VacIon Plus 150. Outline Drawing. Technical Specifications. Dimensions: millimeters (inches) 6" O.D. CFF (NW100) (1.88) REF (14.
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1 VacIon Plus 150 Outline Drawing 6" O.D. CFF (NW100) (1.88) REF 100 (3.94) REF 170 (6.69) REF (10.73) REF (9.62) REF (14.28) REF THREADING 1/2"-20 2B 205 (8.07) REF Dimensions: millimeters (inches) Technical Specifications StarCell Noble Diode Diode Nominal pumping speed for Nitrogen (*) (l/s) Operating life at 1x10-6 mbar (hours) 80,000 50,000 50,000 Maximum starting pressure (mbar) ² 1x10-2 ² 1x10-3 Ultimate pressure Below Inlet flange 6 CFF (NW 100) AISI 304 ESR Maximum baking temperature ( C) 350 Weight, kg (Ibs) 43 (94) (*) Tested according to ISO/DIS
2 Ion Pumps VacIon Plus Pumping Speed vs Pressure Pumping Speed (l/s) Pressure (mbar) Nitrogen unsaturated Diode Nitrogen saturated Diode Argon saturated StarCell See pages for Vaclon Plus combination pumps. Pumps Diode Diode with heaters installed 120 V Diode with heaters installed 220 V Diode double-ended Diode double-ended with heaters installed 120 V Diode double-ended with heaters installed 220 V Noble Diode Noble Diode with heaters installed 120 V Noble Diode with heaters installed 220 V with heaters installed 120 V with heaters installed 220 V StarCell StarCell with heaters installed 120 V StarCell with heaters installed 220 V StarCell double-ended StarCell double-ended with heaters installed 120 V StarCell double-ended with heaters installed 220 V Dual Controller See also pages One Pump Negative 120 V One Pump Negative 220 V One Pump Positive 120 V One Pump Positive 220 V Ordering Information MidiVac Controller See also pages Negative Single Output 120 V Negative Single Output 220 V Positive Single Output 120 V Positive Single Output 220 V MiniVac Controller See also page 31 MiniVac 120 V MiniVac 220 V HV Cables 4 m (13 ft.) long, with interlock m (23 ft.) long, with interlock m (33 ft.) long, with interlock m (66 ft.) long, with interlock Replacement Parts HV Feedthrough with interlock Pumping element Diode Pumping element Noble Diode Pumping element StarCell Heaters* 120 V Heaters* 220 V * To order heaters for replacement or upgrading of existing pumps, please contact your local Varian Vacuum Technologies representative. 2
3 VacIon Plus 300 Outline Drawing 8" O.D. CFF (NW150) (13.57) REF (2.17) REF 130 (5.11) REF 170 (6.69) REF THREADING 1/2" (17.71) REF (9.62) REF Dimensions: millimeters (inches) Technical Specifications StarCell Noble Diode Diode Nominal pumping speed for Nitrogen (*) (l/s) Operating life at 1x10-6 mbar (hours) 80,000 50,000 50,000 Maximum starting pressure (mbar) ² 1x10-2 ² 1x10-3 Ultimate pressure Below Inlet flange 8 CFF (NW 150) AISI 304 ESR Maximum baking temperature ( C) 350 Weight, kg (Ibs) 69 (149) (*) Tested according to ISO/DIS
4 Ion Pumps VacIon Plus Pumping Speed vs Pressure Pumping Speed (l/s) Pressure (mbar) Nitrogen unsaturated Diode Nitrogen saturated Diode Argon saturated StarCell See pages for Vaclon Plus combination pumps. Pumps Diode Diode with heaters installed 120 V Diode with heaters installed 220 V Diode double-ended Diode double-ended with heaters installed 120 V Diode double-ended with heaters installed 220 V Noble Diode Noble Diode with heaters installed 120 V Noble Diode with heaters installed 220 V with heaters installed 120 V with heaters installed 220 V StarCell StarCell with heaters installed 120 V StarCell with heaters installed 220 V StarCell double-ended StarCell double-ended with heaters installed 120 V StarCell double-ended with heaters installed 220 V Dual Controller See also pages One Pump Negative 120 V One Pump Negative 220 V One Pump Positive 120 V One Pump Positive 220 V Ordering Information MidiVac Controller See also pages Negative Single Output 120 V Negative Single Output 220 V Positive Single Output 120 V Positive Single Output 220 V MiniVac Controller See also page 31 MiniVac 120 V MiniVac 220 V HV Cables 4 m (13 ft.) long, with interlock m (23 ft.) long, with interlock m (33 ft.) long, with interlock m (66 ft.) long, with interlock Replacement Parts HV Feedthrough with interlock Pumping element Diode Pumping element Noble Diode Pumping element StarCell Heaters* 120 V Heaters* 220 V * To order heaters for replacement or upgrading of existing pumps, please contact your local Varian Vacuum Technologies representative. 4
5 VacIon Plus 500 Outline Drawing 8" O.D. CFF (NW150) (4.22) REF (1.82) REF 350 (13.78) REF 130 (5.11) REF 230 (9.05) REF 450 (17.71) REF 145 (5.7) REF THREADING 1/2" (12) REF (11.68) REF (20.65) REF Dimensions: millimeters (inches) Technical Specifications StarCell Noble Diode Diode Nominal pumping speed for Nitrogen (*) (l/s) Operating life at 1x10-6 mbar (hours) 80,000 50,000 50,000 Maximum starting pressure (mbar) ² 1x10-2 ² 1x10-3 Ultimate pressure Below Inlet flange 8 CFF (NW 150) AISI 304 ESR Maximum baking temperature ( C) 350 Weight, kg (Ibs) 120 (264) (*) Tested according to ISO/DIS
6 Ion Pumps VacIon Plus Pumping Speed vs Pressure Pumping Speed (l/s) Pressure (mbar) Nitrogen unsaturated Diode Nitrogen saturated Diode Argon saturated StarCell See pages for Vaclon Plus combination pumps. Pumps Diode Diode with heaters installed 120 V Diode with heaters installed 220 V Diode double-ended Diode double-ended with heaters installed 120 V Diode double-ended with heaters installed 220 V Noble Diode Noble Diode with heaters installed 120 V Noble Diode with heaters installed 220 V with heaters installed 120 V with heaters installed 220 V StarCell StarCell with heaters installed 120 V StarCell with heaters installed 220 V StarCell double-ended StarCell double-ended with heaters installed 120 V StarCell double-ended with heaters installed 220 V Dual Controller See also pages One Pump Negative 120 V One Pump Negative 220 V One Pump Positive 120 V One Pump Positive 220 V Ordering Information MidiVac Controller See also pages Negative Single Output 120 V Negative Single Output 220 V Positive Single Output 120 V Positive Single Output 220 V MiniVac Controller See also page 31 MiniVac 120 V MiniVac 220 V HV Cables 4 m (13 ft.) long, with interlock m (23 ft.) long, with interlock m (33 ft.) long, with interlock m (66 ft.) long, with interlock Replacement Parts HV Feedthrough with interlock Pumping element Diode Pumping element Noble Diode Pumping element StarCell Heaters* 120 V Heaters* 220 V * To order heaters for replacement or upgrading of existing pumps, please contact your local Varian Vacuum Technologies representative. 6
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