Standard Operating Manual. Semitool Spin Rinser Dryer SRD

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Mark Walters
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1 Standard Operating Manual Semitool Spin Rinser Dryer SRD Version 1.1 Page 1 of 8

2 Contents 1. Picture and Location 2. Process Capabilities 2.1 Cleanliness Standard 2.2 Substrate Size 3. Contact List and How to Become a Qualified User 3.1 Emergency Response and Communications 3.2 Training to Become a Qualified User 4. Operating Procedures 4.1 System Description 4.2 Safety Warnings 4.3 Operation Precautions and Rules 4.4 Initial Status checks 4.5 Initial System Checks 4.6 SRD operating procedure 4.7 Check Out Version 1.1 Page 2 of 8

Semitool Spin Rinser Dryer SRD 1. Picture and Location This tool is located at NFF Room 2240 Cleanroom Class 1000. 2. Process Capabilities 2.1 Cleanliness Standard: Clean 2.2 Substrate Size: 2 or 4 3.

3 Semitool Spin Rinser Dryer SRD 1. Picture and Location This tool is located at NFF Room 2240 Cleanroom Class Process Capabilities 2.1 Cleanliness Standard: Clean 2.2 Substrate Size: 2 or 4 3. Contact List and How to Become a Qualified User 3.1 Emergency Response and Communications Security Control Center: (24hr) & (24hr) Safety Officer: Mr. Wing Leong CHUNG & Deputy Safety Officer: Mr. Man Wai LEE & NFF Senior Technician: Mr. Henry YEUNG Version 1.1 Page 3 of 8

NFF Technician: Mr. Michael Kwok 23587896 3.2 Training to Become a Spin Rinser and Dryer SRD User Please follow the procedure below to become a qualified user. 1.

4 NFF Technician: Mr. Michael Kwok Training to Become a Spin Rinser and Dryer SRD User Please follow the procedure below to become a qualified user. 1. Read through the on-line equipment operating manual of the equipment; 2. Attend the equipment hand-on operation training either by peer or NFF staff. 3. If training is provided by NFF staff, user must log in NFF equipment reservation system, and register these trainings. 4. Send an to Mr. Henry YEUNG requesting Spin Rinser and Dryer SRD qualified exam. 5. Pass the examination for the equipment operation and security. 4. Operating Procedures 4.1 System Description System Power LED Heater LED Door Seal Chamber N2 ON/OFF Valve Start Button Stop Button Controller Version 1.1 Page 4 of 8

Resistivity Display Digital Time Display LED indicators RPM Meter Resistivity Monitor Switch Rinse Time DRY1 Time DRY2 Time RPM Controls Power Switch The SEMITOOL Spin Rinser Dryer features spin

5 Resistivity Display Digital Time Display LED indicators RPM Meter Resistivity Monitor Switch Rinse Time DRY1 Time DRY2 Time RPM Controls Power Switch The SEMITOOL Spin Rinser Dryer features spin rinse and drying capability in one chamber. It consists of three steps, one rinse cycle and two dry cycles. It can install with resistivity monitor (optional). Rinsing the product with resistivity monitor to a quality base, rather than a time standard, ensures that each lot processed through the Rinser Dryer is rinsed to a consistent level. The SRD sprays DI water through a dedicated rinse manifold. DI water is purged from the process chamber using N2. During the dry portion of the process, heated N2 is applied through a separate dry manifold in the process chamber. 4.2 Safety Warnings 1. Follow NFF Health and Safety Manual. 2. Do not attempt to run the machine unless you are entitled to do so! 3. If the machine failure while being used, never try to fix the problem by yourself. Please contact NFF staffs. 4. Spin Speed should less than 1500rpm. 5. If your wafer thickness is less than 400um, should contact staff to adjust spin speed and spin time. Version 1.1 Page 5 of 8

6 6. Wait for the rotor to come to a home position before loading or unloading the wafer. 4.3 Operation Precautions and Rules 1. Use assigned NFF Wet Station Teflon Cassette only. 2. Please fill all the details of the logbook attached. 3. Do not operate the machine unless you are properly trained and approved by NFF staff. 4. Do not change the spin speeds and spin time by yourself. 5. Should turn off the N2 gas line after each use. 4.4 Initial Status Checks 1. Please check the status of shutdown notice posted in the NFF reservation website. 2. Before operate the machine, please check the checklist and fill all the details of the log sheet attached. 4.5 Initial System Checks Before starting, verify the machine is in the correct idle state: 1. If system power is off, notify NFF staff to turn on power switch on the controller. Leave system ON, after your process. 2. Wait for 1min for LED display to change from 9 to Turn on N2 valve, LED display to change from 3 to Ensure Resistivity Monitor switch is on Manual mode (for Wet station A and B only). Version 1.1 Page 6 of 8

7 5. Check log book that last user had no problem. Table1: Code meaning of SRD Display Code # Code 0 Ready for start input 1 Door not closed 3 Loss of N2 Pressure 9 Wait, don t open the door 999 Rinsing to resistivity 4.6 SRD operating procedure Load Wafers 1. Open SRD process chamber door. 2. Insert wafer in Teflon cassette with H-bar facing the back of the chamber in rotor. 3. Turn on the N2 flow meter. 4. Close the chamber door Start the process 1. Press Green START button to start the process. 2. The Rinse spin speed is around 600rpm and the Dry spin speed is around 1200rpm. If SRD can t reach resistivity above 10Mohm cm (for Wet station A and B only), inform NFF staff. 3. When the process finish, display number shows After several seconds, the display number becomes to Unload wafer Version 1.1 Page 7 of 8

8 1. Slowly move out the Teflon cassette out of the process chamber. 2. Close the Chamber door. 3. Turn off N2 flow meter. 4.7 Check Out 1. Check out the equipment via card reader immediately after use. 2. Fill in the details, problems or comments in the log sheet. Version 1.1 Page 8 of 8

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