor.com 1

2 1. Utility Configuration: a. Tool Specification: - Line Power Input Power: 480VAC, 3P, 60HZ, 87KVA Output Power: 1MeV, 1mA - Weight 40,900 / 18,552 Lbs / kg - b. Utility Gas: Gas Name Usage Connection Type Size Remark CDA Machine Air Swagelok 3/8 SUS male Ar Process Ar Swagelok N/A PN2 Process Vent Swagelok 3/8 SUS male Use for N2 vent GN2 Purge Vent Swagelok N/A Gas box N2 Gas Box Swagelok 3/8 SUS male SF6 Linac Swagelok 3/8 SUS male charge port c. Exhaust: Description Type Flow Rate (CFM) Size Q'ty Exhaust Hood Remark Environment GEX 500 4", PVC 4 Y No air hood, and fan motor Cryo Pump SEX 40 1", SUS 1 Y pipe direct to SEX Gas Cabinet SEX 600 2", PVC 2 Y No air hood, and fan motor RP exhaust SEX 100 KF-40, Clamp 3 Y pipe direct to local scrubber AG Semiconductor Services sales@agsemiconductor.com 2

3 d. Cooling Water: Description Pressure (PSI) Flow Rate (GPM) Temp. ( C) Size Q'ty Remark City Water ", SUS, Clamp 1 Triple Loop Chiller City Water ", SUS, Clamp 1 Disk Chiller DI Water Refill manual manual N/A 1", PVC, Clamp 1 2. System Configuration: a. Endstation Module: - Mini-Environment DEXON - ATM Robot STD, cover ok P/N: , S/N: Notch/Flat Finder Flat - Dummy Cassette 1 - Load Buffer 2 - Vacuum Cassette 1 - Cassette Table 4 AG Semiconductor Services sales@agsemiconductor.com 3

4 - Load Port Interface RFID / AGV - Beam Profile Oscilloscope OK - Cell Controller STD - Loadlock Type GSD 100 / 200, HE - Main SUN Computer SPARC server 10 - Main Monitor OK - Second SUN Computer SPARC station 5 P/N: , S/N: Second SUN Monitor OK - Tape Reader OK - Printer N/A b. Process Module: - Disk NV-GSD Faraday Flag OK - Electron Plasma Shower N/A - Electron Shower Controller N/A - Ar/Xe Bleed MFC N/A AG Semiconductor Services sales@agsemiconductor.com 4

5 - In-Vac Arm OK - Wafer Holder OK - Pedestal OK - Gyro OK - Linear Drive OK - Rotary Drive Belt Drive c. Beamline Module: - HV Power Supply Hitek Power Inc. - HV Stack OL8000/ 104 / 05, 100KV S/N: Post Accel. Volt Max. 1 MeV - Extraction Suppression PS 1 - AMU BSL - AMU PS EMI EMS Hall Probe AMU/FEM - Linac System HE STD - Resonator 10 - RF Power Supply AE A x 1 ea AE C x 2 ea AG Semiconductor Services sales@agsemiconductor.com 5

AE 3155038-001E x 3 ea AE 3155038-004A x 1 ea RFG-3001 x 3 ea - Quad Power Supply GHI PS/NVQ20PN15 x 1 ea GHI PS/NV20PN15 x 9 ea - FEM BSL - FEM Power Supply EMI EMS 30-165 x 2 ea S/N: 94L-2966,

6 AE E x 3 ea AE A x 1 ea RFG-3001 x 3 ea - Quad Power Supply GHI PS/NVQ20PN15 x 1 ea GHI PS/NV20PN15 x 9 ea - FEM BSL - FEM Power Supply EMI EMS x 2 ea S/N: 94L-2966, 20F-6586 d. Source Module: - Source Head ELS - Filament PS EMI EMS Arc PS EMI EMS Cathode PS OK - Vaporizer PS N/A - Source Magnet STD - Source Magnet PS EMI EMS Source Bushing OK - Extraction Assembly HE, Single Aperture - Vaporizer N/A AG Semiconductor Services sales@agsemiconductor.com 6

7 e. Gas Box Module: - Gas Box Type Modular Type - Gas Loop #1 BF3, HP - Gas Loop #2 Ar, HP - Gas Loop #3 AsH3, SDS - Gas Loop #4 PH3, SDS - Loop #1 MFC UNIT UFC-8160, N2, 10 sccm - Loop #2 MFC UNIT UFC-8160, N2, 10 sccm - Loop #3 MFC UNIT UFC-8162, N2, 10 sccm - Loop #4 MFC UNIT UFC-8160, N2, 10 sccm f. Vacuum System: - P1 / Source Turbo SS/BOC-Edwards, STP-1000C S/N: 2279R - P1 Controller Seiko Seiki, STP-1000C - P2 / Resolving Cryo Pump CTI OB-8 - P3 / V3 Cryo Pump CTI OB-10 M/N: EPECA0023, S/N: P4 / Linac Turbo (Right) Seiko Seiki, STP-1000C S/N: P4 Controller Seiko Seiki, STP P5 / Linac Turbo (Left) Seiko Seiki, STP-600, S/N: P5 Controller BOC-Edwards, STP P8 / Beam Guide Turbo LH, M/N: Turbovac 1000C S/N: A P8 Controller LH, Turbotronik, NT 1000/1500VH AG Semiconductor Services sales@agsemiconductor.com 7

8 - P9 / Disk Cryo Pump CTI OB-250F - RP1 (in Main System) BOC Edwards iqdp80 S/N: i RP2 BOC Edwards iqdp80 S/N: RP4 BOC Edwards iqdp80 S/N: IG1 Axcelis IG2 Axcelis IG3 Axcelis IG4 Axcelis g. Safety Options: - VESDA N/A - Smoke Detector N/A - CES Options N/A h. Others: - Enclosures OK - Ground Bars 4 PCS - Door Lock Keys/Spare 3 / 0 ea - Drawings / Manuals N/A AG Semiconductor Services sales@agsemiconductor.com 8

9 3. Sub-Systems: Maker: Affinity Triple Loop Chiller Model No.: CWA-200L-HE-3 LP S/N: Maker: Affinity Disk Chiller Model No.: RWA-012J-BE03CB S/N: RP2 Maker: BOC Edwards M/N: iqdp80 S/N: RP4 Maker: BOC Edwards M/N: iqdp80 S/N: Maker: No UPS System UPS M/N: S/N: AG Semiconductor Services 9

Compressor 1 Maker: CTI M/N: 8510 S/N: 67E9507280

10 Compressor 1 Maker: CTI M/N: 8510 S/N: 67E Compressor 2 Maker: CTI M/N: 8510 S/N: 67D Local Scrubber Maker: JPC M/N: WGC-7A-2 S/N: N/A AG Semiconductor Services sales@agsemiconductor.com 10

11 AG Semiconductor Services 11

AXCELIS NV-GSD-HE EQUIPMENT DATASHEET

AXCELIS NV-GSD-HE EQUIPMENT DATASHEET AXCELIS NV-GSD-HE Tool ID M7THE707 OEM/Model AXCELIS NV-GSD-HE Serial Number 900282 Process IMPLANT - HE Vintage August, 2006 Wafer Size 200 mm AG Semiconductor Services sales@agsemiconductor.com www.agsemiconductor.com