HEB Series. Thermoelectric Bath

Transcription

1 Peltier-Type Thermoelectric Bath HEB Series Accurately controls the temperature of liquid in the bath. Temperature stability: ±0.01 C Temperature distribution: ±0.02 C in the bath RoHS 100/150 Environmentally friendly and refrigerant-free Heaterless Function to detect abnormal heating and temperature sensor errors comes standard. Light and compact Greatly reduced vibration and operating noise when compared with the refrigerated type. H H E HRZ HRZD HRW HECR HEC HEB HED HEA IDH W250 x H180 x D340 W200 x H332 x D207 Circulating fluid Peltier element Tap water, Fluorinated liquid Fluorinert GALDEN Applications Chemicals for MOCVD Diffusion gas Various samples, materials and parts Chemicals and liquids with high viscosity Controller Circulating pump Facility water outlet Facility water inlet 337

2 Features Exclusively developed dual tank construction to provide consistent temperature at any position in the bath Peltier element (Thermo-module, Thermoelectric device) Temperature sensor Accurate display by measuring the circulating fluid with a temperature sensor directly Circulating pump Application Examples Semiconductor Various tests Physical and chemical analysis Various chemical processes Evaporation of chemicals for MOCVD Temperature control of diffusion gas Thermal test with immersion Temperature control of various samples, materials and parts Indirect temperature control of chemicals and liquids with high viscosity Principle of Peltier Device (Thermo-module, Thermoelectric device) A Peltier device (thermo-module, thermoelectric device) is a plate type element, inside which P-type semiconductors and N-type semiconductors are located alternately. If direct current is supplied to the Peltier device, heat is transferred inside the device, and one face generates heat and increases temperature while the other face sucked heat and decreases temperature. Therefore, changing the direction of the current supplied to the Peltier device can achieve heating and cooling operation. This method has a fast response and can shift quickly between heating and cooling, so temperature can be controlled very precisely. Cooling Heat suction (cooling) Recirculating fluid Electron flow N P Facility water Current Heat radiation (heating) DC power supply Electron hole flow Heating Heat generation (heating) Recirculating fluid Electron flow N P Facility water Current Heat suction (cooling) DC power supply Electron hole flow 338

3 CONTENTS HEB Series Thermoelectric Bath HEB Series How to Order... Page 340 Specifications... Page 341 Cooling Capacity... Page 342 Heating Capacity... Page 342 Pressure Loss in Facility Water Circuit... Page 342 Parts Description... Page 342 Dimensions... Page 343 Connectors... Page 344 Maintenance... Page 344 Made to Order... Page /150 H H E HRZ HRZD HRW HECR HEC HEB HED HEA IDH Specific Product Precautions... Page

4 Peltier-Type Thermoelectric Bath HEB Series RoHS How to Order Combination (Controller + Liquid tank) HEB C 002 W A 10 Controller Liquid tank Shape of bath C Round Cooling capacity W Radiating method W Water-cooled Option Nil Rc1/4 N NPT1/4 The option should be specified when ordering. Liquid tank size 10 ø130 x H180 Communication A RS-485 B RS-232C Liquid tank HEB C 002 H W 10 Shape of bath C Round Cooling capacity W Liquid tank Radiating method W Water-cooled Option Nil Rc1/4 N NPT1/4 The option should be specified when ordering. Liquid tank size 10 ø130 x H180 Controller HEBC002 C A Controller Communication A RS-485 B RS-232C 340

5 Peltier-Type/Thermoelectric Bath HEB Series Specifications (For details, please consult our Product Specifications information.) Model HEBC002-WA10 HEBC002-WB10 Cooling method Radiating method Control method Ambient temperature/humidity Note 1) Application fluid Set temperature range Note 1) Note 5) Cooling capacity Note 2) Note 2) Heating capacity Temperature stability Note 3) Temperature distribution Note 3) Tank dimensions Temperature Pressure range Note 4) Flow rate Port size Wetted parts material Power supply Overcurrent protector Current consumption Peltier device (Thermo-module, Thermoelectric device) Liquid tank: Water-cooled, Controller: Forcible air-cooled Cooling/Heating automatic shift PID control 10 to 35 C, 35 to 80%RH Tap water, Fluorinated liquid (Fluorinert FC-3283, GALDEN HT135, HT200), 30% ethylene glycol aqueous solution 15.0 to 60.0 C (5 to 60 C for water) 140 W (Water) 300 W (Water) ±0.01 C ±0.02 C Internal diameter ø130 x Liquid level 188 mm 10 to 35 C (no condensation) Within 0.5 MPa 3 to 5 L/min IN/OUT: Rc1/4 Stainless steel 303, Stainless steel 304, FEP, A6063 (anodized) Single-phase 100 to 240 VAC, 50/60 Hz 10 A 4 A (100 VAC) to 2 A (240 VAC) 1) Overheating of liquid tank (which activates the thermostat) Alarm 2) Controller output voltage reduction (With alarm output connector) 3) Controller fan rotation stopped Communications RS-485 RS-232C Weight Accessories Safety standards Liquid tank: Approx. 8.5 kg Controller: Approx. 6.5 kg Power cable (2 m), DC cable, Signal cable (3 m each) CE marking, UL (NRTL) standard Circulating fluid system Facility water system Electrical system Note 1) GALDEN is a trademark of Solvay Solexis and Fluorinert is a trademark of 3M. For other fluids, please contact SMC. Note 2) Determined under the following conditions: water as the recirculating fluid, set temperature 25 C, facility water temperature 25 C, flow rate 3 L/min, ambient temperature 25 C, and sealed from outside air with a lid. Note 3) Differs depending on the operating conditions. Note 4) An appropriate range is from 3 to 5 L/min. To prevent damage to the radiating system, do not supply a flow over the maximum flow rate of 8 L/min. Note 5) When the temperature is set high, the liquid temperature inside of the liquid tank and the temperature inside of the thermostat could differ greatly depending on the heating mode at start-up, and the thermostat could then begin operating and stop the output. Confirm that there is no problem by carrying out an operating test beforehand. 100/150 H H E HRZ HRZD HRW HECR HEC HEB HED HEA IDH 341

6 HEB Series Cooling Capacity Heating Capacity Circulating fluid temperature ( C) Fluorinert FC-3283 Ambient temperature: 25 C Liquid level: 180 mm (Liquid temperature: 25 C) Facility water temperature: 25 C Facility water flow rate: 3 L/min Shut out from outside with a lid (polystyrene foam) Tap water GALDEN HT Time (minute) Circulating fluid temperature ( C) Fluorinert FC Tap water 45 GALDEN Ambient temperature: 25 C HT Liquid level: 180 mm (Liquid 35 temperature: 25 C) Facility water temperature: 25 C 30 Facility water flow rate: 3 L/min 25 Shut out from outside with a lid (polystyrene foam) Time (minute) Pressure Loss in Facility Water Circuit Pressure loss (kpa) Flow rate (L/min) The values shown on the performance chart are not guaranteed, but typical. Allow margins for safety when selecting the model. Parts Description Tank RUN LED TROUBLE LED Signal connector Facility water outlet DC connector Facility water inlet Display/Operation panel Signal connector Fan Alarm output connector DC output connector Communication connector RUN LED TROUBLE LED Power switch Power connector 342

7 THERMO-CON THERMO-CON Peltier-Type/Thermoelectric Bath HEB Series Dimensions Liquid tank (9) Internal dimensions of liquid tank (204) 15 ø147 I.D.130 Model no. label Signal cable DC cable RUN LED (Green) TROUBLE LED (Red) Signal connector Facility water outlet Rc1/4 For -N spec. NPT1/4 OUT WARNING WARNING SIGNAL DC 148 DC connector IN Warning label Facility water inlet Rc1/4 For -N spec. NPT1/4 100/150 H H E HRZ HRZD HRW HECR HEC 198 (35) (ø79) ø35 LOW Min. liquid level 76 9 Max. liquid level 188 HEB HED HEA IDH Temperature sensor Rubber foot Circulating pump Controller Air IN TROUBLE LED (Red) RUN LED (Green) Display/Operation panel Air IN Ventilation hole (Air IN) The opposite face has the same shape Model no. label Fan WARNING Fan (Air OUT) DC cable Alarm output connector 96 Signal cable Signal connector Air OUT SIGNAL ALARM DC OUTPUT AC Power switch (75) Warning label Communication connector Power connector Power cable DC output connector 343

8 HEB Series Connectors Water Bath and Controller Connection Connector for water baths DC connector (male connector) Signal connector (male connector) Nanaboshi Electric Mfg. Co., Ltd.: NJC-245-RM UL CSA Connection Connection cable DC cable Nanaboshi Electric Mfg. Co., Ltd.: NJC-245-PF UL CSA Female connector HIROSE ELECTRIC CO., LTD.: CDA-15P Holding screw M2.6 Signal cable Connection HIROSE ELECTRIC CO., LTD.: CDA-15S Holding screw M2.6 Female connector Power Cable Connection Connector for controllers Power connector IEC C-14 or equivalent Male connector Power cable Connection Connector side IEC C-13 or equivalent Female connector Connector for External Equipment Connectors that fit with a communication connector and an alarm output connector should be prepared by customer. Alarm output connector HIROSE ELECTRIC CO., LTD.: CDE-9P Holding screw M2.6 Fitting connector: CDE-9S or equivalent Pin No. Signal contents 1 Contact for upper/lower temperature limit deviation alarm (open when alarm occurs) 2 Upper/lower temperature limit deviation alarm common Contact for output cut-off alarm (open when alarm occurs) 6 Common for output cut-off alarm Alarm output connector D-sub 9 pin (male type) Male connector Nanaboshi Electric Mfg. Co., Ltd. NJC-245-PM UL CSA Connection Connector for controllers DC connector (female connector) Signal connector (female connector) Nanaboshi Electric Mfg. Co., Ltd.: NJC-245-RF UL CSA Male connector HIROSE ELECTRIC CO., LTD.: CDA-15P Holding screw M2.6 Connection HIROSE ELECTRIC CO., LTD.: CDA-15S Holding screw M2.6 AWG14 Signal contents Black to 240 VAC (L) Black to 240 VAC (N) Green/Yellow PE Communication connector HIROSE ELECTRIC CO., LTD.: CDE-9S Holding screw M2.6 Fitting connector: CDE-9P or equivalent Pin No HEBC002-WA10 RS-485 T/R (A) RS-485 T/R (B) 5 4 Signal contents Communication connector D-sub 9 pin (female type) 3 HEBC002-WB10 RS-232C RX RS-232C TX RS-232C SG 2 1 Maintenance Maintenance of this unit is performed only in the form of return to and repair at SMC s site. As a rule, SMC will not conduct on-site maintenance. Separately, the following parts have a limited life and need to be replaced before the life ends. Parts Life Expectation Description Expected life Circulating pump 3 to 5 years Fan 5 to 10 years Possible failure The circulating fluid cannot be fed due to worn bearing and/or insufficient capacity of electrolytic capacitor, which results in temperature controlling failure. The capacity of the fan lowers due to the end of lubricating performance of the bearing, which results in increase of internal temperature of the controller. The overheat protective function at the inside of the power supply starts, the output stops and the display goes off. DC power supply to 10 years Abnormal voltage is generated and the display goes off due to insufficient capacity of electrolytic capacitor.

9 HEB Series Specific Product Precautions 1 Be sure to read this before handling the products. Refer to back page 50 for Safety Instructions and pages 13 to 16 for Temperature Control Equipment Precautions. System Design Warning 1. The catalog shows the specifications of the Thermoelectric Bath. 1. Check detailed specifications in the separate Product Specifications, and evaluate the compatibility of the Thermoelectric Bath with customer s system. 2. The Thermoelectric Bath is equipped with a protective circuit independently, but the whole system should be designed by the customer to ensure safety. Handling Warning 1. Thoroughly read the Operation Manual. Read the Operation Manual completely before operation, and keep this manual available whenever necessary. Operating Environment/Storage Environment Warning 1. Avoid using the Thermoelectric Bath in an environment where it could be splashed by fluids (including mist) such as water, salt water, oil, chemicals, or solvents. 2. The Thermoelectric Bath is not designed for clean room usage. It generates dust from the pump inside the tank and the cooling fan in the controller. 3. Low molecular siloxane can damage the contact of the relay. Use the Thermoelectric Bath in a place free from low molecular siloxane. 4. Reserve a space of 50 mm or more at the ventilation hole of the controller. Caution 1. The ventilation hole for radiation air must not be exposed to particles and dust as far as possible. 2. Do not let the inlet and outlet for radiation air get closed. If radiation is prevented, the internal power supply will overheat, causing the protective circuit to be activated and stopping the Thermoelectric Bath. 3. If more than one Thermoelectric Bath is used, consider their arrangement so that the downstream sides of the Thermoelectric Bath suck radiation air from the upstream sides. Caution Radiation Air Circulating Fluid 1. Do not use fluids other than those described in the specification. Otherwise, the pump will be overloaded and may break. If such a fluid is used, please contact SMC beforehand. 2. The Thermoelectric Bath must not be operated without circulating fluid. The pump breaks by empty driving. 3. The circulating fluid may evaporate, lowering the level in the tank. Significant reduction of the fluid level can break the circulating pump as well as causing the performance to deteriorate. Use with appropriate liquid level at all times. Caution Caution Circulating Fluid 4. The pump can be broken by foreign objects entering the circulating pump. Control to prevent any foreign object from entering the fluid. If the fluid is fluorinated liquid and it is set to a temperature below freezing point, steam from the atmosphere will form ice (frost) when entering the fluid. Be sure to remove this ice (frost) regularly. 5. If water is used for the circulating fluid, set its temperature to over or more 5 C to prevent it from being frozen. 6. If tap water is used, it should satisfy the quality standards shown below. Tap Water (as Circulating Fluid) Quality Standards The Japan Refrigeration and Air Conditioning Industry Association JRA GL Cooling water system Circulation type Make-up water Influence Item Unit Standard value Scale Corrosion generation ph (at 25 C) Electrical conductivity (25 C) Chloride ion (Cl ) Standard Sulfuric acid ion (SO4 2 ) item Acid consumption amount (at ph4.8) Total hardness Calcium hardness (CaCO3) Ionic state silica (SiO2) Iron (Fe) Copper (Cu) Reference Sulfide ion (S2 ) item Ammonium ion (NH4 + ) Residual chlorine (Cl) Free carbon (CO2) 6.0 to 8.0 [µs/cm] 100 to 300 [mg/l] 50 or less [mg/l] 50 or less [mg/l] 50 or less [mg/l] 70 or less [mg/l] 50 or less [mg/l] 30 or less [mg/l] 0.3 or less [mg/l] 0.1 or less [mg/l] Should not be detected. [mg/l] 0.1 or less [mg/l] 0.3 or less [mg/l] 4.0 or less In the case of [MΩ cm], it will be to : Factors that have an effect on corrosion or scale generation. Even if the water quality standards are met, complete prevention of corrosion is not guaranteed. Facility Water 1. The maximum operating pressure of facility water is 0.5 MPa. If this value is exceeded, the internal piping of the tank can break, causing leakage of facility water. 2. Do not supply a flow rate of 8 L/min or more which can break the facility water piping. 3. Appropriate range of the flow rate of the facility water is 3 to 5 L/min. Flow rate higher than this range will not slightly affect the cooling and heating capacity. However, a flow rate below 3 L/min will reduce the cooling and heating capacity significantly. Communication Caution 1. The set value can be written to EEPROM, but only up to approx. 100,000 times. In particular, pay attention to how many of times the writing is performed using the communication function /150 H H E HRZ HRZD HRW HECR HEC HEB HED HEA IDH

10 HEB Series Specific Product Precautions 2 Be sure to read this before handling the products. Refer to back page 50 for Safety Instructions and pages 13 to 16 for Temperature Control Equipment Precautions. Maintenance Warning 1. Prevention of electric shock and fire Do not operate the switch with wet hands. Also, do not operate the Thermoelectric Bath with water or fluid left on it. 2. Action in the case of error If any error such as abnormal sounds, smoke, or bad smell occurs, cut off the power at once, and stop supplying facility water. Please contact SMC or a sales distributor to repair the Thermoelectric Bath. 3. Regular inspection Check the following items at least once a month. The inspection must be done by an operator who has sufficient knowledge and experience. a) Check of displayed contents. b) Check of temperature, vibration and abnormal sounds in the body of the Thermoelectric Bath. c) Check of the voltage and current of the power supply system. d) Check for leakage and contamination of the recirculating fluid and intrusion of foreign objects to it. e) Check radiation air flow condition and temperature. f) Check for leakage, quality change, flow rate and temperature of facility water. 346

11 Made to Order Peltier-Type Thermoelectric Bath Accurately controls the temperature of liquid in the bath. Square type is newly added to the product lineup. Temperature stability ±0.02 C to Compact Lightweight 22 kg Application Examples Temperature control of sample and reagent 100/150 H Conductivity meter H (INR ) E 3.5 A to 6 A Power supply voltage 100 VAC to 240 VAC Current consumption Temperature control of source gas for MO-CVD or diffusion furnace HRZ HRZD (Except for some models) HRW HECR Liquid bath INR Peltier element Low vibration and high accuracy when compared to the refrigerator. HEC Related Products Fluoropolymer piping equipment Refer to the Best Pneumatics No. 9 for details. Process gas equipment Regulator P.666 Fittings LQ1/LQ3 Series IDH Direct measurement of liquid temperature. Excellent display accuracy. Bore through connector LQHB Series Diaphragm valve Circulating pump P.758 Tubing TL/TLM Series Drain port Allows the liquid to drain without raising the equipment. Variations Model Usable constant temperature liquid Cooling method Cooling capacity Tank capacity Temperature range Temperature stability INR INR INR INR INR INR INR INR INR W Approx. 10 L Water-cooled 15 to 60 C ±0.02 C 320 W Water Approx. 23 L Ethylene glycol aqueous solution Water-cooled Fluorinated fluid (Square type can be used only at normal temperature.) Air-cooled 320 W Approx. 39 L HEBC002-WA W Approx. 17 L 140 W Approx. 3 L 280 W Approx. 5.5 L Water-cooled INR A HED HEA Temperature sensor Agitation by built-in circulating pump. Reduces the temperature distribution inside the bath. HEB 347

12 Peltier-Type Thermoelectric Bath Lineup (INR ) (INR ) Specifications Model Cooling method Cooling capacity Dimensions (W x D x H) Tank capacity (W x D x H) Weight Power supply voltage range Rated current (at 100 VAC) Liquid temperature range Temperature stability Communications Safety standards Square type, water-cooled INR INR INR INR Peltier, Water-cooled Peltier, Water-cooled 140 W (at 20 C Water) 320 W (at 20 C Water) 266 x 376 x 400 mm 266 x 376 x 400 mm 216 x 216 x 250 mm (Approx. 10 L) 216 x 216 x 250 mm (Approx. 10 L) Approx kg Approx kg 100 VAC to 240 VAC 100 VAC to 240 VAC 3.5 A 5.5 A RS-232C RS-485 RS-485 RS-232C CE marking, UL (NRTL) standard, RoHS Specifications Model Cooling method Cooling capacity Dimensions (W x D x H) Tank capacity (W x D x H) Weight Power supply voltage range Rated current (at 100 VAC) Liquid temperature range Temperature stability Communications Safety standards Square type, water-cooled INR INR INR INR Peltier, Water-cooled Peltier, Water-cooled 320 W (at 25 C Water) 320 W (at 25 C Water) 350 x 510 x 400 mm 350 x 510 x 550 mm 300 x 350 x 250 mm (Approx. 23 L) 300 x 350 x 400 mm (Approx. 39 L) Approx. 21 kg Approx. 25 kg 100 VAC to 240 VAC 100 VAC to 240 VAC 5.5 A 5.5 A RS-232C RS-485 RS-232C RS-485 CE marking, UL (NRTL) standard, RoHS Specifications Model Cooling method Cooling capacity Dimensions (W x D x H) Tank capacity (W x D x H) Weight Power supply voltage range Rated current (at 100 VAC) Liquid temperature range Temperature stability Communications Safety standards Square type, air-cooled INR Peltier, Air-cooled 220 W (at 25 C Water, Ambient temperature 25 C) 350 x 460 x 395 mm 300 x 290 x 200 mm (Approx. 17 L) Approx. 22 kg 100 VAC to 240 VAC 6A RS-232C RoHS Specifications Model Cooling method Cooling capacity Dimensions (W x D x H) Tank capacity Weight Power supply voltage range Rated current (at 100 VAC) Liquid temperature range Temperature stability Communications Safety standards Round type, water-cooled/remote controller HEBC002-WA10/HEBC002-WB10 Peltier, Water-cooled 140 W (at 25 C Water) Liquid tank 200 x 207 x 332 mm Controller 250 x 300 x 180 mm ø130 x 188 mm (Approx. 3 L) Approx. 8.5 kg Approx. 6.5 kg 100 VAC to 240 VAC 4A 15 to 60 C ±0.02 C RS-485/RS-232C CE marking, UL (NRTL) standard, RoHS Specifications Model Cooling method Cooling capacity Dimensions (W x D x H) Tank capacity Weight Power supply voltage range Rated current (at 200 VAC) Liquid temperature range Temperature stability Communications Safety standards Round type, water-cooled/remote controller INR A Peltier, Water-cooled 280 W (at 25 C Water) Liquid tank 240 x 240 x 350 mm Controller 220 x 330 x 123 mm ø170 x 202 mm (Approx. 5.5 L) Approx. 5 kg Approx. 12 kg 200 VAC to 220 VAC 5A 15 to 60 C ±0.02 C RS-485 RoHS Conditions: Facility water temperature 20 C, flow rate 5 L/min, ambient temperature 25 C 348