Varian, Inc. Vacuum Technologies. Diffusion Pumps. Feature and Benefits Typical Applications Pump Models

Transcription

1 Varian, Inc. Vacuum Technologies Diffusion Pumps Feature and Benefits Typical Applications Pump Models Fluids 9-91 Baffles Technical Notes

2 Diffusion Pumps Features and Benefits Varian has earned its position as the leading Diffusion Pump manufacturer in the world by listening to customer needs and by continuously improving the performance and reliability of our benchmark designs. Throughout our more than forty years of leadership in the industry, we have consistently produced pumps that provide the most efficient means of converting heat into pumping throughput. Our experience has allowed us to optimize the design of every element of the pump. As a result, Varian Diffusion Pumps offer you the lowest cost of ownership available for many high vacuum-pumping applications. Options to Address Your Needs Many applications have unique requirements. Varian can provide additional features such as Halo or custom baffles to eliminate additional backstreaming, and a Quick Cool Coil option to accelerate system cycle times. Easy to Maintain Maintaining uptime is critical so we have simplified operation and maintenance. A sight glass provides visual indication of status when cold or hot and under vacuum. A gauge port facilitates system troubleshooting. 62

3 Diffusion Pumps Fully Optimized Jet Using our long and varied experience Varian designs and produces vapor jets that deliver the highest throughput, pressure stability, and tolerable foreline pressure available, while reducing backstreaming to a minimum. Built for Production Volumes Our success is in helping you meet the exacting requirements of your production process. Our pumps deliver superior pumping at high pressure and high gas flow conditions, and handle gas load variations that are typical of large volume production. Diffusion Pumps Robust Boiler Design Through optimized boiler design, Varian pumps are stable and reliable under widely varying operating conditions. This temperature stability prolongs fluid life as well. Thermal protection switches prevent system over-temperature conditions. Low Cost of Ownership By providing the highest throughput available per unit of power, reduced cooling water requirements, and rugged, durable stainless steel construction, Varian delivers large volume pumping at the lowest total cost to you. World-class Service, Training and Support Varian s application consulting capability makes use of our unparalleled experience to identify the optimal solution for you. And we invite you to take advantage of our industry leading worldwide service and support programs and award winning Vacuum Training classes to maximize system uptime and productivity. Varian, Inc. Vacuum Technologies 63

4 Diffusion Pump Typical Applications Courtesy of Mill Lane Engineering Courtesy of Materials Research Furnaces, Inc. Vapor Diffusion Pumps Vacuum Furnaces Vacuum Furnace applications require pumps that have the ability to achieve and maintain low base pressures and the ability to handle. The full fractioning design of the Varian diffusion pumps allows vaporized fluid to be fractionated in the boiler and jet assembly. Contamination and decomposition products are pumped away and only the purist fluid reaches the top jet, assuring highest speed and lowest backstreaming. Metallizing In web and roll coating systems, Varian diffusion pumps have the ability to pump high gas loads making them the perfect choice for continuous production applications. Large Area Coating / Thin Film Deposition Due to it s simplicity, high performance and low initial costs, the diffusion pump remains a primary pumping mechanism for large area coating systems. The large pumps used in this application come equipped with sight glass and drain assemblies and are also available with ASA or ISO flanges. Coatings (Optical, Electronics, Protective) With low ultimate pressure, high speed, high throughput and high tolerable forepressure, Varian diffusion pumps are the best choice for developmental and production systems. Molecular Beams The foreline ejector stage provides high tolerable forepressure and a large surface area for efficient degassing of compressed fluid, while the foreline baffle minimizes fluid loss even under high throughput conditions. All Varian pumps incorporate an ejector stage as will as full fractionating jets. HS Series pumps create high speed and low ultimate pressure, high throughput and high tolerable forepressure and low backstreaming combine to make the HS series the best diffusion pump. Pumps are equipped with full thermal protection. 64

5 Diffusion Pumps Diffusion Pumps Application Notes for Diffusion Pumps As the worldwide diffusion pump market leader, Varian produces the most comprehensive family of pumps, ranging from 2 in. to 35 in. in diameter, and is the only broad-line, U.S.-based manufacturer. The diffusion pump is the most common type of pump for use in high vacuum applications. These vapor jet pumps are one of the oldest and most reliable ways to create a vacuum. Since the chamber itself has no moving parts aside from the oil droplets, a vacuum diffusion pump can operate with stability over long periods. In all diffusion pumps, a small amount of backstreaming occurs. Backstreaming is the migration of minute levels of oil that move in the opposite direction toward the inlet of the pump and into the process stream, which may be the stage of an electron microscope or a welding chamber. In some applications, minor backstreaming has no impact; in others, where the purity of materials is critical, backstreaming cannot be tolerated. For this reason, systems typically add an optically dense baffle of varying design to deflect oil particles before they can reach the process stream. Diffusion pumps are in wide use because they have several advantages: They are reliable, simple in design, operate without noise or vibration, and are relatively inexpensive to operate and maintain. In fact, diffusion pumping is still the most economical means of creating high-vacuum environments. These pumps also tolerate operating conditions such as excess particles and reactive gases that would destroy other types of high-vacuum pumps. With the proper choice of motive fluids, traps, baffles, and valves, diffusion pumps can be used in a wide variety of applications and over pressure ranges from 1 x 1-3 torr to 2 x 1-11 torr Key Features of Varian Diffusion Pumps include: High pumping speeds High throughput High forepressure tolerance Low ultimate pressure Excellent backstreaming characteristics Long-term reliability Varian, Inc. Vacuum Technologies 65

6 Diffusion Pump Models AX-65 HS-2 VHS-4 VHS-6 VHS-25 Previous Model Number Speed, l/s (operating range) Air ,55 2,125 Helium & Hydrogen ,93 2,66 Maximum forepressure, Torr (mbar) No load.75 (1.).55 (.72).65 (.86).65 (.85).65 (.85) Full load.6 (.78).4 (.52).55 (.73).55 (.72).55 (.72) Maximum throughput, T-l/s (mbar-l/s) In operating range.19 (.25).6 (.8) 1.5 (2.) 2.4 (3.2) x 1-2 Torr (1.3 x 1-2 mbar).3 (.4).7 (.93) 2.5 (3.2) 3.5 (4.5) 3.5 (4.5) Minimum recommended backing pump for maximum throughput, cfm (m 3 /hr).15 (.25) 5. (8.5) 1 (17) 17. (28.9) 17. (28.9) Backstreaming rate at inlet flange mg/cm 2 /min (standard cold cap)* 2 x x x x x 1-4 Warmup time, minutes Cooldown time, minutes With quick cool coil, where applicable Fluid charge 3cc 1 cc 3 cc 5 cc 1, cc Electrical requirements 1 ph 1 ph 1 ph 1 ph 3 ph 5/6 Hz 5/6 Hz 5/6 Hz 5/6 Hz 5/6 Hz 9/115/165/22 V 12/24 V 12/28/24 V 12/28/24 V 12/28/24 V Power, Watts 2/ Cooling water, U.S. gpm (l/hr) at 6-8 F (15-26 C) N/A.1 (2).15 (3).25 (5).25 (5) * Refer to page 96 for a description of test methods. Refer to page 99 for discussion of pump performance with halo baffles. 66

7 Diffusion Pumps VHS-1 VHS-4 HS-16 HS-2 HS-32 NHS Speed, l/s (operating range) 3,65 4,5 6, 1, 17,3 28, 4,56 5,625 7,5 12,5 21,625 35,.65 (.85).65 (.85).65 (.85).65 (.85).5 (.65).55 (.71).55 (.72).55 (.72).55 (.72).55 (.72).35 (.45).4 (.52) 6.3 (8.4) 6.3 (8.4) 9.5 (11.7) at 81 W 12.5 (16.7) 3 (4) 25 (33) 7.5 (1.) 7.5 (1.) 11.5 (15.3) at 81 W 18 (23.4) 35 (45.5) 35 (45.5) 3 (51) 3 (51) 8 (136) 1 (17) 3 (51) 3 (51) 5 x x x x x x 1-4 Diffusion Pumps , cc 3 U.S. qts. 5 U.S. qts. 3 U.S. gal. 3 U.S. gal. (2.8 liters) (4.7 liters) (11.3 liters) (11.3 liters) 3 ph 3 ph 3 ph 3 ph 3 ph 5/6 Hz 5/6 Hz 5/6 Hz 5/6 Hz 5/6 Hz 5/6 Hz 28/24/38/48 V 28/24/38/48 V 24/415/48 V 24/415/48 V 24/415/48 V 24/415/48 V /96 12, 24, 24,.4 (8).4 (8) 1.5 (3) 1.5 (3) 4. (8) 4. (8) Varian, Inc. Vacuum Technologies 67

8 AX-65 Outline Drawing Dimensions: inches (millimeters) Technical Specifications Pumping Speed*, Operating Range 65 l/sec Air, 9 l/s He and H 2 Maximum Throughput.19T-l/s (.25 mbar-l/s) in operating range.3t-l/s (.4 torr Compression Ratio 4 x 1 7 (Air), 2 x 1 6 (helium) Operating Range 3 x 1-3 to <5 x 1-8 torr (3.9 x 1-3 to 6.5 x 1-8 mbar) Maximum Forepressure No load:.75 torr (1. mbar) Full Load:.6 torr (.78 mbar) Backstreaming Rate* With cold cap: < 2 x 1-4 mg/cm 2 /min With baffle: <2 x 1-5 mg/cm 2 /min Recommended Backing Pump 1.5 cfm (2.5 m 3 /hr) Warmup Time 7 minutes Cooldown Time 1 minutes Fluid Charge 3 cc Electrical Requirements 1 ph, 5/6 Hz, 9/115/165/22 VAC Pump Power 2/25 watts Air Cooling 3 cfm 68

9 Diffusion Pumps Speed Curve Air speed (l/sec) Throughput (Torr-l/sec) Inlet pressure (Torr) Pumping speed/cold cap Pumping speed/halo baffle Throughput Diffusion Pumps Description Wt. kg (lbs) Part Number KF-5 ISO-6 3KAX-65 with standard cold cap, 3.6 (8.) L96731 L V, 25 W AX-65 with internal baffle, 3.6 (8.) L L V, 25 W AX-65 with standard cold cap, 3.6 (8.) L96732 L V, 25 W AX-65 with internal baffle, 3.6 (8.) L L V, 25 W AX-65 with standard cold cap, 3.6 (8.) L96733 L V, 2 W AX-65 with internal baffle, 3.6 (8.) L L V, 2 W AX-65 with standard cold cap, 3.6 (8.) L96734 L V, 2 W AX-65 with internal baffle, 3.6 (8.) L L V, 2 W AX-65 with standard cold cap, 3.6 (8.) L96735 L V, 25 W AX-65 with internal baffle, 3.6 (8.) L L V, 25 W AX-65 with standard cold cap, 3.6 (8.) L96736 L V, 25 W AX-65 with internal baffle, 3.6 (8.) L L V, 25 W NOTE All pumps have NW-16 foreline See page 9 for Santovac 5 diffusion pump fluid Mounted cooling fan included with each pump (P/N ) Overtemperature thermal switch set to open at 365 F (182 C) Use 25W heater with polyphenyl ether fluids (such as DC-75 and Santovac 5). Use 2W heater for other fluids. Ordering Information Description Wt. kg (lbs) Part Number Accessories Santovac 5 diffusion pump fluid, 4 cc.5 (1.) Santovac 5 diffusion dump fluid, 65 cc.9 (2.) DC-74 diffusion pump fluid, 5 cc 1.4 (3.) DC-75 diffusion pump fluid, 5 cc 1.4 (3.) Internal baffle kit.9 (2.) R11665 Centering ring for inlet flange, NW5.5 (1.) KC5SB Centering ring for inlet flange, ISO-63.2 (.5) IC63SV Centering ring for foreline flange, NW16.2 (.5) KC16SB Instruction manual Replacement Parts (one heater harness required per pump) 2 W, 115 V heater harness.5 (1.) L (for use with DC-74 and DC-72) 25 W, 115 V heater harness.5 (1.) L (for use with DC-75 and Santovac 5) 2 W, 22 V heater harness.5 (1.) L (for use with DC-74 and DC-72) 25 W, 22 V heater harness.5 (1.) L (for use with DC-75 and Santovac 5) 25 W, 9 V heater harness.5 (1.) L (for use with DC-75 and Santovac 5) 25 W, 165 V heater harness.5 (1.) L (for use with DC-75 and Santovac 5) Overtemperature thermal switch.5 (1.) L99641 (included with each heater harness) Pump ready thermal switch (optional).5 (1.) L99642 Varian, Inc. Vacuum Technologies 69

10 HS-2 Outline Drawing.84 DIA O.D. (21.3) 6 (152.4) 4.78 (121.4) (322) Dimensions: inches (millimeters) Technical Specifications Pumping Speed*, Operating Range 16 l/s Air, 2 l/s He and H 2 Maximum Throughput.6 T-l/s (.8 mbar-l/s) in operating range.7 T-l/s (.93 torr Operating Range 3.7 x 1-3 to < 5 x 1-8 torr, (4.9 x 1-3 to < mbar) Maximum Forepressure No Load:.55 torr (.71 mbar) Full Load:.4 torr (.52 mbar) Recommended Backing Pump 5 cfm (8.5 m 3 /hr) Backstreaming Rate*, Standard Cold Cap < 1 x 1-3 mg/cm2/min Warmup Time 15 minutes Cooldown Time 1 minutes (with quick cool coil) Fluid Charge 1 cc Electrical Requirements 1 ph, 5/6 Hz, 12/24 VAC Pump Power 45 watts Cooling Water Requirements.1 gpm (2 l/hr) at 6-8 F (15-26 C) Water Connections 1 8 in. FPT 7

11 Diffusion Pumps Speed Curve Air speed (l/sec) Throughput (Torr-l/sec) Inlet pressure (Torr) Pumping speed Throughput Diffusion Pumps Ordering Information Description Wt. kg (lbs) Part Number Description Wt. kg (lbs) Part Number ASA With standard cold cap, 12 V 2. (9.) With standard cold cap, 24 V 2. (9.) Accessories Wt. kg (lbs) Part Number 332 Water-cooled baffle with ASA 1. (4.5) F Nominal 2 in. ASA blank 5. (2.3) ASA6N mating flanges 2 in. ASA bored mating flanges 5. (2.3) ASA6353N Santovac 5 diffusion 2.5 (1.1) pump fluid, 5 cc DC-72 diffusion pump fluid, 5 cc 3. (1.4) DC-74 diffusion pump fluid, 5 cc 3. (1.4) DC-75 diffusion pump fluid, 5 cc 3. (1.4) Instruction manual NOTE Inlet flange: nominal 2 in. ASA flange with 6 in. OD Foreline flange:.84 in. diameter tube See page 92 for Baffles See page 9 for Santovac 5 diffusion pump fluid Replacement Parts (one heater required per pump) 45 W, 12 V heater 1. (.5) W, 24 V heater 1. (.5) Heater block (one required per pump) 21. (1.) Heater platen (one required per pump) 1. (.5) Replacement o-ring kit, (5 Inlet flange 1. (.5) K o-rings (butyl, 2-338)) Varian, Inc. Vacuum Technologies 71

12 VHS-4 Outline Drawing Dimensions: inches (millimeters) Speed Curve 1 5 Air speed (l/sec) Inlet pressure (Torr) Throughput (Torr-l/sec) Pumping speed/ Standard cold cap Pumping speed/ Extended cold cap Throughput Technical Specifications Pumping Speed*, Operating Range 75 l/s air, 94 l/s He/H 2 Maximum Throughput 1.5 T-l/s (2. mbar-l/s) in operating range, 2.5 T-l/s (3.2 torr Operating Range 2 x 1-3 to <5 x 1-9 torr (2.7 x 1-3 to <6.5 x 1-9 mbar) Maximum Forepressure No Load:.65 torr (.86 mbar) Full Load:.55 torr (.73 mbar) Recommended Backing Pump 1 cfm (17 m 3 /hr) Backstreaming Rate*, Standard Cold Cap <5 x 1-4 mg/cm 2 /min Warmup Time 1 minutes Cooldown Time 1 minutes (with quick cool coil) Fluid Charge 3 cc Electrical Requirements 1 ph, 5/6 Hz, 12/28/24 VAC Pump Power 145 watts Cooling Water Requirements.15 gpm (3 l/hr) at 6-8 F (15-26 C) Water Connections 1 8 in. FPT Tee 72

13 Diffusion Pumps Ordering Information Description Voltage Weight kg (lbs) Part Number Flange Type VHS-4 Pump ASA ISO ConFlat VHS-4 with standard cold cap 12 V 25. (55.) L L VHS-4 with extended cold cap 12 V 25. (55.) L L VHS-4 with standard cold cap 28 V 25. (55.) L L VHS-4 with extended cold cap 28 V 25. (55.) L L VHS-4 with standard cold cap 24 V 25. (55.) L L VHS-4 with extended cold cap 24 V 25. (55.) L L Accessories Page Weight kg (lbs) Part Number 334 Water-cooled baffle with ASA flanges (1.) F Water-cooled baffle with ISO flanges (1.) F Water-cooled baffle with ConFlat flanges (1.) F Centering ring for ISO inlet flange, 16K.5 (1.) IC16SV Centering ring for ISO foreline flange, KF4.2 (.5) KC4SV Santovac 5 diffusion pump fluid, 5 cc (2.5) DC-72 diffusion pump fluid, 5 cc (3.) DC-74 diffusion pump fluid, 5 cc (3.) DC-75 diffusion pump fluid, 5 cc (3.) Instruction manual Replacement Parts (one heater required per pump) 145 W, 12 V heater.5 (1.) W, 28 V heater.5 (1.) W, 24 V heater.5 (1.) Heater clamp (one required per pump) 1. (2.) Replacement nickel heater wire.5 (.2) Replacement o-ring kit, (3 inlet flange o-rings (butyl, 2-258)/ 1 fill and drain o-rings (Viton, 2-113).5 (1.) K Thermal switch (set at 3 F 147 C).5 (1.) Extended cold cap 95.5 (1.) F Sight glass repair kit L89831 Basic sight glass cooling kit R Extended sight glass cooling kit R12831 NOTE Inlet flange 4 in. ASA, foreline flange KF4 Inlet flange ISO 16K, foreline flange ISO KF4 Inlet flange 8 in. CFF, foreline flange 23 4 in. CFF Pumps with ISO flanges do not include required centering rings Diffusion Pumps Varian, Inc. Vacuum Technologies 73

14 VHS-6 Outline Drawing Dimensions: inches (millimeters) Speed Curve 2 5 Air speed (l/sec) Inlet pressure (Torr) Throughput (Torr-l/sec) Pumping speed/ Standard cold cap Pumping speed/ Extended cold cap Throughput Technical Specifications Pumping Speed*, Operating Range 1,55 l/s Air, 1,93 l/s He/H 2 Maximum Throughput 2.4 T-l/s (3.2 mbar-l/s) in operating range, 3.5 T-l/s (4.5 torr Operating Range 1.5 x 1-3 to <5 x 1-9 torr (2 x 1-3 to < 6.5 x 1-9 mbar) Maximum Forepressure No Load:.65 torr (.85 mbar) Full Load:.55 torr (.72 mbar) Recommended Backing Pump 17 cfm (29 m 3 /hr) Backstreaming Rate*, Standard Cold Cap <5 x 1-4 mg/cm 2 /min Warmup Time 1 minutes Cooldown Time 1 minutes (with quick cool coil) Fluid Charge 5 cc exact fluid charge available Electrical Requirements 1 ph, 5/6 Hz, 12/28/24 VAC Pump Power 22 watts Cooling Water Requirements.25 gpm (5 l/hr) at 6-8 F (15-26 C) Water Connections 1 8 in. FPT Tee 74

15 Diffusion Pumps Ordering Information Description Voltage Weight kg (lbs) Part Number Flange Type VHS-6 Pump ASA ISO ConFlat VHS-6 with standard cold cap 12 V 34. (75.) L L6231 VHS-6 with extended cold cap 12 V 34. (75.) L L62311 VHS-6 with standard cold cap 28 V 34. (75.) L L6236 VHS-6 with extended cold cap 28 V 34. (75.) L L62316 VHS-6 with standard cold cap 24 V 34. (75.) L L6232 VHS-6 with extended cold cap 24 V 34. (75.) L L62312 Accessories Page Weight kg (lbs) Part Number 336 Water-cooled baffle with ASA flanges (15.) F Water-cooled baffle with ISO flanges (15.) F Water-cooled baffle with ConFlat flanges (15.) F Santovac 5 diffusion pump fluid, 5 cc (exact pump charge) (2.5) DC-72 diffusion pump fluid, 5 cc (exact pump charge) (3.) DC-74 diffusion pump fluid, 5 cc (exact pump charge) (3.) DC-75 diffusion pump fluid, 5 cc (exact pump charge) (3.) Centering ring for ISO inlet flange, 2K.5 (1.) IC2SV Centering ring for ISO foreline flange, KF5.2 (.5) KC5SV Instruction manual Replacement Parts (one heater required per pump) 22 W, 12V heater.5 (1.) W, 28V heater.5 (1.) W, 24V heater.5 (1.) Heater clamping assembly (includes clamping plate, cover plate, insulator) Heater cover plate (one required per pump) 1. (2.) Heater insulator (one required per pump).2 (.5) Heater clamping plate (one required per pump).5 (1.) Replacement nickel heater wire.5 (1.) Replacement o-ring kit: 3 inlet flange o-rings (butyl, 2-267)/ 3 foreline flange o-rings (butyl/2-332), 1 fill and drain o-rings (Viton, 2-113).5 (1.) K Thermal switch (set at 3 F 147 C).5 (1.) Extended cold cap 95.5 (1.) F64551 NOTE Inlet flange 6 in. ASA, foreline flange 1.5 in. ASA Inlet flange ISO 2K, foreline flange ISO KF5 Inlet flange 1 in. CFF, foreline flange 33 8 in. CFF Pumps with ISO flanges do not include required centering rings Diffusion Pumps Varian, Inc. Vacuum Technologies 75

16 VHS-25 Outline Drawing Dimensions: inches Technical Specifications Pumping Speed*, Operating Range 2,125 l/s Air, 2,66 l/s He/H 2 Maximum Throughput 2.6 T-l/s (3.5 mbar-l/s) in operating range, 3.5 T-l/s (4.5 mbar torr Operating Range 1.2 x 1-3 to <5 x 1-9 torr (1.6 x 1-3 to <6.5 x 1-9 mbar) Maximum Forepressure No Load:.65 torr (.85 mbar) Full Load:.55 torr (.72 mbar) Recommended Backing Pump 17 cfm (29 m 3 /hr) Backstreaming Rate*, Standard Cold Cap < 5. x 1-4 mg/cm 2 /min Warmup Time 1 minutes Cooldown Time 1 minutes (with quick cool coil) Fluid Charge 5 cc exact fluid charge available Electrical Requirements 1 ph, 5/6 Hz, 12/28/24 VAC Pump Power 22 watts Cooling Water Requirements.25 gpm (5 l/hr) Water Connections 1 8 in. FPT Tee 76

17 Diffusion Pumps Speed Curve Air speed (l/sec) Throughput (Torr-l/sec) Inlet pressure (Torr) Pumping speed Throughput Diffusion Pumps Ordering Information Description Voltage Weight kg (lbs) Part Number VHS-25 Pump VHS-25 with standard cold cap 12V 34. (75.) K54331 VHS-25 with standard cold cap 28V 34. (75.) K54336 VHS-25 with standard cold cap 24V 34. (75.) K54332 Accessories Santovac 5 diffusion pump fluid, 5 cc (exact pump charge) 1.1 (2.5) DC-72 diffusion pump fluid, 5 cc (exact pump charge) 1.4 (3.) DC-74 diffusion pump fluid, 5 cc (exact pump charge) 1.4 (3.) DC-75 diffusion pump fluid, 5 cc (exact pump charge) 1.4 (3.) Instruction manual Replacement Parts (one heater required per pump) 22 W, 12 V heater.5 (1.) W, 28 V heater.5 (1.) W, 24 V heater.5 (1.) Heater cover plate (one required per pump) 1. (2.) Heater insulator (one required per pump).2 (.5) Heater clamping plate (one required per pump).5 (1.) Replacement nickel heater wire.5 (1.) Replacement o-ring kit: 3 inlet flange o-rings (butyl, 2-379), 3 foreline flange o-rings (butyl, 2-332)/1 fill and drain o-rings (Viton, 2-113).5 (1.) K Thermal switch (set at 3 F 147 C).5 (1.) NOTE Inlet flange: ISO 25F (bolted, o-ring seal) Foreline flange: ASA with 5 in. OD Varian, Inc. Vacuum Technologies 77

18 VHS-1 Outline Drawing Dimensions: inches (millimeters) Technical Specifications Pumping Speed*, Operating Range 3,65 l/s Air, 4,56 l/s He/H 2 Maximum Throughput 6.3 T-l/s (8.4 mbar l/s) in operating range 7.5 T-l/s (1. mbar torr Operating Range 1.7 x 1-3 to <5 x 1-9 torr at 44 W (2.3 x 1-3 to <6.5 x 1-9 mbar) Maximum Forepressure No Load:.65 torr (.85 mbar) Full Load:.55 torr (.72 mbar) Recommended Backing Pump 3 cfm (51 m 3 /hr) Backstreaming Rate*, Standard Cold Cap <5. x 1-4 mg/cm 2 /min Warmup Time 15 minutes Cooldown Time 25 minutes Fluid Charge 1, cc Electrical Requirements 3 ph, 5/6 Hz, 28/24/38/48 VAC Pump Power 44 watts Cooling Water Requirements.4 gpm (8 l/hr) Water Connections 1 8 in. FPT Tee 78

19 Diffusion Pumps Speed Curve 4 12 Air speed (l/sec) Throughput (Torr-l/sec) Inlet pressure (Torr) Pumping speed/ Standard cold cap Pumping speed/ Extended cold cap Throughput Diffusion Pumps Description Wt. kg (lbs) Part Number ASA ISO ConFlat VHS-1 with standard 68 (15) F42637 L59237 L cold cap, 28 V VHS-1 with extended 68 (15) F L L cold cap, 28 V VHS-1 with standard 68 (15) F42638 L59238 L cold cap, 24 V VHS-1 with extended 68 (15) F L L cold cap, 24 V VHS-1 with standard 68 (15) F L L cold cap, 38 V VHS-1 with extended 68 (15) F L L cold cap, 38 V VHS-1 with standard 68 (15) F42639 L59239 L cold cap, 48 V VHS-1 with extended 68 (15) F L L cold cap, 48 V Accessories Wt. kg (lbs) Part Number 33 Water-cooled baffle 9. (2.) F8631 with ASA flanges 33 Water-cooled baffle 9. (2.) F86311 with ISO flanges 33 Water-cooled baffle 9. (2.) F86312 with ConFlat flanges NOTE Inlet flange 1 in. ASA, foreline flange 2 in. ASA Inlet flange ISO 32K, foreline ISO 63K Inlet flange in. CFF, foreline flange 45 8 in. CFF See page 9 Santovac 5 diffusion pump fluid Baffles and extended cold caps can be found on pages 92 and 95 respectively Ordering Information Description Wt. kg (lbs) Part Number Accessories (Cont'd) DC-72 diffusion pump fluid, 5 cc 2.8 (6.) (two required) DC-74 diffusion pump fluid, 5 cc 2.8 (6.) (two required) DC-75 diffusion pump fluid, 5 cc 2.8 (6.) (two required) Centering ring for ISO foreline.5 (1.) IC63SV flange, 63K Instruction manual Replacement Parts (two heaters required per pump) 22 W, 28 V heater.5 (1.) W, 24 V heater.5 (1.) W, 38 V heater.5 (1.) W, 48 V heater.5 (1.) W, 28 V heater.5 (1.) W, 24 V heater.5 (1.) W, 38 V heater.5 (1.) W, 48 V heater.5 (1.) Heater crush plate (replace one with 1. (2.) K76671 each new heater) Heater clamping plate (one required.5 (1.) K49281 per pump) Replacement nickel heater wire.5 (1.) Replacement o-ring kit, (1 Inlet flange 1. (.5) K o-ring, (butyl, F431)/1 foreline flange o-ring, (butyl, 2-338)/1 fill and drain o-rings, (Viton, 2-113)) Thermal switch (set at 3 F 147 C).5 (1.) Extended cold cap 2. (.9) L Varian, Inc. Vacuum Technologies 79

20 VHS-4 Outline Drawing Dimensions: inches (millimeters) Technical Specifications Pumping Speed*, Operating Range 4,5 l/s Air, 5,625 l/s He/H 2 Maximum Throughput 6.3 T-l/s (8.4 mbar l/s) in operating range 7.5 T-l/s (1. mbar torr Operating Range 1.4 x 1-3 to <5 x 1-9 torr (1.9 x 1-3 to <6.5 x 1-9 mbar) Maximum Forepressure No Load:.65 torr (.85 mbar) Full Load:.55 torr (.72 mbar) Recommended Backing Pump 3 cfm (51 m 3 /hr) Backstreaming Rate*, Standard Cold Cap <1. x 1-3 mg/cm 2 /min Warmup Time 15 minutes Cooldown Time 25 minutes Fluid Charge 1, cc Electrical Requirements 3 ph, 5/6 Hz, 28/38/48 VAC Pump Power 44 watts Cooling Water Requirements.4 gpm (8 l/hr) Water Connections 1 8 in. FPT Tee 8

21 Diffusion Pumps Speed Curve Air speed (l/sec) Inlet pressure (Torr) Throughput (Torr-l/sec) 1 Pumping speed Throughput Diffusion Pumps Ordering Information Description Voltage Weight kg (lbs) Part Number Flange Type VHS-4 Pump ASA ISO VHS-4 with standard cold cap 28 V 75. (18.) K L VHS-4 with standard cold cap 38 V 75. (18.) K L VHS-4 with standard cold cap 48 V 75. (18.) K L VHS-4 with standard cold cap 24 V 75. (18.) K L Accessories Page Weight kg (lbs) Part Number DC-72 diffusion pump fluid, 5 cc (two required) (6.) DC-74 diffusion pump fluid, 5 cc (two required) (6.) DC-75 diffusion pump fluid, 5 cc (two required) (6.) Centering ring for ISO Inlet flange, 4K.5 (1.) IC4SV Centering ring for ISO foreline flange, 63K.5 (1.) IC63SV Instruction manual Replacement Parts (two heaters required per pump) 22 W, 28 V heater 1. (.5) W, 24 V heater 1. (.5) W, 38 V heater 1. (.5) W, 48 V heater 1. (.5) W, 28 V heater 1. (.5) W, 24 V heater 1. (.5) W, 38 V heater 1. (.5) W, 48 V heater 1. (.5) Heater crush plate (one required per pump) 2. (1.) K76671 Heater clamping plate (one required per pump) 1. (.5) K49281 Replacement nickel heater wire 1. (.5) Replacement o-ring kit, 1 inlet flange o-ring (butyl, 2-385), foreline flange o-ring (butyl, 2-338), 1 fill and drain o-rings (Viton, 2-113) 1. (.5) K Thermal switch (set at 3 F 147 C) 1. (.5) NOTE Inlet flange ISO 4K, foreline flange ISO 63-K. Inlet flange non-standard ASA, foreline flange 2 in. ASA. Pumps with ASA flanges include O-Rings for inlet and foreline flanges Pumps with ISO flanges do not include centering rings required for inlet and foreline flanges. Varian, Inc. Vacuum Technologies 81

22 HS-16 Outline Drawing Dimensions: inches (millimeters) Speed Curve 8 2 Air speed (l/sec) Throughput (Torr-l/sec) Inlet pressure (Torr) Pumping speed/cold cap Pumping speed/halo baffle Throughput Technical Specifications Pumping Speed*, Operating Range 6, l/s air, 7,5 l/s He and H 2 Maximum Throughput 8,1 W 9.5 T-l/s (12.7 mbar l/s) in operating range 9,6 W 12. T-l/s (16 mbar l/s) in operating range 11.5 T-l/s (15.3 torr 13.5 T-l/s (18. torr Operating Range 2 x 1-3 to <5 x 1-8 torr at 9,6 W (1.3 x 1-3 to <6.5 x 1-8 mbar) Maximum Forepressure No Load.65 torr (.85 mbar), Full Load.55 torr (.72 mbar) Pump Power 81/96 watts Recommended Backing Pump 8 cfm (136 m 3 /hr) Backstreaming Rate*, Standard Cold Cap <1.5 x 1-3 mg/cm 2 /min Warmup Time 3 minutes Cooldown Time 48 minutes (3 minutes with optional quick cool coil) Fluid Charge 3 quarts (2.8 liters) Electrical Requirements 3 ph, 5/6 Hz, 24/415/48 VAC Cooling Water Requirements 1.5 gpm (3 l/hr) at 6-8 F (15-26 C) Water Connections 1 4 in. FPT Tee Recommended Fluid DC-74 (see page 9) 82

23 Diffusion Pumps Ordering Information Description Voltage Weight kg (lbs) Part Number Flange Type HS-16 Pump ASA ISO HS-16 with standard cold cap 24 V 218. (48.) L HS-16 with halo baffle 24 V 218. (48.) L HS-16 with standard cold cap 415 V 218. (48.) L HS-16 with halo baffle 415 V 218. (48.) L HS-16 with standard cold cap 48 V 218. (48.) L HS-16 with halo baffle 48 V 218. (48.) L NOTE The HS-16 can be ordered with 96 W heaters by increasing the middle number of the 3-digit suffix by two; eg Accessories Page Weight kg (lbs) Part Number Water-cooled halo baffle (2.) K Water-cooled baffle with ASA flanges (18.) R Water-cooled baffle with ISO flanges (13.) R Centering ring for ISO inlet flange, 5K.5 (1.) IC5SV Centering ring for ISO foreline flange, 1K.5 (1.) IC1SV Instruction manual Replacement Parts (three heaters required per pump) 27 W, 24 V/415 V with leads.5 (1.) W, 48 V with leads.5 (1.) W, 24 V/415 V no leads used on pumps built before May (1.) W, 48 V no leads used on pumps built before May (1.) W, 24 V/415 V with leads.5 (1.) W, 48 V with leads.5 (1.) Heater crush plate (replace one with each new heater).5 (1.) K49191 Heater insulator (three required per pump).5 (1.) Heater clamping plate (three required per pump) 8. (4.) K49171 Replacement o-ring kit for ASA pumps, 1 inlet flange o-ring, (buna, )/ 1 foreline flange o-ring, (buna, 2-348)/8 fill and drain o-rings, (Viton, 2-213) 1. (.5) K Upper thermal switch (set at 185 F/85 C) 1. (.5) K951 Lower thermal switch (set at 39 F/199 C) 1. (.5) K952 Heater Retrofit Kit (for pumps built before May 199) HS-16, (11.35) L HS-16, (11.35) L HS-16, (11.35) L NOTE Inlet flange 16 in. ASA, foreline flange 3 in. ASA Inlet flange ISO 5K, foreline flange ISO 1K Not recommended for use with Santovac 5 Pumps with ASA flanges include o-rings for inlet and foreline flanges Pumps with ISO flanges do not include centering rings required for foreline and inlet flanges Diffusion Pumps Varian, Inc. Vacuum Technologies 83

24 HS-2 Outline Drawing Dimensions: inches (millimeters) Speed Curve Air speed (l/sec) Throughput (Torr-l/sec) Inlet pressure (Torr) Pumping speed/cold cap Pumping speed/halo baffle Throughput Technical Specifications Pumping Speed*, Operating Range 1, l/s air, 12,5 l/s He and H 2 Maximum Throughput 12.5 T-l/s (16.7 mbar l/s) in operating range, 18 T-l/s (23 torr Operating Range 1.3 x 1-3 to 5 x 1-8 torr (1.7 x 1-3 to 6.5 x 1-8 mbar) Maximum Forepressure No Load:.65 torr (.85 mbar) Full Load:.55 torr (.72 mbar) Recommended Backing Pump 1 cfm (17 m 3 /hr) Backstreaming Rate*, Standard Cold Cap <1.5 x 1-3 mg/cm 2 /min Warmup Time 45 minutes Cooldown Time 85 minutes Fluid Charge 5 quarts (4.7 liters) Electrical Requirements 3 ph, 5/6 Hz, 24/415/48 VAC Pump Power 12, watts Cooling Water Requirements 1.5 gpm (3 l/hr) at 6-8 F (15-26 C) Water Connections 1 4 in. FPT Tee Recommended Fluid DC-74 (see page 9) 84

25 Diffusion Pumps Ordering Information Description Voltage Weight kg (lbs) Part Number Flange Type HS-2 Pump ASA ISO HS-2 with standard cold cap 24 V 264. (58.) L HS-2 with halo baffle 24 V 264. (58.) L HS-2 with standard cold cap 415 V 264. (58.) L HS-2 with halo baffle 415 V 264. (58.) L HS-2 with standard cold cap 48 V 264. (58.) L HS-2 with halo baffle 48 V 264. (58.) L Accessories Page Weight kg (lbs) Part Number Water-cooled halo baffle (25.) K Water-cooled baffle with ASA flanges (215.) R Water-cooled baffle with ISO flanges (16.) R Centering ring for ISO foreline flange, 16K.5 (1.) IC16SV Instruction manual Replacement Part (six heaters required per pump) Heater, 2 W, 24 V/415 V with leads.5 (1.) Heater, 2 W, 48 V with leads.5 (1.) Heater, 2 W, 24 V/415 V no leads used on pumps built before May (1.) Heater, 2 W, 48 V no leads used on pumps built before May (1.) Heater crush plate (replace one with each new heater).5 (1.) K7181 Heater clamping plate (six required per pump) 4. (8.) K7171 Heater insulator (one required per pump).5 (1.) L65141 Replacement o-ring kit for ASA pumps, 1 Inlet flange o-ring, (butyl, )/ 1 foreline flange o-ring, (buna, 2-432)/8 fill and drain o-rings, (Viton, 2-213).5 (1.) K Upper thermal switch (set at 185 F/85 C).5 (1.) K951 Lower thermal switch (set at 39 F/199 C).5 (1.) K952 Heater Retrofit Kit (for pumps built before May 199) HS-2, (3.) L HS-2, (3.) L HS-2, (3.) L NOTE Inlet flange 2 in. ASA, foreline flange 4 in. ASA Inlet flange ISO 63K, foreline flange ISO 16K Not recommended for use with Santovac 5 ASA version pumps include o-rings for both inlet to foreline flanges. Centering rings for ISO version pumps must be ordered separately. Diffusion Pumps Please note that this item is controlled for export by the Nuclear Suppliers Group. Accordingly, you may be required to obtain an export license from the U.S. Department of Commerce prior to exporting this diffusion pump from the United States. Please consult the U.S. Export Administration Regulations, ECCN 2B231, for further guidance. Varian, Inc. Vacuum Technologies 85

26 HS-32 Outline Drawing 26.5 (673) 68.5 (174) (1187) Dimensions: inches (millimeters) Technical Specifications Pumping Speed*, Operating Range 17,3 l/s Air, 21,625 l/s He and H 2 Maximum Throughput 3 T-l/s (4 mbar l/s) in operating range, 35 T-l/s (45 torr Operating Range 1.7 x 1-3 to <5 x 1-8 torr (2.3 x 1-3 to <6.5 x 1-8 mbar) Maximum Forepressure No Load:.5 torr (.65 mbar) Full Load:.35 torr (.45 mbar) Recommended Backing Pump 3 cfm (51 m 3 /hr) Backstreaming Rate*, Standard Cold Cap <7 x 1-4 mg/cm 2 /min Warmup Time 6 minutes Cooldown Time 18 minutes Fluid Charge 3 U.S. gallons (11.3 liters) Electrical Requirements 3 ph, 5/6 Hz, 24/415/48 VAC Pump Power 24, watts Cooling Water Requirements 4 gpm (8 l/hr) at 6-8 F (15-26 C) Water Connections 3 8 in. FPT Tee Recommended Fluid DC-74 (see page 9) 86

27 Diffusion Pumps Speed Curve Air speed (l/sec) Inlet pressure (Torr) Throughput (Torr-l/sec) Pumping speed/cold cap Pumping speed/halo baffle Throughput Diffusion Pumps Description Wt. kg (lbs) Part Number HS-32 Pump ASA ISO HS-32 with standard 612 (1,35) L cold cap, 24 V HS-32 with halo baffle, 24 V 612 (1,35) L HS-32 with standard 612 (1,35) L cold cap, 415 V HS-32 with halo baffle, 612 (1,35) L V HS-32 with standard 612 (1,35) L cold cap, 48 V HS-32 with halo baffle, 48 V 612 (1,35) L Accessories Wt. kg (lbs) Part Number Water-cooled halo baffle 16 (35) K Water-cooled baffle with ASA flanges 16 (35) R Water-cooled baffle with ISO flanges 135 (3) R Quick cool coil must be installed in K61751 the factory, can not ship separately Centering ring for ISO foreline.5 (1.) IC2SV flange, 2K Instruction manual NOTE Inlet flange 32 in. ASA, foreline flange 6 in. ASA Inlet flange ISO 8F (bolted), foreline flange ISO 2K (clamped) Not recommended for use with Santovac 5 ASA pump versions include o-rings for both inlet and foreline flanges ISO pump versions include inlet flange o-ring, but does not include foreline flange centering ring Baffles can be found on pages 93 and 94 Ordering Information Description Wt. kg (lbs) Part Number Replacement Parts (six heaters required per pump) Heater, 4 W, 24 V/415 V/.5 (1.) V with leads Heater, 4 W, 24 V/415 V/.5 (1.) V no leads used on pumps built before May 199 Heater, 4 W, 2 V.5 (1.) Heater, 4 W, 4 V.5 (1.) L63831 Heater, 4 W, 44 V.5 (1.) L Heater crush plate (replace one with.5 (1.) K72461 each new heater) Heater insulator (one required.5 (1.) per pump) Heater clamping plate (six required 4 (8) K72471 per pump) Replacement o-ring kit for ASA pumps,.5 (1.) K inlet flange o-ring, (buna, 45391)/ 1 foreline flange o-ring, (butyl, 2-443)/ 8 fill and drain o-rings, (Viton, 2-213) ISO inlet flange o-ring.5 (1.) Lower thermal switch.5 (1.) K954 (set at 55 F/288 C) Heater Retrofit Kit (for pumps built before May 199) HS-32, (4.) L HS-32, (4.) L HS-32, (4.) L Please note that this item is controlled for export by the Nuclear Suppliers Group. Accordingly, you may be required to obtain an export license from the U.S. Department of Commerce prior to exporting this diffusion pump from the United States. Please consult the U.S. Export Administration Regulations, ECCN 2B231, for further guidance. Varian, Inc. Vacuum Technologies 87

28 NHS-35 Outline Drawing (173) (88) (1832) Dimensions: inches (millimeters) Speed Curve Air speed (l/sec) Throughput (Torr-l/sec) Inlet pressure (Torr) Pumping speed/cold cap Pumping speed/halo baffle Throughput Technical Specifications Pumping Speed*, Operating Range 28, l/s air, 35, l/s He and H 2 Maximum Throughput 25 T-l/s (33 mbar l/s) in operating range, 35 T-l/s (45 torr Operating Range 9 x 1-4 to < 5 x 1-8 torr (1.2 x 1-3 < 6.5 x 1-8 mbar) Maximum Forepressure No Load.55 torr (.71 mbar), Full Load.4 torr (.52 mbar) Recommended Backing Pump 3 cfm (51 m 3 /hr) Backstreaming Rate*, Standard Cold Cap <5 x 1-4 mg/cm 2 /min Warmup Time 6 minutes Cooldown Time 18 minutes Fluid Charge 3 U.S. gallons (11.3 liters) Electrical Requirements 3 ph, 5/6 Hz, 24/415/48 VAC Pump Power 24, watts Cooling Water Requirements 4 gpm (8 l/hr) at 6-8 F (15-26 C) Recommended Fluid DC-74 (see page 9) 88

29 Diffusion Pumps Ordering Information Description Voltage Weight kg (lbs) Part Number Flange Type HS-35 Pump ASA ISO NHS-35 with standard cold cap 24 V 68. (1,55.) F17338 L NHS-35 with halo baffle 24 V 68. (1,55.) F L NHS-35 with standard cold cap 415 V 68. (1,55.) F L NHS-35 with halo baffle 415 V 68. (1,55.) F L NHS-35 with standard cold cap 48 V 68. (1,55.) F17339 L NHS-35 with halo baffle 48 V 68. (1,55.) F L Accessories Page Weight kg (lbs) Part Number Water-cooled halo baffle (45.) K Water-cooled baffle with ASA flanges (495.) R Water-cooled baffle with ISO flanges (375.) R Quick cool coil must be installed in the factory, can not ship separately F17391 Centering ring for ISO foreline flange, 2K.5 (1.) IC2SV O-ring, ISO Inlet flange.5 (1.) Instruction manual Replacement Parts (six heaters required per pump) Heater 4 W, 24 V/48 V with leads.5 (1.) Heater 4 W, 24 V/48 V no leads used on pumps built before May (1.) Heat shield (reusable).5 (1.) L6371 Heater clamping plate (six required per pump) 4. (8.) F17491 Heater insulator (one required per pump).5 (1.) L96991 Replacement o-ring kit for ASA pumps 1 inlet flange o-ring, (buna, )/ 1 foreline flange o-ring, (butyl, 2-267)/8 fill and drain o-rings, (Viton, 2-213).5 (1.) K Sightglass service kit (pumps built before Oct 95) 1.5 (3.) F69731 Upper thermal switch (set at 2 F/93 C).5 (1.) K955 Lower thermal switch (set at 6 F/316 C).5 (1.) K956 Heater Retrofit Kit (for pumps built before May 199) NHS-35, 24/4/ (4.) L NHS-35, (4.) L NHS-35, (4.) L NOTE Inlet flange 35 in. ASA, foreline flange 6 in. ASA Inlet flange ISO 1F (bolted), foreline flange ISO 2K (clamped) Not recommended for use with Santovac 5 ASA pump versions include o-rings for both inlet and foreline flanges ISO pump versions include inlet flange o-ring, but does not include foreline flange centering ring Diffusion Pumps Please note that this item is controlled for export by the Nuclear Suppliers Group. Accordingly, you may be required to obtain an export license from the U.S. Department of Commerce prior to exporting this diffusion pump from the United States. Please consult the U.S. Export Administration Regulations, ECCN 2B231, for further guidance. Varian, Inc. Vacuum Technologies 89

30 Diffusion Pump Fluids Varian offers a wide range of diffusion pump fluid types and containers sizes. We have just the right fluid type and container size to meet the requirements of your particular application. Varian now offers exact pump charges for many of our diffusion pumps, including the VHS-6, VHS-1, HS-16, HS-2, HS-32, and NHS-35. Exact pump charges enable you to purchase just enough fluid to fill your diffusion pump, thus eliminating costly waste. This eliminates problems associated with the disposal of diffusion pump fluid and eliminates the guess work associated with filling the pump. NEOVAC SY DC-72 DC-74 DC-75 SANTOVAC 5* Chemical description Synthetic Silicone Single-Component High-Purity Mixed 5-Ring Hydrocarbon Silicone Silicone Polyphenyl Ether Chemical composition Mono-N Mixed Tetramethyltetra- Penta phenyltri- Mixed 5-Ring Alkyldiphenylether Phenylmethyldimethyl phenyltrisiloxane methyltrisiloxane Polyphenyl Ether Cyclosiloxane Ultimate pressure Untrapped (torr) Low 1-8 Range to 1-8 range 1-9 to 1-1 range 1-1 Trapped (torr) 1 x 1-11 Range to 1-11 range 1-11 range Vapor pressure at 25 C (torr) 1 x x x x x 1-9 at 2 C Viscosity (cst) at 25 C 25 at 4 C Average molecular weight Boiling temperature ( C) at.5 torr 22 at.8 torr Flash point Ultimate pressure Very Good Fair Very Good Excellent Excellent Thermal stability Good Excellent Excellent Excellent Very Good Oxidation resistance Good Excellent Excellent Excellent Very Good System cleanliness Very Good Good Very Good Very Good Excellent NOTE Santovac 5 is the only recommended fluid for leak detectors NEOVAC SY is a high quality, low cost synthetic organic compound (alkyldiphenylether) that performs as well as DC-74. With its low vapor pressure, it will achieve base pressures in the low 1-8 torr range untrapped and will not produce inorganic deposits which can cause electrostatic charge buildup on electrodes of sensitive instruments. Dow Corning DC-72 is an all-purpose silicone fluid that is capable of achieving pressures of 1-7 torr range. With lower boiling points than DC 74 and DC 75, it gives higher throughput for a given power. Dow Corning DC-74 is a single component silicone fluid that will achieve pressures in the low 1-8 torr range untrapped. With its low vapor pressure, it combines very good pumping characteristics with low Backstreaming Rates. Dow Corning DC-75 is a high-purity, single component silicone fluid designed for ultrahigh vacuum applications. It can achieve pressures in the low 1-1 torr range untrapped. The vapor pressure and backstreaming rate of this fluid is so low that the use of traps and baffles is often unnecessary. Santovac 5 is a five-ring polyphenylether for use in ultrahigh vacuum applications. With ultra low vapor pressure and backstreaming rates, this fluid is very clean and often eliminates the need for traps and baffles. Ultimate pressures in the 1-1 torr range can be achieved and will not produce inorganic deposits which can cause electrostatic charge buildup on electrodes of sensitive instruments. 9

31 Diffusion Pumps Ordering Information Description Diffusion Pump Weight kg (lbs) Part Number Exact Charge NEOVAC SY 1 liter/1, cc VHS-1, VHS-4 3. (1.4) K U.S. gallon (3.8 liters) 1.6 (4.8) K U.S. gallons (18.9 liters) 53. (23.9) K Dow Corning DC-72 5 cc VHS-6, VHS (1.4) U.S. gallon (3.8 liters) 12. (5.4) U.S. gallons (18.9 liters) 51. (23.) Dow Corning DC-74 5 cc VHS-6, VHS (1.4) U.S. gallon (3.8 liters) 12. (5.4) U.S. gallons (23.5 liters) 51. (23.) Dow Corning DC-75 5 cc VHS-6, VHS (1.4) U.S. gallon (3.8 liters) 12. (5.4) Santovac 5 4 cc 1. (.5) cc 2. (.9) cc VHS-6, VHS (1.1) Diffusion Pumps Varian, Inc. Vacuum Technologies 91

32 Water-Cooled Baffles Outline Drawing Dimensions: inches Technical Specifications Ordering Information 33 Water-Cooled Nominal Conductance Recommended Flow 334 Water-Cooled Nominal Conductance Recommended Flow 332 Water-Cooled Nominal Conductance Recommended Flow 336 Water-Cooled Nominal Conductance Recommended Flow 3,55 l/s (air).1 to.2 gpm (2-4 l/hr) 9 l/s (air).1 to.2 gpm (2-4 l/hr) 3 l/s (air).1 to.2 gpm (2-4 l/hr) 1,5 l/s (air).1 to.2 gpm (2-4 l/hr) Description Weight Part kg (lbs) Number Low-profile 33 Water-cooled baffle ASA 9. (2.) F8631 Low-profile 33 Water-cooled baffle ISO 9. (2.) F86311 Low-profile 33 Water-cooled baffle CFF 9. (2.) F Water-Cooled Baffle ASA 4.5 (1.) F Water-Cooled Baffle ISO 4.5 (1.) F Water-Cooled Baffle CFF 4.5 (1.) F Water-cooled baffle ASA 4.5 (1.) F Water-cooled baffle ISO 4.5 (1.) F Water-cooled baffle CFF 4.5 (1.) F Water-cooled baffle ASA 7. (15.) F Water-cooled baffle ISO 7. (15.) F Water-cooled baffle CFF 7. (15.) F

33 Water-Cooled Baffles for HS-16, HS-2, HS-32, and NHS Diffusion Pumps Diffusion Pumps Diffusion Pumps Technical Specifications Recommended Cooling-water Flow Rate Supportable Weight 1-2 gpm ( liter/hr) Designed to support weight of corresponding diffusion pump Flange Dimensions Baffle Diffusion Inlet & Outlet Flange Hole Size Flange Flange Outside Cooling Water Part Number Pump Model Flanges Bolt Circle Height Diameter Tubing OD R HS in. ASA 54 (21.25) 29 (1.125) 18 (7.9) 597 (23.5) 15 (.59) R HS-16 ISO-5K Clamped flanges without bolts 18 (7.9) 55 (21.65) 15 (.59) R HS-2 2 in. ASA 635 (25.) 32 (1.25) 18 (7.9) 699 (27.5) 15 (.59) R HS-2 ISO-63K Clamped flanges without bolts 18 (7.9) 69 (27.17) 15 (.59) R HS in. ASA 921 (36.25) 22 (.875) 18 (7.9) 968 (38.12) 15 (.59) R HS-32 ISO-8F 89 (35.4) 14 (.55) 18 (7.9) 92 (36.22) 15 (.59) R NHS in. ASA 978 (38.5) 22 (.875) 18 (7.9) 16 (41.75) 15 (.59) R NHS-35 ISO-1F 19 (42.91) 14 (.55) 18 (7.9) 112 (44.9) 15 (.59) Ordering Information Description Weight kg (lbs) Part Number Water-cooled baffle for HS-16 with ASA flanges 8 (18) R Water-cooled baffle for HS-16 with ISO flanges 6 (13) R Water-cooled baffle for HS-2 with ASA flanges 1 (215) R Water-cooled baffle for HS-2 with ISO flanges 7 (16) R Water-cooled baffle for HS-32 with ASA flanges 16 (35) R Water-cooled baffle for HS-32 with ISO flanges 135 (3) R Water-cooled baffle for NHS-35 with ASA flanges 225 (495) R Water-cooled baffle for NHS-35 with ISO flanges 17 (375) R Varian, Inc. Vacuum Technologies 93

34 Halo Baffles for Large Diffusion Pumps for HS-16, -2, and NHS-35 Diffusion Pumps Varian s Halo Baffles provide nearly twice the speed at the pump inlet as that achieved with conventional chevron baffles, while adding no height to the system. These watercooled baffles are very economical compared to other opaque chevron baffles. Net Speed with Halo Baffle Approximately 6% of pump speed* Backstreaming Reduction Approximately 9%* Materials Nickel-plated copper (16 in., 2 in.) Nickel-plated mild steel (32 in., 35 in.) Cooling: Recommended Water Flow Technical Specifications In series with diffusion pumps. See specific diffusion pump technical specs HS16 HS-35. Ordering Information Baffle Size Weight Part kg (lbs) Number 16 in. 9. (2.) K in. 11. (25.) K in. 16. (35.) K in. 2. (45.) K * Values are estimates. Actual speed and backstreaming rate will vary depending on the application conditions. 94

35 Extended Cold Caps for VHS-4, -6, and -1 Diffusion Pumps Diffusion Pumps The Extended Cold Cap is an option that fits inside the VHS-4, VHS-6, and VHS-1 pumps in place of the standard cold cap. It stops backstreaming as effectively as an optically dense baffle, yet it retains 8% of the pump s speed. Residual backstreaming is so low that it cannot be measured by the American Vacuum Society s standard collection method. Diffusion Pumps Technical Specifications Ordering Information Speed with Extended Cold Cap Materials Cooling 8% of pump speed Nickel-plated copper Conduction (no water) Description Weight Part kg (lbs) Number VHS-4.5 (1.) F VHS-6.5 (1.) F64551 VHS-1.9 (2.) L Varian, Inc. Vacuum Technologies 95