Fire Safety Compliance

Transcription

1 Fire Safety Compliance Why Are My CO2 Systems Not S2 Compliant? For 2010 SESHA Hill Country By Matt Wyman, Managing Director KFPI Inc. September 28, 2010

2 Overview 1. SEMI S2 2. Fire Safety Requirements 1. SEMI S2 Chapter Non Compliance Findings 4. Cause 5. Solution

3 KFPI Services Equipment Fire Protection Systems Carbon Dioxide (CO2) Fine Water Spray (FWS) Aspirating Smoke Detection (ASD) Flame Detection (Multi IR) Consulting Risk Engineering Analysis & Consulting Equipment Safety Compliance Compliance Audits & Testing Training IR Thermography Thermal Scans Reports

4 KFPI Leadership SEMI Standards Fire Protection Task Force Chairman (Past & Present) NFPA 318 Clean Room Fire Protection Committee Chairman (Past) Factory Mutual (FM Global) Semiconductor Specialist (Past) Factory Mutual Research Board (FMRC) Advisory Board Member (Past) Expert Witness on International Fire Loss Litigations Published Numerous Papers in Industry Magazines Presented Numerous Papers in Industry Venues Global Training Seminars Fabricators, Insurance, & 3 rd Party Consultants

5 SEMI S2 Compliance Environmental, Health, & Safety Guideline for Semiconductor Manufacturing Equipment Required by Fabricators Worldwide Categories Include: Hazard Warning Labels Safety Interlock Systems Emergency Shutdown Electrical Design Fire Protection Heated Chemical Baths Ergonomics and Human Factors Hazardous Energy Isolation Mechanical Design Seismic Protection Automated Material Handlers Environmental Considerations Exhaust Ventilation Chemicals Ionizing Radiation Non-Ionizing Radiation and Fields Lasers Sound Pressure Level

6 Safety Labels

7 Electrical Safety

8 Chemical Safety

9 Hazardous Energy

10 Ergonomics

11 Radiation

12 Laser

13 Environmental Safety

14 Emergency Shutdown

15 Fire Protection

16 Fire Codes International Fire Code (IFC) Combustibles or Flammables >4ft. Wide Sprinkler Head Inside or Gaseous Fire Suppression FM DS 7-7 Semiconductor Fabrication Facilities Equipment Protection Design Criteria CO2 & FWS 13kW Fire Detection NFPA 12 Carbon Dioxide (FM4-11N) NFPA 750 Fine Water Spray NFPA 318 Protection of Semiconductor Fabrication Facilities SEMI S14 Safety Guidelines for Fire Risk Assessment & Mitigation for Semiconductor Manufacturing Equipment SEMI S2 Environmental, Health, & Safety Guideline for Semiconductor Manufacturing Equipment Chapter 14 Fire Protection

17 S2 Compliance Section Fire Detection, Alarm, & Controls &2 All detectors, alarms, and controls be accepted and listed by an accredited laboratory (example UL or FM) and installed in accordance with the terms of that acceptance and appropriate national or international standards (example NFPA 72) Capable of interfacing with facility s alarm system Activate alarms audibly and visually at equipment Note 58 Should be identifiable & distinguishable from other alarms Manual activation should be considered A supervisory/trouble condition should notify operator, allow completion of existing processing, but prevent additional processing until condition is cleared &8 Capable of operation at all times with 24hr backup batteries Shut down the equipment upon alarm condition (EMO) Capable of being certified by licensed parties

18 S2 Compliance Section Fire Suppression The fire suppression system, which includes nozzles, actuators, and their associated controls, should be certified by an accredited testing laboratory (e.g., UL or FM) and suitable for the application and for the environment in which it to be used &3 The fire suppression agent and delivery system should be designed and installed in accordance with the appropriate international or national standard (e.g., NFPA 12) Activate alarms audibly and visually at equipment Note 64 Should be identifiable & distinguishable from other alarms Allowance can be made to disable system when in maintenance mode if supervised Capable of operation at all times with 24hr backup batteries Capable of interfacing with facility s alarm system Shut down the equipment upon alarm condition (EMO) Manual activation should be provided Should be discharge tested on represented sample of equipment Control access to the suppression agent source Capable of being certified by licensed parties Piping should be designed, installed, and tested to ensure it is capable of withstanding discharge pressures.

19 CO2 Hazard Design Total Flood (TF) Design Fully Enclosed Compartments Criteria = 50% CO2 Concentration Time Limit = 60 Seconds Compensate for Exhaust Ventilation Uncloseable Openings Local Application (LA) Design Open Compartments Example = Working Surface Criteria = Minimum Flow Rate Time Limit = Minimum 30 Second Compensate for Missing Walls Not for Exhaust Combination Design Both TF & LA CO2 Concentration Levels Minimum Not Protected Protected

20 Non-Compliance Findings All found on existing CO2 Systems 3 rd Party Reviews Site Audits Design Reviews Incident Investigations

21 Inadequate Designs Total Flood (TF) Hazard Exhaust Compensation Not Included (or Damper) Exhaust Not Distributed Uncloseable Opening Leakage Wrong Flooding Factors Local Application (LA) Hazard Assumed Volume Calculations % Perimeter Closed 60-sec Discharge Duration

22 Assumed Volume (LA) None Local Application Headcase Working Surface Headcase Assumed Volume Actual Volume 4.0ft. Minimum Height Total Flood Plenum Process Tank Total Flood Pumps/Heaters Front View Add 2.0ft. Open Sides Side View

23 Assumed Volume (LA) Example: IPA DRYER LA Design Add 2.0ft. To Each Side Assumed Volume Actual Volume 4.0ft. Minimum Height

24 LA Nozzles All have cone to absorb discharge pressure Reflected discharge from orifice Less exit velocity (same flow rate) Nozzle absorbs most 600psi discharge pressure CO2 Nozzles TF Nozzles V Nozzle is Vent nozzle (TF) Straight discharge from orifice Full effects of ~600psi discharge pressure on tool (especially baths) Much higher velocity

25 Nozzle Issues TF Nozzles Used in LA Hazards Ansul & Hatsuta FM Approved LA Nozzles for Wet Bench Stainless Steel (SS) & Halar Coated Kidde & Others (Fenwal, Fike) No FM Approval for Wet Bench No SS or Halar Coated Models Painted Steel/Brass/Chrome Not Compatible with Wet Processing LA Nozzles Installed Heights Above Coverage Chart All LA Nozzles Have Coverage Chart

26 Hydraulic Calculations UL/FM Approved Calc Software Based Upon Liquid Discharge Time Increase Capacity Increase Concentration More Agent Adequate Design Extends Discharge Duration Inadequate Hydraulic Calculations 60 Supply Demand Discharge Duration > Demand 30 Manufacturer Specific 20 CO2 Distribution Installation 10 0 See Example Minimum Not Protected Protected

27 Hydraulic Calcs Sample Hydraulic Calc Report (Pipe & Tubing)

28 Hydraulic Calculations WET Hazard 1 Hazard 2 Hazard 3 CO2 BENCH LA TF TF Supply CO2 Demand 64.8 lbs 84.2 lbs 13.2 lbs. 200 lbs. # Nozzles cylinders End of Report is Nozzle Summary Must Verify Supply = Demand H1 = 20.5lbs/42.6sec x 30sec = x 4 nozzles = 57.8 lbs H2 = 51.0lbs/42.7sec x 30sec = 35.8 x 2 nozzles = 71.6 lbs H3 = 16lbs/42.6sec x 30sec = 11.2 lbs x 1 nozzle = 11.2 lbs This hydraulic calc is inadequate

29 CO2 Distribution High Pressure CO2 Cylinders Stored Pressure = 750psi Nozzle Pressure = ~350psi 650psi Must have internal pressure rating of 3,000 psi Must have internal burst pressure rating of 5,000 psi SS Piping is Allowed by Fire Code (NFPA 12 Section 4.7) Pipe ¾ in. = Schedule 40 Pipe 1 in. = Schedule 80 with Extra Heavy Fittings Recommend SS Tubing (316) with SS Compression Fittings Minimum Wall Thickness Cleanliness & Contamination Questions? How Do You Verify Integrity? CO2 Discharge?

30 CO2 Distribution Issues Compression Fittings Not Installed Correctly Compression Fittings Installed on Pipe vs. Tube ¾ Fitting on ½ Pipe Calculated with Pipe installed with Tubing ½ Pipe ID > ½ Tube ID ½ Pipe ID 5/8 Tube ID Friction Coefficient Not Equal Pipe Installed with Schedule 40 Fittings Improper Tubing Thickness

31 Exhaust Dampers Exhaust Damper Not Allowed NFPA 318 Section SEMI S2 Exhaust/Chemical Safety Solvent Fumes (LEL) Corrosive Fumes FM DS 7-7 Section Exhaust Ventilation Reduces Smoke Damage Exhaust Volume >> Compartment Volume

32 Flame (Optical) Detectors Semiconductor Industry 4 Flame Detectors FM Approved for Use on Wet Benches Sierra DCR1 (UV/IR) Det-Tronics PM-5MPX (IR) Fire Sentry FS7 (IR) Hatsuta SX-7000 (IR) Field Of View (FOV) Coverage Affected by Physical Obstructions Coverage Affected by Detector Range 120º FOV

33 Flame Detector Issues Compliance Issues: FOV Obstructed Spacing > 13kW 8 PP Fire 4 IPA Fire Chemical Compatibility UV HF Quartz Window Match Detector with Fuel Detector Detection Area Obstructed View

34 Lockout Valves Lockout Valves (NFPA ) Required except where personnel can t enter space ( ) Where CO2 can migrate to expose personnel ( ) System should Lockout during maintenance or testing ( ) Lockout Valve must be supervised Lockout Valve Typically Not Required If a Lockout Valve is Installed then. Pressure Switch installed between Supply and Lockout Valves ( ) A Pressure Relief Valve is Required ( ) Operate psi

35 Disable Switch Disable/By-Pass Switch (Required but Not Installed) Electrically operated systems should have service disconnect switch (NFPA 12 Section ) Switch must be supervised (by panel) Electrical Lockout of Discharge Tool Maintenance or System Testing/Inspection Key Switch Normal Key Switch Lockout

36 Personnel Device Issues Horn/Strobe Not ADA/NFPA Mounting Heights AFF Adequate Notification for Personnel? All 4 Sides of Tool? Bay/Chase or Fab/Subfab Manual Release Not ADA/NFPA Mounting Heights AFF Mounted Above Fire Hazard Adequate Travel Distance? Bay/Chase or Fab/Subfab

37 Wiring Installation Issues All Fire Alarm Inputs & Outputs are Supervised EOL Panel (Not EOL) Fault Relays Not Supervised Flame Detectors Aspirating Smoke Detectors Cables Not Protected NEC / NFPA Wire Gauge Too Small NEC / NFPA Panel Input Panel Input Device Detector EOL Resistor Alarm EOL Resistor Fault

38 Laser Smoke Detector

39 Inadequate Battery Calcs Result is < 24hr. Standby & 5min Alarm

40 Chemical Compatibility Issues CO2 Components Must Be Chemically Compatible Nozzles & Detectors Combustible Plastic Benches Corrosives Single Wafer Processing Tools Solvents & Corrosives Nozzles, Tubing, & Fittings Must be Coated & Sealed Detectors Must be Compatible with Corrosives HF & Quartz are Not Compatible

41 Safety Label Issues No CO2 Safety Labels Labels must meet ANSI Z535 Orange Warning Color Warning Triangle Symbol Aspiration Symbol Outside Protected Space At Manual Activation SEMI S1 Compliant

42 Kidde Issues Kidde V (Vent or Velocity) Nozzle is TF Nozzle Kidde Only Manufactured V Nozzle in Brass June 2005 Kidde Released Stainless Steel V Nozzle FM Approval Guide

43 Imitation (Copy) V Nozzles Result was Imitation Kidde V Nozzles Supplied to Industry prior to These same Imitation Nozzles Are Still Being Used Today VERSION REAL KIDDE VERSION No Threads Result is S2 Non-Compliance Nozzle CO2 System Tool No Strainer Installed Backwards

44 Cause Why Has This Happened? Fire Protection has NOT Been Reviewed as Part of SEMI S2 Report. Fire Protection has NOT Been Reviewed by Site Safety Personnel (Product Safety). Majority of Equipment CO2 Systems are NOT Reviewed by Fire Department or Insurance. 99% EHS Professionals Come from EHS, IH, Ergonmics, etc. Background No Fire Protection Engineering or Fire Safety Background Fire Protection is a Professional Engineering Discipline Must have 3 rd Party Approval & Certification for Compliance CO2 & FWS Specialized Fire Suppression Application Not Used by Majority of Fire Contractors

45 Solution What is the Solution? Verify SEMI S2 Reports Include Fire Protection Verify SEMI S2 Reports are Completed by Qualified Personnel Require Copies of Fire Design Package Documentation OEM, 3 rd Party, Fire Contractor Have Safety Personnel to Review Design & Reports Property Insurance Carrier Equipment Safety Personnel for Fire Safety Compliance Verify Insurance Agent Qualified to Review CO2/FWS Systems Provide Training Corporate Level or at Site Level

46 Questions Fire Protection Is Not Needed Often.. But When It Is It Has To Work! It Also Must Be Reliable.. To Prevent Damage & Downtime! Matt Wyman, Managing Director Advanced Technologies Division Semiconductor, TFT-LCD, & PV KFPI INC. Koetter Fire Protection International Inc. - (1) cell mwyman@kfpiinc.com