FRT Multi Sensor Metrology for Wafer Industries

Transcription

1 FRT Multi Sensor Metrology for Wafer Industries FRT, Fries Research & Technology since 1995

2 FRT International Sales and Service Network FRT provides a worldwide network for sales and service FRT stands for reliable technology and premium customer support Distributors: Around 20 in 18 countries

3 Company Introduction FRT s Range of Metrology Tools tabletop fully integrated production tool

4 FRT MicroScope WLI Lab Metrology Tool

5 FRT MicroSpy Affordable Metrology Tool

6 FRT MicroProf Semi Automated Metrology Tool established standard metrology tool several hundred tools in industrial use easy to use, high reliability on site upgradable to TTV setup on site upgradable to fully automated MHU measurement according to Semi standards IR and Film Thickness upgrades optional adjustable to specific metrology tasks high performance software and hardware

7 FRT MicroProf Wafer Metrology Tool SEMI Compliant TTV Measurement MicroProf 200 MHU Multi Sensor metrology tool with 200 mm stage and material handling unit FRT MFE - Metrology for Frontend Fully automated Multi Sensor metrology tool with 300 mm stage, bridge tool, class 1 EFEM, SECS/GEM interface, thin wafer handling optional MicroProf 300 TTV MHU Multi Sensor metrology tool with 300 mm stage, sensor setup for wafer thickness measurement (TTV), fully automated

8 FRT MicroProf TTV with MHU Fully Automated Material Handling Unit high throughput, >150 w/h fully automated high reliability sorting capability

9 FRT MicroProf MicroProf with Thin Wafer Handling

10 MEMS Metrology FRT s Major Target Industries One Metrology Tool for All Wafer Tasks!!!

11 FRT Multi Sensor Technology Multi Sensor Technology for Flexible Metrology Systems FRT offers various sensors giving 4 basic combination options: Multisensor Configuration

12 FRT MicroProf FRT CWL Sensor Technology step height optical measurement, fast and non contact down to 6 nm vertical resolution 2 µm lateral resolution 4 khz measuring frequency intensity and wavelength 400 nm 540 nm 680 nm blue green red λ I 400 nm 540 nm 680 nm blue green red λ

13 FRT MicroProf FRT Field of View Sensor Technology Data: Michelson interferometer 85 mm x 85 mm range 170 µm lateral resolution z-resolution 1.4 nm image frequency 10 to 30 s/f

14 FRT MicroProf FRT Film Thickness Sensor FTR Downhill Simplex fit, up to 10 layers iterative fit with FFT, with one or two variable film thickness values FFT for thickness bigger 2 µm, 2 layers database with 40 materials upgradable

15 Applications and Automation Roughness, Topography, Profiles

16 FRT MicroProf TTV Measurements on Wafers Polished side Rough side

17 FRT MicroProf Acquire Automation XT Software die layout wizard define die structure and alignment marks define sensor and measurement setting import and export measurement positions

18 FRT MicroProf IR Wafer Thickness Measurement single side IR measurement

19 FRT MicroProf Nanotopography Measurement measurement of nanotopography measurement of dimples

20 FRT MicroProf Measurement of Doped Wafers up to 150 µm thickness of heavily doped wafers

21 FRT MicroProf TSV Measurements TSV measurement high aspect ratio ( > 1:40)

22 FRT MicroProf MEMS Measurements

23 FRT Metrology MST / MEMS Measurements Samples: Danfoss Silicon Power GmbH

24 FRT Metrology MST / MEMS Measurements

25 FRT MicroProf Thickness Measurement SiO 2 on Si SU8 measurement measurement of film thickness interferometry, reflectometry, IR

26 Company Introduction More than 500 Tools in the Market

27 Thank you for your attention! Headquarters FRT, Fries Research & Technology GmbH Friedrich-Ebert-Strasse Bergisch Gladbach, Germany Tel.: +49 (0) Fax: +49 (0) Internet FRT of America, LLC 1101 South Winchester Blvd., Suite L-240 San Jose, CA 95128, USA Tel Fax Internet FRT Shanghai Co., Ltd. Room A18, 3rd Floor, No.475 Fute No. 1 Rd. (W.) Waigaoqiao Free Trade Zone, Shanghai, China Tel Fax Internet info@frt-china.cn FRT Taiwan 2F.-1, No.47, Ln. 223, Sec. 4, Zhongxiao E. Rd., Da-an Dist., Taipei City 106, Taiwan, Republic Of China Tel (0) Fax +886 (0) Internet info@frt-china.cn