Vacuum Pad. New More shapes and sizes of pads. Applicable for various types of work pieces. Series ZP2. ø0.8 to ø15 P. 1 to 9. ø4 to ø125 P.

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1 Vacuum Pad New More shapes and sizes of pads. pplicable for various types of work pieces ompact/short/nozzle ompact, Space-saving ø0. to ø1 P. 1 to 9 Mark-free ø to ø12 P. 2 to 29 or use where adsorption marks must not be left on work pieces. Thin lat/lat ø to ø30 P. 10 to 12 Sponge ø to ø1 P. 30 to 32 or sheets or vinyl or work pieces with bumps ellows ø2 to ø P. 13 to 1 or spherical work pieces or work pieces with inclined surface Heavy-duty ø32 to ø30 P. 33 to or heavy or large work pieces Oval or rectangular work pieces 3. x to x 30 P. 1 to 23 Special onfiguration P. 9, 0 or stage setting of disks (, V) or glass substrates all Spline uffer all spline guide is used to the buffer. ø2 to ø P. 2 Vacuum Saving Valve P. 1 to an restrict the reduction of vacuum pressure even when there is no workpiece. Series ZP2 T.S-

2 Vacuum Pad Series ZP2/ZP Pad iameter List Pad type U Page of ZP2 P Note) : Series ZP2 : Series ZP lat lat with rib Thin flat (pad) Thin flat with rib MU U U UT T P. 2 P. P. P. 1 P. 1 P. 10 P. 1 Note) Note) ellows (pad) J M P. 13 P. 1 ZJ P. 1 eep Nozzle pad N P. 9 lat pad MT P. 11 Oval pad W U P x x x x 10 x 20 x 30 x 30 2 x 3. x x 10 x 10 x 20 x 30 x 20 x 30 H P. 33 Heavy-duty pad HT H P. 33 P. 3 HW P. 3 Mark-free pad elated pad U H P. 2 P. 2 Sponge pad S P. 30 esin attachment K P. 29 Pad with ball spline buffer U P. 2 Heavy-duty ball joint pad H H P. 3 P. 3 yclone pad (Non-contact pad) Made to Order P. 2 Note) The ZP2 series is blast type. Products other than above Vacuum pad for transferring disks P. 9 Vacuum pad for fixing panel P. 0 Vacuum saving valve P. 1 ront matter 1

3 otary ctuators Vane Style ack & Pinion Style ir Grippers Parallel Style ngular Style Vacuum quipment Vacuum jector ir Suction ilter Vacuum Pad elated quipment for Vacuum System est Pneumatics otary ctuators Vane Style ack & Pinion Style ir Grippers Parallel Style ngular Style Vacuum quipment Vacuum jector ir Suction ilter Vacuum Pad elated quipment for Vacuum System Ver. 1 uto Switches est Pneumatics otary ctuators Vane Style ack & Pinion Style ir Grippers Parallel Style ngular Style Vacuum quipment Vacuum jector ir Suction ilter Vacuum Pad elated quipment for Vacuum System Ver. 1 uto Switches est Pneumatics otary ctuators Vane Style ack & Pinion Style ir Grippers Parallel Style ngular Style Vacuum quipment Vacuum jector ir Suction ilter Vacuum Pad elated quipment for Vacuum System Ver. 1 uto Switches est Pneumatics otary ctuators Vane Style ack & Pinion Style ir Grippers Parallel Style ngular Style Vacuum quipment Vacuum jector ir Suction ilter Vacuum Pad elated quipment for Vacuum System Ver. 1 uto Switches uto Switches : efer to SM website or pages 111 to 123 in est Pneumatics No. for details of the ZP series. SM vacuum pad Pad iameter List Search U Page of ZP2 P. 1 est Pneumatics est Pneumatics Ver. 1 atalog of ZP MU U U UT T P. 2 P. P. P. 1 P. 1 P. 10 J M ZJ P. 1 P. 13 P. 1 P. 1 N MT P. 9 P. 11 W P. 1 U H HT H P. 33 P. 33 P x 0 HW U H P. 3 P. 2 P. 2 S K U H H P. 30 P. 29 P. 2 P. 3 P. 3 ront matter 2

4 Series ZP2 Series Variations Variations Pad Type iameter dapter type Page ompact Pad lat or adsorption of general work pieces or adsorption of work pieces with flat and not deformed surface lat with rib or a workpiece which is likely to deform or for releasing a workpiece certainly Thin flat or a workpiece which is likely to deform ellows or adsorption of work pieces with inclined surface Single unit Single unit Single unit U UT lat lat with rib Thin flat ø3, ø ø, ø, ø ø, ø Series ZP ommon adapter P. 1 P. 1 P. 1 ellows ø, ø P. 1 Single unit Short-type Pad Space-saving in the height direction MU ø2, ø3., ø ø, ø, ø ø10, ø1 P. 2 Single unit With adapter U lat ø2, ø, ø ø, ø1 P. Single unit With adapter U ø2, ø3, ø ø, ø P. Single unit Nozzle Pad or adsorption of small components such as I chips Single unit With adapter N Nozzle ø0., ø1.1 P. 9 Thin lat Pad or adsorption of soft work pieces such as thin sheets or vinyl. Wrinkling or deformation during adsorption is reduced. UT Thin flat (Skirt) ø, ø, ø11 ø1, ø1 ø20 P. 10 Single unit Series ZP ommon adapter ront matter 3

5 Series Variations lat Pad ellows Pad Variations or adsorption of flexible sheets or film. eformation of the flat surface during adsorption is reduced. or use where there is no space for the buffer (spring type). or adsorption of work pieces with inclined surface Single unit With adapter MT Pad Type Thin flat (With groove) iameter ø10, ø1 ø20, ø2 ø30 dapter type Page P. 11 ø, ø9, ø10 J ellows ø1, ø1 (Multistage type) ø1, ø2 P. 13 ø30 Single unit Series ZP ommon adapter M ø, ø, ø ø10, ø1 ø20 P. 1 Single unit With adapter ellows ZJ ø2, ø, ø ø, ø0, ø P. 1 Single unit ront matter

6 Series ZP2 Series Variations Variations Type Pad iameter dapter type Page last-type Pad last treatment to create finely uneven surface for adsorption. Work pieces can be removed easily. U lat ø P. 1 Single unit lat with rib ø, ø P. 1 Single unit ellows ø, ø P. 1 Single unit J ellows (Multistage type) ø10, ø1 ø2, ø30 Series ZP ommon adapter P. 13 Single unit MU lat ø2, ø3., ø ø, ø, ø ø10, ø1 P. 2 Single unit With adapter U lat ø2, ø, ø P. Single unit With adapter MT Thin flat (With groove) ø10, ø1 ø20, ø2 ø30 P. 11 Single unit With adapter M ellows ø, ø, ø ø10, ø1 ø20 P. 1 Single unit With adapter ront matter

7 Series Variations Variations Type Pad iameter dapter type Page Oval Pad or work pieces with limitations on the adsorption surface P. 1 Single unit P. 1 With adapter: Vacuum inlet direction Vertical 3. x x 10 x 10 x 10 P. 19 With buffer: Vacuum inlet direction Vertical W Oval x 20 x 20 x 20 x 20 x 30 x 30 x 30 x 30 P. 21 With adapter: Vacuum inlet direction Lateral P. 23 With buffer: Vacuum inlet direction Lateral Pad with all Spline uffer all spline guide is used to the buffer. U lat ø2, ø ø, ø P. 2 With buffer: Vacuum inlet direction Vertical Series ZP ommon adapter ront matter

8 Series ZP2 Series Variations Variations Type Pad iameter dapter type Page Mark-free Pad or use where adsorption marks must not be left on work pieces. Standard pad lear trace of the pad Single unit U lat ø, ø, ø ø10, ø1 ø2, ø32 ø0, ø0 Series ZP ommon adapter P. 2 Mark-free pad No trace on the object Mark-free N pad Stuck fluororesin pad Single unit H Heavy-duty (lat with rib) ø0, ø0 ø3, ø0 ø, ø12 P. 2 elated Pad Made to Order yclone Pad (Non-contact pad) P. 2 esin ttachment Mark-free. Prevents sticking of the rubber and the workpiece. ttachment Single unit With pad ellows ø, ø ø10, ø13 ø1, ø20 ø2, ø32 Series ZP ommon adapter P. 29 Sponge Pad or adsorption of work pieces with bumps Single unit S Sponge ø, ø ø, ø10 ø1 P. 30 P. 31 With adapter Heavy-duty Pad or heavy or large work pieces H Heavy-duty (lat with rib) ø32, ø300 ø30 P. 33 HT Heavy-duty (Thin flat with rib) ø10, ø20 P. 33 H Heavy-duty (ellows) ø32, ø10 P. 3 HW Heavy-duty (Oval) 30 x 0 P. 3 ront matter

9 Series Variations Variations Type Pad iameter Page Heavy-duty all Joint Pad or adsorption of work pieces with inclined or curved surface With adapter: Vacuum inlet direction Vertical P. 3 P. 3 With adapter: Vacuum inlet direction Lateral H Heavy-duty (lat with rib) ø0 ø0 ø3 ø0 ø ø12 P. 39 With buffer: Vacuum inlet direction Vertical P. 1 With buffer: Vacuum inlet direction Lateral P. 3 With adapter: Vacuum inlet direction Vertical P. With adapter: Vacuum inlet direction Lateral H Heavy-duty (ellows) ø0 ø0 ø3 ø0 ø ø12 P. With buffer: Vacuum inlet direction Vertical P. With buffer: Vacuum inlet direction Lateral ront matter

10 Series ZP Variations Type Pad iameter dapter type Page Heavy-duty Pad Heavy-duty type (lat with rib) Ideal for heavy or large work pieces such as T and automobile bodies Heavy-duty type (ellows) Ideal for work pieces with curved surface Ideal for heavy or large work pieces H H Heavy-duty (lat with rib) Heavy-duty (ellows) ø0, ø0 ø3, ø0 ø, ø12 Series ZP ommon adapter P. 9 P. 9 pplications (Pad/dapter) Variations Note Page Vacuum Pad for Transferring isks or adsorbing circular components like and V ellows mechanism is realized in the pad to dampen the impact to the work. 20 x 2 (I x O: P 22.) P. 9 Vacuum Pad for ixing Panel or adsorbing and fixing the stage of panels or glass circuit board, etc. ellows mechanism allows complete contact with curved work surface. Glass circuit board P. 0 Vacuum Saving Valve an restrict the reduction of vacuum pressure even when there is no workpiece. No need for switching operation when changing work pieces Multiple vacuum pads can be operated by one ejector. onnection thread size for pad side M x 1 M x 1.2 1/ c1/ G1/ NPT1/ P. 1 Series ZP2/ZP dapter/uffer pplicable Pad List P. Series ZP dapter ssembly Part No. P. Series ZP2 Mounting dapter Part No. P. 9 Series ZP2 uffer ssembly Part No. P. Series ZP Mounting dapter Part No. P. 2 Series ZP uffer ssembly Part No. P. 0 Series ZP2 dapter ssembly Part No. P. ront matter 9

11 Vacuum quipment Selection 1 eatures of Vacuum dsorption ront matter 11 2 Vacuum Pad Selection ront matter 11 3 Vacuum Pad Selection Procedures Points for Selecting Vacuum Pads. Theoretical Lifting orce. Shear orce and Moment pplied to Vacuum Pad Lifting orce and Vacuum Pad iameter 1. Theoretical Lifting orce Vacuum Pad Type Vacuum Pad Material ubber Material and Properties olor and Identification uffer ttachment Pad Selection by Work Type Vacuum Pad urability Selection of Vacuum jector and Vacuum Switching Valve ront matter 1 alculating Vacuum jector and Switching Valve Size with the ormula Leakage Volume during Work dsorption ront matter 1 Leakage volume from onductance of Work Leakage volume from dsorption Test dsorption esponse Time ront matter 1 elationship between Vacuum Pressure and esponse Time after Supply Valve (Switching Valve) is Operated alculating dsorption esponse Time with the ormula dsorption esponse Time from the Selection Graph Precautions on Vacuum quipment Selection and SM s Proposal ront matter 20 Safety Measures Precautions on Vacuum quipment Selection Vacuum jector or Pump and Number of Vacuum Pads Vacuum jector Selection and Handling Precautions Supply Pressure of Vacuum jector Timing for Vacuum Generation and Suction Verification. Timing for Vacuum Generation. Suction Verification. Set Pressure for Vacuum Pressure Switch ust Handling of Vacuum quipment Vacuum quipment Selection xample ront matter 2 Transfer of Semiconductor hips ata ront matter 2 Selection Graph Glossary of Terms ountermeasures for Vacuum dsorption System Problems (Troubleshooting) Non-conformance xamples Time of eplacement of Vacuum Pad ront matter 10

12 Selection 1 eatures of Vacuum dsorption Vacuum adsorption system as a method to hold a workpiece has the following features. asy construction ompatible with any place where adsorption is possible. No need for accurate positioning ompatible with soft and easily-deformed work pieces However, special care is required in the following conditions. Workpiece may drop under certain conditions since it is transferred being adsorbed. Liquid or foreign matter around the workpiece may be sucked into the equipment. Large adsorption area is necessary to get large gripping force. Vacuum pad (rubber) may deteriorate. ully understand the features above and select the equipment that suits your operating conditions. 2 Vacuum Pad Selection Vacuum Pad Selection Procedures 1) ully taking into account the balance of a workpiece, identify the adsorption positioning, number of pads and applicable pad diameter (or pad area). 2) ind the theoretical lifting force from the identified adsorption area (pad area x number of pads) and vacuum pressure, and then find the lifting force considering actual lifting and safety factor of transfer condition. 3) etermine a pad diameter (or pad area) that is sufficient to ensure the lifting force is greater than the workpiece mass. ) etermine the pad type and materials, and the necessity of buffer based on the operating environment, and the workpiece shape and materials. The above shows selection procedures for general vacuum pads; thus, they will not be applicable for all pads. ustomers are required to conduct a test on their own and to select applicable adsorption conditions and pads based on the test results. Points for Selecting Vacuum Pads. Theoretical Lifting orce The theoretical lifting force is determined by vacuum pressure and contact area of the vacuum pad. Since the theoretical lifting force is the value measured at the static state, the safety factor responding to the actual operating conditions must be estimated in the actual operation. It is not necessarily true that higher vacuum pressure is better. xtremely high vacuum pressure may cause problems. When the vacuum pressure is unnecessarily high, pads are likely to be worn out quickly and cracked, which makes the pad service life shorter. oubling the vacuum pressure makes the theoretical lifting force double, while to doubling the pad diameter makes the theoretical lifting force quadruple. When the vacuum pressure (set pressure) is high, it makes not only response time longer, but also the necessary energy to generate a vacuum larger. xample) Theoretical lifting force = Pressure x rea ø20 ø0 rea (cm 2 ) Vacuum pressure [0-kPa] Theoretical lifting force 12. N Theoretical lifting force 0.23 N 2 times Vacuum pressure [0-kPa] Theoretical lifting force 2.11 N Theoretical lifting force. N times ront matter 11

13 Selection. Shear orce and Moment pplied to Vacuum Pad Vacuum pads are not resistant to shear force (parallel force with adsorption surface) and moment. Minimize the moment applied to the vacuum pad with the position of the workpiece center of gravity in mind. The acceleration rate of the movement must be as small as possible, and make sure to take into consideration the wind pressure and impact. If measures to slow down the acceleration rate are introduced, safety to prevent the workpiece from dropping will improve. void lifting the workpiece by adsorbing the vertical side with a vacuum pad (vertical lifting) if possible. When it is unavoidable, a sufficient safety factor must be secured. Lifting orce, Moment, Horizontal orce To lift a workpiece vertically, make sure to take into consideration the acceleration rate, wind pressure, impact, etc., in addition to the mass of the workpiece. (efer to ig. 1) ecause the pads are susceptible to moments, mount the pad so as not to allow the workpiece to create a moment. (efer to ig. 2) When a workpiece that is suspended horizontally is moved laterally, the workpiece could shift depending on the extent of the acceleration rate or the size of the friction coefficient between the pad and the workpiece. Therefore, the acceleration rate of the lateral movement must be minimized. (efer to ig. 3) Loading by acceleration and wind pressure lifting Lifting direction Pad positioning aution for friction force between pad and workpiece ig. 1 Pad ig. 2 Pad Pad ig. Pad 3 alance of Pad and Work Make sure that the pad's suction surface is not larger than the surface of the workpiece to prevent vacuum leakage and unstable picking. Pad aution Guide for drop prevention If multiple pads are used for transferring a flat object with a large surface area, properly allocate the pads to maintain balance. lso make sure that the pads are aligned properly to prevent them from becoming disengaged along the edges. Pad aution Guide for drop prevention Provide an auxiliary device (example: a guide for preventing the workpieces from dropping) as necessary. Mounting Position s a rule, the unit must be installed horizontally. lthough a diagonal or a vertical installation should be avoided whenever possible, if the unit must be installed in such a manner, be certain to guarantee guide and absolute safety. Pad Horizontal lifting Vertical lifting Guide ront matter 12

14 Selection Lifting orce and Vacuum Pad iameter 1. Theoretical Lifting orce Set the vacuum pressure below the pressure that has been stabilized after adsorption. However, when a workpiece is permeable or has a rough surface, note that the vacuum pressure drops since the workpiece takes air in. In such a case, carry out an adsorption test for confirmation. The vacuum pressure when using an ejector is approximately 0 kpa as a guide. The theoretical lifting force of a pad can be found by calculation or from the theoretical lifting force table. alculation Pad W = P x S x 0.1 x 1 t W : Lifting force (N) P : Vacuum pressure (kpa) S : Pad area (cm 2 ) t : Safety factor Horizontal lifting: or more Vertical lifting: or more Horizontal lifting Vertical lifting This type of application should basically be avoided. Theoretical Lifting orce The theoretical lifting force (not including the safety factor) is found from the pad diameter and vacuum pressure. The required lifting force is then found by dividing the theoretical lifting force by the safety factor t. Lifting force = Theoretical lifting force t (1) Theoretical Lifting orce (Theoretical lifting force = P x S x 0.1) Pad iameter (ø2 to ø0) (N) (mm) ø2 ø ø ø ø10 ø13 ø1 ø20 ø2 ø32 ø0 ø0 Pad area S (cm 2 ) Vacuum pressure (kpa) Pad iameter (ø3 to ø30) (N) (mm) ø3 ø0 ø ø12 ø10 ø20 ø300 ø30 Pad area S (cm 2 ) Vacuum pressure (kpa) Oval Pad (2 x to x 30) (N) Pad size (mm) 2 x 3. x x 10 x 10 x 10 x 20 x 20 x 20 x 20 x 30 x 30 x 30 x 30 Pad area S (cm 2 ) Vacuum pressure (kpa) ront matter

15 Selection Vacuum Pad Type Vacuum pads are available in flat, deep, bellows, thin flat, with rib, and oval types, etc. Select the optimal shape in accordance with the workpiece and operating environment. Please contact SM for shapes not included in this catalog. Pad Type Pad shape pplication Pad shape pplication lat To be used when adsorption surface of work is flat and not deformed. all joint To be used when adsorption surface of work is not horizontal. lat with rib To be used when work is likely to deform or in the case of releasing work certainly. eep To be used when work is curved shape. Long stroke buffer To be used when work height is not even or cushioning toward work is required. ellows To be used when there is not enough space to install buffer or adsorption surface of work is slanted. Large To be used when work is heavy weight. Oval To be used when work has limited adsorption surface or long in length and work is required to locate precisely. onductive s one of the countermeasures against the static electricity, rubber material with reduced resistance is used. or antistatic measures Vacuum Pad Material It is necessary to determine vacuum pad materials carefully taking into account the workpiece shape, adaptability in the operating environment, effect after being adsorbed, electrical conductivity, etc. ased on the work transfer example for each material, select after confirming the characteristics (adaptability) of rubber. Vacuum Pad/xample of Work Transfer Material Material N Silicone rubber Urethane rubber KM onductive N onductive silicone rubber pplication Transfer of general work, orrugated board, Veneer plate, Iron plate and others Semiconductor, emoving from die-casting, Thin work, ood processor orrugated board, Iron plate, Veneer plate hemical work General work of semiconductor (Static electricity resistance) Semiconductor (Static electricity) ront matter 1

16 Selection ubber Material and Properties Main features Pure gum property (specific gravity) Physical properties of blended gum hemical resistance Oil resistance lkaline resistance cid resistance Impact resilience brasion resistance Tear resistance lex crack resistance Maximum operation temperature Minimum operation temperature Volume resistivity (Ωcm) Heat aging Weather resistance Ozone resistance Gasoline/Gas oil enzene/toluene lcohol ther Ketone (MK) thyl acetate Water Organic acid Strong alkali Weak alkali General name Gas permeability resistance Organic acid of high concentration Organic acid of low concentration N (Nitrile rubber) Good oil resistance, abrasion resistance, and aging resistance / / / / / Silicone rubber xcellent heat resistance, and cold resistance / / / / / / Urethane rubber xcellent mechanical strength / / / KM (luoro rubber) est heat resistance, and chemical resistance / / / / (hloroprene rubber) Well balanced weather resistance, ozone resistance, and chemical resistance P (thylenepropylene rubber) Good aging resistance, ozone resistance, and electrical properties / onductive N (Nitrile rubber) Good oil resistance, abrasion resistance, and aging resistance. onductive or less / / / / / onductive silicone rubber Very excellent heat resistance, and cold resistance. onductive / / / or less = xcellent --- Not affected at all, or almost no effect = Good --- ffected a little, but adequate resistance depending on conditions = etter not to use if possible = Unsuitable for usage. Severely affected. Properties, chemical resistance, and other values are not guaranteed. These values depend on the operating environment, so they cannot be guaranteed by SM. Thorough research and confirmation are necessary before usage / / / / / / / / onductive silicone sponge xcellent heat insulation, and impact resilience 0. g/cm 3 / x 10 onductive sponge (hloroprene sponge) xcellent impact resilience, and sound insulation. lame retardance 0.11 g/cm 3 / x 10 olor and Identification General name N (Nitrile rubber) Silicone rubber Urethane rubber KM (luoro rubber) (hloroprene rubber) P (thylenepropylene rubber) onductive N (Nitrile rubber) onductive silicone rubber onductive silicone sponge onductive sponge (hloroprene sponge) olor of rubber lack White rown lack lack lack lack lack lack lack Identification (ot or stamp) Green 1 dot ed 1 dot Silver 1 dot Silver 2 dots ront matter 1

17 Selection uffer ttachment Use a buffer when there is a variation in the height of work pieces and fragile work pieces are adsorbed (cushioning is necessary). If it is necessary to further position the pad and the workpiece, use a non-rotating buffer. Unsteady istance between Pad and Work If the pad and the workpiece cannot be positioned properly, such as when picking a workpiece having an uneven height, use a built-in spring type pad with a buffer. This type of pad acts as a cushion between the pad and the workpiece. If it is necessary to further position the pad and the workpiece, use a non-rotating buffer. Pad Pad Pad Selection by Work Type arefully select a pad for the following work pieces. 1. Porous Work To pick a permeable workpiece such as paper, select a pad with a small diameter that is sufficient to lift the workpiece. ecause a large amount of air leakage could reduce the pad s suction force, it may be necessary to increase the capacity of an ejector or vacuum pump or enlarge the conductance area of the piping passage. 2. lat Plate Work When a workpiece with a large surface area such as sheet glass or P is suspended, the workpiece could move in a wavelike motion if a large force is applied by wind pressure or by an impact. Therefore, it is necessary to ensure the proper allocation and size of pads. Plate glass, circuit board, etc. Porous work 3. Soft Work If a soft workpiece such as vinyl, paper, or thin sheet is picked up, the vacuum pressure could cause the workpiece to deform or wrinkle. In such a case, it will be necessary to use a small pad or a ribbed pad and reduce the vacuum pressure. Pad. Impact to Pad When pushing a pad to a workpiece, make sure not to apply an impact or a large force which would lead to premature deformation, cracking, or wearing of the pad. The pad should be pushed against the workpiece to the extent that its skirt portion deforms or that its ribbed portion comes into slight contact with the workpiece. specially, when using a smaller diameter pad, make sure to locate it correctly. ecide the position not to strike Vinyl, paper, etc. Vacuum Pad urability Need to be careful of the vacuum pad (rubber) deterioration. The vacuum pad s adsorption surface will be worn out when it is used for a certain period of time, and the outer diameter gradually becomes smaller. The lifting force becomes weaker as the pad diameter becomes smaller, but absorption is still possible. Since the vacuum pad replacement period greatly varies depending on the operating environment, it is extremely difficult to estimate the replacement period. Specify the period taking into account the actual operating conditions. ront matter 1

18 Selection 3 Selection of Vacuum jector and Vacuum Switching Valve alculating Vacuum jector and Switching Valve Size with the ormula verage suction flow rate for achieving adsorption response time V x 0 Q = + QL T1 T2 = 3 x T1 Max. suction flow rate Qmax = (2 to 3) x Q L/min (N) <Selection Procedure> Q : verage suction flow rate L/min (N) V : Piping capacity (L) T1 : rrival time to stable Pv 3% after adsorption (sec) T2 : rrival time to stable Pv 9% after adsorption (sec) QL : Leakage volume during work adsorption L/min (N) Note 1) jector Select the ejector with the greater maximum suction flow rate from the Qmax indicated above. irect operation valve Qmax onductance = [dm 3 /(s bar)] x 11.1 Select a valve (solenoid valve) having a conductance that is greater than that of the conductance formula given above from the related equipment (page 12 in est Pneumatics No. ). Note 1) QL: 0 when no leakage occurs during adsorbing a workpiece. If there is leakage during adsorbing a workpiece, find the leakage volume based on. Leakage Volume during Work dsorption. Note 2) Tube piping capacity can be found in. ata: Piping apacity by Tube I.. (Selection Graph (2)). Leakage Volume during Work dsorption ir could be drawn in depending on the type of workpiece. s a result, the vacuum pressure in the pad becomes reduced and the amount of vacuum that is necessary for adsorption cannot be attained. When this type of workpiece must be handled, it is necessary to select the proper size of the ejector and the vacuum switching valve by taking into consideration the amount of air that could leak through the workpiece. Leakage Volume from onductance of Work Pad Ventilation work Pad ough work surface Leakage volume QL = 11.1 x x L QL: Leakage volume L/min (N) L: onductance between work and pad, and work opening area [dm 3 /(s bar)] Leakage Volume from dsorption Test s described in the illustration below, pick up the workpiece with the ejector, using an ejector, pad and a vacuum gauge. t this time, read vacuum pressure P1, obtain the suction flow rate from the flow-rate characteristics graph for the ejector that is being used, and render this amount as the leakage of the workpiece. Vacuum pressure: P1 Pad ZH0S, ZH0S xhaust haracteristics low-rate haracteristics Supply pressure {0. MPa} Work xercise: Using a supply pressure of 0. MPa, when the ejector (ZH0S) picks up a workpiece that leaks air, the vacuum gauge indicated a pressure of 3 kpa. alculate the leakage volume from the workpiece. <Selection Procedure> When obtaining the suction flow rate at a vacuum pressure of 3 kpa from the ZH0S flow-rate characteristics graph, the suction flow rate is L/min (N). Leakage volume Suction flow rate L/min (N) ront matter 1 Vacuum pressure (kpa) Vacuum acuum pressure pressure ir consumption Suction flow w rate Supply pressure (MPa) Suction flow rate (L/min (N)) ir consumption (L/min (N)) Vacuum pressure (kpa) Suction flow rate (L/min (N))

19 Selection dsorption esponse Time When a vacuum pad is used for the adsorption transfer of a workpiece, the approximate adsorption response time can be obtained (the length of time it takes for the pad s internal vacuum pressure to reach the pressure that is required for adsorption after the supply valve {vacuum switching valve} has been operated). n approximate adsorption response time can be obtained through formulas and selection graphs. elationship between Vacuum Pressure and esponse Time after Supply Valve (Switching Valve) is Operated The relationship between vacuum pressure and response time after the supply valve (switching valve) is operated as shown below. Vacuum System ircuit Vacuum Pressure and esponse Time after Supply Valve (Switching Valve) is Operated Supply valve Switching valve Supply valve (Switching valve) operation Work Pad Work Pad Vacuum pressure (P) rrival time (sec) Pv: inal vacuum pressure T1 : rrival time to 3% of final vacuum pressure Pv T2 : rrival time to 9% of final vacuum pressure Pv alculating dsorption esponse Time with the ormula dsorption response times T1 and T2 can be obtained through the formulas given below. dsorption response time T1 = V x 0 Q dsorption response time T2 = 3 x T1 Piping capacity V = x L x 1 (L) 0 T1 : rrival time to 3% of final vacuum pressure Pv (sec) T2 : rrival time to 9% of final vacuum pressure Pv (sec) Q1 : verage suction flow rate L/min (N) alculation of average suction flow rate jector Q1 = (1/2 to 1/3) x jector max. suction flow rate L/min (N) Vacuum pump Q1 = (1/2 to 1/3) x 11.1 x onductance of vacuum pump [dm 3 /(s bar)] : Piping diameter (mm) L : Length from ejector and switch valve to pad (m) V : Piping capacity from ejector and switching valve to pad (L) Q2: Max. flow from ejector and switching valve to pad by piping system Q2 = S x 11.1 L/min (N) Q : Smaller one between the Q1 and Q2 L/min (N) : onductance of piping [dm 3 /(s bar)] or the conductance, the equivalent conductance can be found in. ata: onductance by Tube I.. (Selection Graph (3)). ront matter 1

20 Selection dsorption esponse Time from the Selection Graph 1. Tube Piping apacity Piping capacity from the ejector and switching valve at vacuum pump to the pad can be found in. ata: Piping apacity by Tube I.. (Selection Graph (2)). 2. Obtain the adsorption response times. y operating the supply valve (switching valve) that controls the ejector (vacuum pump), the adsorption response times T1 and T2 that elapsed before the prescribed vacuum pressure is reached can be obtained from the Selection Graph (1). Selection Graph (1) dsorption esponse Time Q x 11.1 [dm3 /(s bar)] Valve conductance = Max. suction flow rate Q (L/min (N)) Piping capacity rrival time of vacuum pressure (3%) T1 (sec) rrival time of vacuum pressure (9%) T2 (sec) onversely, the size of the ejector or the size of the switching valve of the vacuum pump system can be obtained from the adsorption response time. How to read the graph xample 1: or obtaining the adsorption response time until the pressure in the piping system with a piping capacity of 0.02 L is discharged to 3% (T1) of the final vacuum pressure through the use of the vacuum ejector ZH0S with a maximum suction flow rate of 12 L/min (N). <Selection Procedure> rom the point at which the vacuum ejector s maximum vacuum suction flow rate of 12 L/min (N) and the piping capacity of 0.02 L intersect, the adsorption response time T1 that elapses until 3% of the maximum vacuum pressure is reached can be obtained. (Sequence in Selection Graph (1), ) T1 0.3 seconds. xample 2: or obtaining the discharge response time until the internal pressure in the L tank is discharged to 9% (T2) of the final vacuum pressure through the use of a valve with a conductance of 3. [dm 3 /(s bar)]. <Selection Procedure> rom the point at which the valve s conductance of 3. [dm 3 /(s bar)] and the piping capacity of L intersect, the discharge response time (T2) that elapses until 9% of the final vacuum pressure is reached can be obtained. (Sequence in Selection Graph (1), ) T2 12 seconds. ront matter 19

21 Selection Precautions on Vacuum quipment Selection and SM s Proposal Safety Measures Make sure to provide a safe design for a vacuum pressure drop due to a disruption of power supply, or a lack of supply air. rop prevention measures must be taken in particular when dropping a workpiece presents some degree of danger. Precautions on Vacuum quipment Selection s a countermeasure for power outages, select a supply valve that is normally open or one that is equipped with a selfholding function. Select a vacuum switching valve that has a conductance that does not reduce the composite conductance consisting of the areas from the pad to the ejector. or the release valve, select a 2/3 port valve with a low vacuum specification. lso, use a needle valve to regulate the release flow rate. uring the adsorption and transfer of a workpiece, verification of the vacuum switch is recommended. In addition, visually verify the vacuum gauge when handling a heavy or a hazardous item. The ZSP1 type is optimal for the adsorption and transfer of small parts using a suction nozzle with a small diameter. Install a filter (Series Z, Z, Z) before the pressure switch if the ambient air is of low quality. Use a suction filter (Series Z, Z, Z) to protect the switching valve and to prevent the ejector from becoming clogged. lso, a suction filter must be used in a dusty environment. If only the unit's filter is used, it will become clogged quickly. Vacuum jector or Pump and Number of Vacuum Pads jector and number of pads Vacuum pump and number of pads Vacuum line Tank Vacuum source Ideally, one pad should be used for each ejector. When more than one pad is attached to a single ejector, if one of the work pieces becomes detached, the vacuum pressure will drop, causing other work pieces to become detached. Therefore, the countermeasures listed below must be taken. djust the needle valve to minimize the pressure fluctuation between adsorption and non-adsorption operations. Provide a vacuum switching valve to each individual pad to minimize the influences on other pads if an adsorption error occurs. Ideally, one pad should be used for each line. When more than one pad is attached to a single vacuum line, take the countermeasures listed below. djust the needle valve to minimize the pressure fluctuation between adsorption and non-adsorption operation. Include a tank and a vacuum pressure reduction valve (vacuum pressure regulator valve) to stabilize the source pressure. Provide a vacuum switching valve to each individual pad to minimize the influences on other pads if an adsorption error occurs. ront matter 20

22 Selection Vacuum jector Selection and Handling Precautions jector Selection jector Nozzle iameter Selection There are 2 types of ejector flow-rate characteristics: the high vacuum type (S type) and the high flow type (L type). uring the selection, pay particular attention to the vacuum pressure when adsorbing work pieces that leak. High Vacuum Type low-rate haracteristics/ ZH13S High low Type low-rate haracteristics/ ZH13L Vacuum pressure Leakage If a considerable amount of leakage occurs between the workpiece and the pad, resulting in incomplete adsorption, or to shorten the adsorption and transfer time, select an ejector nozzle with a larger diameter from the ZH, ZM, Z, or ZL series. Vacuum pressure (kpa) Vacuum pressure (kpa) Manifold Use Individual exhaust entralized exhaust Suction flow rate (L/min (N)) Suction flow rate (L/min (N)) The vacuum pressure varies in accordance with the leakage volumes indicated in the above diagrams. If the leakage volume is 30 L/min (N), the vacuum pressure of the S type is 20 kpa q w e, and for the L type it is 33 kpa q' w' e'. If the leakage volume is L/min (N), the vacuum pressure of the S type is 0 kpa r t y, and for the L type it is kpa r' t' y'. Thus, if the leakage volume is 30 L/min (N) the L type can attain a higher vacuum pressure, and if the leakage volume is L/min (N), the S type can attain a higher vacuum pressure. Thus, during the selection process, make sure to take the flow-rate characteristics of the high vacuum type (S type) and the high flow type (L type) into consideration in order to select the type that is optimal for your application. If there are a large number of ejectors that are linked on a manifold and operate simultaneously, use the builtin silencer type or the port exhaust type. If there are a large number of ejectors that are linked on a manifold, which exhaust collectively, install a silencer at both ends. If the exhaust must be discharged outdoors through piping, make sure that the diameter of the piping is large enough that its back pressure will not affect the operation of the ejectors. If the vacuum ejector makes an intermittent noise (abnormal noise) from exhaust at a certain supply pressure, the vacuum pressure will not be stable. It will not be any problem if the vacuum ejector is used under this condition. However, if the noise is disturbing or might affect the operation of the vacuum pressure switch, lower or raise supply pressure a little at a time, and use in an air pressure range that does not produce the intermittent noise. Supply Pressure of Vacuum jector Use the vacuum ejector at the standard supply pressure. The maximum vacuum pressure and suction flow rate can be obtained when the vacuum ejector is used at the standard supply pressure, and as a result, adsorption response time also improves. rom the viewpoint of energy-saving, it is the most effective to use the ejector at the standard supply pressure. Since using it at the excessive supply pressure causes a decline in the ejector performance, do not use it at a supply pressure exceeding the standard supply. ront matter 21

23 Selection Timing for Vacuum Generation and Suction Verification. Timing for Vacuum Generation The time for opening/closing the valve will be counted if a vacuum is generated after the adsorption pad descends to adsorb a workpiece. lso, there is a timing delay risk for the generating vacuum since the operational pattern for the verification switch, which is used for detecting the descending vacuum pad, is not even. To solve this issue, we recommend that vacuum be generated in advance, before the vacuum pad begins to descend to the workpiece. dopt this method after confirming that there will be no misalignment resulting from the workpiece s light mass.. Suction Verification When lifting the vacuum pad after absorbing a workpiece, confirm that there is a suction verification signal from the vacuum pressure switch, before the vacuum pad is lifted. If the vacuum pad is lifted, based on the timing of a timer, etc., there is a risk that the workpiece may be left behind. In general adsorption transfer, the time for adsorbing a workpiece is slightly different since the position of the vacuum pad and the workpiece are different after every operation. Therefore, program a sequence in which the suction completion is verified by a vacuum pressure switch, etc. before moving to the next operation.. Set Pressure for Vacuum Pressure Switch Set the optimum value after calculating the required vacuum pressure for lifting a workpiece. If a higher pressure than required is set, there is a possibility of being unable to confirm the suction even though the workpiece is adsorbed. This will result in a suction error. When setting vacuum pressure switch set values, you should set using a lower pressure, with which a workpiece can be adsorbed, only after considering the acceleration or vibration when a workpiece is transferred. The set value of the vacuum pressure switch shortens the time to lift a workpiece. Since the switch detects whether the workpiece is lifted or not, the pressure must be set high enough to detect it. Vacuum Pressure Switch (Series ZS), Vacuum Pressure Gauge (Series GZ) When adsorbing and transferring a workpiece, verify at the vacuum pressure switch as much as possible (In addition, visually verify the vacuum gauge, especially when handling a heavy or a hazardous item.). pprox. ø1 adsorption nozzle The difference in pressure between ON and O becomes small depending on the capacity of the ejector and vacuum pump. In such a case, it will be necessary to use ZSP1 that can detect a small hysteresis or a flow switch. Note) vacuum generator with a large suction capacity will not be detected properly, so an ejector with an appropriate capacity must be selected. Since the hysteresis is small, vacuum pressure must be stabilized. Timing hart xample uring adsorption ylinder UP ylinder OWN ylinder switch Supply valve elease valve uring vacuum release V port vacuum pressure Vacuum pressure switch set value y lowering the setting of the vacuum switch, the takt time can be shortened. tmospheric pressure Suction verification switch ZSP1 low sensor PMV efer to the est Pneumatics No. for details. Vacuum pressure gauge GZ Vacuum pressure switch Vacuum pressure at operation ront matter 22

24 Selection ust Handling of Vacuum quipment When the vacuum equipment is used, not only the workpiece, but also dust in the surrounding environment is taken in the equipment. Preventing the intrusion of dust is required more than for any other pneumatic equipment. Some of SM s vacuum equipment comes with a filter, but when there is a large amount of dust, an additional filter must be installed. When vaporized materials such as oil or adhesive are sucked into the equipment, they accumulate inside, which may cause problems. It is important to prevent dust from entering the vacuum equipment as much as possible. (1) Make sure to keep the working environment and surrounding area of the workpiece clean so that dust will not be sucked in the equipment. (2) heck the amount and types of dust before using the equipment and install a filter, etc., in the piping when necessary. In particular, equipment used to capture dust, such as a vacuum cleaner, require a special filter. (3) onduct a test and make sure that operating conditions are cleared before using the equipment. () Perform filter maintenance depending on the amount of dirt. () ilter clogging generates a pressure difference between the adsorption and ejector parts. This requires attention, since clogging can prevent proper adsorption from being achieved. ir Suction ilter (Series Z, Z, Z) To protect the switching valve and the ejector from becoming clogged, a suction filter in the vacuum circuit is recommended. When using an ejector in a dusty environment, the unit s filter will become clogged quickly, so it is recommended that the Z, Z or Z series be used concurrently. Vacuum Line quipment Selection etermine the volume of the suction filter and the conductance of the switching valve in accordance with the maximum suction flow rate of the ejector and the vacuum pump. Make sure that the conductance is greater than the value that has been obtained through the formula given below. (If the devices are connected in series in the vacuum line, their conductances must be combined.) = Qmax x 11.1 : onductance [dm 3 /(s bar)] Qmax: Max. suction flow rate L/min (N) ront matter 23

25 Selection Vacuum quipment Selection xample Transfer of Semiconductor hips Selection conditions: (1) Workpiece: Semiconductor chips : mm x mm x 1 mm, Mass: 1 g (2) Vacuum piping length: 1 m (3) dsorption response time: 300 msec or less 1. Vacuum Pad Selection (1) ased on the workpiece size, the pad diameter is mm (1 pc.). (2) Using the formula on the front matter 13, confirm the lifting force. W = P x S x 0.1 x 1/t W = 1 g = N = P x 0.13 x 0.1 x 1/ S = π/ x (0.) 2 = 0.13 cm 2 P = 3.0 kpa t = (Horizontal lifting) ccording to the calculation, 3.0 kpa or more of vacuum pressure can adsorb the workpiece. (3) ased on the work shape and type, select: Pad type: lat Pad material: Silicone () ccording to the results above, select a vacuum pad part number ZPT0US-. (Specify the vacuum entry port () from the pad mounting status.) 2. Vacuum jector Selection (1) ind the vacuum piping capacity. ssuming that the tube I.. is 2 mm, the piping capacity is as follows: V = π/ x 2 x L x 1/0 = π/ x 2 2 x 1 x 1/0 = L (2) ssuming that leakage (QL) during adsorption is 0, find the average suction flow rate to meet the adsorption response time using the formula on the front matter 1. Q = (V x 0) /T1 + QL = ( x 0) / = 0.2 L rom the formula on the front matter 1, the maximum suction flow rate Qmax is Qmax = (2 to 3) x Q = (2 to 3) x 0.2 = 1.2 to 1. L/min (N) ccording to the maximum suction flow rate of the vacuum ejector, a nozzle with a 0. diameter can be used. If the vacuum ejector ZX series is used, representative model ZX10 can be selected. (ased on the operating conditions, specify the complete part number for the vacuum ejector used.) 3. dsorption esponse Time onfirmation onfirm the adsorption response time based on the characteristics of the vacuum ejector selected. (1) The maximum suction flow rate of the vacuum ejector ZX10 is L/min. rom the formula on the front matter 1, the average suction flow rate Q1 is as follows: Q1 = (1/2 to 1/3) x jector s max. suction flow rate = (1/2 to 1/3) x = 2. to 1. L/min (2) Next, find the maximum flow rate Q2 of the piping. The conductance is 0.22 from the Selection Graph (3). rom the formula on the front matter 1, the maximum flow rate is as follows: Q2 = x x 11.1 = x 0.22 x 11.1 = 12.2 L/min (3) Since Q2 is smaller than Q1, Q = Q1. Thus, from the formula on the front matter 1, the adsorption response time is as follows: T = (V x 0)/Q = ( x 0)/1. = second = 109 msec It is possible to confirm that the calculation result satisfies the required specification of 300 msec. ront matter 2

26 Selection ata Selection Graph Selection Graph (2) Piping apacity by Tube I.. Piping capacity V (L) Tube I.. Tube length L (m) How to read the graph xample: or obtaining the capacity of tube I.. ø and 1 meter length <Selection Procedure> y extending leftward from the point at which the 1 meter tube length on the horizontal axis intersects the line for a tube I.. ø, the piping capacity approximately equvalent to 0.02 L can be obtained on the vertical axis. Piping capacity 0.02 L Selection Graph (3) onductance by Tube I.. 10 Tube I.. ø9.. quivalent conductance [dm 3 (s bar)] Tube length (m) How to read the graph xample: Tube size ø/ø and 1 meter length <Selection Procedure> y extending leftward from the point at which the 1 meter tube length on the horizontal axis intersects the line for a tube I.. ø, the equivalent conductance approximately 3. [dm 3 /(s bar)] can be obtained on the vertical axis. quivalent conductance 3. [dm 3 /(s bar)] ront matter 2

27 Selection Glossary of Terms Terms (Max.) suction flow rate Maximum vacuum pressure ir consumption Standard supply pressure xhaust characteristics low-rate characteristics Vacuum pressure switch Suction verification switch (ir) supply valve (Vacuum) release valve low adjustment valve elease pressure Pilot pressure xternal release Vacuum port xhaust port Supply port ack pressure Leakage esponse time verage suction flow rate onductive pad Vacuum pressure jector ir suction filter escription Volume of air taken in by the ejector. The maximum value is the volume of air taken in without having anything connected to the vacuum port. The maximum value of the vacuum pressure generated by the ejector The compressed volume of air consumed by the ejector The optimal supply pressure for operating the ejector The relationship between the vacuum pressure and the suction flow rate when the supply pressure to the ejector has been changed. The relationship between the vacuum pressure and the suction flow rate with the standard supply pressure supplied to the ejector. Pressure switch for verifying the adsorption of a workpiece Switch, based on an air pressure bridge, for verifying the adsorption of a workpiece. It is used when the adsorption pad and the nozzle are extremely small. Valve for supplying compressed air to the ejector Valve for supplying positive pressure or air for breaking the vacuum state of the adsorption pad Valve for adjusting the volume of air for breaking the vacuum Pressure for breaking the vacuum Pressure for operating the ejector valve The action of breaking the vacuum using externally supplied air instead of using the ejector unit Port for generating vacuum Port for exhausting air consumed by the ejector, and air taken in from the vacuum port. Port for supplying air to the ejector Pressure inside the exhaust port The entry of air into the vacuum passage, such as from an area between a workpiece and a pad, or between a fitting and a tube. The vacuum pressure decreases when leakage occurs. The time from the application of the rated voltage to the supply valve or release valve, until V port pressure reaches the specified pressure. The suction flow rate by the ejector or pump for calculating the response speed. It is 1 2 to 1 3 of the maximum suction flow rate. low electrical resistance pad for electrostatic prevention measure ny pressure below the atmospheric pressure. When the atmospheric pressure is used as a reference, the pressure is presented by kpa (G), and when the absolute pressure is used as a reference, the pressure is represented by kpa (abs). When referencing a piece of vacuum equipment such as an ejector, the pressure is generally represented by kpa. unit for generating vacuum by discharging the compressed air from a nozzle at a high speed, based on the phenomenon in which the pressure is reduced when the air around the nozzle is sucked. Vacuum filter provided in the vacuum passage for preventing the dust intrusion into the ejector, vacuum pump, or peripheral equipment ront matter 2

28 Selection ountermeasures for Vacuum dsorption System Problems (Troubleshooting) ondition & escription of improvement Initial adsorption problem (uring trial operation) ontributing factor dsorption area is small. (Lifting force is lower than the workpiece mass.) Vacuum pressure is low. (Leakage from adsorption surface) (ir permeable workpiece) Vacuum pressure is low. (Leakage from vacuum piping) ountermeasure econfirm the relationship between workpiece mass and lifting force. Use a vacuum pad with a large adsorption area. Increase the quantity of vacuum pads. liminate (reduce) leakage from adsorption surface. econsider shape of vacuum pad. onfirm the relationship between suction flow rate and arrival pressure of vacuum ejector. Use a vacuum ejector with a high suction flow rate. Increase adsorption area. epair leakage point. Internal volume of vacuum circuit is large. onfirm the relationship between internal volume of the vacuum circuit and suction flow rate of the vacuum ejector. educe internal volume of the vacuum circuit. Use a vacuum ejector with a high suction flow rate. Pressure drop of vacuum piping is large. econsider vacuum piping. Use a shorter or larger tube (with appropriate diameter). Inadequate supply pressure of vacuum ejector Measure supply pressure in vacuum generation state. Use standard supply pressure. econsider compressed air circuit (line). logging of nozzle or diffuser (Infiltration of foreign objects during piping) emove foreign objects. Late vacuum achieving time (Shortening of response time) Supply valve (switching valve) is not being activated. Workpiece deforms during adsorption. Internal volume of vacuum circuit is large. Pressure drop of vacuum piping is large. Measure supply voltage at the solenoid valve with a tester. eview electric circuits, wiring and connectors. Use in the rated voltage range. Since a workpiece is thin, it deforms and leakage occurs. Use a pad for adsorption of thin objects. onfirm the relationship between internal volume of the vacuum circuit and suction flow rate of the vacuum ejector. educe internal volume of the vacuum circuit. Use a vacuum ejector with a high suction flow rate. econsider vacuum piping. Use a shorter or larger tube (with appropriate diameter). ront matter 2 Using the product as close to the highest vacuum power in the specifications. Setting of vacuum pressure switch is too high. Set vacuum pressure to minimum necessary value by optimizing the pad diameter, etc. s the vacuum power of an ejector (venturi) rises, the vacuum flow actually lowers. When an ejector is used at its highest possible vacuum value, the vacuum flow will lower. ue to this, the amount of time needed to achieve adsorption is lengthened. One should consider an increase in the diameter of the ejector nozzle or an increase the size of the vacuum pad utilized in order to lower the required vacuum pressure, maximum the vacuum flow, and speed up the adsorption process. Set to suitable setting pressure.

29 Selection ondition & escription of improvement luctuation in vacuum pressure ontributing factor luctuation in supply pressure Vacuum pressure may fluctuate under certain conditions due to ejector characteristics. ountermeasure econsider compressed air circuit (line). (ddition of a tank, etc.) Lower or raise supply pressure a little at a time, and use in a supply pressure range where vacuum pressure does not fluctuate. Occurrence of abnormal noise (intermittent noise) from exhaust of vacuum ejector Intermittent noise may occur under certain conditions due to ejector characteristics. Lower or raise supply pressure a little at a time, and use in a supply pressure range where the intermittent noise does not occur. ir leakage from vacuum port of manifold type vacuum ejector dsorption problem over time (dsorption was normal during trial operation.) xhaust air from the ejector enters the vacuum port of another ejector that is stopped. logging of suction filter logging of sound absorbing material logging of nozzle or diffuser Use a vacuum ejector with a check valve. (Please contact SM for the part no. of an ejector with a check valve.) eplace filters. Improve installation environment. eplace sound absorbing materials. dd a filter to supply (compressed) air circuit. Install an additional suction filter. emove foreign objects. dd a filter to supply (compressed) air circuit. Install an additional suction filter. Vacuum pad (rubber) deterioration, cracking, etc. eplace vacuum pads. onfirm compatibility of vacuum pad material and workpiece. Workpiece is not released. Inadequate release flow rate Viscosity increase due to vacuum pad (rubber) wear Open release flow adjustment needle. eplace vacuum pads. onfirm compatibility of vacuum pad material and workpiece. Vacuum pressure is too high. Set vacuum pressure to minimum necessary value. ffects due to static electricity Use a conductive pad. ront matter 2

30 Selection Non-conformance xamples No problem occurred during the test, but adsorption becomes unstable after starting operation. [Possible causes] Setting of the vacuum switch is not appropriate. Supply pressure is unstable. Vacuum pressure does not reach the set pressure. There is leakage between the workpiece and the vacuum pad. [emedy] 1) Set the pressure for the vacuum equipment (supply pressure, if using an ejector) to the necessary vacuum pressure during the adsorption of the work pieces. nd set the set pressure for the vacuum switch to the necessary vacuum pressure for adsorption. 2) It is presumed that there was leakage during the test, but it was not serious enough to prevent adsorption. evise the vacuum ejector and the shape, diameter, and material of the vacuum pad. evise the vacuum pad. dsorption becomes unstable after replacing the pad. [Possible causes] Initial setting conditions (vacuum pressure, vacuum switch setting, height of the pad) have changed. Settings have changed because the pad was worn out or had permanent setting due to the operating environment. When the pad was replaced, leakage was generated from the screw connection part, or the engagement between the pad and the adapter. [emedy] 1) evise the operating conditions including vacuum pressure, the set pressure of the vacuum switch, and the height of the pad. 2) evise the engagement. Identical pads are used to adsorb identical work pieces, but some of the pads cannot adsorb the work pieces. [Possible causes] There is leakage between the workpiece and the vacuum pad. The supply circuit for the cylinder, the solenoid valve and the ejector is in the same pneumatic circuit system. The supply pressure decreases when they are used simultaneously. (Vacuum pressure does not increase) There is leakage from the screw connection part or the engagement between the pad and the adapter. [emedy] 1) evise the pad diameter, shape, material, vacuum ejector (suction flow rate), etc. 2) evise the pneumatic circuit. 3) evise the engagement. In principle, vacuum pads are molded using a die. Therefore, there is minimal variance in dimensions between products. The workpiece cannot be separated from the pad. The workpiece sticks to the rubber part of the bellows. [Possible causes] The adhesiveness of the rubber material is high. dhesiveness increases due to the operating environment (wearing of the pad, etc.). Vacuum pressure is higher than necessary, so excessive force (adhesiveness of the rubber + vacuum pressure) is applied to the pad (rubber part). [emedy] 1) evise the shape, material, and quantity of vacuum pads. 2) educe the vacuum pressure. If inadequate lifting force causes a problem in transferring the work pieces due to the reduction of vacuum pressure, increase the number of pads, or select pads with larger diameter. ront matter 29

31 Selection When mounted with the nut, sometimes the buffer operation is not smooth, or the buffer does not slide. [Possible causes] The tightening torque of the nut for mounting the buffer is too high. Particles stuck to the sliding surface, or it is scratched. Lateral load applied to the piston rod, causing eccentric wearing. [emedy] Tighten the nut to the recommended tightening torque. The nut may become loose depending on the operating conditions and environment. e sure to perform regular maintenance. General Purpose Product specifications Nut tightening torque Product part no. Mounting thread size ø2 to ø1 200 to 010 ø10 to ø32 ø20 to ø0 ZP (02 to 0) U, ZP (10 to 1) UT, T ZP (200 to 010) U ZP (10 to 32) U,,, ZP (10 to 1) ZP (0, 0) U,,, ZP (20 to 0) M x 1 M10 x 1 M1 x 1 1. to 2.0 N m 2. to 3. N m. to. N m Heavy-duty Pad Product specifications Product part no. Mounting thread size uffer body material ø0, ø0 ø3, ø0 ø, ø12 ZP (0/0) H ZP (0/0) H ZP (3/0) H ZP (3/0) H ZP (/12) H ZP (/12) H J J J J J J J J J M1 x 1. M1 x 1. M22 x 1. luminum alloy rass Steel luminum alloy rass Steel luminum alloy rass Steel Heavy-duty all Joint Pad Product specifications Product part no. Mounting thread size uffer body material ø0, ø0 ø3, ø0 ø, ø12 ZP2- (0/0) H J rass M1 x 1. ZP2- (0/0) H J Steel ZP2- (3/0) H J rass M22 x 1. ZP2- (3/0) H J Steel ZP2- (/12) H J rass M22 x 1. ZP2- (/12) H J Steel Nut tightening torque 9. to 10. N m 2 to 32 N m to 2 N m 9. to 10. N m 2 to 32 N m to 2 N m 9. to 10. N m to 0 N m to 0 N m Nut tightening torque 2 to 32 N m to 2 N m to 0 N m to 0 N m to 0 N m to 0 N m Time of eplacement of Vacuum Pad The vacuum pad is disposable. eplace it on a regular basis. ontinued use of the vacuum pad will cause wear and tear on the adsorption surface, and the exterior dimensions will gradually get smaller and smaller. s the pad diameter gets smaller, lifting force will decrease, though adsorption is possible. It is extremely difficult to provide advice on the frequency of vacuum pad exchange. This is because there are numerous factors at work, including surface roughness, operationg environment (temperature, humidity, ozone, solvents, etc.), and operating conditions (vacuum pressure, workpiece weight, pressing force of the vacuum pad on the workpiece, presence or absence of a buffer, etc.). Thus, the customer should decide when the vacuum pad should be exchanged, based on its condition at time of initial use. The bolt may become loose depending on the operating conditions and environment. e sure to perform regular maintenance. ecommended Tightening Torque for eplacement of Heavy-duty Pad Product specifications olt tightening Product part no. olt torque ø0, ø0 ø3, ø0 ø, ø12 ZP (0/0) H ZP (0/0) H ZP (3/0) H ZP (3/0) H ZP (/12) H ZP (/12) H M3 x M x M x to 0.9 N m 0.9 to 1.1 N m 2.3 to 2. N m ssemble parts with recommended tightening torque. ront matter 30

32 2 ompact Pad ø3, ø, ø, ø, ø, ø /Type U: lat : lat with rib UT: Thin flat : ellows types of ø3 to ø are added. pplicable for the ZP series adapter Pad unit ZP2 last type ø3 ø ø ø ø ø ø last type: Work pieces can be removed easily. How to Order 03 UN Pad material Material N N S Silicone rubber U Urethane rubber KM GN onductive N GS onductive silicone rubber : Pad Unit Pad type 03 0 Pad type () U (lat) (lat with rib) UT (Thin flat) (ellows) ZP2-03U ø ZP2-0U ø ZP2-0UT ZP2-0UT ZP2-0 ZP2-0 ø ø ø ø ø1. ø3 ø3. 0. ø1. ø ø. 0. ø1.2 ø 0.3 ø0. ø 0.3 ø ø ø dapter Mounting If an adapter will be made by the customer, design the adapter with the dimensions shown below. ø ø2. ø3.3 ø ø ø9 ø2. ø. ø ø9 ø10 ZP2-0 ZP2-0 ZP2-0 ø2. ø 0. ø2. ø 0. ø2. ø ø ø ø9 ø2. ø3. ø.9 Note) part has to be smooth with no corners. efer to page for adapter applicable to the ZP series. 1

33 Short-type Pad ø2, ø3., ø, ø, ø, ø, ø10, ø1 /Type MU: lat Space-saving in the height direction : Pad Unit Pad unit ZP2 last type 02 ø2 03 ø3. 0 ø 0 ø 0 ø 0 ø 10 ø10 1 ø1 last type: Work pieces can be removed easily. How to Order 02 MU N Pad type Type MU lat Pad material Material N N S Silicone rubber U Urethane rubber KM GN onductive N GS onductive silicone rubber ZP2-02MU ZP2-03MU ZP2-0MU ø ø ø ø3 ø3 ø3 ø2 ø2 ø2 ZP2-0MU ø ø3 ø ø1 0. ø1 0. ø1. 0. ø1. 0. ø2 ø3. ø ø ø2. ø3. ø. ø. ZP2-0MU ø. ø ø ZP2-0MU ø ø ø dapter Mounting If an adapter will be made by the customer, design the adapter with the dimensions shown below. pplicable pad 02MU/03MU/0MU/0MU. ø2 ø ø ø2 ø ø ø1.2 ø2 ø3 ZP2-10MU ø ø ø ZP2-1MU ø9 ø ø pplicable pad 0MU/0MU/10MU/1MU ø ø ø2 ø ø ø10 ø10. ø1 ø1. Note) part has to be smooth with no corners. efer to page 9 for adapter applicable to the ZP2 series. 2

34 Series ZP2 With adapter ZP2 T 02 MU N 3 Vacuum inlet direction irection T Vertical last type ø2 ø3. ø ø ø ø ø10 ø1 last type: Work pieces can be removed easily. : With dapter Pad type Type MU lat How to Order Mounting () Thread size (M3 x 0. Male thread) H ( Male thread) ( emale thread) Pad material Material N N S Silicone rubber U Urethane rubber KM GN onductive N GS onductive silicone rubber 0 eplacement Part No. ZP2-T02MU-3 ZP2-T03MU-3 ZP2-T0MU-3 ZP2-T0MU-3 ZP2-T0MU-H ZP2-T0MU-H ZP2-T10MU-H ZP2-T1MU-H ZP2-T0MU- ZP2-T0MU- ZP2-T10MU- ZP2-T1MU- 0 0 Pad unit part no. ZP2-02MU ZP2-03MU ZP2-0MU ZP2-0MU ZP2-0MU ZP2-0MU ZP2-10MU ZP2-1MU ZP2-0MU ZP2-0MU ZP2-10MU ZP2-1MU 10 Note) in the table indicates the pad material. 1 dapter part no. ZP2-M01P ZP2-M02P ZP2-M0 ZP2-T02MU-3 ZP2-T03MU-3 ZP2-T0MU-3 Width across flat M3 x 0. Width across flat M3 x 0. Width across flat M3 x 0. (9) (9) (9) ø1 0. ø1 0. ø ø2 ø3. ø ø2. ø3. ø. Width across flat (9) ZP2-T0MU-3 ZP2-T0MU-H ZP2-T0MU-H M3 x (11.) 1.. ø1. ø Width across flat 1. (12) ø1. ø Width across flat 1. ø ø 0. ø 1.2 ø ø. ø. ø. 3

35 Short-type Pad Series ZP2 : With dapter ZP2-T10MU-H ZP2-T1MU-H ø1. ø1. (12) ø Width across flat 1. (13) ø Width across flat 1. 2 ø10 ø ø1 ø1. ZP2-T0MU- ZP2-T0MU- Width across flat Width across flat Width across flat 2 (1).. (1.) (1).. ø2 0. ø2 1.2 ø ø ø. ø. ZP2-T10MU- ZP2-T1MU- Width across flat (1). ø2 ø10 ø ø2 ø1 ø1.

36 2. Short-type Pad ø2, ø, ø, ø, ø1 /Type U: lat Space-saving in the height direction : Pad Unit ZP2-02U ø ø2. Pad unit ZP2 last type 02 ø2 0 ø 0 ø 0 1 ø ø1 last type: Work pieces can be removed easily. How to Order 02 U N Pad type Type U lat Pad material Material N N S Silicone rubber U Urethane rubber KM GN onductive N GS onductive silicone rubber ZP2-0U ø ø2. ø1. 0. ø ø. ø ø2. ø ø ø1. 0. ø1. 0. ø ø ø. ø9 ø ø ø ø2 ø2. ZP2-0U ZP2-0U ZP2-1U dapter Mounting If an adapter will be made by the customer, design the adapter with the dimensions shown below. ø2 ø1 ø1. ø1. ø3 ø. Note) part has to be smooth with no corners. efer to page 0 for adapter applicable to the ZP2 series.

37 Short-type Pad Series ZP2 With adapter ZP2 T 02 U N Vacuum inlet direction irection T Vertical last type ø2 ø ø ø ø1 last type: Work pieces can be removed easily. : With dapter Pad type Type U lat How to Order Mounting H Pad material Thread size Material N N S Silicone rubber U Urethane rubber KM GN onductive N GS onductive silicone rubber dapter type Hexagon O.. Hexagon socket head eplacement Part No. ZP2-T02U- ZP2-T0U- ZP2-T0U- ZP2-T0U- ZP2-T1U- ZP2-T02U-H ZP2-T0U-H ZP2-T0U-H ZP2-T0U-H ZP2-T1U-H Pad unit part no. ZP2-02U ZP2-0U ZP2-0U ZP2-0U ZP2-1U ZP2-02U ZP2-0U ZP2-0U ZP2-0U ZP2-1U Note) in the table indicates the pad material. dapter part no. ZP2-Z01P ZP2-Z02P Width across flat ZP2-T02U- Width across flat ZP2-T0U- (10) (10) ø1.2 ø2 ø2. 0. ø1. ø ø. 0. Width across flat ZP2-T0U- Width across flat ZP2-T0U- (10) 2. (10) ø1. ø ø. 0. ø1. ø ø9 0. Width across flat ZP2-T1U- (11) ø1. ø1 ø1. 1.

38 Series ZP2 : With dapter ZP2-T02U-H ZP2-T0U-H (9) ø Width across flat 1. (9) Width across flat 1. (9) Width across flat 1. (9) Width across flat 1. ø1. ø ø. 0. ø1. ø ø9 0. ø1. Width across flat ø ø1.2 ø2 ø2. 0. ø1. ø ø. 0. ZP2-T0U-H ZP2-T0U-H ø ø ZP2-T1U-H (10) 1. ø ø1 1. ø1.

39 Short-type Pad ø2, ø3, ø, ø, ø /Type U: lat Space-saving in the height direction Pad unit ZP2 How to Order 02 U N last type ø2 ø3 ø ø ø last type: Work pieces can be removed easily. Pad type Type U lat Pad material Material N N S Silicone rubber U Urethane rubber KM GN onductive N GS onductive silicone rubber : Pad Unit ZP2-02U ZP2-03U ZP2-0U ø ø2 ø ø2 ø ø2 ø ø ø. ø ø2. ø ø ø ø ø2 ø3 ø2. ø3. ZP2-0U ZP2-0U ø2.2 ø ø.3 ø2.2 ø ø.3

40 Nozzle Pad ø0., ø1.1 /Type N: Nozzle or adsorption of small components (such as I chips) : Pad Unit Pad unit ZP2 How to Order 0 N N 0 ø0. 11 ø1.1 Pad type Type N Nozzle Pad material Material N N S Silicone rubber U Urethane rubber KM GN onductive N GS onductive silicone rubber ZP2-0N ø ø2 ZP2-11N ø ø2 dapter Mounting If an adapter will be made by the customer, design the adapter with the dimensions shown below ø0. ø1.1 ø1. ø2 ø1.1 ø2.2 Note) part has to be smooth with no corners. efer to page 0 for adapter applicable to the ZP2 series. How to Order With adapter ZP2 T 0 N N Vacuum entry direction irection T Vertical Pad type 0 11 ø0. ø1.1 N Type Nozzle : With dapter Pad material Material N N S Silicone rubber U Urethane rubber KM GN onductive N GS onductive silicone rubber Mounting Thread size eplacement Part No. ZP2-T0N- ZP2-T11N- Pad unit part no. ZP2-0N ZP2-11N dapter part no. ZP2-Z21P Note) in the table indicates the pad material. Width across flat ZP2-T0N- Width across flat ZP2-T11N- (1.) 3 3. (1.) ø0. ø1. ø1.1 ø2

41 Thin lat Pad ø, ø, ø11, ø1, ø1, ø20 /Type UT: Thin flat (Skirt) or adsorption of soft work pieces such as thin sheets or vinyl. Wrinkling or deformation during adsorption is reduced. pplicable for the ZP series adapter : Pad Unit Pad unit 0 ø 0 ø 11 ø11 1 ø1 1 ø1 20 ø20 ZP2 UT How to Order 11 UT N Pad type Type Thin flat (Skirt) Pad material Material N N S Silicone rubber U Urethane rubber KM GN onductive N GS onductive silicone rubber ZP2-0UT ø ZP2-0UT ø ZP2-11UT ø ZP2-1UT ø 12 ø2. ø1. ø1. 1. ø ø1.2 ø 0.3 ø0. ø 0.3 ø2. ø11. ø ZP2-1UT ø2. ø1 ø19 1. dapter Mounting If an adapter will be made by the customer, design the adapter with the dimensions shown below. ø.9 ZP2-20UT ø ø2. ø3. ø.9 1. Note) part has to be smooth with no corners. efer to page for adapter applicable to the ZP series. ø2. ø20 ø21 10

42 lat Pad ø10, ø1, ø20, ø2, ø30 /Type MT: Thin flat (with groove) dsorption surface with groove (0.3) Pad unit or adsorption of thin sheets or film eformation of the flat surface during adsorption is reduced. Note 1) Not suitable for transferring work pieces which apply a load. Note 2) Wrinkling may be generated depending on the sheet thickness. onfirm the thickness before use. : Pad Unit ZP2 last type 10 ø10 1 ø1 20 ø20 2 ø2 30 ø30 last type: Work pieces can be removed easily. How to Order 10 MT N Pad material Material N N S Silicone rubber KM GN onductive N GS onductive silicone rubber Pad type Type MT Thin flat (With groove) ZP2-10MT ZP2-1MT ZP2-20MT ZP2-2MT ø. ø ø ø. ø ø ø13. ø10 ø ø1 ø10 ø ø1. ø10 ø11 (0.3) ø1. ø1 ø1 (0.3) ø1. ø20 ø21 (0.3) ø1. ø2 ø2 (0.3) ZP2-30MT ø1 ø10 ø 2 dapter Mounting. ø1. ø30 ø31 2 (0.3) pplicable pad 10MT/1MT If an adapter will be made by the customer, design the adapter with the dimensions shown below. pplicable pad 20MT/2MT/30MT 2 2 ø ø ø ø10 Note) part has to be smooth with no corners. efer to page 9 for adapter applicable to the ZP2 series. 11

43 lat Pad Series ZP2 With adapter ø10 ø1 ø20 ø2 ø30 ZP2-T10MT-H ZP2 T 10 MT N H last type last type: Work pieces can be removed easily. (10.). 1 Vacuum inlet direction irection T Vertical Width across flat 1. Pad type Type MT Thin flat (With groove) : With dapter ø (10.) ZP2-T1MT-H. 1 ø Width across flat 1. How to Order Pad material Mounting () Thread size () H ( Male thread) ( emale thread) Material N N S Silicone rubber KM GN onductive N GS onductive silicone rubber 10 ZP2-T20MT-H (10.). 1 ø eplacement Part No. ZP2-T10MT-H ZP2-T1MT-H ZP2-T20MT-H ZP2-T2MT-H ZP2-T30MT-H ZP2-T10MT- ZP2-T1MT Pad unit part no. ZP2-10MT ZP2-1MT ZP2-20MT ZP2-2MT ZP2-30MT ZP2-10MT ZP2-1MT Note) in the table indicates the pad material. Width across flat 2. (10.). 1 ZP2-T2MT-H ø1 dapter part no. ZP2-M02 ZP2-M03 ZP2-M0 Width across flat 2. ø1. ø10 ø11 (0.3) ø1. ø1 ø1 (0.3) ø1. ø20 ø21 (0.3) ø1. ø2 ø2 (0.3) (10.). 1 ZP2-T30MT-H ø1 Width across flat Width across flat 2. ZP2-T10MT- (13.).. Width across flat ZP2-T1MT- (13.).. ø1. ø30 ø31 (0.3) ø1. ø10 ø11 (0.3) ø1. ø1 ø1 (0.3) 12

44 ellows Pad ø, ø9, ø10, ø1, ø1, ø1, ø2, ø30 /Type J: ellows (Multistage type) or use where there is no space for the buffer (spring type) Work pieces with inclined adsorption surface pplicable for the ZP series adapter : Pad Unit Pad unit ZP2 last type ø ø9 ø10 ø1 ø1 ø1 2 ø2 30 ø30 last type: Work pieces can be removed easily. How to Order 0 JN X19 Pad material N S U GN GS Material N Silicone rubber Urethane rubber KM onductive N onductive silicone rubber Pad type Type J ellows (Multistage type) With/Without lock ring Nill With lock ring X19 Without lock ring Note) Note) ø, ø10, ø1 are not available. 1. ZP2-0J ø Lock ring 1 ZP2-09J ø13 1. ZP2-10J ø dapter Mounting If an adapter will be made by the customer, design the adapter with the dimensions shown below. pplicable pad 0J/10J/1J ø.9. ø13 ø ø2. ø. ø10 ø11 ø12 ø Lock ring ø2. ø ø ø ø3 ø9 ø10 ZP2-1J ZP2-1J ZP2-1J Lock ring 2 0. ø2. ø3. ø.9 pplicable pad 09J/1J/1J ø1 1 1 Lock ring ø3 ø1 ø1 ZP2-2J ø1 Lock ring ø2. ø11. ø1 ø1 ø1 ZP2-30J ø1 ø ø.2 ø1 ø1. ø2. ø. ø ø. pplicable pad 2J/30J ø2 ø ø10.2 ø2 ø ø32 ø ø13. ø30 ø ø3. ø ø ø.9 Note) part has to be smooth with no corners. efer to page for adapter applicable to the ZP series.

45 ellows Pad ø, ø, ø, ø10, ø1, ø20 /Type M: ellows or use where there is no space for the buffer (spring type) Work pieces with inclined adsorption surface : Pad Unit Pad unit ZP2 last type 0 ø 0 ø 0 ø 10 ø10 1 ø1 20 ø20 How to Order 0 M N Pad type Type M ellows last type: Work pieces can be removed easily. Pad material Material N N S Silicone rubber U Urethane rubber KM GN onductive N GS onductive silicone rubber ZP2-0M ø. ø3 ø2 ø1. 1. ZP2-0M ø ø ø 2 2 ZP2-0M ø ø ø ø10. ø. ø1. ø.1 ø. ø11 ø. ø ø1. 9 ø2. ø3.3 ø ø ø. ø11 ø. ø ø1 ø9. ø2. ø. ø ø9 ZP2-10M ZP2-1M ZP2-20M ø1 ø10. ø.. 3. ø. ø10 ø11 ø9. ø1 ø1 ø12 ø20 ø If an adapter will be made by the customer, design the adapter with the dimensions shown below. pplicable pad pplicable pad pplicable pad pplicable pad 0M 0M/0M 10M/1M 20M ø2. ø2. ø1.2 ø2 ø3 2 ø1. ø ø Note) part has to be smooth with no corners. efer to pages 9 and 0 for adapter applicable to the ZP2 series. dapter Mounting 2 ø. Width across flat ø10. Width across flat 3 1

46 Series ZP2 Width across flat (11) With adapter ø ZP2 M3 x (1) T Vacuum inlet direction irection T Vertical last type ø ø ø ø10 ø1 ø20 last type: Work pieces can be removed easily. : With dapter 9 0 M 3. (1) 9 3. ø Width across flat 1. ø. ø9. 1. ø1. N How to Order 3 Mounting () Thread size () 3 (M3 x 0. Male thread) H ( Male thread) ( emale thread) Pad material Material N N S Silicone rubber U Urethane rubber KM GN onductive N GS onductive silicone rubber Pad type Type M ellows ZP2-T0M-3 ZP2-T0M-H ZP2-T0M-H ZP2-T10M-H 1. ø1. 0 ø 0 Width across flat (13) eplacement Part No. ZP2-T0M-3 ZP2-T0M-H ZP2-T0M-H ZP2-T10M-H ZP2-T1M-H ZP2-T20M-H ZP2-T0M- ZP2-T0M- ø2. ø Pad unit part no. ZP2-0M ZP2-0M ZP2-0M ZP2-10M ZP2-1M ZP2-20M ZP2-0M ZP2-0M Note) in the table indicates the pad material. ø11 dapter part no. ZP2-M01P ZP2-M02P ZP2-M0 ZP2-M0 ZP2-M0 Width across flat 3 3 ø1.2 ø3.3 ø. ø10 ø.1 ø. ø ø ø ø9 ø11 ZP2-T1M-H ZP2-T20M-H ZP2-T0M- ZP2-T0M- ø1 3. (1.) 11 ø1. ø2. ø11 Width across flat 3. (1) 13 ø1 ø2. Width across flat 3. Width across flat (1) 9 ø.. Width across flat (1) 9 ø9.. ø1 ø20 ø2 ø2 ø1 ø21 ø3.3 ø. ø ø ø ø9 1

47 ellows Pad ø2, ø, ø, ø, ø0, ø /Type ZJ: ellows or use where there is no space for the buffer (spring type) Work pieces with inclined adsorption surface Pad unit ZP2 02 ø2 0 ø 0 ø 0 ø 0 ø0 ø How to Order 02 ZJ N Pad material Material N N S Silicone rubber U Urethane rubber KM GN onductive N GS onductive silicone rubber Pad type Type ZJ ellows : Pad Unit ZP2-02ZJ ZP2-0ZJ ZP2-0ZJ ZP2-0ZJ ø ø ø2.2 ø. ø.3 ø.2 ø... ø ø1. ø2. ø3.3 ø ø ø ø.3 ø. ø. ø. ø ø2 ø30 ø21 ø ø3. ø ø1 ø2 ø2. ø3. ZP2-0ZJ ZP2-ZJ ø29 ø0 ø ø3 ø ø0 1

48 a a () () Oval Pad Pad size 3. x to x 30 /Type W: Oval or work pieces with limitations on the adsorption surface : Pad Unit Pad unit Size 3. x x 10 x 10 x 10 x 20 x 20 ZP2 Pad size Size 020 x x x x x x 30 How to Order 30 WN Pad material Material N N S Silicone rubber U Urethane rubber KM GN onductive N GS onductive silicone rubber Pad type Type W Oval ZP2- W ZP2-20 W ZP2-30 W pplicable pad 020W/020W/020W/020W - pplicable pad 030W/030W/030W/030W - ø. ø () a b ZP2-30W ZP2-010W ZP2-010W ZP2-010W a 3.. b x ZP2-020W ZP2-020W ZP2-020W ZP2-020W a 9 2 x 1. 2 x ZP2-030W ZP2-030W ZP2-030W ZP2-030W a 9 2 x 1. 2 x pplicable pad 30W/010W/010W/010W dapter Mounting If an adapter will be made by the customer, design the adapter with the dimensions shown below. ø ø3 ø ø3 ø ø3 ø20. Note) part has to be smooth with no corners. efer to page 9 for adapter applicable to the ZP2 series. 1

49 Oval Pad: With dapter (Vacuum Inlet irection: Vertical) Series ZP2 How to Order With adapter Vacuum inlet direction irection T Vertical ZP2 T 30 WN Size 3. x x 10 x 10 x 10 x 20 x Pad size Size x 20 x 20 x 30 x 30 x 30 x 30 : With dapter Pad material Vacuum inlet Thread size Material N N S Silicone rubber U Urethane rubber KM GN onductive N GS onductive silicone rubber Pad type Type W Oval eplacement Part No. Pad unit part no. dapter part no. ZP2-T30W- ZP2-30W ZP2-T010W- ZP2-010W ZP2-001 ZP2-T010W- ZP2-010W ZP2-T010W- ZP2-010W ZP2-T020W- ZP2-020W ZP2-T020W- ZP2-020W ZP2-002 ZP2-T020W- ZP2-020W ZP2-T020W- ZP2-020W ZP2-T030W- ZP2-030W ZP2-T030W- ZP2-030W ZP2-003 ZP2-T030W- ZP2-030W ZP2-T030W- ZP2-030W Note) in the table indicates the pad material. ZP2-T W- ZP2-T 20 W- 12 ø 20 ø11 (1) ZP2-T30W- ZP2-T010W- ZP2-T010W- ZP2-T010W- a a 3.. b b x (1) a ZP2-T020W- ZP2-T020W- ZP2-T020W- ZP2-T020W- a x 1. 2 x ZP2-T 30 W- 30 ø19 (1) a ZP2-T030W- ZP2-T030W- ZP2-T030W- ZP2-T030W- a 9 2 x 1. 2 x

50 Series ZP2 With buffer Vacuum inlet direction Size 3. x x 10 x 10 x 10 x 20 x 20 Width across flat ZP2 T 30 WNK10 T Pad size Size x 20 x 20 x 30 x 30 x 30 x 30 Pad type W Type Oval irection Vertical uffer Specifications Stroke (mm) Spring reactive t 0 stroke (N) force t buffer stroke (N) Tightening torque : With uffer ZP2-T WK - Pad material () Material N N S Silicone rubber U Urethane rubber KM GN onductive N GS onductive silicone rubber uffer specification Specification K Non-rotating 10, 20, 30, 0, N m ±% How to Order uffer stroke ( ) Stroke 10 mm 20 mm 30 mm 0 mm 0 mm Width across flat Vacuum inlet () 0 0 eplacement Part No. Pad unit part no. ZP2-T30WK - ZP2-30W ZP2-T010WK - ZP2-010W ZP2-T010WK - ZP2-010W ZP2-T010WK - ZP2-010W ZP2-T020WK - ZP2-020W ZP2-T020WK - ZP2-020W ZP2-T020WK - ZP2-020W ZP2-T020WK - ZP2-020W ZP2-T030WK - ZP2-030W ZP2-T030WK - ZP2-030W ZP2-T030WK - ZP2-030W ZP2-T030WK - ZP2-030W Note 1) in the table indicates the pad material. Note 2) in the table indicates the buffer stroke. pplicable tube O.. ø one-touch fitting ø one-touch fitting dapter part no. ZP2-001 ZP2-002 ZP2-003 ZP2-T 20 WK - uffer assembly part no. ZP2K uffer stroke Stroke mm mm mm 0 0 mm 0 0 mm - Vacuum inlet pplicable tube O.. ø onetouch fitting 0 ø onetouch 0 fitting Note 3) in the table indicates the vacuum inlet. () Width across flat 1 Width across flat Width across flat 1 M10 x 1 M10 x 1 () 13 3 Width across flat 1 3 M10 x 1 a b ZP2-T30WK - ZP2-T010WK - ZP2-T010WK - ZP2-T010WK - a 3.. b 2 x a ZP2-T020WK - ZP2-T020WK - ZP2-T020WK - ZP2-T020WK - a 9 2 x 1. 2 x ZP2-T 30 WK - () common for all three drawings (per buffer stroke) Stroke ( ) a ZP2-T030WK - ZP2-T030WK - ZP2-T030WK - ZP2-T030WK - a 9 2 x 1. 2 x

51 Oval Pad: With uffer (Vacuum Inlet irection: Vertical) Series ZP2 : With uffer ZP2-T WK ZP2-T 20 WK - 0 Width across flat J øh Width across flat J øh (G) Width across flat (G) Width across flat () 13 Width across flat M10 x 1 () 13 Width across flat M10 x 1 Width across flat J Width across flat Width across flat 1 øh M10 x 1 a b a ZP2-T30WK - ZP2-T010WK - ZP2-T010WK - ZP2-T010WK a 3.. b x ZP2-T020WK - ZP2-T020WK - ZP2-T020WK - ZP2-T020WK a 9 2 x 1. 2 x ZP2-T 30 WK - 0 (G) () a ZP2-T030WK - ZP2-T030WK - ZP2-T030WK - ZP2-T030WK a x 1. 2 x common for all three drawings (per buffer stroke) H: ø H: ø Stroke ( ) G 13.9 J G 1. J 10 20

52 Series ZP2 Male thread mounting Without buffer Vacuum inlet direction irection Lateral Width across flat Width across flat Q Width across flat Width across flat 10 How to Order ZP2 30 WN 0 Pad size Size 3. x x 10 x 10 x 10 x 20 x 20 x 20 x 20 x 30 x 30 x 30 x 30 W : Without uffer 0 0 Pad type Type Oval Pad material () eplacement Part No. ZP2-30W-- ZP2-010W-- ZP2-010W-- ZP2-010W-- ZP2-020W-- ZP2-020W-- ZP2-020W-- ZP2-020W-- ZP2-030W-- ZP2-030W-- ZP2-030W-- ZP2-030W-- Material N N S Silicone rubber U Urethane rubber KM GN onductive N GS onductive silicone rubber ZP2-30W-- ZP2-010W-- ZP2-010W-- ZP2-010W-- ZP2-020W-- ZP2-020W-- ZP2-020W-- ZP2-020W-- ZP2-030W-- ZP2-030W-- ZP2-030W-- ZP2-030W-- Note 1) in the table indicates the pad material. Note 2) in the table indicates the vacuum inlet. Q Vacuum inlet () 0 0 Mounting Thread size (Male thread) (emale thread) pplicable tube O.. ø ø Pad unit part no. ZP2-30W ZP2-010W ZP2-010W ZP2-010W ZP2-020W ZP2-020W ZP2-020W ZP2-020W ZP2-030W ZP2-030W ZP2-030W ZP2-030W emale thread mounting Width across flat Width across flat 10 dapter part no. ZP2-001 ZP2-002 ZP2-003 Type adapter part no. ZPS-- ZPS-- Vacuum inlet pplicable tube O.. 0 ø 0 ø 0 0 ZP2- W- - ZP2-20 W- - ZP2-30 W- - 0 Q 0 21 P 21 P 21 P øs (0) øs (0) øs (0) a b a a ZP2-30W-- ZP2-010W-- ZP2-010W-- ZP2-010W-- a 3.. b x ZP2-020W-- ZP2-020W-- ZP2-020W-- ZP2-020W-- a 9 2 x 1. 2 x ZP2-030W-- ZP2-030W-- ZP2-030W-- ZP2-030W-- a. 9 2 x x common for all three drawings (per applicable tube) pplicable tube O.. () ø ø P Q S

53 Oval Pad: Without uffer (Vacuum Inlet irection: Lateral) Series ZP2 : Without uffer 0 ZP2- W- 0-0 ZP2-20 W- 0 - Width across flat 10 Q P Width across flat 10 Q P (39) øs (39) øs a b a ZP2-30W-- ZP2-010W-- ZP2-010W-- ZP2-010W-- a 3.. b x ZP2-020W-- ZP2-020W-- ZP2-020W-- ZP2-020W-- a 9 2 x 1. 2 x ZP2-30 W- 0 - Width across flat 10 Q P (39) øs a ZP2-030W-- ZP2-030W-- ZP2-030W-- ZP2-030W-- a 9 2 x 1. 2 x common for all three drawings (per applicable tube) pplicable tube O.. () ø ø P Q S

54 Series ZP2 With buffer Vacuum inlet direction Size 3. x x 10 x 10 x 10 x 20 x 20 How to Order ZP2 30 WNK10 0 Pad size irection Lateral Size x 20 x 20 x 30 x 30 x 30 x 30 Pad material () Pad type W Material N N S Silicone rubber U Urethane rubber KM GN onductive N GS onductive silicone rubber Type Oval uffer Specifications (Non-rotating) uffer specification Specification K Non-rotating eplacement Part No. Vacuum inlet () pplicable tube O.. 0 ø 0 ø uffer stroke ( ) Stroke 10 mm 20 mm 30 mm 0 mm 0 mm Pad unit part no. dapter part no. ZP2-30WK - ZP2-30W ZP2-010WK - ZP2-010W ZP2-001 ZP2-010WK - ZP2-010W ZP2-010WK - ZP2-010W ZP2-020WK - ZP2-020W ZP2-020WK - ZP2-020W ZP2-002 ZP2-020WK - ZP2-020W ZP2-020WK - ZP2-020W ZP2-030WK - ZP2-030W ZP2-030WK - ZP2-030W ZP2-003 ZP2-030WK - ZP2-030W ZP2-030WK - ZP2-030W Note 1) in the table indicates the pad material. Note 2) in the table indicates the buffer stroke. Type adapter part no. ZPS-- Vacuum inlet pplicable tube O.. 0 ø 0 ø uffer assembly part no. ZP2K uffer stroke Stroke mm mm mm 0 0 mm 0 0 mm Note 3) in the table indicates the vacuum inlet. Stroke (mm) Spring reactive t 0 stroke (N) force t buffer stroke (N) Tightening torque 10, 20, 30, 0, N m ±% : With uffer () ZP2- WK - ZP2-20 WK - ZP2-30 WK - 0 Width across flat Width across flat Width across flat M10 x 1 Q øs P () Width across flat Width across flat Width across flat Q M10 x 1 øs P () Width across flat 1 Width across flat Width across flat M10 x 1 Q øs P a ZP2-30WK - ZP2-010WK - ZP2-010WK - ZP2-010WK - 23 b a 3.. b a common for all three drawings (per stroke) (per applicable tube) Stroke ( ) x ZP2-020WK - ZP2-020WK - ZP2-020WK - ZP2-020WK Stroke ( ) a x 1. 2 x a pplicable tube O.. () ø ø P ZP2-030WK - ZP2-030WK - ZP2-030WK - ZP2-030WK - a Q x x S

55 Pad with all Spline uffer ø2, ø, ø, ø /Type U: lat all spline guide is used to the buffer. How to Order uffer Specifications Specifications Stroke (mm) Spring reactive t 0 stroke (N) force t buffer stroke (N) ZP2-T02US all spline T Vacuum inlet ZP2 02 U N S direction irection T Vertical 02 ø2 0 ø 0 ø 0 ø Pad type Type U lat eplacement Part No. Pad unit part no. ZP2-T02US ZP02U ZP2-T0US ZP0U ZP2-T0US ZP0U ZP2-T0US ZP0U Note) in the table indicates the pad material. uffer stroke Stroke mm uffer specification Specification S all spline Pad material Material N N S Silicone rubber U Urethane rubber KM GN onductive N GS onductive silicone rubber dapter part no. uffer assembly part no. ZPT1- ZP2-T3S 1 1 x 3. (9.) Width across flat 2. ø Gasket 12 Width across flat ø ø ø ZP2-T02US ZP2-T0US ZP2-T0US ZP2-T0US

56 Mark-free Pad Series Minimizes the transfer of rubber constituents to the workpiece. Si board Pad dsorption mark Standard silicone rubber nlarged view μm nalysis equipment: Scanning probe microscope Measurement conditions: Measurement mode tomic force microscope M mode Sample conditions: Press the vacuum pad to the Si board for 1 hour. Monitoring location: Monitored at a randomly selected location where adsorption marks were likely due to contact between the vacuum pad and Si board. 1 Mark-free N Pad Minimizes the transfer of rubber constituents which is supposed to be the cause of adsorption. : ø to ø12 μm Heavy-duty type 2 Stuck luororesin Pad luororesin sheet is baked onto the pad adsorption surface. Prevents the transfer of rubber constituents. : ø0 to ø12 μm 3 esin ttachment PK material is used for the pad adsorption surface. Prevents the transfer of rubber constituents. : ø to ø32 μm elated Pad yclone Pad No adsorption mark is left because the vacuum pad does not come into contact with the workpiece. Made to Order ttachment μm 2 The above adsorption marks show sample data. ctual results will depend on the conditions.

57 Series ZP2 Pad type Material of the adsorption part (Part in contact with the workpiece) Visual checking dsorption mark 1 ondition 2 (Initial value) Vapor method 3 Operating temperature range ( ) Static friction ratio 1 Mark-free N pad Mark-free N (Specially treated ) to 0 0. N + Stuck fluororesin to 0 Standard Mark-free Pad Series 2 3 Stuck fluororesin pad esin attachment yclone pad Made to Order Series ZP (Standard material) luororubber + Stuck fluororesin PK onductive PK (Volume resistivity: 1 x 10 Ωcm) N luororubber onductive N/Silicone rubber Silicone rubber Urethane rubber to to 0 Standard: to 0 (No freezing) dsorption mark characteristics [: Little or no influence : an be used depending on the conditions. : Not suitable] The above table is for reference when selecting the pad. Values and evaluation are reference data only. Preparatory testing under actual operating conditions is recommended. 1 dsorption mark 2 ondition 3 Vapor method Specially treated Static friction ratio Indicates the transfer of rubber constituents from the pad. Visual evaluation of the adsorption mark Method of applying vapor to the workpiece to visually check for adsorption marks N is specially treated to modify and reduce the transfer of rubber constituents. Static friction ratio when the workpiece (glass) is adsorbed by the pad. (N = 1 as a benchmark) When the cyclone pad is used, the pad does not come into contact with the workpiece (glass). The customer needs to install a guide for holding. leaning method [Mark-free N pad/stuck fluororesin pad/esin attachment] lways clean the product before operation and when carrying out regular maintenance. 1) Hold the part other than the adsorption surface. Non particle-generating vinyl gloves are recommended. 2) Soak a non particle-generating cloth in 2-propanol (isopropyl alcohol) (purity > 99.%). This solution is a recommendation. If not available, use a solution with high purity which does not affect the material properties. 3) Wipe the adsorption surface (pad/resin attachment) and the part that comes into contact with the workpiece. ) ry them with clean air blow. (Or, wipe again with a dry non particle-generating cloth.) 2

58 Mark-free Pad ø, ø, ø, ø10, ø1, ø2, ø32, ø0, ø0 /Type U: lat Pad which reduces the adsorption marks left on the workpiece by rubber The pad is made from markfree N, and the N is then specially treated to minimize the transfer of rubber constituents to the workpiece. pplicable for the ZP series adapter : Pad Unit Pad unit ZP2 0 ø 0 ø 0 ø 10 ø10 1 ø1 2 ø2 32 ø32 0 ø0 0 ø0 How to Order 0 UL Pad type Type U lat X19 Pad material Material L Mark-free N With/Without lock ring Nill With lock ring X19 Without lock ring Note) Note) ø10 or larger ZP2-0 to 0UL ø Lock ring ZP2-10 to 0UL ø 12 ZP2-0UL ZP2-0UL ZP2-0UL. 9 ø ø ø ZP2-10UL ZP2-1UL ZP2-2UL ZP2-32UL ZP2-0UL ZP2-0UL ø ø ø pplicable pad 0U/0U/0U ø.9 dapter Mounting If an adapter will be made by the customer, design the adapter with the dimensions shown below. pplicable pad 10U/1U pplicable pad 2U/32U pplicable pad 0U/0U ø2. ø3. ø.9 ø2. ø. ø ø. Note) part has to be smooth with no corners. efer to page for adapter applicable to the ZP series ø3. ø ø ø.9 ø. ø ø9 ø11. 2

59 Mark-free Pad ø0, ø0, ø3, ø0, ø, ø12 /Type H: Heavy-duty (lat with rib) Pad which reduces the adsorption marks left on the workpiece by rubber The pad is made from markfree N, and the N is then specially treated to minimize the transfer of rubber constituents to the workpiece. Prevents rubber constituents of the pad from transferring by baking the fluororesin sheet to the adsorption surface. Pad unit ZP2 0 ø0 0 ø0 3 ø3 0 ø0 ø 12 ø12 Pad type Type H Heavy-duty (lat with rib) How to Order 0 HL Stuck fluororesin Pad material Material L Mark-free N NT N + Stuck fluororesin T luororubber + Stuck fluororesin : Pad Unit 0 3 ZP2-0H ZP2-0H ZP2-12H 11. ø ø ø ø ø ø ø ø.. 21 ø ø10 ø ø.. 3 x x x 3 x. x x 9. ZP2-0H ZP2-0H ZP2-3H ZP2-0H ZP2-H ZP2-12H

60 esin ttachment ø, ø, ø10, ø13, ø1, ø20, ø2, ø32 No adsorption marks (rubber constituents) are left on the workpiece. voids direct contact between the workpiece and the rubber by installing a PK attachment to the bellows pad to prevent the transfer of rubber constituents. Prevents sticking of the pad (rubber) and the workpiece. Ideal for the ZP series bellows pad (ø to ø32) ZP2 0 ZP0 0 ZP0 10 ZP10 13 ZP13 1 ZP1 20 ZP20 2 ZP2 32 ZP32 0 KP How to Order ttachment material Material P PK GP onductive PK How to Order (When ordering with a pad) ellows pad When ordering with a pad, put, below the part number of the pad as shown below. Note that the pad is not delivered with the attachment assembled. This attachment can only be assembled onto SM s standard bellows pad. When the attachment is made of conductive PK, use conductive material for the pad. ttachment Ordering example ZPT0NJ10-- ZP2-0KP ellows pad part no. esin attachment part no. ø ø ø ZP2-0K ZP2-0K ZP2-10K pplicable pad ZP0 ZP0 ZP ZP2-13K ZP ZP2-1K ZP1 1 1 ZP2-20K ZP ZP2-2K ZP2 2 2 ZP2-32K ZP Note 1) in the table indicates the attachment material. Note 2) in the table indicates the pad material «Precautions» lean the product before using the attachment. This product is not cleaned after machining. If the product is used in the condition in which it is shipped, residual material may be left on the work pieces. lean before usage. If you have any questions, please contact SM. If contact with hard material is a problem, do not use this product. PK material and cut parts fall under the security trade control

61 Sponge Pad ø, ø, ø, ø10, ø1 /Type S: Sponge or adsorption of work pieces with bumps Pad unit ZP2 Pad O.. 0 ø 0 ø 0 ø 10 ø10 1 ø1 How to Order 0 S GS Pad material Material GS onductive silicone G onductive Pad type Type S Sponge : Pad Unit ZP2-0S ZP2-0S ZP2-0S ø1. ø3 ø ø ø ø ZP2-10S ZP2-1S ø ø10 ø10 ø1 dapter Mounting If an adapter will be made by the customer, design the adapter with the dimensions shown below. pplicable pad 0S pplicable pad 0S pplicable pad 0S pplicable pad 10S pplicable pad 1S ø0. 1. ø1. 1. ø2. 1. ø.1 1. ø.1 ø1. ø3.1 ø.1 ø.1 ø10.1 ø2.1 ø3.9 ø.9 ø.9 ø10.9 efer to pages 0 and 1 for adapter applicable to the ZP2 series. 30

62 Series ZP2 With adapter ZP2 Vacuum inlet direction irection T Vertical Pad O.. 0 ø 0 ø 0 ø 10 ø10 1 ø1 T 0 S GS 3 Pad type Type S Sponge How to Order Mounting 3 3 Pad material GS G Material onductive silicone onductive Thread size M3 x 0. (Male thread) (Male thread) M3 x 0. (emale thread) (emale thread) pplicable pad O.. symbol eplacement Part No. ZP2-T0S-3 ZP2-T0S- ZP2-T0S- ZP2-T10S- ZP2-T1S- ZP2-T0S-3 ZP2-T0S- ZP2-T0S- ZP2-T10S- ZP2-T1S- Pad unit part no. ZP2-0S ZP2-0S ZP2-0S ZP2-10S ZP2-1S ZP2-0S ZP2-0S ZP2-0S ZP2-10S ZP2-1S Note) in the table indicates the pad material. dapter part no. ZP2-S01P ZP2-S02P ZP2-S03P ZP2-S0P ZP2-S0P ZP2-S11 ZP2-S12 ZP2-S13 ZP2-S1 ZP2-S1 : With dapter ZP2-T0S-3 ZP2-T0S- ZP2-T0S- Width across flat M3 x 0. Width across flat Width across flat (10) (11) (11) ø0. ø1. ø2. ø1. ø ø3 ø ø ø 31

63 Sponge Pad Series ZP2 : With dapter ZP2-T10S- ZP2-T1S- Width across flat 10 Width across flat 1 (12) (12) ø2. ø ø10 ø2. ø10 ø1 Width across flat M3 x 0. Width across flat Width across flat (10.). 3. (12) (12) ø0. ø1. ø ø1. ø3 ø ø2. ø ø Width across flat 10 Width across flat 1 (10) (10) 1 1 ZP2-T0S-3 ZP2-T0S- ZP2-T0S ZP2-T10S- ZP2-T1S- ø.1 ø ø10 ø.1 ø10 ø1 32

64 Heavy-duty Pad ø32, ø10, ø20, ø300, ø30 /Type H: Heavy-duty (lat with rib) HT: Heavy-duty (Thin flat with rib) einforced pad to prevent deformation when transferring heavy or large work pieces Pad unit ZP2 How to Order 32 HN 32 ø32 10 ø10 20 ø ø ø30 Pad material Material N N S Silicone rubber KM Note) Silicone rubber is only applicable to the ø32 pad. : Pad Unit Pad type () Pad type H (lat with rib) HT (Thin flat with rib) ZP2-32H ø2 2. ø ø ø3 1 3 x 3 3 x ZP2-300H ZP2-30H ø20 x M x 1.2 ø10 ø ø2 19 ø2 ø29 ø30 ø301 ø3 x 9 x 1 x 9 x 1 33

65 Heavy-duty Pad Series ZP2 ZP2-10HT ZP2-20HT ø ø10 x M x 1.2 ø ø20 1 ø ø10 ø20 ø1 0 x 9 x 1 x 10 x 1 3

66 Heavy-duty Pad ø32, ø10 /Type H: Heavy-duty (ellows) or heavy or large work pieces How to Order Pad unit ZP2 32 ø32 10 ø10 32 H N Pad material Material N N S Silicone rubber KM Note) Silicone rubber is only applicable to the ø32 pad. Pad type Type H Heavy-duty (ellows) : Pad Unit ZP2-32H ZP2-10H ø109 x ø1 ø2 x ø9 3 x ø 3 x ø ø ø1 ø22 ø32 ø33 ø3 ø12 ø0 ø10 ø10 ø12 ø1 3

67 Heavy-duty Pad Pad size 30 x 0 /Type HW: Heavy-duty (Oval) or heavy or large work pieces How to Order Pad unit ZP2 300 Pad size Pad size 30 x HW N Pad material Material N N S Silicone rubber KM Pad type Type HW Heavy-duty (Oval) : Pad Unit ZP2-300HW ø ø 1 3 x x 0 3 3

68 Heavy-duty all Joint Pad ø0, ø0, ø3, ø0, ø, ø12 /Type H: Heavy-duty (lat with rib) or adsorption of work pieces with inclined surface eplacement Part No. Pad unit part no. dapter assembly part no. ZP2-T0H ZP0H With three ZP2-T1 ZP2-T0H ZP0H M3 bolts ZP2-T3H ZP3H With four ZP2-T2 ZP2-T0H ZP0H M bolts ZP2-TH ZPH With four ZP2-T3 ZP2-T12H ZP12H M bolts Note) in the table indicates the pad material. : With dapter With adapter ZP2 Vacuum inlet direction irection T Vertical Specification (mechanism) Specification all joint 0 ø0 0 ø0 3 ø3 0 ø0 H ø 12 ø12 How to Order T 0H N Pad type Type Heavy-duty (lat with rib) Vacuum inlet direction Vertical Pad material () Material N N S Silicone rubber U Urethane rubber KM P 0 ZP2-T 0H Width across flat 19 Width across flat 19 M1 x 1 c1/ (9) ø ø2 ø1 ø ø 3 3 x M3 x 10 ZP2-T0H ZP2-T0H ZP2-T 0H ZP2-T 12H Width across flat 22 Width across flat 22 M1 x 1. c1/ Width across flat 22 Width across flat 22 M1 x 1. c1/ 9. () ø0 X (1.) ø ø ø3 ø ø x M x ø ø0 ø ø. x M x 12 ZP2-T3H ZP2-T0H X ZP2-TH ZP2-T12H

69 Heavy-duty all Joint Pad Series ZP2 With adapter ZP2 M1 x 1 Width across flat 19 X 0 Vacuum inlet direction irection X Lateral Specification (mechanism) Specification all joint ø0 ø0 ø3 ø0 ø ø12 : With dapter 0 ZP2-X 0 H H N How to Order Pad material () N S U Pad type H Material N Silicone rubber Urethane rubber KM P Type Heavy-duty (lat with rib) eplacement Part No. ZP2-X0H ZP2-X0H ZP2-X3H ZP2-X0H ZP2-XH ZP2-X12H Vacuum inlet direction Lateral Pad unit part no. ZP0H ZP0H ZP3H ZP0H ZPH ZP12H Note) in the table indicates the pad material. dapter assembly part no. ZP2-X1 With three M3 bolts ZP2-X2 With four M bolts ZP2-X3 With four M bolts 9. (1) ø ø2 ø1 ø ø 3 3 x M3 x 10 ZP2-X0H ZP2-X0H ZP2-X 0 H ZP2-X 12H M1 x 1. Width across flat 22 M1 x 1. Width across flat () c1/ ø0 X (102.) ø0 c1/ x M x ø ø3 ø ø x M x ø ø0 ø ø. ZP2-X3H ZP2-X0H X ZP2-XH ZP2-X12H

70 Series ZP2 How to Order With buffer ZP2 T 0H N J 2 Vacuum inlet direction irection T Vertical Specification (mechanism) Specification all joint uffer stroke () pplicable Stroke pad 2 0 ZP0H ZP0H ZP3H ZP0H ZPH ZP12H ø0 ø0 ø3 ø0 ø ø12 uffer specification J J Specification otating With bushing Material: rass otating With bushing Material: Steel Vacuum inlet direction Vertical H Pad type Type Heavy-duty (lat with rib) Pad material () N S U Material N Silicone rubber Urethane rubber KM P eplacement Part No. Pad unit part no. ZP2-T0H(J/J)2 ZP2-T0H(J/J)0 ZP0H ZP2-T0H(J/J) ZP2-T0H(J/J)2 ZP2-T0H(J/J)0 ZP0H ZP2-T0H(J/J) ZP2-T3H(J/J)2 ZP2-T3H(J/J)0 ZP3H ZP2-T3H(J/J) ZP2-T3H(J/J) ZP2-T0H(J/J)2 ZP2-T0H(J/J)0 ZP0H ZP2-T0H(J/J) ZP2-T0H(J/J) ZP2-TH(J/J)2 ZP2-TH(J/J)0 ZPH ZP2-TH(J/J) ZP2-TH(J/J) ZP2-T12H(J/J)2 ZP2-T12H(J/J)0 ZP12H ZP2-T12H(J/J) ZP2-T12H(J/J) Note) in the table indicates the pad material. uffer assembly part no. ZP2-T1(J/J)2 ZP2-T1(J/J)0 ZP2-T1(J/J) ZP2-T1(J/J)2 ZP2-T1(J/J)0 ZP2-T1(J/J) ZP2-T2(J/J)2 ZP2-T2(J/J)0 ZP2-T2(J/J) ZP2-T2(J/J) ZP2-T2(J/J)2 ZP2-T2(J/J)0 ZP2-T2(J/J) ZP2-T2(J/J) ZP2-T3(J/J)2 ZP2-T3(J/J)0 ZP2-T3(J/J) ZP2-T3(J/J) ZP2-T3(J/J)2 ZP2-T3(J/J)0 ZP2-T3(J/J) ZP2-T3(J/J) With three M3 bolts With four M bolts With four M bolts uffer Specifications Stroke (mm) Spring reactive force uffer specifications t 0 stroke (N) t buffer stroke (N) J J ø0, ø0 ø3, ø0, ø, ø12 2, 0, 2, 0,, otating With bushing uffer body material: rass Tightening torque: 30 N m ±% Tightening torque: N m ±% Tightening torque: 0 N m ±% otating With bushing uffer body material: Steel Tightening torque: 0 N m ±% 39

71 Heavy-duty all Joint Pad Series ZP2 : With uffer 0 ZP2-T H J 0 J Width across flat 1 c1/ () Width across flat M1 x 1. Width across flat 13 ushing ø30 30 ø2 ø1 ø ø x M3 x 10 ZP2-T0H(J/J)2 ZP2-T0H(J/J)0 ZP2-T0H(J/J) ZP2-T0H(J/J)2 ZP2-T0H(J/J)0 ZP2-T0H(J/J) ZP2-T H J 0 J ZP2-T 12H J J Width across flat 1 Width across flat 1 c1/ c1/ Width across flat 30 ushing 0 Width across flat 30 ushing () M22 x 1. Width across flat 1 () M22 x 1. Width across flat ø0 X ø0 x M x ø ø3 ø ø x M x ø ø0 ø ø. ZP2-T3H(J/J)2 ZP2-T3H(J/J)0 ZP2-T3H(J/J) ZP2-T3H(J/J) ZP2-T0H(J/J)2 ZP2-T0H(J/J)0 ZP2-T0H(J/J) ZP2-T0H(J/J) X ZP2-TH(J/J)2 ZP2-TH(J/J)0 ZP2-TH(J/J) ZP2-TH(J/J) ZP2-T12H(J/J)2 ZP2-T12H(J/J)0 ZP2-T12H(J/J) ZP2-T12H(J/J)

72 Series ZP2 With buffer ZP2 X Vacuum inlet direction irection X Lateral Specification (mechanism) Specification all joint H N J 2 ø0 ø0 ø3 ø0 ø ø12 Pad type Type H Heavy-duty (lat with rib) How to Order uffer stroke () Stroke 2 0 pplicable pad uffer specification J J Pad material () N S U Material N Silicone rubber Urethane rubber KM P Specification otating With bushing Material: rass otating With bushing Material: Steel ZP0H ZP0H ZP3H ZP0H ZPH ZP12H Vacuum inlet direction Lateral eplacement Part No. Pad unit part no. ZP2-X0H(J/J)2 ZP2-X0H(J/J)0 ZP0H ZP2-X0H(J/J) ZP2-X0H(J/J)2 ZP2-X0H(J/J)0 ZP0H ZP2-X0H(J/J) ZP2-X3H(J/J)2 ZP2-X3H(J/J)0 ZP2-X3H(J/J) ZP3H ZP2-X3H(J/J) ZP2-X0H(J/J)2 ZP2-X0H(J/J)0 ZP2-X0H(J/J) ZP0H ZP2-X0H(J/J) ZP2-XH(J/J)2 ZP2-XH(J/J)0 ZP2-XH(J/J) ZPH ZP2-XH(J/J) ZP2-X12H(J/J)2 ZP2-X12H(J/J)0 ZP2-X12H(J/J) ZP12H ZP2-X12H(J/J) Note) in the table indicates the pad material. uffer assembly part no. ZP2-X1(J/J)2 ZP2-X1(J/J)0 ZP2-X1(J/J) ZP2-X1(J/J)2 ZP2-X1(J/J)0 ZP2-X1(J/J) ZP2-X2(J/J)2 ZP2-X2(J/J)0 ZP2-X2(J/J) ZP2-X2(J/J) ZP2-X2(J/J)2 ZP2-X2(J/J)0 ZP2-X2(J/J) ZP2-X2(J/J) ZP2-X3(J/J)2 ZP2-X3(J/J)0 ZP2-X3(J/J) ZP2-X3(J/J) ZP2-X3(J/J)2 ZP2-X3(J/J)0 ZP2-X3(J/J) ZP2-X3(J/J) With three M3 bolts With four M bolts With four M bolts uffer Specifications Stroke (mm) Spring reactive force uffer specifications t 0 stroke (N) t buffer stroke (N) J J ø0, ø0 ø3, ø0, ø, ø12 2, 0, 2, 0,, Tightening torque: 30 N m ±% Tightening torque: 0 N m ±% otating With bushing uffer body material: rass otating With bushing uffer body material: Steel Tightening torque: N m ±% Tightening torque: N m ±% 1

73 Heavy-duty all Joint Pad Series ZP2 : With uffer 0 ZP2-X H J 0 J Width across flat 1 () Width across flat M1 x 1. Width across flat ø30 ø2 30 ø1 ø ø 3 1. ushing 3 x M3 x 10 ZP2-X0H(J/J)2 ZP2-X0H(J/J)0 ZP2-X0H(J/J) ZP2-X0H(J/J)2 ZP2-X0H(J/J)0 ZP2-X0H(J/J) ZP2-X H J 0 J ZP2-X 12H J J Width across flat 1 Width across flat Width across flat 30 M22 x 1. ushing 0 21 Width across flat 30 M22 x 1. ushing () Width across flat 22 c1/ () c1/ ø0 x M x 10 X. 21 Width across flat ø0 x M x ZP2-X3H(J/J)2 ZP2-X3H(J/J)0 ZP2-X3H(J/J) ZP2-X3H(J/J) ZP2-X0H(J/J)2 ZP2-X0H(J/J)0 ZP2-X0H(J/J) ZP2-X0H(J/J) 30 ø ø3 ø ø X ZP2-XH(J/J)2 ZP2-XH(J/J)0 ZP2-XH(J/J) ZP2-XH(J/J) ZP2-X12H(J/J)2 ZP2-X12H(J/J)0 ZP2-X12H(J/J) ZP2-X12H(J/J) 30 ø ø0 ø ø

74 Heavy-duty all Joint Pad ø0, ø0, ø3, ø0, ø, ø12 /Type H: Heavy-duty (ellows) or adsorption of work pieces with inclined or curved surface Width across flat 19 Width across flat 19 M1 x 1 c1/ ZP2 Vacuum inlet direction irection T Vertical Specification (mechanism) eplacement Part No. Specification Pad unit part no. dapter assembly part no. all joint ZP2-T0H ZP0H With three ZP2-T1 ZP2-T0H ZP0H M3 bolts ZP2-T3H ZP3H With four 0 ø0 ZP2-T2 ZP2-T0H ZP0H M bolts 0 ø0 ZP2-TH ZPH With four 3 ø3 ZP2-T3 H ZP2-T12H ZP12H M bolts 0 ø0 Note) in the table indicates the pad material. ø 12 ø12 : With dapter 0 ZP2-T 0H With adapter How to Order T 0H N Pad type Type Heavy-duty (ellows) Vacuum inlet direction Vertical Pad material () Material N N S Silicone rubber U Urethane rubber KM P (G) ø30 3 ZP2-T H 1. Width across flat 22 Width across flat ø0 30 ø2 ø1 ø ø ø ø c1/ X M1 x 1. 3 x M3 x 10 0 ZP2-T H (G) ZP2-T0H ZP2-T0H Width across flat 22 Width across flat 22 (G) G 1. ø0 X X M1 x 1. c1/ x M x 12 X ZP2-T3H ZP2-T0H ø ø3 ø ø ø ø G X 0..1 x M x ZP2-TH ZP2-T12H ø ø0 ø ø ø ø G X..1 3.

75 Heavy-duty all Joint Pad Series ZP2 With adapter ZP2 M1 x 1 Width across flat 19 X 0 Vacuum inlet direction irection X Lateral Specification (mechanism) Specification all joint ø0 ø0 ø3 ø0 ø ø12 : With dapter 0 ZP2-X 0 H H N How to Order Pad material () N S U Pad type H Material N Silicone rubber Urethane rubber KM P Type Heavy-duty (ellows) Vacuum inlet direction Lateral eplacement Part No. Pad unit part no. dapter assembly part no. ZP2-X0H ZP0H With three ZP2-X1 ZP2-X0H ZP0H M3 bolts ZP2-X3H ZP3H With four ZP2-X2 ZP2-X0H ZP0H M bolts ZP2-XH ZPH With four ZP2-X3 ZP2-X12H ZP12H M bolts Note) in the table indicates the pad material. (G) ø30 1. X M1 x 1. Width across flat ø2 ø1 ø ø ø ø 3 x M3 x 10 ZP2-X0H ZP2-X0H 3 ZP2-X 0 H ZP2-X 12H M1 x 1. Width across flat 22 2 G 0 3. X Width across flat 22 (G) 0. Width across flat c1/ ø0 (G) X ø0 c1/ x M x 12 X ZP2-X3H ZP2-X0H ø ø3 ø ø ø ø G x M x 10 X ZP2-XH ZP2-X12H ø ø0 ø ø ø ø G X..1 3.

76 Series ZP2 How to Order With buffer ZP2 T Vacuum inlet direction irection T Vertical Specification (mechanism) Specification all joint H H N J 2 ø0 ø0 ø3 ø0 ø ø12 Pad type Type Heavy-duty (ellows) uffer stroke () Stroke 2 0 pplicable pad uffer specification J J Pad material () N S U Material N Silicone rubber Urethane rubber KM P Specification otating With bushing Material: rass otating With bushing Material: Steel ZP0H ZP0H ZP3H ZP0H ZPH ZP12H Vacuum inlet direction Vertical eplacement Part No. Pad unit part no. ZP2-T0H(J/J)2 ZP2-T0H(J/J)0 ZP0H ZP2-T0H(J/J) ZP2-T0H(J/J)2 ZP2-T0H(J/J)0 ZP0H ZP2-T0H(J/J) ZP2-T3H(J/J)2 ZP2-T3H(J/J)0 ZP2-T3H(J/J) ZP3H ZP2-T3H(J/J) ZP2-T0H(J/J)2 ZP2-T0H(J/J)0 ZP2-T0H(J/J) ZP0H ZP2-T0H(J/J) ZP2-TH(J/J)2 ZP2-TH(J/J)0 ZP2-TH(J/J) ZPH ZP2-TH(J/J) ZP2-T12H(J/J)2 ZP2-T12H(J/J)0 ZP12H ZP2-T12H(J/J) ZP2-T12H(J/J) Note) in the table indicates the pad material. uffer assembly part no. ZP2-T1(J/J)2 ZP2-T1(J/J)0 ZP2-T1(J/J) ZP2-T1(J/J)2 ZP2-T1(J/J)0 ZP2-T1(J/J) ZP2-T2(J/J)2 ZP2-T2(J/J)0 ZP2-T2(J/J) ZP2-T2(J/J) ZP2-T2(J/J)2 ZP2-T2(J/J)0 ZP2-T2(J/J) ZP2-T2(J/J) ZP2-T3(J/J)2 ZP2-T3(J/J)0 ZP2-T3(J/J) ZP2-T3(J/J) ZP2-T3(J/J)2 ZP2-T3(J/J)0 ZP2-T3(J/J) ZP2-T3(J/J) With three M3 bolts With four M bolts With four M bolts uffer Specifications Stroke (mm) Spring reactive force uffer specifications t 0 stroke (N) t buffer stroke (N) J J ø0, ø0 ø3, ø0, ø, ø12 2, 0, 2, 0,, otating With bushing uffer body material: rass Tightening torque: 30 N m ±% Tightening torque: N m ±% otating With bushing uffer body material: Steel Tightening torque: 0 N m ±% Tightening torque: N m ±%

77 Heavy-duty all Joint Pad Series ZP2 : With uffer 0 ZP2-T H J 0 J Width across flat 1 c1/ (H) G Width across flat M1 x 1. Width across flat 13 ushing ø30 1. X 30 ø2 ø1 ø ø ø ø 3 x M3 x 10 ZP2-T0H(J/J)2 ZP2-T0H(J/J)0 ZP2-T0H(J/J) ZP2-T0H(J/J)2 ZP2-T0H(J/J)0 ZP2-T0H(J/J) G H X ZP2-T H J 0 J ZP2-T H Width across flat Width across flat 30 c1/ ushing 12 J J Width across flat Width across flat 30 M22 x 1. c1/ ushing (H) G M22 x 1. Width across flat 1 (H) G Width across flat ø0 x M x ø0 x M x 12 X X ZP2-T3H(J/J)2 ZP2-T3H(J/J)0 ZP2-T3H(J/J) ZP2-T3H(J/J) ZP2-T0H(J/J)2 ZP2-T0H(J/J)0 ZP2-T0H(J/J) ZP2-T0H(J/J) ø ø3 ø ø ø ø G H X ZP2-TH(J/J)2 ZP2-TH(J/J)0 ZP2-TH(J/J) ZP2-TH(J/J) ZP2-T12H(J/J)2 ZP2-T12H(J/J)0 ZP2-T12H(J/J) ZP2-T12H(J/J) ø ø0 ø ø ø ø G H X..1 3.

78 Series ZP2 How to Order With buffer ZP2 X Vacuum inlet direction irection T Lateral Specification (mechanism) Specification all joint H H N J 2 ø0 ø0 ø3 ø0 ø ø12 Pad type Type Heavy-duty (ellows) uffer stroke () Stroke 2 0 pplicable pad uffer specification J J Pad material () N S U Material N Silicone rubber Urethane rubber KM P Specification otating With bushing Material: rass otating With bushing Material: Steel ZP0H ZP0H ZP3H ZP0H ZPH ZP12H Vacuum inlet direction Lateral eplacement Part No. Pad unit part no. ZP2-X0H(J/J)2 ZP2-X0H(J/J)0 ZP0H ZP2-X0H(J/J) ZP2-X0H(J/J)2 ZP2-X0H(J/J)0 ZP0H ZP2-X0H(J/J) ZP2-X3H(J/J)2 ZP2-X3H(J/J)0 ZP2-X3H(J/J) ZP3H ZP2-X3H(J/J) ZP2-X0H(J/J)2 ZP2-X0H(J/J)0 ZP2-X0H(J/J) ZP0H ZP2-X0H(J/J) ZP2-XH(J/J)2 ZP2-XH(J/J)0 ZP2-XH(J/J) ZPH ZP2-XH(J/J) ZP2-X12H(J/J)2 ZP2-X12H(J/J)0 ZP12H ZP2-X12H(J/J) ZP2-X12H(J/J) Note) in the table indicates the pad material. uffer assembly part no. ZP2-X1(J/J)2 ZP2-X1(J/J)0 ZP2-X1(J/J) ZP2-X1(J/J)2 ZP2-X1(J/J)0 ZP2-X1(J/J) ZP2-X2(J/J)2 ZP2-X2(J/J)0 ZP2-X2(J/J) ZP2-X2(J/J) ZP2-X2(J/J)2 ZP2-X2(J/J)0 ZP2-X2(J/J) ZP2-X2(J/J) ZP2-X3(J/J)2 ZP2-X3(J/J)0 ZP2-X3(J/J) ZP2-X3(J/J) ZP2-X3(J/J)2 ZP2-X3(J/J)0 ZP2-X3(J/J) ZP2-X3(J/J) With three M3 bolts With four M bolts With four M bolts uffer Specifications Stroke (mm) Spring reactive force uffer specifications t 0 stroke (N) t buffer stroke (N) J J ø0, ø0 ø3, ø0, ø, ø12 2, 0, 2, 0,, Tightening torque: 30 N m ±% Tightening torque: 0 N m ±% otating With bushing uffer body material: rass otating With bushing uffer body material: Steel Tightening torque: N m ±% Tightening torque: N m ±%

79 Heavy-duty all Joint Pad Series ZP2 : With uffer 0 ZP2-X H J 0 J Width across flat 1 (H) 0. G 3 1 Width across flat M1 x 1. Width across flat ø30 ushing 1. X 30 ø2 ø1 ø ø ø ø 3 x M3 x 10 ZP2-X0H(J/J)2 ZP2-X0H(J/J)0 ZP2-X0H(J/J) ZP2-X0H(J/J)2 ZP2-X0H(J/J)0 ZP2-X0H(J/J) G H X ZP2-X H J 0 J ZP2-X H (H) Width across flat G. Width across flat 30 M22 x 1. Width across flat 22 c1/ ø0 ushing x M x 10 X (H) 12 J J Width across flat 1 Width across flat 30 G c1/ Width across flat M22 x 1. ø0 ushing x M x 12 X 30 ø ø3 ø ø ø ø 30 ø ø0 ø ø ø ø ZP2-X3H(J/J)2 ZP2-X3H(J/J)0 ZP2-X3H(J/J) ZP2-X3H(J/J) ZP2-X0H(J/J)2 ZP2-X0H(J/J)0 ZP2-X0H(J/J) ZP2-X0H(J/J) G H X ZP2-XH(J/J)2 ZP2-XH(J/J)0 ZP2-XH(J/J) ZP2-XH(J/J) ZP2-X12H(J/J)2 ZP2-X12H(J/J)0 ZP2-X12H(J/J) ZP2-X12H(J/J) G H X..1 3.

80 Heavy-duty Pad ø0, ø0, ø3, ø0, ø, ø12 /Type H: Heavy-duty (lat with rib) H: Heavy-duty (ellows) einforced pad prevents deformation when transferring heavy or large work pieces. : Pad Unit Pad unit ZP0 HN 0 ø0 0 ø0 3 ø3 0 ø0 ø 12 ø12 How to Order Pad material Material N N S Silicone rubber U Urethane rubber KM P Pad type Type H Heavy-duty (lat with rib) H Heavy-duty (ellows) ZP 0H ZP H ZP H ø ø ø ø ø ø ø ø.. 21 ø10 12 ø ø ø.. 3 x x x 1 3 x. x 3 0 x 9. ZP0H 0 ZP0H ZP3H 3 ZP0H ZPH ZP12H ZP 0H ZP H ZP H ø 3 x ø 3 x ø. 0 ø x ø x ø 12 ø x ø9. x ø 3. G ZP0H ZP0H ø 1 2 ø1 ø ø ø ø ZP3H ZP0H ø ø3 ø ø ø ø G ZPH ZP12H 12 ø ø0 ø ø ø ø

81 Heavy-duty Pad Series ZP With adapter H H ø0 ø0 ø3 ø0 ø ø12 Pad material () N S U ZPT0 H N Type Heavy-duty (lat with rib) Heavy-duty (ellows) Material N Silicone rubber Urethane rubber KM P Pad type ( ) : With dapter 1 ZPT0-1 ZPT0-1N ZPT0-1T ZPT0-1N ZPT0-1T ZPT3-1N ZPT3-1T ZPT0-1N ZPT0-1T ZPT -1N ZPT -1T ZPT12-1N ZPT12-1T How to Order Mounting thread size (Vacuum inlet) Mounting eplacement Part No. Male thread 1 1N 1T 1 1N 1T ZPT 0 H-1 (Male thread) ZPT 0 H-1 (Male thread) ZPT 12H-1 (Male thread) M1 x 1 M1 x 1. emale thread Pad unit part no. dapter assembly part no. ZP-T1-01 ZP0 ZP-T1-N01 ZP-T1-T01 With three ZP-T1-01 M3 bolts ZP0 ZP-T1-N01 ZP-T1-T01 ZP-T2-01 ZP3 ZP-T2-N01 ZP-T2-T01 With four ZP-T2-01 M bolts ZP0 ZP-T2-N01 ZP-T2-T01 ZP-T3-01 ZP ZP-T3-N01 ZP-T3-T01 With four ZP-T3-01 M bolts ZP12 ZP-T3-N01 ZP-T3-T01 Vacuum inlet direction Vertical Thread size c1/ NPT1/ NPT1/ c1/ NPT1/ NPT1/ M x 1.2 M10 x 1. M12 x 1. M1 x 1. ø0, ø0 ø3, ø0 ø, ø12 Pad unit part no. dapter assembly part no. ZPT0 - ZP-T1- ZP0 ZPT0-10 ZP-T1-10 With three ZPT0 - ZP-T1- M3 bolts ZP0 ZPT0-10 ZP-T1-10 ZPT3 - ZP-T2- ZPT3-10 ZP-T2-10 ZPT3-12 ZP3 ZP-T2-12 ZPT3-1 ZP-T2-1 With four ZPT0 - ZP-T2- M bolts ZPT0-10 ZP-T2-10 ZPT0-12 ZP0 ZP-T2-12 ZPT0-1 ZP-T2-1 ZPT -12 ZP-T3-12 ZP ZPT -1 ZP-T3-1 With four ZPT12-12 ZP-T3-12 M bolts ZP12 ZPT12-1 ZP-T3-1 Note 1) in the table indicates the pad type. Note 2) in the table indicates the pad material. Width across flat 19 1/ (c, NPT, NPT) Width across flat 22 1/ (c, NPT, NPT) Width across flat 22 1/ (c, NPT, NPT) Width across flat 19 ø2 ø x M x ø0 x M x 10 3 x M3 x Width across flat 2 Width across flat 2 ø3 ø ø ø ø ø ø ø ø ZPT0H-1 ZPT0H ZPT3H-1 ZPT0H ZPTH-1 ZPT12H

82 Series ZP : With dapter 0 ZPT 0 H-1 (Male thread) 3 ZPT 0 H-1 (Male thread) ZPT 12H-1 (Male thread) M1 x 1. Width across flat 19 G 2 M1 x 1 ø2 1/ (c, NPT, NPT) Width across flat 19 3 x M3 x Width across flat 22 G M1 x / (c, NPT, NPT) Width across flat 2 ø x M x G Width across flat / (c, NPT, NPT) Width across flat 2 ø0 x M x 10 ø3 ø1 ø ø ø ø ø ø3 ø ø ø ø ø ø0 ø ø ø ø ZPT0H-1 ZPT0H ZPT3H-1 ZPT0H ZPTH-1 ZPT12H ZPT0H-1 ZPT0H G ZPT3H-1 ZPT0H G ZPTH-1 ZPT12H G ZPT 0 H- (emale thread) ZPT 0 H- (emale thread) Width across flat 2 ø2 3 x M3 x Width across flat 3 x M x 10 ø ø ø ø ø 1 3 ZPT0H- ZPT0H-10 ZPT0H- ZPT0H M x 1.2 M10 x 1. M x 1.2 M10 x 1. ZPT3H- ZPT3H-10 ZPT3H-12 ZPT3H-1 ZPT0H- ZPT0H-10 ZPT0H-12 ZPT0H M x 1.2 M10 x 1. M12 x 1. M1 x 1. M x 1.2 M10 x 1. M12 x 1. M1 x

83 Heavy-duty Pad Series ZP : With dapter ZPT 0 12H- (emale thread) ZPT 0 H- (emale thread) Width across flat 0 ø0 x M x 10 Width across flat 2 ø2 G 3 x M3 x ø10 ø ø ø ø1 ø ø ø ø ø0 Width across flat 0 G x M x 10 Width across flat 3 ø G x M x ZPTH-12 ZPTH-1 ZPT12H-12 ZPT12H M12 x 1. M1 x 1. M12 x 1. M1 x 1. ZPT0H- ZPT0H-10 ZPT0H- ZPT0H G M x 1.2 M10 x M x 1.2 M10 x ZPT 0 H- (emale thread) ZPT 12H- (emale thread) ø ø3 ø ø ø ø ø10 ø0 ø ø ø ø ZPT3H- ZPT3H-10 ZPT3H-12 ZPT3H-1 ZPT0H- ZPT0H-10 ZPT0H-12 ZPT0H G M x 1.2 M10 x 1. M12 x 1. M1 x 1. M x 1.2 M10 x 1. M12 x 1. M1 x ZPTH-12 ZPTH-1 ZPT12H-12 ZPT12H-1 12 G M12 x 1. M1 x M12 x 1. M1 x 1. 2

84 Series ZP Without buffer ø0 ø0 ø3 ø0 ø ø12 Pad material () N S U ZPX 0 H N : Without uffer H H Material N Silicone rubber Urethane rubber KM P Pad type ( ) Type Heavy-duty (lat with rib) Heavy-duty (ellows) 01 Vacuum inlet thread size 01 N01 T01 eplacement Part No. Thread size c1/ NPT1/ NPT1/ How to Order Mounting thread size Thread size M x 1.2 M10 x 1. M12 x 1. Pad unit part no. dapter assembly part no. ZPX0-01- ZP-X1-01- ZPX0 -N01- ZP-X1-N01- ZPX0 -T01- ZP-X1-T01- With three ZP0 ZPX ZP-X M3 bolts ZPX0 -N01-10 ZP-X1-N01-10 ZPX0 -T01-10 ZP-X1-T01-10 ZPX0-01- ZP-X1-01- ZPX0 -N01- ZP-X1-N01- ZPX0 -T01- ZP-X1-T01- With three ZP0 ZPX ZP-X M3 bolts ZPX0 -N01-10 ZP-X1-N01-10 ZPX0 -T01-10 ZP-X1-T01-10 ZPX ZP-X ZPX3 -N01-10 ZP-X2-N01-10 ZPX3 -T01-10 ZP-X2-T01-10 With four ZP3 ZPX ZP-X M bolts ZPX3 -N01-12 ZP-X2-N01-12 ZPX3 -T01-12 ZP-X2-T01-12 Note 1) in the table indicates the pad type. Note 2) in the table indicates the pad material. ø0, ø0 ø3, ø0 ø, ø12 ZPX ZPX0 -N01-10 ZPX0 -T01-10 ZPX ZPX0 -N01-12 ZPX0 -T01-12 ZPX ZPX -N01-10 ZPX -T01-10 ZPX ZPX -N01-12 ZPX -T01-12 ZPX ZPX12 -N01-10 ZPX12 -T01-10 ZPX ZPX12 -N01-12 ZPX12 -T01-12 Vacuum inlet direction Lateral Pad unit part no. dapter assembly part no. ZP-X ZP-X2-N01-10 ZP-X2-T01-10 With four ZP0 ZP-X M bolts ZP-X2-N01-12 ZP-X2-T01-12 ZP-X ZP-X3-N01-10 ZP-X3-T01-10 With four ZP ZP-X M bolts ZP-X3-N01-12 ZP-X3-T01-12 ZP-X ZP-X3-N01-10 ZP-X3-T01-10 With four ZP12 ZP-X M bolts ZP-X3-N01-12 ZP-X3-T ZPX H ZPX H ZPX H / (c, NPT, NPT) 1/ (c, NPT, NPT) G Width across flat 21 Width across flat 21 1/ (c, NPT, NPT) 3 x M3 x ø x M x Width across flat 21 ø0 x M x 10 ø ø ø ø ø ø ø ø G ZPX0H M x 1.2 ZPX3H M10 x 1. ZPXH ZPX0H M10 x 1. ZPX3H M12 x 1. ZPXH ZPX0H M x 1.2 ZPX0H M10 x 1. ZPX12H ZPX0H M10 x 1. ZPX0H M12 x 1. ZPX12H M10 x 1. M12 x 1. M10 x 1. M12 x 1.

85 Heavy-duty Pad Series ZP : Without uffer 0 3 ZPX H ZPX H ZPX H / (c, NPT, NPT) I 1/ (c, NPT, NPT) Width across flat 21 I 11 1/ (c, NPT, NPT) Width across flat 21 I 11 ø Width across flat x M x 10 ø0 H ø2 3 x M3 x H x M x G H G G ø3 ø1 ø ø ø ø ø ø3 ø ø ø ø ø ø0 ø ø ø ø ZPX0H ZPX0H ZPX0H ZPX0H ZPX3H ZPX3H ZPX0H ZPX0H ZPXH ZPXH ZPX12H ZPX12H ZPX0H ZPX0H ZPX0H ZPX0H G 0. H 9 2. I M x 1.2 M10 x 1. M x 1.2 M10 x ZPX3H ZPX3H ZPX0H ZPX0H G 3. H 0. I M10 x 1. M12 x 1. M10 x 1. M12 x ZPXH ZPXH ZPX12H ZPX12H G. H I M10 x 1. M12 x 1. M10 x 1. M12 x 1. 3.

86 Series ZP How to Order With buffer ZPT ø0 ø0 ø3 ø0 ø ø12 Pad material () N S U Material N Silicone rubber Urethane rubber KM P Stroke 2 0 Pad type ( ) Type Heavy-duty H (lat with rib) Heavy-duty H (ellows) ø0 J J J ø0 0 HNJ uffer body material ( ) Material luminum alloy rass + With bushing Steel + With bushing 2 uffer stroke () ø3 ø0 ø ø12 uffer Specifications (otating) Stroke (mm) Spring t 0 stroke (N) reactive force t buffer stroke (N) : With uffer ø0 to ø0 ø, ø12 2, 0, 2, 0,, Vacuum inlet thread size 01 N01 T01 Thread size c1/ NPT1/ NPT1/ Mounting thread size 1 22 eplacement Part No. Thread size M1 x 1. (ø0 to ø0) M22 x 1. (ø, ø12) Tightening Torque ZPT0 2-(/N/T)01-1 ZPT0 0-(/N/T)01-1 ZP0 ZPT0 -(/N/T)01-1 ZPT0 2-(/N/T)01-1 ZPT0 0-(/N/T)01-1 ZP0 ZPT0 -(/N/T)01-1 ZPT3 2-(/N/T)01-1 ZPT3 0-(/N/T)01-1 ZP3 ZPT3 -(/N/T)01-1 ZPT0 2-(/N/T)01-1 ZPT0 0-(/N/T)01-1 ZP0 ZPT0 -(/N/T)01-1 ZPT 2-(/N/T)01-22 ZPT 0-(/N/T)01-22 ZP ZPT -(/N/T)01-22 ZPT -(/N/T)01-22 ZPT12 2-(/N/T)01-22 ZPT12 0-(/N/T)01-22 ZP12 ZPT12 -(/N/T)01-22 ZPT12 -(/N/T)01-22 Note 1) in the table indicates the pad type. uffer body luminum rass Mounting material alloy + thread size With bushing M1 x M22 x ontrol value shall be ±% of the tightening torque. Steel + With bushing Pad unit part no. uffer assembly part no. ZP-T1 2-(/N/T)01 ZP-T1 0-(/N/T)01 ZP-T1 -(/N/T)01 ZP-T1 2-(/N/T)01 ZP-T1 0-(/N/T)01 ZP-T1 -(/N/T)01 ZP-T2 2-(/N/T)01 ZP-T2 0-(/N/T)01 ZP-T2 -(/N/T)01 ZP-T2 2-(/N/T)01 ZP-T2 0-(/N/T)01 ZP-T2 -(/N/T)01 ZP-T3 2-(/N/T)01 ZP-T3 0-(/N/T)01 ZP-T3 -(/N/T)01 ZP-T3 -(/N/T)01 ZP-T3 2-(/N/T)01 ZP-T3 0-(/N/T)01 ZP-T3 -(/N/T)01 ZP-T3 -(/N/T)01 Note 2) in the table indicates the pad material. Note 3) in the table indicates the buffer body material. Vacuum inlet direction Vertical 0 (N m) With three M3 bolts With four M bolts With four M bolts 3 ZPT H - -1 ZPT H ZPT H Width across flat 1 1/ (c, NPT, NPT) 20. Width across flat Width across flat 1 Width across flat 2 1/ (c, NPT, NPT) 2 Width across flat 1 Width across flat 30 1/ (c, NPT, NPT) 3 x M3 x x M x x M x 10 () () () ø ø ø ø ø ø ZPT0H ZPT3H ZPTH ZPT0H ZPT3H ZPTH ZPT0H ZPT3H ZPTH ZPT0H ZPT0H ZPTH ZPT0H ZPT0H ZPT12H ZPT0H ZPT0H ZPT12H ZPT12H ZPT12H

87 Heavy-duty Pad Series ZP : With uffer 3 ZPT H - -1 ZPT H ZPT H (H) G Width across flat 1 Width across flat M1 x 1. 1/ (c, NPT, NPT) ø2 3 x M3 x (H) G Width across flat 1 Width across flat 2 9 M1 x 1. 1/ (c, NPT, NPT) ø x M x 9 (H) 0 2 G Width across flat 1 M22 x 1. Width across flat 30 1/ (c, NPT, NPT) ø0 x M x 10 ø3 ø1 ø ø ø ø ø3 ø3 ø ø ø ø ø ø0 ø ø ø ø ZPT0H ZPT0H ZPT0H ZPT0H ZPT0H ZPT0H ZPT0H ZPT0H ZPT0H ZPT0H ZPT0H ZPT0H G H ZPT3H ZPT3H ZPT3H ZPT0H ZPT0H ZPT0H ZPT3H ZPT3H ZPT3H ZPT0H ZPT0H ZPT0H G H ZPTH ZPTH ZPTH ZPTH ZPT12H ZPT12H ZPT12H ZPT12H ZPTH ZPTH ZPTH ZPTH ZPT12H ZPT12H ZPT12H ZPT12H G H

88 Series ZP How to Order With buffer ZPX ø0 ø0 ø3 ø0 ø ø12 Pad material () N S U Material N Silicone rubber Urethane rubber KM P Stroke 2 0 ø0 ø0 Stroke (mm) Spring t 0 stroke (N) reactive force t buffer stroke (N) H H Pad type ( ) J J J 0 HNJ2 Type Heavy-duty (lat with rib) Heavy-duty (ellows) uffer body material ( ) Material luminum alloy rass + With bushing Steel + With bushing uffer stroke () ø3 ø0 ø ø12 uffer Specifications (otating) : With uffer ø0 to ø0 ø, ø12 2, 0, 2, 0,, Vacuum inlet thread size 01 N01 T01 Thread size c1/ NPT1/ NPT1/ Mounting thread size 1 22 eplacement Part No. Thread size M1 x 1. (ø0 to ø0) M22 x 1. (ø, ø12) Tightening Torque ZPX0 2-(/N/T)01-1 ZPX0 0-(/N/T)01-1 ZP0 ZPX0 -(/N/T)01-1 ZPX0 2-(/N/T)01-1 ZPX0 0-(/N/T)01-1 ZP0 ZPX0 -(/N/T)01-1 ZPX3 2-(/N/T)01-1 ZPX3 0-(/N/T)01-1 ZP3 ZPX3 -(/N/T)01-1 ZPX0 2-(/N/T)01-1 ZPX0 0-(/N/T)01-1 ZP0 ZPX0 -(/N/T)01-1 ZPX 2-(/N/T)01-22 ZPX 0-(/N/T)01-22 ZP ZPX -(/N/T)01-22 ZPX -(/N/T)01-22 ZPX12 2-(/N/T)01-22 ZPX12 0-(/N/T)01-22 ZP12 ZPX12 -(/N/T)01-22 ZPX12 -(/N/T)01-22 Note 1) in the table indicates the pad type. Vacuum inlet direction Lateral (N m) uffer body luminum rass Steel Mounting material alloy + + thread size With bushing With bushing M1 x 1. M22 x ontrol value shall be ±% of the tightening torque. Pad unit part no. uffer assembly part no. ZP-X1 2-(/N/T)01 ZP-X1 0-(/N/T)01 ZP-X1 -(/N/T)01 ZP-X1 2-(/N/T)01 ZP-X1 0-(/N/T)01 ZP-X1 -(/N/T)01 ZP-X2 2-(/N/T)01 ZP-X2 0-(/N/T)01 ZP-X2 -(/N/T)01 ZP-X2 2-(/N/T)01 ZP-X2 0-(/N/T)01 ZP-X2 -(/N/T)01 ZP-X3 2-(/N/T)01 ZP-X3 0-(/N/T)01 ZP-X3 -(/N/T)01 ZP-X3 -(/N/T)01 ZP-X3 2-(/N/T)01 ZP-X3 0-(/N/T)01 ZP-X3 -(/N/T)01 ZP-X3 -(/N/T)01 Note 2) in the table indicates the pad material. Note 3) in the table indicates the buffer body material. With three M3 bolts With four M bolts With four M bolts ZPX 3 ZPX H - -1 H ZPX H Width across flat 1 Width across flat Width across flat 1 Width across flat 2 12 Width across flat 30 Width across flat 1 () 21 1/ (c, NPT, NPT) Width across flat 21 3 x M3 x (H) G 1/ (c, NPT, NPT) Width across flat 21 x M x () M22 x 1. 1/ (c, NPT, NPT) Width across flat 21 x M x 10 ø ø ø ø ø ø G H ZPX0H ZPX3H ZPXH ZPX0H ZPX3H ZPXH ZPX0H ZPX3H ZPXH ZPX0H ZPX0H ZPXH ZPX0H ZPX0H ZPX12H ZPX0H ZPX0H ZPX12H ZPX12H ZPX12H

89 Heavy-duty Pad Series ZP : With uffer (J) 3 ZPX H - -1 ZPX H / (c, NPT, NPT) 3 1 I 9 9 Width across flat 21 H G ø3 ø1 ø ø ø ø Width across flat 1 Width across flat 2 M1 x 1. ø2 3 x M3 x (J) 1/ (c, NPT, NPT) 3 1 I 9 9 Width across flat 21 H G ø ø3 ø ø ø ø Width across flat 1 Width across flat 2 M1 x 1. x M x ø (J) 0 21 I ZPX H / (c, NPT, NPT) H Width across flat 21 G ø ø0 ø ø ø ø Width across flat 1 M22 x 1. ø0 Width across flat 30 x M x 10 ZPX0H ZPX0H ZPX0H ZPX0H ZPX0H ZPX0H ZPX0H ZPX0H ZPX0H ZPX0H ZPX0H ZPX0H G H I J ZPX3H ZPX3H ZPX3H ZPX0H ZPX0H ZPX0H ZPX3H ZPX3H ZPX3H ZPX0H ZPX0H ZPX0H G H I J ZPXH ZPXH ZPXH ZPXH ZPX12H ZPX12H ZPX12H ZPX12H ZPXH ZPXH ZPXH ZPXH ZPX12H ZPX12H ZPX12H ZPX12H G H I J

90 Vacuum Pad for Transferring isks or adsorbing and transferring disks of digital household electric appliances (, V) or adsorbing circular components like and V ellows mechanism is realized in the pad to dampen the impact to the work. How to Order ZP2 Z1 001 S Pad material Material S Silicone rubber GS Urethane rubber ZP2-Z P 22. ZPT1- is a recommended adapter. (our adapters are necessary.) See below for mounting. efer to the est Pneumatics No. for details. P 22. x ø x Vac. Vac. Vac. ZPT1-20 xample of attachment (ø2.) 0. ing-shaped adsorption area x

91 Vacuum Pad for ixing Panel or adsorbing and fixing the stage of L panels, etc. ellows mechanism allows complete contact with curved work surface. ZP2-Z002 ZP2-Z ø11 ø9 q w 90 x ø e ø20 ø1 q w 90 x ø e ø ( ) ø9. x ø ø12 ( ) x ø2. ø20 omponent Parts No. Part no. escription ZP2-Z2 ZP2-Z2 ZP2-Z2 Pad Joint Mounting plate Material PT KM luminum alloy Note lear anodized omponent Parts No. Part no. escription ZP2-Z3 ZP2-Z3 ZP2-Z3 Pad Joint Mounting plate Material PT KM luminum alloy Note lear anodized How to use The plate for air purging should be prepared by the customer. The plate needs to have supporting points. (void applying the weight of the workpiece directly to the pad.) Place the workpiece on the pad horizontally. Workpiece Mounting plate Supporting point Vacuum When a hole is made in the plate, the dimension shall be ( ) or less. 0

92 No.0. No.0. Vacuum Saving Valve an restrict the reduction of vacuum pressure even when there is no workpiece. When multiple vacuum pads are operated by one vacuum generator, and some of them are not holding the workpiece, the reduction of vacuum pressure is restricted and the workpiece can remain held by the rest of pads. Without workpiece Suction of workpiece Without workpiece How to Order onnection thread symbol for pad side Male thread connection pplicable fixed orifice size Thread size M M 01 1/ Male G1 G1/ thread N1 NPT1/ Pad side emale thread connection Thread pplicable fixed orifice size 01 G1 N1 size M M c1/ G1/ NPT1/ ZP2V Pad side emale thread 03 ixed orifice size ixed orifice size (mm) Specifications onnection thread size for pad side ixed orifice size (mm) luid Max. operating pressure range (MPa) Max. operating vacuum pressure range (kpa) mbient and fluid temperature ( ) lement nominal filtration rating (μm) Min. operating flow rate (L/min (N)) M, M M, 1/, G1/, NPT1/ ir 0 to 0. 0 to to 0 (No freezing) No need for switching operation when changing work pieces When the work pieces have different shapes, the control circuit can be simplified. Use of ZP2V Vacuum saving valve ZP2V Vacuum generator xisting way Vacuum generator Valve PL Sensor STOP The operation can be switched simply. Only the ZP2V is needed. The sensor checks the workpiece size, and the valve switches the pads. 1