UNIVEX 450 B Experimental Vacuum Coating System

Transcription

1 UNIVEX 450 B Experimental Vacuum Coating System Operating Instructions GA502932V901_002_A0 Part Number V901

2 Contents Page 0 Important Safety Information Mechanical Hazards Electrical Hazards Thermal Hazards Hazards Caused by Materials and Substances Hazards Caused by Radiation Danger of Damages to the UNIVEX 7 1 Description Design Supplied Equipment Technical Data 13 2 Transport 16 3 Installation Installation Conforming Utilization Ambient Conditions Connecting the Exhaust Lines Connecting the Compressor Unit Connecting Cooling Water Water Quality Connecting Gases Electrical Connection General Start-up GUI of the UNIVEX 450 B Status Displays Language Selection User Login and Logout Description of Pump System Pump System with Cryo Pump Interspace Evacuation Venting 35 2 GA502932V901_002_A0-01/ Oerlikon Leybold Vacuum

3 Contents 4.7 Gas Inlet Substrate Handling KRI: Ion Source (Plasma beam source) Substrate Table Heating Temperature with Heating Elements Substrate Positioning and Rotation Coating Systems Sources Thermal Evaporator: RPS Electron Beam Evaporator Ferrotec Automatic / Recipe Layer Recipe Administration Layer Recipe/Process Step Trends Service Service > Operating Hours Counter User Management Shut-off Emergency Off 56 5 Maintenance Safety Information Maintenance Intervals Oerlikon Leybold Vacuum Service Cleaning 58 6 Troubleshooting 59 7 Waste Disposal 66 EC Conformance Declaration 67 Index 69 Original installation and operating instructions. GA502932V901_002_A0-01/ Oerlikon Leybold Vacuum 3

4 Safety Information NOTICE Obligation to Provide Information Before installing and commissioning the UNIVEX, carefully read these Operating Instructions and follow the information so as to ensure optimum and safe working right from the start. The Oerlikon Leybold Vacuum UNIVEX has been designed for safe and efficient operation when used properly and in accordance with these Operating Instructions. It is the responsibility of the user to carefully read and strictly observe all safety precautions described in this section and throughout the Operating Instructions. The UNIVEX must only be operated in the proper condition and under the conditions described in the Operating Instructions. It must be operated and maintained by trained personnel only. Consult local, state, and national agencies regarding specific requirements and regulations. Address any further safety, operation and/or maintenance questions to our nearest office. DANGER DANGER indicates an imminently hazardous situation which, if not avoided, will result in death or serious injury. WARNING WARNING indicates a potentially hazardous situation which, if not avoided, could result in death or serious injury. CAUTION CAUTION indicates a potentially hazardous situation which, if not avoided, could result in minor or moderate injury. NOTICE NOTICE is used to notify users of installation, operation, programming or maintenance information that is important, but not hazard related. We reserve the right to alter the design or any data given in these Operating Instructions. The illustrations are not binding. Retain the Operating Instructions for further use. 4 GA502932V901_002_A0-01/ Oerlikon Leybold Vacuum

5 Safety Information 0 Important Safety Information Please note all safety information provided in the Operating Instructions for the individual components; in particular the information relating to dangers caused by high helium pressures and retained gases as detailed in the Operating Instructions for the cryopump. DANGER 0.1 Mechanical Hazards 1 Use sufficiently rated lifting gear. While transporting, do not stand under the lifted system. 2 During operation of the UNIVEX, the returning cooling water flow must not be obstructed. Blockages or reverse pressures which are too high in the cooling water return system can cause the formation of vapour bubbles causing the buildup of a dangerously high pressure. 3 Avoid exposure of any part of the human body to the vacuum. Handle the equipment only in the vented state. 4 After a mains failure expect the pump to run up automatically after the mains power has returned. WARNING 0.2 Electrical Hazards 1 The system must only be connected to a power supply the specifications of which match those stated on the nameplate. The power supply lines need to be rated so that they can handle the maximum power which can occur. 2 During all connection work, make sure that the mains cables have been reliably disconnected and do not carry a mains voltage. The electrical connections must only be provided by a trained electrician as specified, for example, by the regulations EN High voltage! Immediately after opening the vacuum chamber and before taking hold of anything inside with your hands, earth the electron beam evaporator with the grounding rod. DANGER 0.3 Thermal Hazards 1 During operation the following parts can get so hot (> 80 C), that there is the risk of suffering burns: Process chamber Backing pump Exhaust line of the backing pump Protect hot parts against touching. Note the danger icons on the equipment and wear the required protective clothing. 2 A missing cooling water flow or a flow of cooling water which is to low can result in dangerous heating up of the system. 3 After switching off, parts of the system may still be very hot. Let the system cool down and/or wear protective clothing. CAUTION GA502932V901_002_A0-01/ Oerlikon Leybold Vacuum 5

6 Safety Information DANGER 0.4 Hazards Caused by Materials and Substances 1 The product in its standard version is not suited for operation in explosion hazard areas. 2 The product is not suited for pumping of combustible and explosive gases and vapours radioactive and toxic gases and vapours pyrophrous substances oxygen which exceeds the concentration in the atmosphere (> 21%) Please consult us first when planning operation under such conditions. 3 If within the system toxic substances or gases are being used, then the operator will be responsible for ensuring that the corresponding safety precautions are introduced! 4 If the system has previously pumped hazardous gases take the appropriate safety measures before opening the intake or exhaust ports. Use gloves, a breathing mask or protective clothing to avoid skin contact with toxic or highly corrosive substances. Work under a fume hood. 5 Contaminated parts can be detrimental to health and environment. Before beginning with any work, first find out whether any parts are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts. CAUTION 0.5 Hazards Caused by Radiation 1 The electron beam evaporator emits x-rays during operation. It's accelerating voltage is below 30 kv. The local dose rate at a distance of 0.1 m from the touchable surface of the UNIVEX is under normal operating conditions below 1.0 µsv/h at the highest possible operating values. The electron beam evaporator must only be operated while fitted within the UNIVEX and only while keeping below the specified limit values. Any modifications are prohibited. 2 Use dark glasses (like used in welding goggles) to protect the eyes against the bright light emission of the e-beam source when observing the evaporation. 3 Pay attention to the dangers from magnetism when using and handling the electron beam evaporator. People with cardiac pacemakers, with insulin pumps, with active or passive prostheses and ferromagnetic or conductive foreign bodies must keep clear of the UNIVEX! Clearly mark the limits of how close they may approach the machine. 6 GA502932V901_002_A0-01/ Oerlikon Leybold Vacuum

7 Safety Information 0.6 Danger of Damages to the UNIVEX 1 Make sure that no drip water and no humidity can occur. Adapt the cooling water temperature corresponding to the dew point. 2 Switch the system off first when plugging in or disconnecting any cables. 3 The UNIVEX is not suited for pumping of dusty, aggressive or corrosive media. 4 Failure to comply with the coolant data may lead to internal corrosion. This will result in damaging the UNIVEX. 5 Avoid the influences of shock and vibration when the pump system is running. 6 Never directly coat the substrate holder. Make sure that always either a substrate or a blank is present. 7 Before each coating batch check whether there is enough evaporating material in the crucibles. In the case of an empty crucible there exists the risk of contaminating the chamber with copper or the liner material. 8 Do not switch on the e-gun power unless the chamber pressure is below mbar! NOTICE GA502932V901_002_A0-01/ Oerlikon Leybold Vacuum 7

8 Description Transport lock Electrical cabinet Process chamber with observation window View port shutter ø 130mm Table for notebook with UNIVEX control software Fig. 1.1 UNIVEX 450 B 1 Description 1.1 Design The UNIVEX 450 B has been developed for the deposition of functional coatings on test samples. It is especially well suited for applications in the area of research and pilot production also under cleanroom conditions. The UNIVEX 450 B is a box coater system and consists of a two-part frame. In the left part (process module) the vacuum chamber with pump systems is installed. In the right part is the control cabinet with power supply, PLC and process controllers (control module). Process chamber Cubic vacuum chamber with front door, observation window and removable protective liners against chamber wall deposition Cryo pump COOLVAC 2000 CL with pressure transmitter TTR 91 Cryo compressor unit COOLPAK 2200 with flexlines 3-positions gate valve DN 250 ISO-F Dry compressing scroll pump SCROLLVAC SC 30 D Pressure transmitter ITR 90 (for chamber) Backing pump bypass (2 electro-pneumatic valves) 8 GA502932V901_002_A0-01/ Oerlikon Leybold Vacuum

9 Description Laptop table Gas inlet Diaphragm pump DIVAC 0,8T E-beam gun filament power supply Cooling water IN Cooling water OUT Scroll vacuum pump SCROLLVAC SC 30 D Fig. 1.2 Rear and side views Safety pressure switch PS 113 A Overpressure safety valve Electro-pneumatic venting valve (for chamber) 2x Mass flow controllers (MFC) for process gas inlet Process components, installed in the vacuum chamber: Ferrotec EV-M8 electron beam evaporator with source shutter 2x thermal evaporator Swing source MK 40/50 Ion source EH 1000F Substrate holder with rotary drive and heater 2x Thin film sensor head ASF-140 with shutter Diaphragm pump DIVAC 0.8 LT for process chamber door double sealing interspace evacuation with two valves and pressure transmitter GA502932V901_002_A0-01/ Oerlikon Leybold Vacuum 9

10 Description Combi transmitter ITR 90 / DN 40 KF Rotary feedthrough ferro fluid sealed with dia. 200 mm resistor heater plate 2x Deposition controller adjustable sensor head ASF-140 with shutter View without door Overpressure safety valve; DN 16 KF z Cryo pump COOLVAC 2000 CL TM Transmitter TTR 91 DN 16 KF A A A A 700 Electro pneumatic angle valve for chamber venting Electro pneumatic right angle valve DN 25 KF process chamber bypass A-A Ion source gas feedthrough Ion source power feedthrough A-A Substrate clamping ring dia. 200 mm substrate size(s) TBD Ion source EH 1000F 1 additional installation holes blank flanged Ferrotec EV-M8 e-beam gun crucible volume 8x12ccm 9x additional threaded inserts M3 for fastening various substrate sizes (subtrate sizes TBD) E-beam gun power feedthrough Swing source MK 40/50 left hand Source shutter dia 130mm for e-beam source shutter Swing source MK 40/50 right hand Fig. 1.3 Views of the process chamber 10 GA502932V901_002_A0-01/ Oerlikon Leybold Vacuum

11 Description Electro pneumatic 3 positions gate valve DN 250 ISO-F Low pressure safety switch DN 16 KF Blank flange DN 16 KF Blank flange DN 250 ISO-K Electro pneumatic angle valve DN 40 KF process chamber bypass z 1:1 Fastening of substrate clamping ring and smaller sizes by spring supported clamps Fig. 1.4 Views of the process chamber GA502932V901_002_A0-01/ Oerlikon Leybold Vacuum 11

12 Description Deposition controller RPS 5002 controller E-beam gun controller Ion source auto controller Ion source filament controller Ion source discharge controller Cryo pump power supply Cryo pump controller Main switch E-beam gun power supply Fig. 1.7 Electrical cabinet Control module SIMATIC S7: PLC with Dell laptop for control Deposition controller SQC-310 Thermal evaporation controller RPS 5002 E-beam gun control FerroTec Genius E-beam gun power supply FerroTec Carrera Ion source auto controller, filament controller, discharge controller Cryo pump controller and power supply The cryo pump is operated via PLC. At the cryo pump controller it is possible to read off the operational status of the pump and in the case of malfunctions also an error code. Main switch with emergency off function 12 GA502932V901_002_A0-01/ Oerlikon Leybold Vacuum

13 Description 1.2 Supplied Equipment UNIVEX 450 B Operating Instructions for the UNIVEX and the built-in components Electric circuit diagram for the UNIVEX Accessories for the components (for scope, see Operating Instructions of the components) Required connection accessories, e.g. mains cable or water hoses are not included with the delivery of the system 1.3 Technical Data Attainable ultimate pressure: valid for a clean, dry and nitrogen vented chamber Mains power connection: Nominal power consumption: < mbar 208 V, 3ph/ N/ PE, 60 Hz 41.5 kva / 115 A Cooling water requirement about l/min Cooling water temperature 15 to 25 C Cooling water pressure 4 bar (abs.) inlet, pressureless outlet Cooling water connection DN 19 Compressed air Compressed air connections Process gas Process gas connections Venting gas Venting gas connections Exhaust connection Weight 4 to 7 bar (abs.), dry and oil-free Pneumatic hose 8x1 (inside dia 6 mm) max. 1.2 bar (abs.) dry air or inert gases like nitrogen or argon or gas mixtures with max. 21 % oxygen 6 mm Swagelok tube at each MFC (mass flow controller) max. 1.2 bar (abs.) dry air or nitrogen Pneumatic hose 8x1 (inside dia 6 mm) Flanges DN 25 KF, DN 16 KF, Silencer approx. 700 kg GA502932V901_002_A0-01/ Oerlikon Leybold Vacuum 13

14 Description PS 113 A ITR 90 (IM110) Overpressure safety valve Process chamber O2 Ar MFC MFC V140 Venting valve V110 3-positions gate valve V181 V186 N2 P120 COOLVAC 2000 CL COOLPAK 2200 compressor unit TTR 91 COOLVAC Safety valve V130 Forevacuum valve V120 Forevacuum valve P112 DIVAC 0.8 T P110 SCROLLVAC SC 30 D Fig. 1.8 Vacuum diagram 14 GA502932V901_002_A0-01/ Oerlikon Leybold Vacuum

15 Description Fig. 1.9 Dimensional drawing; dimensions in mm GA502932V901_002_A0-01/ Oerlikon Leybold Vacuum 15

16 Transport 2 Transport For moving, the UNIVEX has been equipped with crane eyes and a tie-bar. Make use of all crane eyes which are present, so that the UNIVEX can be maintained in an upright and horizontal position while being moved. The tie-bar on the top of the UNIVEX is a transport aid. It may be removed after transport. Transport the UNIVEX always with the tie-bar screwed in place. Alternatively the UNIVEX can also be moved with a fork lifter. When doing so, support the UNIVEX so that it cannot topple over. CAUTION Use sufficiently rated lifting gear. While transporting, do not stand under the lifted system. The UNIVEX must only be moved without the backing pumps and compressor unit mounted. 16 GA502932V901_002_A0-01/ Oerlikon Leybold Vacuum

17 Installation 3 Installation 3.1 Installation Place the pump system on a flat and level surface. The feet are height adjustable using two size 24 spanners. Place the pump system so that a clearance of at least 50 cm is maintained on all sides of the pump system for fresh air. 3.2 Conforming Utilization The UNIVEX 450 B is an experimental vacuum coating system for thermal and electron beam evaporation and for ion etching. The system is suited for pumping of air and inert gases like nitrogen and argon. The product is not suited for pumping of combustible and explosive gases and vapours radioactive and toxic gases and vapours pyrophrous substances oxygen which exceeds the concentration in the atmosphere (> 21%) media which contain dust or aggressive or corrosive media. Please consult us first when planning operation under such conditions. DANGER 3.3 Ambient Conditions The ambient temperature should be between 12 C and 40 C. Further information is provided in the Operating Instructions of the cryo pump. The system must not be operated under humid ambient conditions and must never be exposed to drip water. 3.4 Connecting the Exhaust Lines We recommend to connect exhaust lines so that no dangerous gases may enter into the room. The cross-section of the exhaust line must at least match the inside diameter of the connection. An exhaust line the cross-section of which is too narrow can cause overpressures within the backing pump. The exhaust lines should be laid so that they drop down and away thereby preventing condensate from flowing back into the pumps. If within the system toxic substances or gases are being used, then the operator will be responsible for ensuring that the corresponding safety precautions are introduced! DANGER GA502932V901_002_A0-01/ Oerlikon Leybold Vacuum 17

18 Installation 3.5 Connecting the Compressor Unit Connect the COOLPAK 2200 compressor unit to the cryopump. Refer to the Operating Instructions of the COOLPAK. Do not mix up the red and green flexlines and connections. WARNING Observe all safety informations on the flexlines, they are filled with 28 bar helium. 3.6 Connecting Cooling Water Connect the cooling water to the UNIVEX and to the compressor unit. The cooling water is distributed internally to the electron beam evaporator thin film sensor heads and compressor unit COOLPAK. Check to ensure that a sufficient cooling water flow is present, see Technical Data. The connections are on the rear side of the UNIVEX, see Fig Secure the hoses with hose clamps. The cooling water flow to the electron beam evaporator is monitored by water flow monitors. The flow monitor indicates on its LCD display the current throughput in litres per minute. A yellow LED (S1) comes on as soon as the actual flow increases above the setpoint. When the flow of water is too low, the electron beam evaporator is shut down through the interlock input port of its power supply. WARNING A missing cooling water flow or a flow of cooling water which is too low can result in dangerous heating up of the system. During operation of the UNIVEX, the returning cooling water flow must not be obstructed. Blockages or reverse pressures which are too high in the cooling water return system can cause the formation of vapour bubbles causing the buildup of a dangerously high pressure Water Quality In order to ensure long trouble-free operation the cooling water must not contain any oils, greases and suspended solids. Moreover, we recommend compliance with the following limit values: Appearance Suspended matter Clear, free of oils and greases < 250 mg/l Particle size < 150 µm Electrical conductivity < 700 µs/cm ph value 7.0 to 9.0 Total hardness (total alkaline earths) Aggressive carbon dioxide Chloride Sulfate < 8 dh None, not detectable < 100 mg/l < 150 mg/l 18 GA502932V901_002_A0-01/ Oerlikon Leybold Vacuum

19 Installation Nitrate Iron Manganese Ammonium 50 mg/l < 0.2 mg/l < 0.1 mg/l < 1.0 mg/l Free chlorine < 0.2 mg/l 8 dh (degrees German hardness) = 1.4mmol/l = 10 e (degrees English hardness) = 14 f (degrees French hardness) If there is the danger of frost, you may use a water glycol mixture of up to 30 %. When using DS water/deionised water (softened or fully desalinated water) check whether cooling system, water and materials used are suitable. For this please consult us. 3.7 Connecting Gases Venting Gas Venting the system with ambient air will lengthen the pumpdown time and can result in unwanted reactions with the process media. Therefore we recommend to use dry air or nitrogen for system venting. The connections for the venting gas are located at the rear side of the UNIVEX. The venting gas supply must be connected through a pressure reducer. The UNIVEX must only be vented up to atmospheric pressure. The venting pressure set up at the pressure reducer must not exceed 1.2 bar (absolute). The venting gas supply must not be shut off while the UNIVEX is operating, above all especially not during shutdown and venting operations. Compressed Air Compressed air is needed to actuate the pneumatic control valves. Specifications see Technical data. The connections for the compressed air are located at the rear side of the UNIVEX. Process Gas Process gas is needed for all plasma processes (ion etching). Specifications see Technical data. Connect the gas line to the mass flow controller at the rear side of the UNIVEX, see Fig The supply pressure should not exceed atmospheric pressure (max. 1.2 bar absolute). GA502932V901_002_A0-01/ Oerlikon Leybold Vacuum 19

20 Installation 3.8 Electrical Connection Connect the UNIVEX to the electrical mains power supply. For this it is required to connect a five core mains cable (3ph/N/PE) to the terminals X1 in the electrical cabinet. DANGER During all connection work, make sure that the mains cables have been reliably disconnected and do not carry a mains voltage. The electrical connections must only be provided by a trained electrician as specified, for example, by the regulations EN The system must only be supplied by a three-phase mains power of 208 V AC, 60 Hz with N- and PE- conductors. The three main phases must be connected such that the backing pump runs in the correct direction of rotation. DANGER At the high voltage transformer for the electron beam evaporator no connection work is necessary. Keep the transformer always closed. 20 GA502932V901_002_A0-01/ Oerlikon Leybold Vacuum

21 4 The UNIVEX 450 B is an experimental vacuum coating system for thermal and electron beam evaporation and for ion etching. It is suited for pumping of air, inert gases like nitrogen and argon. Observe Section 0.4 of the Safety Informations. Most of the components and controllers integrated in this UNIVEX are described in separate manuals. These manuals are contained in the UNIVEX documentation. The following instructions refer to the specific UNIVEX control and operation, especially defined via PLC and touchscreens. 4.1 General If possible open the door of the process chamber only for as short time as possible. Humidity may deposit itself on the inner surfaces of the chamber. This will then, when evacuating the process chamber once more, result in significantly longer pumpdown times until the desired high vacuum ultimate pressure is attained. For this reason we also recommend connecting nitrogen or dry air as the venting gas, see Section 3.7. Before closing the chamber door, check to see that the O-ring is clean and undamaged. The vacuum chamber is equipped with a stainless steel panel which shall help to protect thechamber walls against being coated inadvertently. This panel is screwed on and can be removed for cleaning, see Section 5.4. After longer process operation, coatings deposited on the inner surfaces can loosen. Such loose particles should be removed on a regular basis using an industrial vacuum cleaner. High voltage! Immediately after opening the vacuum chamber and before taking hold of anything inside with your hands, earth the electron beam evaporator with the grounding rod. Keep the door closed DANGER Observe Safety Informations and Grounding rod Fig. 4.0 Grounding rod GA502932V901_002_A0-01/ Oerlikon Leybold Vacuum 21

22 4.2 Start-up Before switching on, check the following: Is the cooling water flowing freely? Is the cooling water flow adequate? See flow monitors. Are compressed air, venting and process gases present at the correct pressures? Has the UNIVEX been correctly connected to the power supply? Before starting the process: Check the filling level in the crucibles of the electron beam evaporator and add material as required. In the case of an empty e-beam gun crucible there exists the risk of contaminating the chamber with copper or the liner material. In this case and when running the coating process automatically, even the electron beam evaporator may suffer damage. Do not overfill the e-beam gun crucibles with evaporator material, otherwise the rotation might be blocked. Fix the test pieces to the substrate holder. Close the chamber door and lock it with the rotary handle. 22 GA502932V901_002_A0-01/ Oerlikon Leybold Vacuum

23 Allen screw for aperture adjustment Stud bolt Indicator for gate valve aperture Allen screw for position indicator adjustment Fig. 4.4 High vacuum valve V110 High vacuum gate valve V110 The 3-positions gate valve V110 can be switched into three positions: Open: For full speed chamber evacuation Intermediate: For reduced pump speed during plasma processes Closed The aperture size of the valve in the INTERMEDIATE position can be set manually. Loosen the stud bolt Set the aperture at the Allen screw. The indicator shows the aperture. 10 = open, 0 = closed Fasten the stud bolt. Test the adjusted intermediate position by activation of the gas flow (Section 4.7) If an error message indicates a wrong gate valve position, turn the Allen screw below the aperture indicator until the message is gone. The Intermediate position is only possible with the cryo pump running and the pressure below 0.5 mbar. V110 is controlled by the PLC only. GA502932V901_002_A0-01/ Oerlikon Leybold Vacuum 23

24 Switch on the pump system through the main switch. Thereafter the PLC runs through its initialisation sequence. The system reverts to its default settings: all valves are closed, the pumps are off, the process components are shut down. Switch the computer on and start WINDOWS. The control program UNIVEX.exe has been written for the following operating systems: WINDOWS XP SP3 WINDOWS Vista SP2 WINDOWS 7. NOTICE For safety reasons we recommend to operate the computer without any network links. The operator is responsible for any further software installations on the computer. Start the program UNIVEX.exe provided it is not started automatically upon booting the computer. After having started the program, the UNIVEX-GUI is displayed with the rights defined for the default user and the specific settings as to the country language. 24 GA502932V901_002_A0-01/ Oerlikon Leybold Vacuum

25 Navigation Terminal Global buttons Operator panel Content pane Status pane Fig. 4.1 Schematic overview of the UNIVEX process chamber 4.3 GUI of the UNIVEX 450 B GUI = Graphic User Interface Generally use the mouse to click on the individual menu items. In some cases you may also use the keyboard. When doing so, use the common WINDOWS keys like Tab, Shift/Ctrl, Enter and the arrow keys. Start the individual menus by clicking on the buttons of the navigation terminal. Navigation Terminal The current place, i.e. the place of the current menu within the entire directory structure is displayed. By clicking on the path entries you may return to the higher level menus. By clicking on Quit the respective higher-level menu is invoked. The navigation terminal is accessible from all menus. Through the global buttons frequently used functions and commands like printing (printer icon), for example, logging in and logging out the user (key icon) and online help (?) are available from all menus. GA502932V901_002_A0-01/ Oerlikon Leybold Vacuum 25

26 Where functions and commands are not available in the specific menus, then these buttons are displayed as disabled. By operating the global button Login/Logout (key icon) and by subsequently operating the button "Logout" the user may log out of the system. Then the settings for the default user are loaded. An automatic logout occurs when for a certain period of time there are no user actions through the GUI. "Alt" + "F4" terminates the program. Content Pane Through the content pane the functions belonging to the actual application are made available. If buttons shall be displayed but not used to run any functions, then they are displayed as disabled. In the upper section of the content pane, process and status information is displayed. Fig. 4.2 Process and status information Status Pane The status pane displays global information like operating, warning and alarm messages or date and time, for example. Such information is displayed for the user at all times. The alarm preview offers the following functions: Display of the up to 8 most recently pending alarms. If no alarms are pending, this display will be blank. Numeric display as to how many alarms in total are currently pending. Clicking on the display field opens the Actual Alarms in the content pane. Fig. 4.3 Alarm preview with two currently pending alarms 26 GA502932V901_002_A0-01/ Oerlikon Leybold Vacuum

27 Fig. 4.4 Alarms Operator Panel The automatic mode for the corresponding chamber is enabled or disabled through the left-hand button located at the right-hand side visible on every faceplate. When the automatic mode is enabled, the button is green and all further functions of the faceplate for manual operation are locked. The process is started or stopped with the right-hand button. When the process has been started, the button is green. After the end of the process the button turns grey again. The automatic mode cannot be disabled as long as the process is active. GA502932V901_002_A0-01/ Oerlikon Leybold Vacuum 27

28 4.3.1 Status Displays General Icon or no icon Description Unit is ready to operate Warning Error Maintenance is required (maintenance interval has elapsed, for example) Gate (connection between two chambers) Icon Description Gate is open Gate is closed Chamber door Icon Description Door is open Door is closed Substrate Icon No icon Description No substrate New unprocessed substrate Substrate is being processed Substrate processing has been completed Error during processing 28 GA502932V901_002_A0-01/ Oerlikon Leybold Vacuum

29 Source shutter Icon Description Shutter closed Shutter open Heater Icon Pumps Icon Description Heater off Heater on, at temperature Heater error Description Pump on flashing Pump is running up Pump off flashing Pump is running down Warning Error Valves Icon Description Valve is open flashing Valve is opening Valve is closed flashing Valve is closing Warning Error GA502932V901_002_A0-01/ Oerlikon Leybold Vacuum 29

30 Chamber lid Icon Description Chamber lid closed Chamber lid open Chamber lid opening Chamber lid closing Operator panel symbols Icon Description Automatic process running Automatic process enabled Switch off button, device running Switch off button, device not running Automatic process does not run Button deactivated 30 GA502932V901_002_A0-01/ Oerlikon Leybold Vacuum

31 4.3.2 Language Selection The language may even be changed with a logged off user. For this click on the global button Menu and then select a country language. Currently the user may select between the following languages: German English User Login and Logout In order to correspondingly access the menus of the UNIVEX 450 B the user must identify himself. For this click on the global button Login/Logout (key icon) and enter your username through the keyboard. You may also select your user name by operating the adjacent button and clicking on an entry in the then appearing list. Thereafter enter your personal password in the entry field Password through the keyboard. Then click on the button Login and operate the Enter key to confirm the entry. After user login, the menus are displayed in the user dependent language of the country and enabled with the corresponding rights. In the login dialogue, the passwords of the respective users may be changed. For this click on the button Change.... Thereafter enter the old and then the new password. Finally confirm the newly entered password and then operate Login or operate the Enter key. If for a certain period of time there are no user interactions with the GUI, then the logged in user will be automatically logged out again. GA502932V901_002_A0-01/ Oerlikon Leybold Vacuum 31

32 Fig. 4.6 Process chamber screen 4.4 Description of Depicted in the overview is an abstract representation of the machine as seen from the top, the status of the units and information relevant to the process. The mouse pointer changes its shape to a hand when moved over a component which can be operated in any way. By clicking on the individual components, windows open overlaying the overview. These windows are called faceplates. These provide further information and allow operation of individual subassemblies of the UNIVEX. Commands for subassemblies which cannot be run, are disabled. By disabling/locking a command, misoperation is avoided which might cause unwanted reactions at the machine, like for example, locking of the command Open for the intermediate gate valve when there is a vacuum in one chamber and atmospheric pressure in the other chamber. If a faceplate supports switching between a manual and automatic operating mode, then setpoints can only be changed and commands can only be issued provided the manual operating mode has been switched on. The following description of operation includes operating details for the individual subassemblies of the UNIVEX. The x in the component designations, for example Vx30 or Px20 is a placeholder for the chamber number. 32 GA502932V901_002_A0-01/ Oerlikon Leybold Vacuum

33 4.5 Pump System Faceplate: Pump System The UNIVEX has two pumping systems a cryo pump system for the process chamber a diaphragm pump DIVAC 0.8 T for process chamber door double sealing interspace evacuation The pump system will only run up provided the chamber doors have been closed, provided there are no errors affecting the pump system and provided no automatic operation is active Pump System with Cryo Pump The COOLVAC System Controller displays information on the cryopump status. The cryopump cannot be operated at the System Controller keys. On and Off switch of the cryopump on and off. Backing pump and valves are controlled by the cryo controller Coolvac SC. The chamber is not evacuated. A warm cryogenic pump takes about one hour until it will be capable of actually pumping. In the case of Off the cryopump is switched off and warmed. The chamber is not automatically vented. Fig. 4.8 Pump system faceplate During the shut-off and regeneration process the backing pump must always be ready for the cryopump. Never switch off the backing pump separately or switch off the the mains power during shut-off. DANGER Evacuate starts the chamber pump down. At first, the cryopump is started, provided this has not happened before by pressing On. When venting during evacuation, it will necessary to press Evacuate once more after closing the door. Venting vents the vacuum chamber through the chamber venting valve Vx40. The pumps continue to run. GA502932V901_002_A0-01/ Oerlikon Leybold Vacuum 33

34 Regenerate Since cryopumps are gas-binding pumps, the gas retained in the pump needs to be removed from time to time. This process is called regeneration. Regeneration can only be switched on provided the cryopump is running. It is controlled by the cryo controller Coolvac SC. The chamber is not automatically vented. Behaviour when power returns after switching off the power or after a power failure 1. Evacuation started: cryopump is in the process of cooling down or has cooled down Power failure When the power returns the cryo system continues at the same point where the power failure occurred. The chamber is only evacuated again after pressing Evacuate once more. The pump system can be switched off again through Off. 2. Stop pumps active: cryogenic pump is in the process of warming up Power failure When the power returns the cryo system continues at the same point where the power failure occurred. The pump system can be switched on again through Evacuation. The chamber is evacuated again Interspace Evacuation Interspace evacuation facilities are installed for the doors of the swivel arm, for example. The interspace evacuation is controlled automatically together with the pump system, there is no separate faceplate for it. 34 GA502932V901_002_A0-01/ Oerlikon Leybold Vacuum

35 4.6 Venting Faceplate: venting valve (Vx40) Process sequence: Start venting: 1. By pressing on Open, first the high vacuum valve Vx10 respectively the bypass valve Vx30 is closed. 2. Thereafter venting valve Vx40 is opened. 3. After a fixed time of 30 seconds after the pressure switch PSx10 indicates atmospheric pressure, the time measurement is started as to how long the venting valve still remains open. 4. Thereafter after the adjustable time has elapsed, venting valve Vx40 is closed automatically. 5. If venting once again at atmospheric pressure, venting valve Vx40 is closed automatically after the adjustable time has elapsed. The remaining time as to how long it remains open is displayed. 6. Through Close the valve can be closed prematurely. 7. The pump system remains switched on as long as Pump system Off is not pressed. Venting valve Vx40 can never be constantly open. The command Open is enabled if 1. All chamber doors are closed 2. No automatic operation is running The command Close is enabled if no automatic operation is running Fig. 4.9 Venting valve faceplate GA502932V901_002_A0-01/ Oerlikon Leybold Vacuum 35

36 4.7 Gas Inlet Faceplate: Gas inlet Pressing on the field in the area of the MFC displays an entry window. Here the setpoint in sccm as well as the corresponding correction factor for gas can be entered. If the gas admission valve is open, then the values are dynamically accepted. The gas admission valves can only be opened when all chamber doors are closed and the chamber pressure is under a preset value. 3-Positions Gate Valve The UNIVEX is equipped with a 3- positions gate valve.when the gas flow has been started, the PLC drives the 3-positions gate valve automatically into the intermediate position and the faceplate is no longer applicable. For changing the intermediate value of the 3-positions gate valve manually refer to Section 4.2. Fig Gas inlet faceplate 36 GA502932V901_002_A0-01/ Oerlikon Leybold Vacuum

37 Fig Ion source faceplate 4.8 Substrate Handling KRI: Ion Source (Plasma beam source) Programs 1 to 4 can be started as saved in the ion controller. The parameters (Emission current, Discharge voltage, Gas flow ) for the programs are set up at the unit. In order to operate the ion etching process through the visualisation all three units must be switched on before being activated. The operating mode switch of the autocontroller must be set to Remote. Program Start and Program Stop switch the ion controller on and off in the manual operating mode; for this a program number ranging between 1 and 4 must be selected. Through Etching time an etching time may be specified. This time runs as soon as the ion controller has controlled itself attaining a stable state and providing etching is active. After an ion source operating time of 40 hours has elapsed a warning message is indicated and after 50 hours an error message is indicated. In the setpoint manager this message can be reset. Here also the operating hours counter for the ion source is reset. The ion source is only enabled provided the chamber pressure is below 10-3 mbar. GA502932V901_002_A0-01/ Oerlikon Leybold Vacuum 37

38 4.9 Substrate Table of the units is effected either through the faceplate of the substrate table and/or through a separate faceplate of the corresponding unit Heating Temperature with Heating Elements Heater On and Heater Off switch the heater for the substrate table. The PLC controls the preset temperature. The control parameters should preferably be set up so that any overshoot is avoided. Reference values for the control parameters: P = 10, I (Ti) = 20 seconds, D (TD) = 1 The command Heater On is enabled provided - the water flow is okay, - all chamber doors have been closed and - the chamber pressure is 0.3 mbar Substrate Positioning and Rotation Depending on the version, the substrate table is rotated only or is rotated and also positioned in the horizontal plane. Fig Faceplate: Substrate table Substrate position and rotation speed Through drag and drop selection, switch on the rotation of the substrate table with the correspondingly preset speed. Through the selection of Stop Rotation the rotation is stopped. The following speeds are selectable: 1, 2, 3, 4, 6, 8, 10, 12, 14, 16, 18 and 20 rpm. Through Go To Handover Position the substrate is moved to the handover position. When the substrate has arrived at the handover position this is then indicated through a hand symbol. Through Reset Drive any malfunctions affecting the drive controller can be acknowledged. When the message... Warning positioning drive not referenced - substrate table - xy is displayed press Go to Reference Position. This reference drive is normally required after a mains failure or after switching off the system via the mains switch. 38 GA502932V901_002_A0-01/ Oerlikon Leybold Vacuum

39 Substrate table: Rotation speed Rotation On and Rotation Off switch the rotation for the substrate table in consideration of the preset speed. If a transfer rod is provided, then it needs to be ensured that it is not present in the process chamber. Substrate table: lifting/lowering Table Up/Substrate Up or Table Down/Substrate Down move the substrate table up or down. The enabling conditions can vary depending on the type of equipment ordered Coating Systems Sources Sources with fixed mapping to the power units Each source is permanently mapped to a specific power unit. By clicking on the source the corresponding faceplate of the source opens. Shutter Time Setpoint : entry of the opening time for shutters, in hours, minutes and seconds. Remaining Time : time which remains until the shutter is closed automatically. Shutter Time Control : enable time controlled opening of the shutter. Manual opening and closing of the shutter is possible through Shutter Open and Shutter Close. If Time Control is enabled, then it is possible to prematurely close the shutter through Shutter Close. Fig Sources permanently mapped to a specific power unit GA502932V901_002_A0-01/ Oerlikon Leybold Vacuum 39

40 Thermal Evaporator: RPS 5002 Clicking on the source icon opens the corresponding faceplate. Through the faceplate keyboard the unit can be switched on and off manually. The entered setpoint is transferred to the unit. The unit can only be switched on provided the thermal evaporator has not yet been switched on. Upon switching on, the swing source of the thermal evaporator swings over the electron beam evaporator. For details on how to operate the evaporator please refer to the corresponding manual of the unit. Equipment for thermal evaporation Fig Thermal source faceplate Swing Sources MK 40/50 Right Hand Single filament water cooled Thermal Resistance Source holder which may be rotated over another source With shielding and electropneumatic actuator Resistance source may be mounted next to the electron beam gun so it will swing over the gun to allow sequential deposition from the baseplate center line Fig RPS 5002 controller 5 kw SCR controlled thermal resistance power supply with control panel volt/ammeter water and vacuum interlocks SCR power pack and a low voltage transformer with 5V, 10V, 20V and 40V terminals and interchangeable links Includes source selector switch for sequential deposition. 40 GA502932V901_002_A0-01/ Oerlikon Leybold Vacuum

41 Control via the deposition controller: The automatic program sequence can be started at the deposition controller SQC-310. For details on how to operate the deposition controller please refer to the corresponding manual of the instrument. Upon starting a SQC program, the shutter is automatically closed. The current and the shutter for the corresponding source are controlled according to the parameters entered in the SQC program. The setpoint is limited to 100% % correspond to A. Here each source is interpreted as a pocket of the deposition controller. In order to drive a source, the corresponding pocket is invoked. The corresponding pockets of the deposition controller may have been assigned as follows, for example: Deposition controller pockets SQC-310 (Pocket 9) SQC-310 (Pocket 10) Control thermal evaporator with corresponding shutter (TE 1) source TE11 (TE 1) source TE12 The thermal evaporator is only enabled provided the chamber door is closed the chamber pressure is 5 x 10-4 mbar the high-vacuum pump is run up the pressure switch displays vacuum the electron beam evaporator is off GA502932V901_002_A0-01/ Oerlikon Leybold Vacuum 41

42 Electron Beam Evaporator Ferrotec Clicking on the source icon opens the corresponding faceplate. Driving through the deposition controller: The automatic program sequence can be started at the deposition controller SQC-310. Upon starting a SQC program the shutter is closed automatically. While the process is active in the automatic mode, the electron beam evaporator and the shutters cannot be operated in the manual mode. Fig E-beam faceplate with shutter time control The emission current and the shutter for the corresponding source are controlled according to the parameters entered through the SQC program. Setpoint: the setpoint is limited to 100% % correspond to ma. The corresponding pockets of the electron beam evaporator have been assigned at the deposition controller as follows: Deposition controller pockets Control electron beam evaporator with corresponding shutter SQC-310 (Pocket 1) (EB1) source POCKET 1 SQC-310 (Pocket 2) (EB1) source POCKET 2 SQC-310 (Pocket 3) (EB1) source POCKET 3 SQC-310 (Pocket 4) (EB1) source POCKET 4 SQC-310 (Pocket 5) (EB1) source POCKET 5 SQC-310 (Pocket 6) (EB1) source POCKET 6 SQC-310 (Pocket 7) (EB1) source POCKET 7 SQC-310 (Pocket 8) (EB1) source POCKET 8 The electron beam evaporator is only enabled provided the chamber pressure is 5 x 10-4 mbar and the water flow is ok. CAUTION Use dark glasses (like used in welding goggles) to protect the eyes against the bright light emission of the e-beam source when observing the evaporation. 42 GA502932V901_002_A0-01/ Oerlikon Leybold Vacuum

43 4.11 Automatic / Recipe The substrate is coated using a sequential process in which layer by layer is deposited within the process chamber. Each layer may have its own layer recipe. The entire sequence of successive process steps (layer recipes) is termed process recipe. In the following, the term layer recipe is used synonymously with process recipe. A layer recipe is created for a certain process chamber and cannot be transferred to another. The process recipe describes coating of a substrate with one or several sequentially applied layers. The process recipe contains a freely definable sequence of layer recipes. One or several process chambers may be involved in working off a process recipe whereby these process chambers are enabled one after the other according to the layer recipe of the currently running process step. Fig Recipe management GA502932V901_002_A0-01/ Oerlikon Leybold Vacuum 43

44 Layer Recipe Administration Layer recipe administration serves the purpose of creating, administrating and saving of layer and cleaning recipes. The layer recipes are unambiguously assigned to the recipe chambers and are based on the process chamber templates. Functions Reading of the different templates by way of an XML file. Sorting and presentation of the existing layer and cleaning recipes according to the existing templates. Creating a new layer or cleaning recipe based on the existing templates (instantiating the template). Editing of an already existing layer or cleaning recipe. Validating the entry with reference to entry limits of a parameter. Entry editors for different parameter data types (integer, time span, enumeration and others, for example). Versioning of the layer and cleaning recipes. Deleting of layer and cleaning recipes. Duplicating of layer and cleaning recipes (copying and renaming). Renaming of layer and cleaning recipes. Individual grouping of the recipe pool within a category (process chamber type, cleaning) by the user. Exporting of layer and cleaning recipes by way of an XML file. Importing of layer and cleaning recipes by way of an XML file. 44 GA502932V901_002_A0-01/ Oerlikon Leybold Vacuum

45 Fig Process recipe Process Recipe Administration Process recipe administration serves the purpose of creating, administrating and saving of process recipes. Functions Presentation of the existing process recipes. Free grouping of the existing process recipes by the user. Creating a new process recipe with any number or a maximum number of process steps. Assigning an existing layer and cleaning recipe to a process step. Editing of existing process recipes: - Adding of process steps - Deleting of process steps - Re-sorting of process steps - Editing a layer or cleaning recipe of a process step - Replacing a layer or cleaning recipe within a process step. Exporting a process recipe by way of an XML file. Importing a process recipe by way of an XML file GA502932V901_002_A0-01/ Oerlikon Leybold Vacuum 45

46 Fig Magazines Magazine Administration Magazine administration consists of a number of slots or chambers into which the substrates can be placed. The substrates present in the magazine are subjected to processing one after the other in the system according to the process recipes which are associated to a substrate slot/chamber. A process recipe can only be assigned to a substrate slot/chamber provided it has been released first. Assigning of an existing process recipe to a Substrate in magazine / Chamber. Removing of a process recipe assigned to a substrate/chamber. This UNIVEX 450 B is equipped with only one process chamber when supplied. Substrate magazines are not present. Process Link The process link is the linking element between system controller and the actual recipe administration. It ensures that the process recipes planned through magazine administration with respect to a substrate/chamber are transferred to the system controller. The transfer of a process recipe to the system controller is not effected by way of a single block but is instead run in steps. The system controller requests from the process link the recipe of the in each case next process step, works it off and thereafter directs a new query for the next process step to the process link. This process is repeated until the process recipe has been completely worked off. 46 GA502932V901_002_A0-01/ Oerlikon Leybold Vacuum

47 Layer Recipe/Process Step One process step defines one layer recipe in each case. The recipe consists of the following logic units: Substrate handling Gas flow/pressure Source handling The logic units are worked off in parallel whereby the entire unit or parts of it can be disabled: The software includes a number of functions which are not relevant to this system because the corresponding hardware has not been built-in like bias sputtering or a third gas inlet, for example. These functions are described here only partly or not at all. The parameters for missing functions need to be set correspondingly to No or 0. Substrate Handling Fig Substrate handling Substrate handling generally means pre-processing or simultaneous processing of the substrate during the coating process in one step. These are among others: Heating or cooling of the substrate Rotation of the substrate Bias sputtering (not implemented) Substrate handling can be switched on or off through the selection entry Substrate handling = Yes/No. When substrate handling is switched off through No all subsequent settings and parameters will be ineffective. Heating or Cooling the Substrate The substrate may be heated to a specific temperature. Holding time: entry of the holding, respectively waiting time in order to determine running of the next action. The time measurement is started as soon as the currently measured temperature attains the setpoint. The in each case possible actions are described in other chapters. In any case the coating process will be only started after the holding time has elapsed. GA502932V901_002_A0-01/ Oerlikon Leybold Vacuum 47

48 Rotation of the Substrate The substrate may be rotated with an adjustable rotating speed. Substrate table rotation speed: 1, 2, 3, 4, 6, 8, 10, 12, 14, 16, 18, 20 rpm are possible. Process Gas/Pressure Within this unit/group the gas flows and the operating pressure are set up for the sputter coating. Here the gas flows and the pressures may be different during pre-sputtering and main sputtering in a process step. This unit can be switched on or off through the selection entry Select gas flow/vacuum process = Yes/No. When switching off the unit through No all subsequent settings and parameters will be ineffective. Adjustable parameters: Start-up delay: entry of a waiting time after gas admission so as to ensure a stable gas flow before the coating process starts. Shutdown delay: entry of a waiting time after termination of the gas admission at the end of the coating process before the process is terminated. Operating pressure: The controller ensures this operating pressure before switching on the sputtering units. Gas flow (Ar): entry of the gas flow for argon in sccm. Gas flow (O2): entry of the concentration for oxygen in percent of the total flow. Fig Process gas data input 48 GA502932V901_002_A0-01/ Oerlikon Leybold Vacuum

49 Fig Source handling Source Handling The automatic program sequence can be started at the deposition controller SQC-310. GA502932V901_002_A0-01/ Oerlikon Leybold Vacuum 49

50 4.12 Trends The UNIVEX 450 B is equipped with a trend logger module for archiving a statically configured number of process values. The archived process values are displayed for the user through statically configured trend views (see menu structure). The trend module offers besides the actual display of curves the following functionality: Several vertical axes Logarithmic and linear divisions for the vertical axes Horizontal axis is time related Zooming in vertical and horizontal direction Displaying of online (live) and off-line (saved) values. Ruler with indication of values Browsing and scrolling through the archive of process values. For each process chamber a double trend view is offered. Here two trend displays are arranged on top of each other. The trend displays are visually separated from each other through the joint X-axis. Fig Trends for the process chamber 50 GA502932V901_002_A0-01/ Oerlikon Leybold Vacuum

51 4.13 Service Service > Operating Hours Counter The operating hours counter lists in a table the units with their operating hours counters. The following functions are supported by the operating hours counter: Definition of the units to be displayed (e.g. pumps) via XML configuration. Tabular listing of all units with their operating hours counter. The table consists of the following columns: Designation of the unit Current value of the operating hours counter in the unit of measurement [hh::mm:ss]. Automatic updating of the list Fig Operating hours counter GA502932V901_002_A0-01/ Oerlikon Leybold Vacuum 51

52 4.14 User Management The user management module serves the purpose of central user and rights administration within a production system. Through the user management general domain user accounts, user groups and the corresponding access rights can be created, maintained or deleted. User Management Basics The user management is based on a free rights assignment system. There are no hierarchies, but by configuring accordingly a hierarchical system can be arranged. As a rule rights belong to a group. A user receives rights based on his affiliation with one or several groups. The assignment of rights to objects (parameters, templates, functions..., for example) is effected through categories to which the individual objects in the system are assigned. Content Pane User and Groups Invoke the user management through the navigation terminal: Administration Accounts The contents of the content pane will only be visible, respectively can be edited provided the currently logged in user has the corresponding rights. Tab "User List" See figure on the next page. Through this tab the information on all user accounts created in the system is displayed by way of a nested table. The left-hand section of the nested table contains information on the individual user accounts: The table with the user accounts will only be visible, respectively can be edited provided the currently logged in user has the corresponding rights. By simply clicking on the line of the respective user account select a user in the left-hand section of the nested table. The selected line will have a white background and is enclosed by the red separator line. The right-hand section of the nested table contains as drill down further information on the user account currently selected on the left-hand side: Double-clicking on a checkbox toggles the respective status. The user thus receives the group rights for the respective domain or his rights are revoked. If there are more entries in the table or in the drill down than can be displayed simultaneously in the window, then on the left-hand side or the right-hand side a vertical scrollbar will be displayed besides the table. By moving the scrollbar thumbs or by operating the scrollbar buttons the display window can be moved over the table. 52 GA502932V901_002_A0-01/ Oerlikon Leybold Vacuum

53 Fig Administration User List Command Buttons Beneath the table there are four command buttons. By double-clicking on the line of a user account the dialogue User properties is also opened. This function corresponds to the click on the command button Edit. GA502932V901_002_A0-01/ Oerlikon Leybold Vacuum 53

54 Fig Administration group settings Tab "Group Settings" Through this tab the information on all user groups created in the system is displayed by way of a nested table. The left-hand section of the nested table contains information on the individual user groups: The table with the user groups will only be visible, respectively can be edited provided the currently logged in user has the corresponding rights. By simply clicking on the line of the respective user group select a group in the left-hand section of the nested table. The selected line will have a white background and is enclosed by the red separator line. The right-hand section of the nested table contains as drill down further information on the user group currently selected on the left-hand side: Double-clicking on a checkbox toggles the respective status. The group thus receives the group rights for the objects or the rights are revoked. If there are more entries in the table or in the drill down than can be displayed simultaneously in the window, then on the left-hand side or the right-hand side a vertical scrollbar will be displayed besides the table. By moving the scrollbar thumbs or by operating the scrollbar buttons the display window can be moved over the table. 54 GA502932V901_002_A0-01/ Oerlikon Leybold Vacuum

55 Access categories for use of UNIVEX operation Standard usage No command or setting rights Extended usage 1. Commands on Faceplate 2. Start of automatic mode Standard process setting 1. Selection of control mode 2. Settings of setpoint e.g. setpoint flow or gas flow Extended process setting 1. Correction factor of gas 2. Source name and material name 3. Control parameters: eg. Gain, TI, TD of substrate heater Service manufacturer 1. Adminstration 2. Service:Tag Browser 3. Reset of operation counter 4. Date and time of system 5. Opening of service door Service customer 1. Adminstration 2. Date and time of system 3. Opening of service door Command Buttons Beneath the table there are four command buttons. By double-clicking on the line of a user group the dialogue Group properties is also opened. This function corresponds to the click on the command button Edit group. Dialog Group properties In the dialogue Group properties the name of the user group can be edited. For this click on the entry field. Clicking on the command button OK closes the dialogue and saves the changes. Alternatively the dialogue can be closed by the entry of Return. Clicking on the command button Cancel closes the dialogue and discards possibly entered changes. The entered group name must be unambiguous. GA502932V901_002_A0-01/ Oerlikon Leybold Vacuum 55

56 4.15 Shut-off After having vented the system, switch off the main switch. Shut off the water cooling circuit. When cooling the system during standstill, condensation will occur. Shut off the nitrogen and compressed air feeds. If during longer downtimes the system shall remain conditioned for a rapid pumpdown, we recommend to vent in the system with dry nitrogen to atmospheric pressure and maintain it in this condition without opening it Emergency Off In case of emergency the UNIVEX 450 B can be completely deenergised through the main switch with EMO function. The red and yellow rotary switch is located centrally on the front of the electrical cabinet. The pump system and the process components are switched off. All valves with the exception of the purge gas valve are closed. Thus pump system and vacuum chamber are vented gently. After having removed the fault cause, vent the UNIVEX and switch it off as described above. 56 GA502932V901_002_A0-01/ Oerlikon Leybold Vacuum

57 Maintenance 5 Maintenance 5.1 Safety Information Before starting any work on the UNIVEX, switch the UNIVEX off reliably and vent in accordance with Section Only Oerlikon Leybold Vacuum personnel or personnel instructed by Oerlikon Leybold Vacuum may perform any repair work on the UNIVEX. During all connection work, make sure that the mains cables have been reliably disconnected and do not carry a mains voltage. DANGER After switching off, parts of the system may still be very hot. Let the system cool down and/or wear protective clothing. If the system has previously pumped hazardous gases take the appropriate safety measures before opening the intake or exhaust ports. Use gloves, a breathing mask or protective clothing to avoid skin contact with toxic or highly corrosive substances. Work under a fume hood. 5.2 Maintenance Intervals The Scroll pump must be checked and have a standard maintenance annually or after 8000 operating hours. For this ask us for a quotation. Diaphragm and valve plates are the only wearing parts of the diaphragm pump. Wear will make itself felt by an increase in the attainable ultimate pressure resp. pumping speed will be impaired. We recommend exchanging the entire regenerator displacer in the cold head of the cryopump after 9,000 hours of operation. The adsorber of the compressor unit will have to be replaced after about 18,000 hours of operation. During operation, check the operating pressure and the coolant flow rate of the compressor unit at regular intervals (at least every 6 months). For this see the Operating Instructions for the compressor unit. SCROLLVAC Diaphragm pump Cryo pump system GA502932V901_002_A0-01/ Oerlikon Leybold Vacuum 57

58 Maintenance Contamination Form 5.3 Oerlikon Leybold Vacuum Service Whenever you send us in equipment, indicate whether the equipment is contaminated or is free of substances which could pose a health hazard. If it is contaminated, specify exactly which substances are involved. You must use the form we have prepared for this purpose. A copy of the form has been reproduced at the end of these Operating Instructions: Declaration of Contamination for Compressors, Vacuum Pumps and Components. Another suitable form is available from Oerlikon Leybold Vacuum Documentation Download Documents. Attach the form to the equipment or enclose it with the equipment. This statement detailing the type of contamination is required to satisfy legal requirements and for the protection of our employees. We must return to the sender any equipment which is not accompanied by a contamination statement. 5.4 Cleaning Regularly remove any loose particles or residues present in the vacuum chamber. Loose particles can be removed with a vacuum cleaner. From time to time remove the inner cover panel from within the process chamber and clean these. The intervals will depend very much on the kind of processes run within the chamber. After having exposed the system to the atmosphere for a longer period of time, it is likely that humidity and other constituents of the air will have deposited themselves on the inner surfaces. This results in longer pumpdown times, respectively an impaired ultimate pressure. Such light contamination can be removed prolonged pumping while at the same time baking out the vacuum chamber. In the case of more severe contamination, it may be required to disassemble pumps or valves. 58 GA502932V901_002_A0-01/ Oerlikon Leybold Vacuum

59 Troubleshooting 6 Troubleshooting Failure ID All failure IDs begin with AL_DSC. There then follows the designation for the chamber to which these apply, like PC1 for process chamber 1, LL for load lock chamber or TC for transfer chamber. This is then followed by the failure number. Example: AL_DSC_TC_F00_31_F021. Failure numbers and failure descriptions are basically the same for all chambers. The failure descriptions differ through their chamber number of the affected component and the chamber designation. Example: motor protection failure - P320 - High vacuum pump - TK. These two designators are for this reason replaced in the following by x or Cx. Failure No Failure description Possible cause Remedy Responsibility F00_31_F000 Failure motor protection - Px10 - roughing pump - Cx Motor protection switch of the roughing pump has responded. Possible causes: Blocked exhaust Seized pump Defective motor After the switch has responded and before restarting let the switch cool down for at least 3 to 5 minutes. Check to see that the exhaust is not blocked. Replace the pump. Check to see if the motor will turn, replace motor. Maint. personnel/ Service F00_31_F001 Failure feedback signal Px10 - roughing pump - Cx Contactor of the roughing pump does not supply any return information although being driven. Replace contactor. Maint. personnel F00_31_F005 Failure vacuum generation - Cx No vacuum, 2 minutes after evacuation has been started. Possible causes: Major leak Safety pressure switch PS 113 A defective. Leak test. Check safety pressure switch, replace if required. Maint. personnel/ Service F00_31_F006 F00_31_F007 Failure venting valve Vx40 - Cx Failure roughing valve Vx20 - Cx No compressed air available or (over)pressure < 4 bar. Defective valve position switch. Defective valve. Reconnect compressed air, check pressure. Replace position switch. Replace valve. Maint. personnel F00_31_F008 Failure bypass valve Vx30 - Cx GA502932V901_002_A0-01/ Oerlikon Leybold Vacuum 59

60 Troubleshooting Failure No. Failure description Possible cause Remedy Responsibility F00_31_F010 F00_31_F011 Failure high vacuum gate valve Vx10 - Cx Failure chamber separation gate valve Vx70(Cx) - Cx No compressed air available or (over)pressure < 4 bar. Defective valve position switch. Defective valve. Reconnect compressed air, check pressure. Replace position switch. Replace valve. Maint. personnel F00_31_F012 Warning no purge gas Px20 - high vacuum pump - Cx No purge gas (nitrogen) available or pressure < 1.2 bar. Defective valve position switch. Defective valve. Reconnect purge gas, check pressure. Replace position switch. Replace valve. Maint. personnel F00_31_F013 F00_31_F014 Failure PMx10 - PTR 90 - PENNINGVAC - Cx Failure IMx10 - ITR 90 - IONIVAC - Cx Missing or apparently incorrect signal from the gauge head. Transmitter is defective or connection is malfunctioning. Check the connections, if required replace gauge head. Maint. personnel F00_31_F015 Failure CMx10 - CTR 90 - CERAVAC - Cx F00_31_F016 Failure TMx12 - TTR 90 - THERMOVAC - Cx F00_31_F018 to F00_31_F021 Failure mass flow controller Axyx - (Gas...) - set point not achieved - Cx The PLC has detected a too big difference between set and actual process gas flow values. Check process gas supply, valves and flowmeters. Operator/ Maint. personnel F00_31_F022 to F00_31_F031 F32_63_F000 to F32_63_F003 Failure water flow monitor - (source...) - Cx The cooling water flow to one of the sources is too low, the source is switched off. Ensure sufficient cooling water flow. Check the flow monitor adjustment. Operator/ Maint. personnel F32_63_F004 F32_63_F005 Failure water flow monitor substrate table Failure water flow monitor - heated substrate stage - Cx The cooling water flow to a device is too low, the device is switched off. Ensure sufficient cooling water flow. Check the flow monitor adjustment. Operator/ Maint. personnel F32_63_F006 Failure water flow monitor 60 GA502932V901_002_A0-01/ Oerlikon Leybold Vacuum

61 Troubleshooting Failure No. Failure description Possible cause Remedy Responsibility F32_63_F016 Failure motor protection substrate table - Cx Motor protection switch of the substrate table has responded. Possible causes: Blocked substrate table Defective substrate table After the switch has responded and before restarting let the switch cool down for at least 3 to 5 minutes. Check to see that the substrate table is not blocked. Replace substrate table if required. Maint. personnel/ Service F32_63_F017 Failure proximity switch - lift drive substrate table - Cx Proximity switch is electrically or mechanically defective. Check switch and drive, replace switch if necessary. Maint. personnel F32_63_F018 to F32_63_F020 Failure power supply Cx Defective device. Disconnect and check this device, replace if necessary. Maint. personnel F32_63_F021 Failure control - heated substrate stage - Cx Defective heater element, short or broken connection, internal error. Check heater elements and wiring. Maint. personnel/ Service F32_63_F022 Failure temperature sensor - heated substrate stage - Cx Missing or apparently incorrect signal from the temperature sensor in the substrate stage. Sensor is defective or connection is malfunctioning. Check the connections, if required replace temperature sensor. Maint. personnel F32_63_F023 Failure Download Recipe Magazine - Cx Defective data file, missing data file, internal error. Contact OLV OLV Service / Programmer F32_63_F024 Failure Download Recipe Chamber - Cx F32_63_F025 Warning: Process Step or Magazine is no entry - Cx Missing input for automatic process control. Missing data are processed as zero or no. Input missing data. Operator GA502932V901_002_A0-01/ Oerlikon Leybold Vacuum 61

62 Troubleshooting Failure No. Failure description Possible cause Remedy Responsibility F32_63_F028 Failure positioning drive - substrate table - Cx Rotary drive is malfunctioning. Green LED for rotary drive is flashing. On the mounting panel switch off the fuse for the rotary drive, wait five seconds and switch on again. When the green LED then comes on, the rotary drive will be okay. Maint. personnel Defective rotary drive. Replace rotary drive. F32_63_F029 Warning positioning drive not referenced - substrate table - Cx Perform a reference drive. Operator F32_63_F030 Failure rotation drive - substrate table - Cx Rotary drive is malfunctioning. Green LED for rotary drive is flashing. On the mounting panel switch off the fuse for the rotary drive, wait five seconds and switch on again. When the green LED then comes on, the rotary drive will be okay. Maint. personnel Defective rotary drive. Replace rotary drive. F32_63_F031 Failure door switch - Cx Door safety switch is electrically or mechanically defective. Check switch and door, replace switch if necessary. Maint. personnel F64_95_F000 to F64_95_F002 Failure power supply Qxyz -... etching source - Cx Defective device. Disconnect and check this device, replace if necessary. Maint. personnel F64_95_F003 Failure plasma etching controller Ax80 - Cx Defective device. Disconnect and check this device, replace if necessary. Maint. personnel F64_95_F004 Failure no feed back etching controller Ax80 - Cx F64_95_F005 Failure operating time (50 hours) etching controller reached The key RESET TIME GAS REFLECTOR OKAY? has not been pressed after an ion source operating time of more than 50 hours. Check the gas reflector at the ion source and replace it if required. Press the key to reset this message. Maint. personnel 62 GA502932V901_002_A0-01/ Oerlikon Leybold Vacuum

63 Troubleshooting Failure No. Failure description Possible cause Remedy Responsibility F64_95_F006 to F64_95_F013 Failure... ebeam 1 - Cx Defective device. Disconnect and check this device, replace if necessary. Maint. personnel F64_95_F014 to F64_95_F021 Failure... ebeam 2 - Cx Defective device. Disconnect and check this device, replace if necessary. Maint. personnel F64_95_F022 Failure high vacuum gate valve Vx12 door gap - Cx No compressed air available or (over)pressure < 4 bar. Defective valve position switch. Defective valve. Reconnect compressed air, check pressure. Replace position switch. Replace valve. Maint. personnel F64_95_F023 Failure positioning door lift drive - Cx Drive is blocked. Defective device. Check if drive is blocked. Disconnect and check drive, replace if necessary. Maint. personnel F64_95_F024 Failure proximity switch door lift drive - Cx Proximity switch is electrically or mechanically defective. Check switch and drive, replace switch if necessary. Maint. personnel F64_95_F025 F64_95_F026 Failure... thin film controller... - Cx Defective device. Disconnect and check this device, replace if necessary. Maint. personnel F64_95_F027 Failure motor protection - Px10 - roughing pump - Cx Motor protection switch of the roughing pump has responded. Possible causes: Blocked exhaust Seized pump Defective motor After the switch has responded and before restarting let the switch cool down for at least 3 to 5 minutes. Check to see that the exhaust is not blocked. Replace the pump. Check to see if the motor will turn, replace motor. Maint. personnel/ Service F64_95_F028 Failure feed back - Px10 - roughing pump - Cx Contactor of the roughing pump does not supply any return information although being driven. Replace contactor. Maint. personnel GA502932V901_002_A0-01/ Oerlikon Leybold Vacuum 63

64 Troubleshooting Failure No. Failure description Possible cause Remedy Responsibility F64_95_F029 Failure motor protection - Px20 - cryo pump - Cx Motor protector has responded. Power supply or controller of cryo pump or pump is defective. See Operating Instructions for the cryo pump. The cryo controller display will indicate an error message. Replace defective device. Maint. personnel/ Service F64_95_F030 Failure motor protection - Ax20 - compressor Motor protector has responded. Compressor unit for cryo pump or pump is defective. See Operating Instructions for the compressor unit. The compressor unit display will indicate an error message. Replace defective device. Maint. personnel/ Service F64_95_F031 Failure cryo pump - Cx Power supply or controller of cryo pump or pump is defective. See Operating Instructions for the cryo pump. The cryo controller display will indicate an error message. Replace defective device. Maint. personnel/ Service F96_127_F000 Failure communication network cryo pump - Cx Connection is malfunctioning. Defective device. Check the connections, if required replace defective device. Maint. personnel F96_127_F001 Failure evacuation - Cx No vacuum, 2 minutes after evacuation has been started. Possible causes: Major leak Safety pressure switch PS 113 A defective. Leak test. Check safety pressure switch, replace if required. Maint. personnel/ Service F96_127_F002 F96_127_F003 Failure roughing valve Vx20 - Cx Failure bypass valve Vx30 - Cx No compressed air available or (over)pressure < 4 bar. Defective valve position switch. Defective valve. Reconnect compressed air, check pressure. Replace position switch. Replace valve. Maint. personnel F96_127_F004 Failure venting valve Vx40 - Cx F96_127_F006 Warning operating time (40 hours) etching controller reached - Cx The key RESET TIME GAS REFLECTOR OKAY? has not been pressed after an ion source operating time of more than 40 hours. Check the gas reflector at the ion source and replace it if required. Press the key to reset this message. Maint. personnel F96_127_F007 Failure motor protection Q1 - power supply electrical socket Motor protector has responded. Defective device. Replace defective device. Maint. personnel F96_127_F008 Failure motor protection Q2 - power supply cabinet fan 64 GA502932V901_002_A0-01/ Oerlikon Leybold Vacuum

65 Troubleshooting Failure No. Failure description Possible cause Remedy Responsibility F96_127_F010 Failure motor protection - Px12 - door gap pump - Cx Motor protection switch of the roughing pump has responded. Possible causes: Blocked exhaust Seized pump Defective motor After the switch has responded and before restarting let the switch cool down for at least 3 to 5 minutes. Check to see that the exhaust is not blocked. Replace the pump. Maint. personnel/ Service F96_127_F011 Failure feedback signal - Px12 - roughing pump - Cx/Cy Contactor of the roughing pump does not supply any return information although being driven. Replace contactor. Maint. personnel F96_127_F012 Failure vacuum generation - door gap - Cx No vacuum, 2 minutes after evacuation has been started. Possible causes: Major leak Safety pressure switch PS 113 A defective. Leak test. Check safety pressure switch, replace if required. Maint. personnel/ Service F96_127_F013 Failure venting valve Vx42 - Cx No compressed air available or (over)pressure < 4 bar. Defective valve position switch. Defective valve. Reconnect compressed air, check pressure. Replace position switch. Replace valve. Maint. personnel F96_127_F014 Failure motor protection high vacuum gate valve Vx10 - Cx Valve is blocked. Defective device. Check if valve is blocked. Check valve, replace if necessary. Maint. personnel GA502932V901_002_A0-01/ Oerlikon Leybold Vacuum 65

66 Disposal Contamination WARNING 7 Waste Disposal The equipment may have been contaminated by the process or by environmental influences. In this case the equipment must be decontaminated in accordance with the relevant regulations. We offer this service at fixed prices. Further details are available on request. Contaminated parts can be detrimental to health and environment. Before beginning with any work, first find out whether any parts are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts. Separate clean components according to their materials, and dispose of these accordingly. We offer this service. Further details are available on request. When sending us any equipment, observe the regulations given in Section 5.3 Oerlikon Leybold Vacuum service. 66 GA502932V901_002_A0-01/ Oerlikon Leybold Vacuum

67 EC - Declaration of Conformity The manufacturer: Oerlikon Leybold Vacuum GmbH Bonner Straße 498 D Köln Tel.: +49(0) Info.vacuum@oerlikon.com herewith declares that the following product: Product designation: Type designation: Part number: UNIVEX 450B for thermal and e-beam evaporation V901 complies with all pertinent regulations of the Directive on Machinery (2006/42/EC). Furthermore the machinery complies with all regulations of the Directive Electrical Equipment (2006/95/EC) and Electromagnetic Compatibility (2004/108/EC). The following harmonised standards have been applied: EN A1:2009 Compressors and vacuum pumps - Safety requirements - Part 2: Vacuum pumps EN , 2006 Safety of machinery - Electrical equipment of machines - Part 1: General requirements EN , 2007 Electromagnetic compatibility (EMC) - Part 6-4: Generic standards - Emission standard for industrial environments EN , 2005 Electromagnetic compatibility (EMC) - Part 6-2: Generic standards - Immunity for industrial environments Documentation officer: Herbert Etges Phone: +49(0) Fax: +49(0) documentation.vacuum@oerlikon.com Oerlikon Leybold Vacuum GmbH Bonner Strasse 498, D Köln Cologne, May 6, 2011 Cologne, May 6, 2011 Armin Hestermann Senior Manager Solutions Harald Udelhoven Senior Manager Head of Quality Management GA502932V901_002_A0-01/ Oerlikon Leybold Vacuum 67