cooled, Non-heated ATH 1603 M, DN 200 CF-F, External drive electronics, Water cooled, Non-heated

Transcription

1 ATH 1603 M, DN 200 CF-F, External drive electronics, Water ATH 1603 M, DN 200 CF-F, External drive electronics, Water

2 ATH 1603 M, DN 200 CF-F, External drive electronics, Water Similar Image 5-axis magnetically levitated turbopump with drag stage for a pump speed of up to 1360 l/s for N 2 DN 200 CF-F flange for demanding UHV applications Operation with Magpower external drive electronics Installation in any orientation Water CE marked and ROHS compliant Page 2

3 Dimensions H mm Technical Data Bearing Compression ratio for Ar > Compression ratio for H 2 > Compression ratio for He > Compression ratio for N 2 > Cooling method Cooling water consumption Cooling water consumption, max Cooling water consumption, min Cooling water temperature Electronic drive unit Flange (in) Flange (out) Fore-vacuum max. for N 2 Gas throughput for Ar Gas throughput for H 2 Gas throughput for He Gas throughput for N 2 Interfaces Mounting orientation Operating voltage: 50/60 Hz Power consumption at ultimate pressure Pumping speed for Ar Pumping speed for H 2 Pumping speed for He ATH 1603 M, DN 200 CF-F, External drive electronics, Water Magnetically Levitated Water C F K External drive electronics DN 200 CF-F DN 40 ISO-KF 1.7 hpa 1.27 Torr 1.7 mbar 20.3 hpa l/s > 67.6 hpa l/s > 67.6 hpa l/s 67.6 hpa l/s Via External drive electronics in any orientation / , 50/60 Hz V AC 300 W 1280 l/s 540 l/s 940 l/s Pumping speed for N l/s Rotation speed ± 2 % 39,000 rpm 39,000 min -1 Run-up time Separate electronic drive unit Sound pressure level Ultimate pressure Weight < 6 min YES 48 db(a) < hpa < Torr < mbar 34 kg lb Page 3

4 Order number ATH 1603 M Y Accessories Cables Connection cables external drive electronics), L = 1.0 m A C6-D external drive electronics), L = 3.5 m A C6-D external drive electronics), L = 5.0 m A C6-D external drive electronics), L = 10.0 m A C6-D external drive electronics), L = 20.0 m A C6-D Cables Mains cables / Power cords Power cord 2.5 m Europe standard V AC A Power cord 2.5 m US standard V AC A Cables Valve cables (external drive electronics to venting valve) electronics to venting valve), L = 1.0 m A electronics to venting valve), L = 3.5 m A electronics to venting valve), L = 5.0 m A electronics to venting valve), L = 10.0 m A electronics to venting valve), L = 20.0 m A Control Devices External drive units Magpower controller Flanges/Ports Rotatable flanges Rotatable flange DN 200 CF-F Mounting Mounting kits for ATH-M <verteilen> Mounting bolts for CF-F (for ATH 1600 M, DN 200) Protection Dust separators/inlet particle filters Dust filter Protection Inlet screens Stainless inlet screen kit for DN M Aluminum inlet screen kit for DN Valves Sealing gas valves, shielded (normally closed) Purge valve 50 sccm S Valves Water inlet valves Water inlet valve 24 V DC Venting Venting valves (normally closed) Air venting valve (for OBC V4 and Magpower) Page 4

5 Vacuum solutions from a single source Pfeiffer Vacuum stands for innovative and custom vacuum solutions worldwide, technological perfection, competent advice and reliable service. Complete range of products From a single component to complex systems: We are the only supplier of vacuum technology that provides a complete product portfolio. Competence in theory and practice Benefit from our know-how and our portfolio of training opportunities! We support you with your plant layout and provide first-class on-site service worldwide. Are you looking for a perfect vacuum solution? Please contact us: Pfeiffer Vacuum GmbH Headquarters Germany T info@pfeiffer-vacuum.de All data subject to change without prior notice.