OPERATOR S MANUAL B-70264EN/02

Transcription

1 OPERATOR S MANUAL B-70264EN/02

2 No part of this manual may be reproduced in any form. All specifications and designs are subject to change without notice. In this manual we have tried as much as possible to describe all the various matters. However, we cannot describe all the matters which must not be done, or which cannot be done, because there are so many possibilities. Therefore, matters which are not especially described as possible in this manual should be regarded as impossible.

3 B-70264EN/02 SAFETY PRECAUTIONS SAFETY PRECAUTIONS This manual contains precautions which must be observed during operation and maintenance of the laser oscillator to ensure the safety of the operator and maintenance personnel and prevent damage to the oscillator. Maintenance involves a variety of risks and, therefore, must be conducted by those personnel who have sufficiently trained in maintenance and safety. Besides the laser oscillator, the laser machining system contains a machine, power magnetics cabinet, servo system, CNC, and operator's panel. This manual describes the laser oscillator. For a description of notes other than those on the oscillator, refer to the corresponding manuals, supplied by the machine tool builder and FANUC. Contents 1.1 DEFINITION OF WARNING, CAUTION, AND NOTE...s WARNINGS AND CAUTIONS ON EXPOSURE...s WARNINGS AND CAUTIONS ON MAINTENANCE...s WARNINGS AND CAUTIONS ON HANDLING...s WARNINGS AND CAUTIONS ON MACHINING...s-8 s-1

4 SAFETY PRECAUTIONS B-70264EN/ DEFINITION OF WARNING, CAUTION, AND NOTE To ensure the safety of maintenance personnel (referred to as users) and prevent damage to the machine, this manual indicates each precaution on safety with "Warning" or "Caution" according to its severity. Supplementary information is indicated by "Note". Read the contents of each "Warning", "Caution", and "Note" before attempting to use the oscillator. WARNING Applied when there is a danger of the user being injured or when there is a danger of both the user being injured and the equipment being damaged if the approved procedure is not observed. CAUTION Applied when there is a danger of the equipment being damaged, if the approved procedure is not observed. NOTE Notes is used to indicate supplementary information other than Warnings and Cautions. Read this manual carefully, and store it in a safe place. s-2

5 B-70264EN/02 SAFETY PRECAUTIONS 1.2 WARNINGS AND CAUTIONS ON EXPOSURE WARNING 1 It is extremely dangerous to expose your eyes to direct, scattered, or reflected CO 2 laser light. Always wear protective glasses while the laser is operating. Exposure to laser light can cause blindness. If your eyes are accidentally exposed, seek medical advice immediately. 2 Do not turn on the laser oscillator while a panel is removed or a door is open. Operating the laser with a door open or panel removed may result in the operator being directly exposed to CO 2 laser radiation. Exposure to laser light can cause blindness and/or severe burns. If your eyes are accidentally exposed to laser light, seek medical advice immediately. Before turning on the power during maintenance if absolutely necessary, wear protective glasses and clothing to prevent accidents. 3 Surround the laser machining tool with a fence made of a material which absorbs laser light well (such as acrylic). Place appropriate warning notices on the fence. The door in the safety fence shall be fitted with an interlock switch such that opening the door stops the laser. Failure to provide such a fence exposes persons in the vicinity of the machine tool to the danger of being exposed to CO 2 laser radiation and the associated risk of blindness. If a person is accidentally exposed to laser light, seek medical advice immediately. 4 If the laser oscillator is operated with a panel open, ultraviolet radiation is emitted from the high-frequency discharge section. Gazing the discharge section for a long time can cause visual disturbances such as impaired eyesight. Always wear protective glasses during work. If you feel trouble with your eyes, seek medical advice immediately. 5 The laser beam shall be no higher than average eye height. Enclose the path of the laser beam with covers. Do not leave the end of the beam path open. Place laserabsorbing material at the end of the beam path to absorb the beam's energy. A CO 2 laser beam is directional and has a high energy density. Exposure to laser light can cause blindness. Flammable material may burn or explode if exposed to the laser beam. If your eyes are accidentally exposed to laser light, seek medical advice immediately. s-3

6 SAFETY PRECAUTIONS B-70264EN/02 WARNING 6 If there is a possibility of being exposed to CO 2 laser radiation exceeding the maximum permissible exposure (MPE) level for skin, wear protective clothing. Otherwise, there is a danger of being burnt. 7 The oscillator is fitted with a red semiconductor laser to indicate the approximate position of invisible CO 2 laser beam. Do not look directly at the semiconductor laser beam. Otherwise, your eyes may be injured. NOTE 1 Warning labels are affixed to those parts of the laser oscillator where there is a danger of exposure to laser radiation. Observe the precautions given on the labels. 2 During installation or maintenance necessitating the opening of an oscillator door or the removal of a panel, only persons who have undergone maintenance training should operate the laser. In such a case, extreme caution must be exercised. 3 Laser products shall conform to the regulations laid down in the laser safety standard, including that stipulating control using a key. The oscillator start signal (RUN ON) shall be controlled with a key switch such that the oscillator cannot be turned on without a specific key. Control using a key ensures that other than the authorized personnel cannot operate the laser oscillator. It is extremely dangerous if a person who is unfamiliar with the equipment attempts to operate the laser oscillator. The shutter shall be unlocked only while a beam is being output. Otherwise, keep the shutter locked to provide protection should the laser accidentally be turned on. The laser oscillator is equipped with a warning light as an option. The warning light blinks while discharge is in progress or whenever laser radiation is possible. While the warning light is blinking, pay careful attention to laser radiation and high voltages. s-4

7 B-70264EN/02 SAFETY PRECAUTIONS 1.3 WARNINGS AND CAUTIONS ON MAINTENANCE WARNING 1 A high voltage of 3 to 4 kv 0-p is applied to some places in the laser oscillator cabinet. Therefore, do not turn the power to the oscillator on or operate the oscillator when an oscillator panel is open. Operating the laser oscillator with a panel open can cause a touch on a high-voltage place, resulting in electric shock. 2 Before daily inspection, the replacement of a maintenance part or maintenance, open the main circuit breaker and turn the power supply off (double power-off). To prevent the power from being inadvertently turned on, lock the circuit breaker open, and affix an indication of work in progress. Before turning on the power during maintenance if absolutely necessary, take measures for safety. 3 The gas circulating system in the oscillator becomes very hot. Do not touch the gas pipes, turbo blower, heat exchanger, or exhaust pump, until they have cooled down sufficiently after the oscillator has been turned off. Otherwise, you may be burnt. 4 The oscillator contains cooling fan units. Although the fan units are fitted with a finger guard, to prevent injury, keep your hands well away from the fans. s-5

8 SAFETY PRECAUTIONS B-70264EN/ WARNINGS AND CAUTIONS ON HANDLING WARNING 1 The oscillator output mirror and focusing lens on the machining head both have a substrate made of ZnSe (zinc selenide), a toxic substance. Therefore, do not touch the mirror or lens with your bare hands if it is damaged. Inhaling ZnSe dust may cause difficulty in breathing, completely stopping the breathing of the victim in the worst case. If you accidentally touch the mirror or lens with your bare hands, wash your hands well under running water. If you accidentally inhale ZnSe dust or debris, seek medical advice immediately. 2 If the laser oscillator must be moved, entrust the work to the machine tool builder whenever possible. If performed by inexperienced personnel, the oscillator may topple or be dropped, resulting in a potentially fatal accident. When the machine tool builder is not available to move the oscillator, follow the procedure described on the hanging method label. While moving the oscillator, stand well clear and never pass under the oscillator. 3 Do not allow any dangerous or high-pressure gas to get into the oscillator housing. The oscillator cabinet has a hermetic structure (dustproof and dripproof), it cannot be ventilated easily. 1) Flammable gases such as oxygen can cause a fire or explosion. 2) Toxic gases can harm operators during maintenance. 3) Organic gases can degrade machining performance. 4) High-pressure gases can damage a panel or the cabinet, resulting in injury from flying matters. If such a gas accidentally gets into the oscillator housing, remove a panel for ventilation. The installation room must be also well ventilated. To purge the oscillator housing, use purified, low-pressure air or nitrogen. 4 Those who use a cardiac pacemaker must avoid maintenance and inspection work during the discharge of the oscillator because the electromagnetic waves generated during the discharge may affect the operation of the pacemaker. If you feel sick or out of condition, either immediately leave the spot or stop operation. s-6

9 B-70264EN/02 SAFETY PRECAUTIONS CAUTION 1 The oscillator is controlled according to the CNC internal parameter settings. If a numeric value different from a setting is entered and the oscillator is operated, the oscillator may malfunction. In the worst case, the oscillator may be damaged. 2 Use laser gas with the specified correct composition ratios. If you use laser gas with different specifications by mistake, performance degradation or an alarm will result. In the worst case, the oscillator may be damaged. 3 If storing the laser oscillator for a long time or leaving it unused for a long time, drain the inside of the oscillator. Otherwise, corrosion and clogging may result. Also drain the oscillator if it is likely to freeze in winter. If it freezes, the water piping and cooling system components will be damaged. NOTE Do not discard a used output mirror or focusing lens together with regular waste. If the output mirror or focusing lens is replaced, return the original to the supplier or entrust it to a specialized disposal company. s-7

10 SAFETY PRECAUTIONS B-70264EN/ WARNINGS AND CAUTIONS ON MACHINING WARNING 1 Do not look at the machining point without eye protection. Otherwise, your eyes may be exposed to reflected laser light, resulting in blindness. If your eyes are accidentally exposed to laser light, seek medical advice immediately. 2 Before attempting to machine any material for the first time, consult with the manufacturer of the material. Some materials generate toxic gases when cut or drilled by a laser beam. Should you accidentally inhale any toxic gas, seek medical advice immediately. 3 The workpiece becomes very hot during machining. Never touch the workpiece with your bare hands. Otherwise, you may be burnt. 4 During machining, extremely hot chips are likely to be generated. Unless sufficient caution is exercised, there is a danger of the operator being burnt, or of a fire being started. 5 Some materials may burn or explode when laser machined. Before attempting to machine any material for the first time, consult with the manufacturer of the material, to prevent the danger of fire of or the possibility of operator injury. NOTE 1 Do not place any flammable material (such as paper, cloth, or wood) near the workpiece table. 2 Keep a fire extinguisher beside the unit. s-8

11 B-70264EN/02 PREFACE PREFACE Contents of the manual Applicable models Related manuals This manual consists of the following chapters and appendixes: Chapter 1 : Notes on Use Chapter 1 covers the operating environment conditions, cooling water, laser gas, oscillator mirrors, and notification in accordance with the Radio Law. Chapter 2 : Handling the Laser Beam Chapter 2 covers the warning labels affixed to the optical paths in the oscillator and the oscillator itself. Chapter 3 : Internal Structure Chapter 3 describes the structure and operation of the laser oscillator. Chapter 4 : Maintenance Chapter 4 describes daily maintenance and periodic maintenance. It also describes maintenance software functions. Chapter 5 : Alarms Chapter 5 describes the alarms generated if errors occur in the laser oscillator. Chapter 6 : Setting and Displaying Data Chapter 6 describes the display and setting of diagnostic data and parameters. Appendix A. External View B. Specifications C. Glossary This manual covers the following models. The following abbreviations may be used in the text of this manual. Model Abbreviation FANUC LASER C1000-MODEL E FANUC LASER C2000-MODEL E FANUC LASER C4000-MODEL E FANUC LASER C5000-MODEL E FANUC LASER C6000-MODEL E C1000-E C2000-E C4000-E C5000-E C6000-E The following manuals are available for the FANUC LASER C1000/ C2000/C4000/C5000/C6000-MODEL E FANUC Series 16i-LB DESCRIPTIONS B-63662EN CONNECTION MANUAL B-63663EN OPERATOR S MANUAL B-63664EN MAINTENANCE MANUAL B-63665EN PARAMETER MANUAL B-63670EN FANUC LASER C1000/ C2000/C4000/C5000/C MODEL E OPERATOR S MANUAL (this manual) MAINTENANCE MANUAL B-70264EN B-70265EN p-1

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13 B-70264EN/02 TABLE OF CONTENTS TABLE OF CONTENTS SAFETY PRECAUTIONS...s-1 PREFACE...p-1 1 NOTES ON USE OPERATING ENVIRONMENT CONDITIONS COOLING WATER LASER GAS Laser gas specification Supply Gas Pressure Replacing the Laser Gas Cylinder OSCILLATOR MIRRORS POWER CABLE NOTIFICATION IN ACCORDANCE WITH THE RADIO LAW (APPLICATION FOR PERMISSION OF HIGH-FREQUENCY EQUIPMENT) HANDLING THE LASER BEAM WARNING LABELS OPTICAL PATHS IN THE OSCILLATOR INTERNAL STRUCTURE OUTLINE INTERNAL STRUCTURE MAINTENANCE DAILY INSPECTION PERIODIC MAINTENANCE DETAILS OF MAINTENANCE Turbo Blower Oil Exhaust Pump Oil Exhaust Pump Filter Checking Operation Times Automatic Aging MAINTENANCE PARTS LIST ALARMS CHECKING THE ALARM OCCURRENCE STATUS c-1

14 TABLE OF CONTENTS B-70264EN/ LIST OF ALARMS ALARM DETAILS DISPLAY ITEMS ON THE DIAGNOSIS SCREEN Screen Display Operation Signal Display on CNC-PMC (Machine Operator's Panel) Laser Oscillator Status Display SETTING AND DISPLAYING DATA DISPLAYING THE DIAGNOSIS SCREEN SETTING AND DISPLAYING PARAMETERS Displaying Parameters Setting Parameters...73 APPENDIX A EXTERNAL VIEW OF LASER OSCILLATOR...77 B SPECIFICATIONS...81 C GLOSSARY...84 c-2

15 B-70264EN/02 1.NOTES ON USE 1 NOTES ON USE To attain stable performance, bear in mind the notes contained in this chapter during use

16 1.NOTES ON USE B-70264EN/ OPERATING ENVIRONMENT CONDITIONS (1) Ambient temperature : +5 to 30 C (2) Temperature variation :1.1 C/minute maximum (3) Humidity : 75% or below (relative humidity) (4) Vibration : Acceleration not to exceed 0.05G. Vibration amplitude not to exceed 5µm. (5) Atmosphere : Dust must be minimized. There must be no organic volatile components. There must be no flammable gas or dangerous gas such as oxygen

17 B-70264EN/02 1.NOTES ON USE 1.2 COOLING WATER Use either pure water or tap water treated in an ion exchanger. Set the water temperature in the range from 20 C to 30 C. Wait for the water temperature to reach 20 C or greater before starting the oscillator. (1) pure water supply unit Install a pure water supply unit (ion-exchange region) at the water inlet of the chiller. The pure water supply unit can prevent problems with the oscillator from occurring due to corrosion or a clogged pipe. Replace the water periodically after every 1,500 hours because the quality of the circulating cooling water is lowered. Product name: Pure Water Treatment Cartridge Manufacturer: ORUGANO Corporation Use: Refer to the description indicated on the product. (2) Anticorrosive Add the following anticorrosive to cooling water immediately after installation to prevent problems due to corroding cooling water and to decrease the frequency of replacement of cooling water. Consult the chiller manufacturer for use of the anticorrosive. Product name Manufacturer 1 CONTLIME K-6000 MITSUBISHI GAS CHEMICAL. Inc 2 Kurilex L-111 Kurita Water Industries LTD. Use : Add the anticorrosive to cooling water in concentration of 1000 to 2000 ppm (100 to 200 cc/100 liters). Monthly check the concentration of the anticorrosive using concentration check paper dedicated to anticorrosives and add the anticorrosive to cooling water until the concentration reaches about 1000 ppm. Concentration check paper : Purchase a concentration check set (50 sheets of check paper, a dropping pipette, etc.) together with CONTLIME K-6000 (manufactured by Mitsubishi Gas Chemical Inc)

18 1.NOTES ON USE B-70264EN/02 (3) Cleaning agent Foreign matters such as fur will adhere to the inside of the cooling water circulating path. Wash the cooling water circulating path using a detergent after every 3,000 hours. Consult the chiller manufacturer for use of the detergent. Product name Manufacturer 1 DESLIME MITSUBISHI GAS CHEMICAL. Inc 2 Kuridine I-302 Kurita Water Industries LTD. Use : Add the detergent of 10% of the amount of cooling water, circulate the water for an hour, then drain the water. After that, rinse the cooling water circulating path thoroughly. Do not touch a stock solution of DESLIME with your bare hands because the solution is a strong chemical. If a stock solution accidentally contacts your skin, wash the stock solution off your skin well under running water. If waste water used for washing is left standing, the main ingredient, hydrogen peroxide, is decomposed. Wait until hydrogen peroxide is decomposed, or dilute waste water with water to reduce the concentration, then flush the waste water down the drain. (4) Antifreezing solution If the chiller is used in a cold district, it should be provided with an antifreezing function. When the air temperature falls, the water supply pump should be kept running. In a very cold district, incorporate a heater into the chiller to prevent the water temperature to drop too much. A chiller with a built-in heater is recommended because the water temperature must reach 20 C or greater to start the oscillator. If it is necessary to use an antifreezing solution for lack of an alternative, he following antifreezing solution should be used. Its concentration should be 30% (usually) or 40% (in an extremely cold district). Use of an antifreezing solution should be restricted within four months in winter. The following antifreezing solution is already added with an anticorrosive; do not use the above-mentioned anticorrosive. Product name: AURORA BRINE Manufacturer: TOKYO FINE CHEMICAL Co. Use: Refer to the description indicated on the product

19 B-70264EN/02 1.NOTES ON USE 1.3 LASER GAS Laser gas specification Supply Gas Pressure Supply the laser oscillator with a mixture of gases that satisfy the conditions listed below. (1) Composition ratio and accuracy (For the composition ratio, check the label and specifications of the oscillator.) Gas A Gas B Gas C CO 2 5±0.25% 5±0.25% 5±0.25% He 40±2% 60±3% 70±3.5% 55±2.75% 35±1.75% 25±1.25% N 2 (N 2 balance) (N 2 balance) (N 2 balance) (2) Water (H 2 O): 5 ppm or less (3) Hydrocarbon (C n H m ): 1 ppm or less (4) Gas purity: 99.99% or higher Replacing the Laser Gas Cylinder Set the pressure so that the secondary pressure as measured at the regulator on the laser gas cylinder falls into the range of 0.175MPa±0.025MPa. If the primary pressure of the regulator installed in the laser gas cylinder is 1 MPa or less, replace the laser gas cylinder with new one. When laser gas runs out during oscillator operation, the oscillator stops automatically. In this case, after the oscillator stops, replace the gas cylinder. When replacing the gas cylinder, close the main plug of the gas cylinder, completely loosen the adjustment valve of the regulator, then remove the regulator. If the adjustment valve of the regulator is left tightened, external air will enter the piping. When the oscillator is started after the replacement of the cylinder, the external piping exhaust operates to remove gas inside the piping, and the oscillator starts in the normal sequence. When laser gas runs out during purging, a stop occurs while the inside of the piping is in the negative pressure state. If the gas cylinder is replaced in this state, the atmosphere is sucked. Therefore, be sure to loosen the adjustment valve of the regulator before removing the regulator. Before the oscillator starts, the external piping exhaust operation takes place then the automatic aging function operates to perform aging in the oscillator to prevent possible troubles from occurring if the atmosphere should be sucked

20 1.NOTES ON USE B-70264EN/ OSCILLATOR MIRRORS (1) If replacing a mirror, replace it with that purchased from FANUC. If you replace it with a mirror purchased from a source other than FANUC, we cannot guarantee performance or quality. (2) The output mirror falls under the category of special industrial waste; an output mirror purchased from FANUC must be returned to FANUC. If you dispose of it by yourself, have it processed appropriately by a specialized disposal company

21 B-70264EN/02 1.NOTES ON USE 1.5 POWER CABLE OSC C1000-E C2000-E (1) If placing the cable in the duct If laying the power cable by placing it in the duct between the power board and the laser oscillator, use a single-core cable. For the C4000-E, run the 3-phase cable through the conduit (cable clamp) and the ground wire through the signal line inlet when introducing the oscillator. Recommendation Cross Section Diameter Max Current Type Layout Hitachi Cable : 600V MLFC 22mm 2 φ10.3mm 73A Single Core 4 pieces Furukawa : 600V LMFC 22mm 2 φ10.3mm 73A Cross Section LAPP : Multi standard single core 25mm 2 φ10.1mm 78A Hitachi Cable : 600V MLFC 50mm 2 φ14.4mm 124A Diameter Furukawa : 600V LMFC 50mm 2 φ14.4mm 124A LAPP : Multi standard single core 50mm 2 φ14mm 120A C4000-E Hitachi Cable : 600V MLFC 100mm 2 φ20.3mm 205A Furukawa : 600V LMFC 100mm 2 φ20.3mm 205A Single Core 3 pieces Cross Section Diameter LAPP : Multi standard single core 120mm 2 φ19.4mm 209A C5000-E Hitachi : 600V MLFC 150mm 2 250A φ22.2mm Single Core 4 pieces Furukawa : 600V LMFC 150mm 2 φ22.2mm 250A Cross Section Diameter C6000-E Hitachi Cable : 600V MLFC 200mm 2 φ26.9mm 304A Furukawa : 600V LMFC 200mm 2 φ26.9mm 304A OSC C1000-E Recommendation Hitachi Cable : 600V 2PNCT (2) If not placing the cable in the duct If not placing the power cable in the duct between the power board and the laser oscillator, you can use a heavy-duty power cord cable. Cross Section 22mm 2 Diameter φ28mm Max Current 89A LAPP : OLFLEX mm 2 φ25.4mm 93A Type Layout 4 Core Sheathed Portable 1 piece Cross Section Diameter C2000-E Hitachi Cable : 600V 2PNCT 38mm 2 φ34mm 124A LAPP : OLFLEX mm 2 φ34.5mm 146A C4000-E LAPP : OLFLEX mm 2 φ41.3mm 217A 3 Core Sheathed Portable 1 piece Cross Section Diameter C5000-E Hitachi Cable : 600V 2PNCT 100mm 2 253A φ24mm LAPP : OLFLEX FD mm 2 φ23.8mm 219A 1 Core Sheathed Portable 4 pieces Cross Section Diameter C6000-E Hitachi Cable : 600V 2PNCT 125mm 2 φ26mm 291A LAPP : OLFLEX FD mm 2 φ28.9mm 285A - 7 -

22 1.NOTES ON USE B-70264EN/02 (3) Recommended cable suppliers HitachiCable : Hitachi Cable, Ltd. Furukawa : The Furukawa electric Co., Ltd. LAPP : U.I. Lapp GmbH - 8 -

23 B-70264EN/02 1.NOTES ON USE 1.6 NOTIFICATION IN ACCORDANCE WITH THE RADIO LAW (APPLICATION FOR PERMISSION OF HIGH-FREQUENCY EQUIPMENT) The energization power supply of the laser oscillator falls under the category of high-frequency equipment in accordance with the Radio Law, and requires an application for permission. Before installing a new oscillator, relocating an existing one, installing an additional one, and abolishing an oscillator, file an application for permission to your local radio administrative bureau. An application form for new installation is attached together with the data sheets at the time of delivery of the oscillator. For relocation, additional installation, and abolition, contact FANUC

24 2.HANDLING THE LASER BEAM B-70264EN/02 2 HANDLING THE LASER BEAM

25 B-70264EN/02 2.HANDLING THE LASER BEAM 2.1 WARNING LABELS The oscillator uses high voltages and laser beam radiation. Such hazards are indicated with warning labels attached to the positions shown in Fig. 2.1 (a) to (j). This section describes the warning labels and their positions. Fig.2.1(a) Warning label positions (C1000-E : front view) Fig.2.1(b) Warning label positions (C1000-E : rear view)

26 2.HANDLING THE LASER BEAM B-70264EN/02 Fig.2.1(c) Warning label positions (C2000-E : front view) Fig.2.1(d) Warning label positions (C2000-E : rear view)

27 B-70264EN/02 2.HANDLING THE LASER BEAM Fig.2.1(e) Warning label positions (C4000-E : front view) Fig.2.1(f) Warning label positions (C4000-E : rear view)

28 2.HANDLING THE LASER BEAM B-70264EN/02 Fig.2.1(g) Warning label positions (C5000-E : front view) Fig.2.1(h) Warning label positions (C5000-E : rear view)

29 B-70264EN/02 2.HANDLING THE LASER BEAM Fig.2.1(i) Warning label positions (C6000-E : front view) Fig.2.1(j) Warning label positions (C6000-E : rear view)

30 2.HANDLING THE LASER BEAM B-70264EN/02 <1> Class indication label (JPN) <1> Class indication label (FDA) Model Maximum output Medium C1000-E 2000W CO 2/N 2/He = 5/55/40% C2000-E 5000W CO 2/N 2/He = 5/55/40% C4000-E 8000W CO 2/N 2/He = 5/55/40% C5000-E 10000W CO 2/N 2/He = 5/35/60% C6000-E 12000W CO 2/N 2/He = 5/55/40% Model Maximum output Medium C1000-E 2000W CO 2/N 2/He = 5/55/40% C2000-E 5000W CO 2/N 2/He = 5/55/40% C4000-E 8000W CO 2/N 2/He = 5/55/40% C5000-E 10000W CO 2/N 2/He = 5/35/60% C6000-E 12000W CO 2/N 2/He = 5/55/40%

31 B-70264EN/02 2.HANDLING THE LASER BEAM <2> Warning label <3> Aperture label <4> Suspension method label <5> Access panel <6> Label inside the access panel

32 2.HANDLING THE LASER BEAM B-70264EN/02 <7> Discharge section label <8> Certification label <9> Equipment nameplate <10> Manufacturer's address label <11> Label for regulating the atmospheric gases in the oscillator housing

33 B-70264EN/02 2.HANDLING THE LASER BEAM <12> Cooling water and gas maintenance label

34 2.HANDLING THE LASER BEAM B-70264EN/ OPTICAL PATHS IN THE OSCILLATOR The figures below show the laser optical paths inside the oscillator. Fig.2.2(a) Optical paths in the C1000-E

35 B-70264EN/02 2.HANDLING THE LASER BEAM Fig.2.2(b) Optical paths in the C2000-E Fig.2.2(c) Optical paths in the C4000-E

36 2.HANDLING THE LASER BEAM B-70264EN/02 Fig.2.2(d) Optical paths in the C5000-E Fig.2.2(e) Optical paths in the C6000-E

37 B-70264EN/02 3.INTERNAL STRUCTURE 3 INTERNAL STRUCTURE

38 3.INTERNAL STRUCTURE B-70264EN/ OUTLINE Fig. 3.1 shows an outline of the structure of the oscillator. Fig.3.1 Outline of structure (1) Laser resonator The resonator consists of an output mirror, a rear mirror, folding mirrors, discharge tubes, a power sensor unit, etc. Several discharge tubes are connected in series using folding mirrors, with an output mirror and a rear mirror placed at the open ends of the discharge tubes, thus sealing the tubes. The resonator is fitted with a gas pipe connecting port through which laser gas is fed into the discharge tubes. A discharge from the electrodes of the discharge tubes energizes CO 2 molecules, which emit light. This light is amplified by the stimulated emission that takes place while the light travels back and forth between the output mirror and the rear mirror. The resonator is capable of converting electrical energy to optical energy (10.6-µm singlewavelength laser beam). (2) Energization power supply This is a high-frequency power supply of 2 MHz whose output is controlled by the CNC. It discharges the laser gas flows through the discharge tubes to energize CO 2 molecules

39 B-70264EN/02 3.INTERNAL STRUCTURE (3) Laser gas circulating system A gas circulating system is configured by connecting the resonator and the fan (turbo blower) with a circulating pipe. Laser gas runs through the discharge tubes at a speed of 200 m/s or higher. In this circulating system, a water-cooled heat exchanger, used to cool the high-temperature gas from the discharge tubes, is provided at the inlet side of the turbo blower. At the outlet side of the turbo blower, another water-cooled heat exchanger is provided to dissipate the compression heat of the turbo blower. (4) Pressure control unit To ensure stable laser output, this controller controls the laser gas pressure of the laser gas circulating system with commands issued from the CNC, while exhausting degraded laser gas. (5) CNC interface This is the interface of the laser oscillator for connecting to FANUC Series 16i-L. CNC commands that, control the operation of the laser oscillator, such as start/stop and laser output, are input via this interface. (6) Housing An enclosure that houses the above components. The housing, consisting of metal panels, completely encloses the laser oscillator, thus protecting the operator from exposure to laser radiation and from high voltages. All panels are screw-fixed and cannot be removed without an appropriate tool

40 3.INTERNAL STRUCTURE B-70264EN/ INTERNAL STRUCTURE This section describes the internal structure of the oscillator more specifically. Fig.3.2(a) to (j) are internal structural drawing. Fig.3.2(a) Internal structural drawing (C1000-E : front view) Fig.3.2(b) Internal structural drawing (C1000-E : rear view)

41 B-70264EN/02 3.INTERNAL STRUCTURE Fig.3.2(c) Internal structural drawing (C2000-E : front view) Fig.3.2(d) Internal structural drawing (C2000-E : rear view)

42 3.INTERNAL STRUCTURE B-70264EN/02 Fig.3.2(e) Internal structural drawing (C4000-E : front view) Fig.3.2(f) Internal structural drawing (C4000-E : rear view)

43 B-70264EN/02 3.INTERNAL STRUCTURE Fig.3.2(g) Internal structural drawing (C5000-E : front view) Fig.3.2(h) Internal structural drawing (C5000-E : rear view)

44 3.INTERNAL STRUCTURE B-70264EN/02 Fig.3.2(i) Internal structural drawing (C6000-E : front view) Fig.3.2(j) Internal structural drawing (C6000-E : rear view) (1) Output mirror A transmitting/reflecting mirror which outputs the laser beam after it has been amplified inside the resonator. The output mirror consists of a ZnSe (zinc selenide) substrate with a curvature on the surface and coated with dielectric. ZnSe is highly toxic. Be particularly careful, therefore, when handling the output mirror. (2) Rear mirror A reflecting mirror consisting of a Ge (germanium) substrate, coated with dielectric. The rear mirror is used to reflect the laser beam within the resonator while transmitting part of the laser light to the outside to obtain the monitor light for laser output measurement

45 B-70264EN/02 3.INTERNAL STRUCTURE (3) Folding mirror A mirror with an Si (silicon) substrate coated with dielectric to reflect the laser beam. It linearly polarizes the laser beam. A system equipped with an optional antireflective mirror (ATFR) is available. The antireflective mirror consists of a copper substrate with coating. (4) Discharge tube A pair of Ag (silver) electrodes are metallized on the surface of a hollow quartz glass pipe. A high-frequency discharge between these electrodes injects electrical energy into the laser gas. Each electrode is coated with ceramic, preventing it from degrading and thus improving system reliability. (5) Trigger electrode This electrode is capable of predischarging outside the laser oscillation area so that the laser output becomes completely zero when the beam is off. (6) Power sensor An optical sensor which detects the intensity of the laser beam, transmitted through the rear mirror, thus enabling monitoring of the laser output level. (7) Oil mist decomposing element This element is capable of decomposing the organic matter that gets into the laser gas circulating system, with photocatalytic effect, using the ultraviolet rays generated from the discharge tubes. (8) Laser power supply This power supply outputs high-frequency power (2 MHz) according to a specified output with commands from the CNC and supplies it to the discharge tubes via the matching box. (9) Matching box The matching box contains a matching circuit, which ensures that power is effectively input to the discharge tubes. (10) Turbo blower This fan circulates the laser gas in the gas circulating system at high speed. It rotates at a high speed of 60,000 revolutions per minute (min -1 ). (11) Inverter This inverter drives the turbo blower. It is responsible for acceleration/deceleration control and issuing alarms during start and stop of the blower

46 3.INTERNAL STRUCTURE B-70264EN/02 (12) Turbo PCB This PCB relays overheating and frequency reached signals of the turbo blower. In addition, it monitors the oil level of the turbo blower. (13) Gas dust collection unit This unit is a cyclone dust collector that removes dust that gets in the gas circulating system. (14) Heat exchanger (inlet) Water-cooled heat exchanger used to cool the laser gas that has been heated by discharge, before it is drawn into the turbo blower. (15) Heat exchanger (outlet) Water-cooled heat exchanger used to cool the laser gas that has been heated by compression in the turbo blower, before being forced into the discharge tubes. (16) Gas control unit (C1000-E, C5000-E, C6000-E) This gas control unit constantly monitors the gas pressure in each discharge tube and supplies fresh laser gas to the circulating system to keep the pressure constant while exhausting degraded laser gas. It also monitors the supply status of the laser gas, purge check for the circulating system, and other items and has a function of adjusting the amount of flow of the gas to be exhausted. It provides the functions of both the C2000-E or C4000-E pressure control unit and the exhaust control unit. (17) Pressure control unit (C2000-E, C4000-E) This gas control unit constantly monitors the gas pressure in each discharge tube and supplies fresh laser gas to the circulating system to keep the pressure constant while exhausting degraded laser gas. It also monitors the supply status of the laser gas, purge check for the circulating system, and other items. (18) Exhaust control unit (C2000-E, C4000-E) The exhaust control unit is capable of controlling the flow rate of the gas to be exhausted. (19) Exhaust pump This pump is used to vacuum-exhaust laser gas from the gas circulating system such that its pressure falls to that used for laser oscillation. In addition, it exhausts part of the degraded gas in the gas circulating system. (20) Hour meter The hour meter records the total number of hours that the laser oscillator has operated (how many hours the exhaust pump has operated) to indicate whether maintenance or inspection is necessary

47 B-70264EN/02 3.INTERNAL STRUCTURE (21) Shutter The shutter is normally closed to keep the laser beam inside, and can be opened and closed with CNC commands. It is equipped with a position sensor and a temperature sensor and constantly monitors the open/close status and the shutter mirror temperature. (22) Beam absorber To perform laser oscillation without emitting the laser beam to the outside, the laser beam is reflected on the shutter mirror and guided into the beam absorber. The absorber, which is watercooled, absorbs the laser beam. The absorber is equipped with a temperature sensor which allows the system to constantly monitor the temperature of the absorber. (23) Distribution unit This unit distributes temperature-regulated external cooling water to each unit inside the laser oscillator. The unit is equipped with a flow sensor which allows the system to constantly monitor the flow rate of the cooling water. (24) Intermediate PCB B This PCB relays signals collected into the shutter section, such as those from the limit switch, absorber temperature sensor, power sensor, and condensation sensor, to the interface PCB. (25) Input unit This unit distributes the power supplied to the oscillator to each unit in the laser oscillator. It also protects each unit from overcurrents. (26) Input unit control PCB This PCB relays contactor open/close signals according to CNC commands to the input unit. (27) Interface PCB This PCB communicates with the CNC via the FANUC I/O LINK (serial interface). (28) Stabilized power supply This unit supplies DC power (24 VDC) to the interface PCB and various units. (29) Dew sensor This sensor is mounted to the output mirror holder to monitor the output mirror for condensation. It prevents faults in each unit from occurring due to condensation

48 3.INTERNAL STRUCTURE B-70264EN/02 (30) Guide laser (red semiconductor laser) A diode laser is overlaid on the same optical axis as a guide beam for checking the optical axis because the CO 2 laser beam is invisible to the unaided eye. The guide beam is emitted in synchronization with the mechanical shutter only when the shutter is closed. The guide laser can be used for roughly adjusting the optical path of an external optical system and for obtaining a guide for the machining point. (31) Beam folding unit This unit extends the optical path length by folding back the laser beam output from the output mirror in the oscillator and outputting the beam from the outlet of the oscillator. It consists of one circular polarization mirror and one zero shift mirror or of two zero shift mirrors. It is provided in an oscillator of short optical path length type; it is not provided in an oscillator of long optical path length type

49 B-70264EN/02 4.MAINTENANCE 4 MAINTENANCE In laser oscillator, periodic inspection items have been reduced, and adjustments have been made easy. To keep the oscillator in a satisfactory operating condition over a long period, however, it is necessary to carry out periodic maintenance (including daily inspection) described in this chapter. The oscillator is designed to maintain the same performance and reliability as it has when it is installed, provided that maintenance is carried out as prescribed

50 4.MAINTENANCE B-70264EN/ DAILY INSPECTION Table 4.1 lists daily inspection items. Inspect the laser oscillator according to this table. When parts (including oil) have been used for a prescribed period, replace them quickly. Table 4.1 Daily inspection items Item Period Content and instruction 1 Residual laser gas Daily Check the primary pressure as measured at the regulator on the laser gas cylinder. If the primary pressure is 1MPa or lower, replace the gas cylinder. 2 Exhaust pump oil Weekly Make sure that the oil level is between L (lower limit) and H (higher limit). If the level is L or below, replenish the oil by following the procedure described in Subsection Exhaust pump oil leak Weekly Make sure that no oil is leaking from the exhaust pump main body, drain valve and their periphery. If oil is leaking, immediately replace the exhaust pump filter, because it is likely to have been clogged. 4 Turbo blower oil Daily Make sure that the oil level is between L (lower limit) and H (higher limit). If the level is L or below, replenish the oil by following the procedure described in Subsection Laser output Weekly If the laser output decreases within the oscillator, warning message No is issued. If this message appears, clean or replace the mirror in the oscillator quickly. 6 Cooling water Daily Check the discharge pressure of the chiller. If it is high, clean the water path. Wait for the water temperature to reach 20 C or greater before starting the oscillator. Check the amount of cooling water in the chiller and check for Weekly contamination. If the amount of water is small, replenish the water. If the water is contaminated, clean the water path and replace the water as appropriate

51 B-70264EN/02 4.MAINTENANCE 4.2 PERIODIC MAINTENANCE The laser oscillator contain consumables that must be replaced periodically. Table 4.2(a) or (b) lists such consumables and the related periodic maintenance work. Perform periodic maintenance as well as daily inspection described in Section 4.1 by using the listed periods as guidelines. Note, however, that the replacement and maintenance intervals are not guaranteed values. Table 4.2(a) Periodic maintenance items and periods Item Period of maintenance (operation hour) Remarks 1 Output mirror change Every 3,000 to 4,000 hours Change when the quality has degraded 2 Rear mirror change Every 3,000 to 4,000 hours Change when the quality has degraded 3 Folding mirror change Every 3,000 to 4,000 hours Change when the quality has degraded 4 Exhaust pump oil change Every 1,500 hours Change when the exhaust power has degraded 5 Exhaust pump filter change Every 3,000 hours Change when the exhaust power has degraded 6 Exhaust pump overhaul Every 10,000 hours Change when the exhaust power has degraded 7 Turbo blower oil change Every 1,000 hours Change when oil properties have changed 8 Every 12,000 hours Conduct when the power has degraded, dust is Turbo blower overhaul generated, or abnormal sound is generated 9 Gas controller gas filter change Every 12,000 hours Change when a pressure failure occurs 10 Discharge tube O-ring change Every 6,000 hours Change when internal leakage occurs 11 Gas pipe O-ring replacement Every 6,000 hours Change when internal leakage occurs 12 Discharge tube cleaning Every 10,000 hours Conduct if quartz powder adheres to mirror 13 Discharge tube change Every 30,000 hours Change when the quality has degraded 14 Cooling water change Every 1,500 hours Change when cooling water properties have changed 15 Cleaning of interior of cooling Every 3,000 hours Change when water pipe has clogged water system 16 Alarm lamp replacement Every 3,000 hours Change when the lamp fails to blink 17 Oil mist decomposing element Every 10,000 hours Change when the power has degraded change 18 Fan motor change Every 30,000 hours Subject to the operating environment. Table 4.2(b) Mirror cleaning periods Unit : hours Model C1000-E C2000-E C4000-E C5000-E C6000-E Cleaning of output and rear mirrors only None None 1,500 to 2,000 (Note 1) (Note 1) 1,000 to 1,300 Cleaning of all internal mirrors 3,000 to 4,000 NOTE 1 If the oil mist decomposing element and the gas dust collection unit are not equipped, 1,500 to 2,000 hours for the C2000-E and 800 to 1,200 hours for the C4000-E. 2 The mirror cleaning periods are not guaranteed values. They are standard values in the field

52 4.MAINTENANCE B-70264EN/ DETAILS OF MAINTENANCE Turbo Blower Oil When opening the panels and doors during maintenance, keep the power turned off. Before replacing oil, be sure to check that purging is completed. (1) Check method With the laser oscillator at a rest, check to see if the oil level in the turbo blower is between graduations L and H. When the turbo blower is running, it is impossible to check the amount of oil correctly. Fig (a) Appearance of turbo blower Fig (b) Oil gage (2) Replacement method a) Before replacing the oil, be sure to stop the oscillator according to the correct procedure and turn off the power. Remove the hexagonal-head screw from the oil inlet of the turbo blower with a 17 mm wrench. Be careful not to lose the O-ring on the hexagonal-head screw or contaminate it. CAUTION If the oscillator is not stopped with the correct procedure, the pressure in the vacuum system in the oscillator becomes negative. Opening the oil inlet under such a condition lets air get in the turbo blower. This flow of gas causes oil mist to get into the vacuum system of the oscillator, resulting in contamination of internal mirrors. b) Get a container for oil drain on hand, and put the tip of the drain tube into the container. Turn the oil drain cock through 90 degrees, and the oil will start draining. c) After all the oil has been drained, close the oil drain cock by setting it back in the initial place

53 B-70264EN/02 4.MAINTENANCE d) Remove the nozzle from the oil bottle, take off the inner lid, then put the nozzle back on the bottle. Put the supplied tube into the nozzle, insert the tube into the oil inlet, pour oil being careful to cause no foreign matters to get into oil. Pour oil while checking the oil level from the oil level window until the oil level reaches the three-quarter position from L between L and H. Either superfluous or insufficient oil can be a cause of trouble. e) Lightly wipe the area around the oil inlet, hexagonal-head screw on the oil inlet, and O-ring with a clean cloth or paper, then check that there are no foreign matters. Foreign matters getting into oil may cause a turbo blower fault. Check that the O-ring is fit to the hexagonal-head screw on the oil inlet, then tighten the screw (recommended torque: 800N cm) CAUTION If the O-ring at the inlet is damaged, gas leak will result. f) If oil has spilled over, wipe it up. g) After replacing the oil for the turbo blower, be sure to conduct automatic aging as described in Subsection CAUTION If you do not conduct automatic aging after replacing the oil for the turbo blower, correct discharge is not possible, which can become a cause of trouble. h) If there is oil left over, put the inner lid back on the bottle, and keep the bottle in a dark, cool place. CAUTION Once you open a new oil package, you should use it within six months. Even for an oil package not opened, you should use it within one year. Never use old oil whose validity has expired. Using such oil can cause a failure in the turbo blower

54 4.MAINTENANCE B-70264EN/ Exhaust Pump Oil (1) Check method Watch the oil gauge, and check that the oil level is between graduations Low and High. Also check whether the oil is dark. If the oil level is below L, add oil to the turbo blower or replace the oil in it. If the oil level is above H, drain until the oil level becomes below H. Fig.4.3.2(a) Front view of exhaust pump Fig.4.3.2(b) Enlarged view of oil gage (2) Replacement method a) Stop the laser oscillator with the correct procedure, and turn the power off. b) Remove the oil inlet plug. There is an O-ring on it. Be careful not to damage it. A missing or damaged O-ring can lower the exhaust capacity of the pump. c) Insert the drain tube into a drain oil vessel. d) Open the drain cock. e) After the oil has been drained up, close the cock. f) Pour new oil into the oil inlet, while checking the oil gage. g) Attach the oil inlet plug

55 B-70264EN/02 4.MAINTENANCE Exhaust Pump Filter (1) Replacement method When the operation time reaches 3000 hours or the exhaust capacity gets lowered, replace the filter. A clogged filter may cause a whitish smoke of oil mist to come out of the pump or lower the exhaust capacity. a) Stop the laser oscillator with the correct procedure, and turn the power off. The pump is hot immediately after it has stopped. Start the work after the pump has cooled down. b) Remove the black screw from the exhaust pump unit, then remove the filter cover and O-ring. c) Remove the spring and washer. d) Pull out the exhaust filter element. e) Check the mounting orientation of a new exhaust filter element, then insert the filter. A filter element mounted improperly may cause oil mist (whitish smoke) to come out of the gas outlet. Therefore, check again that the filter is mounted properly

56 4.MAINTENANCE B-70264EN/ Checking Operation Times The cumulative operation time of each component is displayed on the maintenance screen of the CNC. Use it for periodic maintenance. (1) Method Press the "Setting" operation key on the CNC. Then, press the soft keys at the bottom of the CNC screen as follows: POWER SET DATA STATUS MAINT. PW.OFS ACT.TM ALARM (2) Display screen Operation time display Pressing the [PW.OFS] soft key causes the operation time display screen to be displayed. If you enter a limit time in a set time field in advance, the operation time display will turn red when the operation time exceeds 90% of the set time. If it exceeds the set time, the operation time display in red reverse video. The set time and the operation time are in 0.1-hour units. To switch pages, use the "PAGE " and PAGE " keys on the MDI panel. (3) Methods of entering a set time and resetting an operation time In this normal state, this screen prohibits the entry of data so that data such as operation times is not deleted by mistake. To enter data, first set bit 1 of parameter No (MDS) to 1. To enter a set time or reset an operation time, position the cursor on the desired field, using the arrow keys as appropriate, enter a setting from the MDI unit, and press the <INPUT> key. No special soft keys such as all clear are not available. To reset an operation time, set

57 B-70264EN/02 4.MAINTENANCE (4) Parameter setting (a) If the screen is not displayed even after screen manipulation Check the settings of the following parameters and change them as appropriate. i) Press the <SYSTEM> operation key on the CNC to select the parameter screen. ii) Check that bit 0 of parameter No (MNT) is set to "1". iii) If it is not set to "1", set bit 0 of parameter No (MNT) to "1" referring to "Setting Parameters" in Chapter 6. iv) Return "PARAMETER WRITE" to "DISABLE". #7 #6 #5 #4 #3 #2 #1 # MDS MNT MNT MDS 0 : Does not display the laser maintenance screen. 1 : Displays the laser maintenance screen. 0 : Disables data input on the laser maintenance screen. 1 : Enables data input on the laser maintenance screen. (b) Resetting an operation time After an operation time has reached the corresponding set time and you have conducted maintenance, you may want to reset the operation time to 0. To do this, follow the procedure below. i) Set bit 1 of parameter No (MDS) to "1" referring to "Setting Parameters" in Chapter 6. ii) Display the component operation time display screen, move the cursor to the desired operation time field, and enter 0. The operating time is reset. iii) After resetting, return bit 1 of parameter No to "0" and return "PARAMETER WRITE" to "DISABLE"