AXCELIS NV-GSD-HE EQUIPMENT DATASHEET
|
|
- Willa Crawford
- 6 years ago
- Views:
Transcription
1 AXCELIS NV-GSD-HE Tool ID M7THE707 OEM/Model AXCELIS NV-GSD-HE Serial Number Process IMPLANT - HE Vintage August, 2006 Wafer Size 200 mm AG Semiconductor Services sales@agsemiconductor.com 1
2 1. Utility Configuration: a. Tool Specification: - Line Power Input Power: 480VAC, 3P, 60HZ, 99, 87KVA Output Power: 1MeV, 1mA - Weight 30,000 / 13,600 Lbs / kg - b. Utility Gas: Gas Name Usage Connection Type Size Remark CDA Machine Air Swagelok 3/8 SUS male Ar Process Ar Swagelok 1/2 SUS male No use PN2 Process Vent Swagelok 1/2 SUS male GN2 Purge Vent Swagelok 3/8 SUS male Gas box N2 Gas Box Swagelok 3/8 SUS male SF6 Linac Swagelok 3/8 SUS male charge port c. Exhaust: Description Type Flow Rate (CFM) Size Q'ty Exhaust Hood Remark Environment GEX 500 4", PVC 4 Y No exhaust hood Cryo Pump SEX 40 1", SUS 1 Y pipe direct to SEX Gas Cabinet SEX 600 2", PVC 2 Y With exhaust hood RP exhaust SEX 100 KF-40, Clamp 3 Y pipe direct to local scrubber AG Semiconductor Services sales@agsemiconductor.com 2
3 d. Cooling Water: Description Pressure (PSI) Flow Rate (GPM) Temp. ( C) Size Q'ty Remark City Water ", SUS, Clamp 1 Triple Loop Chiller City Water ", SUS, Clamp 1 Disk Chiller DI Water Refill manual manual N/A 1", PVC, Clamp 1 2. System Configuration: a. Endstation Module: - Mini-Environment Synetics - ATM Robot STD P/N: , S/N: Notch/Flat Finder Flat - Dummy Cassette 1 - Load Buffer 2 - Vacuum Cassette 1 AG Semiconductor Services sales@agsemiconductor.com 3
4 - Cassette Table 4 - Load Port Interface AGV - Beam Profile Oscilloscope 1 - Cell Controller 1 - Loadlock Type GSD 100 / 200, HE - Main SUN Computer LEAN S/N: Main Monitor OK - Tape Reader OK - Printer N/A b. Process Module: - Disk NV-GSD Faraday Flag OK - Electron Plasma Shower N/A - Ar/Xe Bleed MFC N/A - In-Vac Arm OK AG Semiconductor Services sales@agsemiconductor.com 4
5 - Wafer Holder OK - Pedestal OK - Gyro OK - Linear Drive OK - Rotary Drive Direct Drive c. Beamline Module: - HV Power Supply Hitek Power Inc. - HV Stack OL8000/ 104 / 05, 100KV - Post Accel. Volt Max. 5 MeV - Extraction Suppression PS 1 - AMU BSL - AMU PS EMI EMS Hall Probe AMU/FEM - Linac System HE STD - Resonator 10 - RF Power Supply AE D x 1 ea RFG-3001 x 9 ea - Quad Power Supply GHI PS/NVQ20PN15 x 5 ea AG Semiconductor Services sales@agsemiconductor.com 5
6 - FEM BSL - FEM Power Supply EMI EMS x 2 ea d. Source Module: - Source Head ELS - Filament PS EMI EMS Arc PS EMI EMS Cathode PS OK - Vaporizer PS N/A - Source Magnet STD - Source Magnet PS EMI EMS Source Bushing OK - Extraction Assembly HE - Vaporizer N/A e. Gas Box Module: - Gas Box Type Module Type - Gas Loop #1 Ar, HP - Gas Loop #2 BF3, HP AG Semiconductor Services sales@agsemiconductor.com 6
7 - Gas Loop #3 AsH3, SDS - Gas Loop #4 PH3, SDS - Loop #1 MFC UNIT UFC-8160, N2, 10 sccm - Loop #2 MFC UNIT UFC-8160, N2, 10 sccm - Loop #3 MFC UNIT UFC-8162, N2, 10 sccm - Loop #4 MFC UNIT UFC-8162, N2, 10 sccm f. Vacuum System: - P1 / Source Turbo BOC-Edwards, STP-A2203C2 S/N: M P1 Controller BOC-Edwards, SCU P2 / Resolving Cryo Pump CTI OB-8 - P3 / V3 Cryo Pump CTI OB-10 - P4 / Linac Turbo (Right) BOC-Edwards, STP-603C S/N: M P4 Controller Seiko Seiki, STP-603C - P5 / Linac Turbo (Left) Seiko Seiki, STP-1003C S/N: M P5 Controller BOC-Edwards, SCU P8 / Beam Guide Turbo LH, M/N: PK-S 830 S/N: P8 Controller LH, M/N: EP5CC0005 S/N: P9 / Disk Cryo Pump CTI OB-8F - RP1 BOC Edwards IH600 S/N: AG Semiconductor Services sales@agsemiconductor.com 7
8 - RP2 BOC Edwards IH600 S/N: RP4 BOC Edwards IH600 S/N: IG1 Axcelis IG2 Axcelis IG3 Axcelis IG4 Axcelis g. Safety Options: - VESDA N/A - Smoke Detector N/A - CES Options N/A h. Others: - Enclosures OK - Ground Bars 4 PCS - Door Lock Keys/Spare 3 / 2 ea - Drawings / Manuals N/A AG Semiconductor Services sales@agsemiconductor.com 8
9 3. Sub-Systems: Maker: SMC Thermo Triple Loop Chiller Model No.: INR B S/N: JU004(JUL 2005) Maker: Affinity Disk Chiller Model No.: RWA-012J-BE03CB S/N: RP1 Maker: BOC Edwards M/N: IH600 S/N: RP2 Maker: BOC Edwards M/N: IH600 S/N: RP4 Maker: BOC Edwards M/N: IH600 S/N: AG Semiconductor Services 9
10 System UPS Maker: ESCORT M/N: ESCORT-3500 S/N: Compressor 1 Maker: CTI M/N: 9600 S/N: H Compressor 2 Maker: CTI M/N: 9600 S/N: H AG Semiconductor Services sales@agsemiconductor.com 10
11 AG Semiconductor Services 11
12 AG Semiconductor Services 12
13 AG Semiconductor Services 13
AXCELIS NV-GSD-HE EQUIPMENT DATASHEET
AXCELIS NV-GSD-HE Tool ID M9IHE101 OEM/Model AXCELIS NV-GSD-HE Serial Number 90009 Process IMPLANT - HE Vintage January, 1995 Wafer Size 200 mm AG Semiconductor Services sales@agsemiconductor.com www.agsemiconductor.com
More informationTEL UNITY85DD EQUIPMENT DATASHEET
TEL UNITY85DD Tool ID RO88 OEM/Model TEL UNITY85DD Serial Number U00961 Process OXIDE ETCH Vintage FEBRUARY, 1998 Wafer Size 200 mm AG Semiconductor Services sales@agsemiconductor.com www.agsemiconductor.com
More informationDNS FS-820L EQUIPMENT DATASHEET
DNS FS-820L Tool ID HI13 OEM/Model DNS FS-820L Serial Number 54520-0503 Process WET - PROCESS Vintage JANUARY 1995 Wafer Size 200 mm AG Semiconductor Services sales@agsemiconductor.com www.agsemiconductor.com
More informationTube Cleaners.
Tube Cleaners www.elliott-tool.com Tube Cleaners Table of Contents Pg. Tube Cleaners 2 5370 Jiffy Gun 3 537100C Jumbo Jiffy Gun 4 Jiffy Gun & Jumbo Jiffy Gun Spares & Accessories 5 Soot Buster 5 Soot
More informationhttp://www.globalfoundriesusedequipment.com/iinfo.cfm?itemno=9294 a. General Cat Vendor / Supplier Model Process Vintage (Year of Manufacture) Serial No. Asset Tool Status (Unhooked/Cold shutdown /Warm
More informationPHI Quantera II Consumable Parts List
Consumable Parts List Contents VACUUM SYSTEM... 2 PUMPS... 2 GAUGES... 2 GASES... 2 SEALS (Gaskets/O-Rings)... 3 COMPONENT PARTS... 4 ANALYZER... 4 NEUTRALIZER... 4 ION GUNS... 4 X-RAY SOURCE (MONOCHROMATOR)...
More informationTube Cleaners.
Tube Cleaners www.elliott-tool.com Tube Cleaners Table of Contents Pg. Tube Cleaners 2 5370 Jiffy Gun 3 537100C Jumbo Jiffy Gun 4 Jiffy Gun & Jumbo Jiffy Gun Spares & Accessories 5 Soot Buster 5 Soot
More informationFRONT END ENCLOSURE (FEE) - ROOM DATA SHEET
ROOM DATA SHEETS FACILITY COMPONENT WBS and System Managers: Richard Bionta/ John Arthur FRONT END ENCLOSURE (FEE) - ROOM DATA SHEET Name of Building LCLS Organization or Department SLAC, Stanford University
More informationPressure Transducers Ultrahigh-Purity
www.swagelok.com Pressure Transducers Ultrahigh-Purity PTU Series Single-end, flow-through, and modular surface-mount models Positive pressure ranges to 5000 psi, 400 bar, and 40 MPa; compound pressure
More informationRecirculating Coolers
09 Recirculating Coolers (chillers) General Recirculating Coolers Low Temp. Recirculating Coolers Advanced Low Temp. Recirculating Coolers High Temp. Recirculating Coolers Compact Recirculating Cooler
More informationTHEORY OR OPERATION 2 SENSOR UNIT - MECHANICAL 6 SENSOR UNIT - ELECTRICAL 8 CONTROL UNIT - MECHANICAL 9 CONTROL UNIT - ELECTRICAL 9 OPTIONS 11
Table of Contents INTRODUCTION 1 THEORY OR OPERATION 2 DESCRIPTION 5 SENSOR UNIT - MECHANICAL 6 SENSOR UNIT - ELECTRICAL 8 CONTROL UNIT - MECHANICAL 9 CONTROL UNIT - ELECTRICAL 9 SPECIFICATIONS 10 OPTIONS
More informationWater Circulator (Chiller) & Cold Trap
Yamato Scientific America Innovating Science for Over 125 Years Water Circulator (Chiller) & Cold Trap Contents Water Circulator (Chiller) Cold Trap CA Series Page Page 91 93 9 Water Circulator (Chiller)
More informationApplications and Accessories, Cryo Pumps
General Applications and Accessories, Cryo Pumps Cryo pumps Application UHV systems Beam tubes in particle accelerators Transfer chambers / Loadlock General research Evaporation coating systems Sputtering
More informationCool IR. Model C104 - Cooling System. Instruction Manual
Cool IR Model C104 - Cooling System Instruction Manual February 26, 2015 Research, Inc. USA Ph: 952.949-9009 Fax: 952.949-9559 tsdsales@researchinc.com www.researchinc.com Table of Contents List of Figures...
More informationInstallation and Maintenance Manual Please retain this manual for future reference.
342 N. Co. Rd. 400 East Valparaiso, IN 46383 219-464-8818 Fax 219-462-7985 www.heatwagon.com Installation and Maintenance Manual Please retain this manual for future reference. Electric Construction Heaters
More informationOperating Instructions for the STS ICP Metal Etcher
Operating Instructions for the STS ICP Metal Etcher Tool Owner: Pat Watson, gwatson@princeton.edu, x 8-4626, cell: 732 996 2713 Backup: Joe Palmer, jpalmer@princeton.edu, x 8-4706, cell: 609 751 1353 Introduction
More informationGerber Innovations M Series Laser. Site Preparation & Installation Manual
Gerber Innovations M Series Laser Site Preparation & Installation Manual Copyright Notice COPYRIGHT 2011 Gerber Innovations, Inc. All Rights Reserved. This document may not be reproduced by any means,
More informationRemote. control unit. accessories. Leak detector SmartTest. Remote control unit for SmartTest. Remote. Vacuum analysis and measurement
Vacuum analysis and measurement Leak detector SmartTest Remote control unit Remote control unit for SmartTest Remote control unit Rugged and reliable Easy operation Clear and unambiguous display Integrated
More informationUsing the DewTrak II Dew Point/ Humidity Transmitter
APPLICATION NOTE 2016_FEB2 DT Rev 10 Using the DewTrak II Dew Point/ Humidity Transmitter The Model DewTrak ll Dew Point/Humidity Transmitter is a compact, cost effective, optical chilled mirror hygrometer.
More informationSITE CONDITIONS Design Altitude < 3,280 Ambient Temperature F Humidity < 80 % Gas and Noxious Vapors
SITE CONDITIONS Design Altitude < 3,280 Ambient Temperature 40-95 F Humidity < 80 % Particulates Pressure Gas and Noxious Vapors < 0.14 mg/scf 14.7 PSI NO ELECTRICAL DATA Mains voltage 400 Vac ± 10 % Frequency
More informationMass Sensors, Inc. Profile. Applications. Technology Baur Blvd, St. Louis, MO (314)
Mass Sensors, Inc. 1350 Baur Blvd, St. Louis, MO 63132 (314) 997-5779 www.mass-sensors.com Innovations in chemical microsensors Profile Mass Sensors is a development stage high-tech company operating in
More informationFCT-CE SERIES ELECTRIC TILTING KETTLE W/HAND CRANK PARTS AND SERVICE MANUAL
FCT-CE SERIES ELECTRIC TILTING KETTLE W/HAND CRANK PARTS AND SERVICE MANUAL EFFECTIVE SEPTEMBER 12, 2014 Superseding All Previous Parts Lists. The Company reserves the right to make substitution in the
More informationPORT700CF Portable Fume Collector
11975 Portland Ave. S. Suite 104 Burnsville, MN 55337 Phone: 952-894-6637 Fax: 952-894-0750 Email: info@ventaire.com Website: www.ventaire.com PRODUCT GUIDE FOR PORT700CF Portable Fume Collector REV:110314
More informationEffective october 14, 2014
COS-101 & COS-101S COMBI OVEN STEAMER REPLACEMENT PARTS LIST Effective october 14, 2014 Superseding All Previous Parts Lists. The Company reserves the right to make substitution in the event that items
More informationCryopumps, Cryogenics
Cryopumps, Cryogenics 182.01.02 Excerpt from the Product Section C12 Edition 2010 Contents General Applications and Accessories Cryopumps........................................ C12.03 Cryogenics........................................
More informationWELD STRONG BREATHE FREE
WELD STRONG BREATHE FREE REVISED 03/01/2017 FUME EXTRACTORS THAT WORK AS HARD AS YOU DO Welding and metal fabricating can be tough, dirty jobs. But they should never be unsafe. Protecting workers from
More informationTPF Series Ozone Generators
TPF Series Introduction The model TPF is modular series of medium frequency ozone generators employing the latest electronics. The generators are manufactured by Ozono Elettronica Internazionale (OEI)
More informationCustom Products Gallery
Custom Products Gallery KEY HIGH VACUUM PRODUCTS, INC., willingly customizes its standard product line to meet individual customer specifications. Customized products include but are not limited to, valves,
More informationB.C.S. Shop Heaters 26, 30 & 36 (36 shown)
BIOMASS COMBUSTION SYSTEMS, INC. 67 MILLBROOK ST., SUITE 502 WORCESTER, MA 01606 508-798-5970 - FAX 508-798-5971 B.C.S. Shop Heaters 26, 30 & 36 (36 shown) INSTALLATION MANUAL HAND FIRED SYSTEMS 8-09 Biomass
More informationReplacement Parts List For Models COS-101 COS-101S
Replacement Parts List For Models COS-101 COS-101S (Ovens with s/n HD, HE, HG, HJ) Contents: Page # Front View: Control Panel, Door, Exterior Components 2-4 Oven Interior: 5 Bottom Section: Plumbing Components
More informationYOUR PROCESS DEMANDS THE MOST DEPENDABLE TEMPERATURE CONTROL UNIT AVAILABLE.
Temperature Control Units Water & Oil 0-00 F Portable Chillers 0 - F Central Chillers Packages & Modules 0 - F Pump Tank Stations Chilled or Tower Water 00-0 gallons Cooling Tower Cells 4-40 tons Filters
More informationbc14g combi oven serial numbers with iw/ix/iz/jg/jo
bcg combi oven REPLACEMENT PARTS LIST serial numbers with iw/ix/iz/jg/jo Effective february 0, 05 Superseding All Previous Parts Lists. The Company reserves the right to make substitution in the event
More informationReplacement Parts List For Models COS-20G
Replacement Parts List For Models COS-20G (Ovens with s/n HP & HT) Contents: Page # Electrical Compartment:Contactors,Steam Generator,Thermostats 2-5 Oven Interior: 5 Bottom Section: Gas, Plumbing Components
More informationUsing the Model 1500 Portable Chilled Mirror Hygrometer
APPLICATION NOTE 2016_0120 MODEL 1500 Rev C Using the Model 1500 Portable Chilled Mirror Hygrometer The Model 1500 is a portable, multi-function, optical chilled mirror hygrometer designed to accurately
More informationV * V V V V V-25L-230* V * V *
LAVINA Vacuums LAVINA Vacuums and Pre-separators Superabrasive introduces a new line of LAVINA vacuums, specially designed for work with LAVINA machines. See below for vacuum specifications and part numbers.
More informationINSPECTION SHEET ON OFF YES NO YES NO. Enduser ENG'R DISMANTLE. Removed Connected. Clean Room Warehouse Other. Good No Good
INSPECTION SHEET MAKER / MODEL VINTAGE Equipment NO. TEL / CS500 2001 年 05 月 C541172 Item Status Remark Power ON OFF Function Checked YES NO Software( Data ) Back up YES NO Enduser ENG'R M/C DATA BACK-UP
More informationWHAT ARE THE SPECIFICATIONS FOR THE VACUUM
WHAT ARE THE SPECIFICATIONS FOR THE VACUUM PUMPS NEEDED TO OPERATE THE JOULE THOMSON REFRIGERATORS? INTRODUCTION TO VACUUM PUMP USAGE Joule Thomson refrigerators have a wide temperature range to operate
More informationIntegrated Process Solutions. Series 48 Heaters. heater jackets sizes 1 1/2'' to 4'' (nw 40 to nw 100)
Integrated Process Solutions w w w. m k s i n s t. c o m Series 48 s heater jackets sizes 1 1/2'' to 4'' (nw 40 to nw 100) Series 48 heaters have been designed for safety, flexibility, power conservation,
More informationNANO-MASTER Single Wafer/Mask Cleaning Systems
Damage-Free Megasonic and Cleaning Technology The latest developments in Megasonic and Cleaning Technology have opened up new horizons to achieve the cleanest wafers and masks used in MEMS and Semiconductor
More informationCABS/BLADES/ SPREADERS/ACCESSORIES
JOHN DEERE 3000 SERIES (4200/4300/4400) (4210/4310/4410) (3120/3320/3520/3720) JOHN DEERE 4000 SERIES (4500/4600/4700) (4510/4610/4710) (4120/4320/4520/4720) OPTIONAL AUXILIARY HEATER INSTALLATION (p/n
More informationFan speed controller Type Saginomiya XGE
Data sheet Fan speed controller Type Saginomiya Fan speed controller stabilizes condensing pressure by changing condenser s fan speed. The controller reduces fan noise and saves energy in low ambient conditions.
More informationTouch Screen 1 loop Addressable Fire Alarm Panel
evolution 1 Touch Screen 1 loop Addressable Fire Alarm Panel The evolution 1 control panel offers complete compatibility with the award winning range of Nittan evolution detection and alarm devices and
More informationProviding Comfort Through Efficient Energy Solutions PRICE BOOK (USD) - LIST EFFECTIVE JUNE 1,
Providing Comfort Through Efficient Energy Solutions PRICE BOOK (USD) - LIST EFFECTIVE JUNE 1, 2018 2018 www.electromn.com sales@electromn.com PLENUM HEATER WARMFLO SELECT SERIES Our all-in-one plenum
More informationTECOM SYSTEMS NETWORK MASTER
TECOM SYSTEMS NETWORK MASTER The Tecom Network Master is a cost effective, Dialler Receiver and Direct Line Network Master combined in a single modular unit. HARDWARE The unit consists of a 3RU, 19 inch
More informationRIGID DC LIQUID CHILLER
RIGID DC LIQUID CHILLER Phone: +86-579-8837-9768 Email:info@rigidhvac.com Website: www.rigidchill.com 1 1. WHAT S LIQUID CHILLER? Liquid Chiller cooling refers to cooling by means of the convection or
More informationM7100 Pressure Transducer
SPECIFICATIONS Performance standard on and off highway engine and vehicle OEMs Rugged for heavy equipment and outdoor use Designed specifically for high volume applications Stainless steel wetted surfaces
More informationAIR CONDITIONNING 95 CODE 002
CODE 002 AIR CONDITIONNING 95 Cool-Tech Refrigerant Recovery/Recycling Unit Model 34788 It recovers, recycles, evacuates, leak tests, and recharges R-134a quickly and accurately. Fully automatic function
More informationR O T O - J E T O F A M E R I C A C O M P A N Y, I N C.
R O T O - J E T O F A M E R I C A C O M P A N Y, I N C. 19425 Soledad Canyon Road, Ste 317 Santa Clarita, CA 91351-2632 PH 661-299-2231 FX 661-299-9239 NET www.roto-jetoa.com ANNOUNCING THE LATEST DESIGN
More informationHydrogen Generator Model HPNM 1. Instruction manual. 166 Keystone Drive Montgomeryville, PA Phone: Fax:
Hydrogen Generator Model HPNM 1 Instruction manual 166 Keystone Drive Montgomeryville, PA 18936 Phone: 215-641-2700 Fax: 215-641-2714 Introduction Index INDEX... 2 INTRODUCTION... 3 SCOPE OF THE MANUAL...
More informationDATA SHEET CHEETAH XI 50 INTELLIGENT SUPPRESSION CONTROL SYSTEM DESCRIPTION APPROVALS: SYSTEM OPERATION. Form No. D
DATA SHEET CHEETAH XI 50 INTELLIGENT SUPPRESSION CONTROL SYSTEM DESCRIPTION Fike s Cheetah Xi 50 (P/N 10-071) is a state-of-the-art true intelligent digital peer-to-peer modular suppression control system.
More information(EE1500, EE2000, EE2500, EE3000)
EE-Ti (EE1500, EE2000, EE2500, EE3000) Heat Pump (Mfg. 2010 Present) 15 26 3 11 12 1 BLUE WIRE RED WIRE YELLOW WIRE ORANGE WIRE These pressure switches are installed in the refrigerant line near the compressor
More informationHigh-Power Q-Switched Diode-Pumped UV Laser Q-Series, Q305
High-Power Q-Switched Diode-Pumped UV Laser Q-Series, Q305 The new high-power Q305 laser is an expansion of the existing Q-Series that provides a solution for demanding applications requiring faster throughput.
More informationBlood bank refrigerators and freezers. BBR & Mini - Platinum & Iridium - Plasmafrost Series
Blood bank refrigerators and freezers & Mini - Platinum & Iridium - Plasmafrost Series ANGELANTONI LIFE SCIENCE propose a wide range of blood bank equipment for blood products storage as well for shock
More informationRoto-Jet I & II Tube Cleaning Systems
Roto-Jet I & II Tube Cleaning Systems Tube Size Tube Section Deposit Thickness of Deposit Deposit Flush 0.312 to 2.000 Straight Soft, guy, Light (7.9 to 50.8) ID Curved or organic Medium Dry Elliott Tool
More informationLINEAR HEAT SENSING DETECTION. System Sensor India 2014
LINEAR HEAT SENSING DETECTION VJ System Sensor India 2014 Linear Heat Sensing Cable: LINEAR - Across the Length HEAT - Heating of Cable SENSOR - Detector LHS Cable - Cable capable of detecting heating
More informationALTAIR II CONVECTION STEAM COOKER PARTS AND SERVICE MANUAL
ALTAIR II CONVECTION STEAM COOKER PARTS AND SERVICE MANUAL EFFECTIVE MAY, 0 Superseding All Previous Parts Lists. The Company reserves the right to make substitution in the event that items specified are
More informationAIR COOLED CHILLERS FOR OUTDOOR INSTALLATION WITH INTEGRATED FREE COOLING MULTISCROLL SERIES
AIR COOLED CHILLERS FOR OUTDOOR INSTALLATION WITH INTEGRATED FREE COOLING MULTISCROLL SERIES COOLING CAPACITY FROM 76 TO 612 Kw 1 AND 2 COOLING CIRCUITS RAE 1702 F Kc + P2 28 Above picture is only indicative
More informationSaintech Ion Beam Systems - Ion Current Monitor
Saintech Ion Beam Systems - Ion Current Monitor The Saintech Ion Current Monitor (ICM) provides REAL TIME Monitoring of Ion Flux throughout Ion-based Deposition Processes The Sensor Head The sensor head
More informationEffective october 14, 2014
COS-20G combi oven-steamer REPLACEMENT PARTS LIST Effective october 14, 2014 Superseding All Previous Parts Lists. The Company reserves the right to make substitution in the event that items specified
More information28 1/2"* 72.4 cm. (*28 1/2 " to include hinges.) 41 3/4" 106 cm. 27" 68.6 cm. 28 1/2"* 72.4 cm. (includes hinges.) 28 1/2"* 41 3/4" 106 cm
Commercial Single Load Dryers 28 1/2"* 72.4 cm PRODUCT DIMENSIONS (*28 1/2 " to include hinges.) 28 1/2"* 72.4 cm (*28 1/2 " to include hinges.) Models MDE/MDG21PD MDE/MDG21PS MDE/MDG21PR MDE/MDG21PN 43
More informationProduct Data. Features/Benefits. 19XB Positive Pressure Storage System
Product Data 19XB Positive Pressure Storage System 19XB028 Copyright 1992 Carrier Corporation 19XB052 Carrier s Positive Pressure Storage (PPS) System ensures the critical conservation of refrigerants
More informationDWYER INSTRUMENTS, INC. P.O. BOX 373 MICHIGAN CITY, INDIANA 46360, U.S.A. Series 670 Hood Monitor. Bulletin AV-670
Bulletin AV-670 Series 670 Hood Monitor Specifications - Installation and Operating Instructions DWYER INSTRUMENTS, INC. P.O. BOX 373 MICHIGAN CITY, INDIANA 46360, U.S.A. Phone: 219/879-8000 Fax: 219/872-9057
More informationLiebert Xtreme Density Chiller (XDC) Unit Warranty Inspection Check Sheet
The following information must be completed and forwarded to your local Liebert sales office to establish your equipment warranty. Installer Address Owner Address Owner e-mail address Date of Installation:
More informationSpinTron 2: 2-inch High Vacuum Magnetron Sputter Source Product Installation and Use
www.directvacuum.com www.micromagnetics.com Micro Magnetics, Inc. 421 Currant Road, Fall River, MA 02720 Phone: (508)672-4489 admin@micromagnetics.com SpinTron 2: 2-inch High Vacuum Magnetron Sputter Source
More informationGateKeeper Gas Purification System Z2 Series
MICROCONTAMINATION CONTROL GateKeeper Gas Purification System Z2 Series Continuous high-flow, point-of-use, purified XCDA gas at a low cost of ownership Advanced Technology in Gas Purification The GateKeeper
More informationBC14G SERIES SERIAL NUMBERS WITH IW/IX/IZ/JG/JO REPLACEMENT PARTS LIST. EFFECTIVE March 20, 2006
BCG SERIES SERIAL NUMBERS WITH IW/IX/IZ/JG/JO REPLACEMENT PARTS LIST EFFECTIVE March 0, 00 BLODGETT OVEN COMPANY, Lakeside Avenue, Burlington, Vermont 050 USA Telephone: (0) 0-700 (00) -5 Fax: (0) 0-7
More informationRAS Kp AIR COOLED CHILLERS WITH RECIPROCATING COMPRESSORS AND AXIAL FANS REFRIGERANT R290 LIQUID CHILLERS - AIR COOLED AIR
AIR COOLED CHILLERS WITH RECIPROCATING COMPRESSORS AND AXIAL FANS REFRIGERANT R290 46 Above picture is only indicative and is not binding AIR FC The packaged air cooled chillers of RAS Kp series are suitable
More informationChapter 3.1, 43 is subdivided into the following sections. System overview (Chapter 3.1.1, 43) and
3. Design, Functions 3.1 General Chapter 3.1, 43 is subdivided into the following sections System overview (Chapter 3.1.1, 43) and Fundamentals of the evaporation technology (Chapter 3.1.2, 46). 3.1.1
More informationAPPLICATION DESCRIPTION O.E.M. # PART NO.
Blower Motors BUSES, SCHOOL BUSES AmTran Heater motor w/oe# 1512-02 01-4011 Heater motor 2spd, REV, 12v, vented 1533-02 01-3043 Heater Motor 1spd, CCW, 12v, vented 169708C-91 01-0812 Heater Motor, 1spd,
More informationDHR Accessories Requirements. Site Preparation Guide
DHR Accessories Requirements Site Preparation Guide Revision C Issued May 2018 Table of Contents Table of Contents... 2 Smart Swap Requirements... 3 Air Chiller System (ACS)... 7-9 ETC Chiller Panel...
More informationDriven by CLIMATISATION. Excellence for professionals. Bosch air conditioning service units for R-134a and R-1234yf
Driven by CLIMATISATION Excellence for professionals Bosch air conditioning service units for R-134a and R-1234yf A/C service from Bosch Air conditioning systems in vehicles require regular maintenance.
More informationPrefunctional Checklist
Prefunctional Checklist This Prefunctional Checklist should be completed as part of startup and initial checkout of the equipment in preparation for Functional Performance testing. PC: 16231 ITEM: Generator
More informationCME1856W Service Parts
This parts list contains the part numbers and description of the replacement parts available for this model. To avoid costly and time consuming errors, double check the model and voltage before ordering
More informationTM Series. Induced Draft, Counter Flow Optional Accessories
ANTIFREEZE PACKAGE / RESISTANCE HEATING OPTION The antifreeze package is supplied to provide protection against freezing of standing water in the cooling tower sump due to shutdown during winter operation.
More informationThermo Scientific Cryopreservation Storage Equipment
Thermo Scientific Cryopreservation Storage Equipment Indefinite sample storage. Infinite possibilities. Thermo Scientific Cryopreservation Equipment Our cryopreservation sample preparation and storage
More informationGateKeeper Gas Purification System Z2 Series for 400, 500, 600 NM 3 /HR
MICROCONTAMINATION CONTROL GateKeeper Gas Purification System Z2 Series for 400, 500, 600 NM 3 /HR Continuous high-flow, point-of-use purified XCDA (Extreme Clean Dry Air) purge gas at a low cost of ownership
More informationMODEL TRC TOTAL RECOVERY FOR ALL CLIMATES - COMMERCIAL APPLICATIONS
TOTAL RECOVERY FOR ALL CLIMATES - COMMERCIAL APPLICATIONS MODEL FTURES MERV-8 filters Transformer/relay package allowing simple on/off control Access doors for easy access to blowers, core and filters
More informationZERO AIR GENERATOR MODEL 7000 INSTRUCTION MANUAL
ZERO AIR GENERATOR MODEL 7000 INSTRUCTION MANUAL UNPACKING Connect the intake filter to the Air In port as shown below. Use Teflon tape on filter thread if not supplied on the fitting. POWER The ZAG is
More informationIntegrated Process Solutions. Series 46 Heaters HEATER JACKETS FOR STAINLESS STEEL PIPING SIZES 1 1/2 TO 4 (NW 40 TO NW 100)
Integrated Process Solutions W W W. M K S I N S T. C O M Series 46 Heaters HEATER JACKETS FOR STAINLESS STEEL PIPING SIZES 1 1/2 TO 4 (NW 40 TO NW 100) Series 46 Heaters - 11/2015 MKS products provided
More informationEmission Monitoring System
Advance Cemas-FTIR Multi-component Emission Monitoring System System Description 30/23-200-1 EN System Overview Measurement principle The Advance Cemas FTIR is a multi-component emission monitoring system
More informationTable of Contents. Check the LCLS Project website to verify 2 of 12 that this is the correct version prior to use.
Table of Contents Summary...3 Mechanical Design Specifications...3 Vacuum...3 Materials...5 Support Requirements...5 Cabling...6 Light Path...6 BLM Synchrotron Radiation Assembly (BL11)...7 Other Requirements...9
More informationMCD200-NPP. Pos. Qty P/N Description 01 1 pce. MCD200- NPP
MCD200-NPP 01 1 pce. MCD200- NPP POLOS Single Wafer Spin Processor for Manual Dispense for up to 200 mm diameter substrates: Autoselect 100-120VAC, 200-240VAC, 50/60Hz, with CE-Compliance Full-Plastic
More informationOperating Instructions for the SAMCO RIE800iPB
Operating Instructions for the SAMCO RIE800iPB Tool Owner: Pat Watson x8-4626, cell: 732 996 2713 Backup: Bert Harrop, cell 848 459 2542 Introduction The SAMCO International RIE800iPB is a state of the
More informationSECTION 1 (Page 2) Introduction, standard accessories and mounting specifications.
HGM300 / RDM800 Refrigerant Monitoring System Instruction 3015-4149 Installation & Operation Mini Manual Rev. 5 November 2004 SECTION 1 (Page 2) Introduction, standard accessories and mounting specifications.
More informationC13-Series Engineering Guide
Engineering Guide Effective January 2018 Horizontal Air-Cooled, Water-Cooled, Chilled Water and Heat Pump Contents Product Features............................... 3 Product Options................................
More informationMetal hydride storage system for MICE experiment at Rutherford Appleton Laboratory. Technical specification.
DRAFT Metal hydride storage system for MICE experiment at Rutherford Appleton Laboratory. Technical specification. MICE Collaboration Contact persons: Dr Thomas Bradshaw Head of Cryogenics Section Tel:
More informationAeronex Gas Purification System Z2 Series
MICROCONTAMINATION CONTROL Aeronex Gas Purification System Z2 Series Continuous high-flow, point-of-use Extreme Clean Dry Air (XCDA ) purge gas at a low cost of ownership Advanced Technology in High-flow
More informationportable gas analyser
www..com portable gas analyser The largest of s analysers equipped with electrochemical cells. It can fit even up to 7 EC cells and up to 3 sensors. GA-60 has a large (320*240), graphical LCD with backlighting.
More informationDDBF036 SERIES 10 : REFRIGERATOR DOOR [1/12]
DDBF036 SERIES 10 : 001 - REFRIGERATOR DOOR [1/12] Page 1 of 24 DDBF036 SERIES 10 : 001 - REFRIGERATOR DOOR [1/12] Ref # Part Number 1 2 PS400000 PS400001 PS400002 PE030188 PS400003 PS400004 PS400005 PS400006
More informationR7DA Series TECHNICAL SPECIFICATIONS. FEATURES and BENEFITS. 6 and 7 ½ Ton DOAS Packaged Gas/Electric Units
TECHNICAL SPECIFICATIONS R7DA Series 6 and 7 ½ Ton DOAS Packaged Gas/Electric Units 5.4 ISMRE Commercial System 81% Steady State Efficiency Standard Features Fits Pre-Existing Curbs High-Efficiency Low
More informationSHORT CIRCUIT ISOLATOR TO NEXT COMPONENT REQUIRING POWER TO NEXT KEYPAD (** IF REQUIRED) STROBE RELAY MODULE KEYSWITCH ISOLATION MODULE STROBE
The Door Switch 11772 Westline Industrial Drive St. Louis, Mo 63146 (877) 998-5625 www.thedoorswitch.com Patent No. RE42,991 and RE44,039 CONTROL PANEL TRANSFORMER (SUPPLIED WITH CONTROL PANEL) NOTIFICATION
More informationNON-DESTRUCTIVE 2-D BEAM PROFILE MONITOR USING GAS SHEET IN J-PARC LINAC -overview & hardware construction-
NON-DESTRUCTIVE 2-D BEAM PROFILE MONITOR USING GAS SHEET IN J-PARC LINAC -overview & hardware construction- J. Kamiya, N. Ogiwara, Y. Hikichi, Y. Yamada (Vac. Gr.) K. Okabe, A. Miura, K. Moriya (Mon. Gr.)
More informationHall A Tritium Target (HATT) Operator Training. Skill PHY020
Hall A Tritium Target (HATT) Operator Training Skill PHY020 Overview Introduction and User Interface (GUI) Principles of Operation JT-valve controls PID and Heater Controls Target Motion Alarms and response
More informationEasy Dose Chemical Injection and Dispensing System DEMA Engineering Company
Easy Dose Chemical Injection and Dispensing System DEMA Engineering Company Overview The DEMA Easy Dose is a simple and reliable chemical delivery system. Easy Dose features an electronic control system
More informationBASIL 6000 TUNNEL CAGE WASHER
BASIL 6000 TUNNEL CAGE WASHER APPLICATION For thorough, efficient cleaning of cages, debris pans, bottles, feeder bowls, and miscellaneous items used in the care of laboratory animals. DESCRIPTION The
More informationCryogenics for Neutral Beam Injector System
Cryogenics for Neutral Beam Injector System Ch. Chakrapani, S.K.Sharma, A.K.Chakraborty, B.Sridhar, Vishnu.B. Patel, Siddharth Sheth, N.V.M.Rao, Mainak. B, G.B.Patel, M.J.Singh Janardhan.U, S.Rambabu,
More informationAGILENT VS SERIES LEAK DETECTORS
Established 1981 Advanced Test Equipment Rentals www.atecorp.com 800-404-ATEC (2832) AGILENT VS SERIES LEAK DETECTORS Wide range, high performance systems Features and Benefits Easy-to-Use - Two Button
More informationAD-360X2 Parts Manual
AD-360X2 Parts Manual Phase 7 American Dryer Corporation 88 Currant Road Fall River MA 02720-4781 USA Telephone: +1 (508) 678-9000 / Fax: +1 (508) 678-9447 e-mail: techsupport@amdry.com www.adclaundry.com
More informationCLIMATE CONTROL PRODUCT GUIDE
CLIMATE CONTROL PRODUCT GUIDE 0985822 Climate Control Product Guide 3/08-25M CURE THAW PREVENT FROST AIR HEAT DRY TABLE OF CONTENTS 2 3 GROUND HEATERS HEATING AND DRYING Ground Heaters is a brand of climate
More informationPARTS LIST. SERVICE PARTS LIST WVG-136 Ventless Griddle with or without Roll Warmer CONTENTS
WELLS BLOOMFIELD A Division of Carrier Commercial Refrigeration, Inc. 2 ERIK CIRCLE, P. O. Box 280 Verdi, NV 89439 telephone: 888-492-2782 fax: 888-492-2783 www.wellsbloomfield.com PARTS LIST 502 SERVICE
More information