Vacuum chucks. Modular version in standard sizes or special design. µ-porous vacuum chucks

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1 34 µ-porous vacuum chucks µ-porous Vacuum chucks Modular verson n standard szes or specal desgn These chucks have a porous surface area made out of snterbronze, ceramc or porous alumnum dependng on the applcaton and workpece. METAPOR opens a whole new perspectve for dfferent clampng solutons Applcaton Preferred workpeces: Thn walled (.e. paper, fols, plate bars, metal strps) Fne (.e. optcal) Soft materals (.e. rubbers) for work such as: Hgh precson measurng Precson mllng Slcon wafer producton Advantages Due to the absence of grooves and holes workpeces are not deformed for nstance on nserts n the clampng area Mllng through the workpece s possble wth the use of our Frcton booster METAPOR has dfferent qualty grades and can also qualfy for clean room surroundngs (Kl. 10) Handlng Modular chucks can be nterconnected to enlarge the surface area. Part specfc specal desgns avalable

2 µ-porous vacuum chucks 35 µ-porous Vacuum chuck wth METAPOR CE100 Whte C Nr. A B C , , A B Plate nlay n Metapor CE 100 WHITE fne porous materal wth low pore dameter and very homogenc total porosty Supply ncludes: Modular Metapor TM vacuum chuck 12x Heght adjustable excentrc end stops Vacuum chuck adapter 1m Vacuum sucton hose wth plug 2 x Step heel clamps, alu Tools for settng up µ-porous Vacuum chuck wth METAPOR MC100 Whte C Nr. A B C , , A B Plate nlay n Metapor MC 100 WHITE fne porous materal wth low pore dameter and very homogenc total porosty, wth larger porosty compared to BF 100 AL Supply ncludes: Modular Metapor TM vacuum chuck 12x Heght adjustable excentrc end stops Vacuum chuck adapter 1m Vacuum sucton hose wth plug 2 x Step heel clamps, alu Tools for settng up Other Dmensons avalable on request. Further nformaton on Metapor see page 96

3 C 36 µ-porous vacuum chucks C µ-porous Vacuum chuck wth METAPOR BF100 Al A Nr. A B C , , A B B Supply ncludes: Modular Metapor TM vacuum chuck 12x Heght adjustable excentrc end stops Vacuum chuck adapter 1m Vacuum sucton hose wth plug 2 x Step heel clamps, alu Tools for settng up Plate nlay n porous materal Metapor BF100 AL detals on page 96 µ-porous Vacuum chuck wth METAPOR HD 210 Nr. A B C , , Supply ncludes: Modular Metapor TM vacuum chuck 12x Heght adjustable excentrc end stops Vacuum chuck adapter 1m Vacuum sucton hose wth plug 2 x Step heel clamps, alu Tools for settng up Plate nlay n porous materal Metapor HD210 AL for temperatures up to 210 C

4 µ-porous vacuum chucks 37 Sntermetal Vacuum chuck Double layered, hardwearng snterbronze nlay C Nr. A B C , , ,4 A B Supply ncludes: Modular Metapor TM vacuum chuck 12x Heght adjustable excentrc end stops Vacuum chuck adapter 1m Vacuum sucton hose wth plug 2 x Step heel clamps, alu Tools for settng up Frcton Booster Protects Metapor chucks from damage when through cuttng or laserng parts Nr. A B C Stck <1 50 1, <1 25 1, <1 25 3,6 Other Dmensons avalable on request. Further nformaton on Metapor see page 96

5 38 µ-porous vacuum chucks Vacuum Clampng Technology for new technologes n research and development Specal verson wth ntegrated heatng and electronc temperature control 1. Clampng wth Wtte vacuum chucks Vacuum chucks from Wtte have proven successful n many areas of semconductor technology and made a name for accurate, fast and "gentle" clampng. These lghtweght, yet very accurate vacuum chucks are made of alumnum alloy and usually have a mcro-porous clampng surface of Metapor materal. However, custom-bult perforated-grd chucks wth small holes arranged n a specfc pattern can also be mplemented. (See pctures) 2. Flexble Besdes standard versons of ths vacuum chucks, Wtte offers every concevable specfc desgn and dmenson. We analyze techncal requrements and envronmental condtons of customers processes, and develop a concept together wth them. Varous techncally feasble confguratons have already been manufactured. 3. Accurate A modern machne shop and clmatzed measurng rooms wth hgh precson measurng machnes ensure excellent qualty of products. Vacuum chucks are avalable wth flatness and / or parallelsm of < 5µm f the applcaton profle of the customer requres t. 4. Relablty A chuck surface comprsng of mcro-porous materal guarantees completely "flat" clampng. Thn carrer fols or wafers are not deformed by sucton holes, sucton grooves or smlar whch occurs durng conventonal clampng methods. The low weght and accuracy of such Wtte chucks s also advantageous for automated applcatons. 5. Unversal Another major advantage of mcro-porous vacuum chucks s that the vacuum stll works extremely effectvely even when the mcro-porous surface s not covered completely. Ths enables clampng of dfferent szed parts on the same chuck. The porous surface may also be dvded nto separately operable areas wth ndvdual swtches. (See example opposte) Integrated hovercraft technology, ejector and lftng pns are some of the techncal ngredents of these nnovatve concepts. Furthermore, vacuum chucks for certan processes can be "heatable" up to a temperature as hgh as 150 C wth correspondng temperature controls (see pcture above.). Lkewse, coolng systems or lght transparency applcatons are possble. 6. Everythng from one source In addton to standard and custom vacuum chucks Wtte supples all necessary accessores such as smple ejectors, vacuum pumps, rotary jonts, hoses, solenod valves and much more. Our expert staff can advse you and look forward to your nqury.

6 µ-porous vacuum chucks 39 Specally desgned porous chuck wth three ndvdual clampng areas, stops for part postonng and lftng pns for easy removal of wafers. Independent vacuum chuck. Clampng of parts on chuck completely free of external supply lnes. Battery, vacuum pump, controls, dsplay and valves are all ntegrated Flourescent chuck, 6 dameter Grd hole chuck wth fnely mlled surface Fnely mlled vacuum chuck for clampng wafers, clampng area mcroporous materal Wtte MP CE100 WHITE flatness accuracy <0,005mm

7 40 µ-porous vacuum chucks DLC lght transmttng chuck for clampng parts, vews from above and below µ-porous vacuum chucks Further examples Applcaton n automotve ndustry, leather clamped on vsble sde for grndng predetermned breakng ponts n areas of arbags on reverse sde Same chuck shown wthout leather parts

8 µ-porous vacuum chucks 41 Vacuum clampng system for laser applcaton. Detal shows both clampng areas and cuttng channels. Small sze mcro fnely machned chuck Vacuum chuck wth four separately usable clampng areas Vacuum chuck wth mcro porous clampng surfaces and holes for applcatons usng lght transference

9 42 µ-porous vacuum chucks Vacuum chuck wth two clampng areas and lftng pns for automatc controlled process Vacuum chuck wth three clampng areas and lftng pns for manually controlled process DLC (Durchlcht chuck), lght transmttng chuck for gentle clampng of parts durng optcal analyss process

10 Sntermetal vacuum fxtures 43 Pcture shows a specal snter metal vacuum fxture used n qualty control department of CD manufacturer Sntermetal vacuum fxtures Vacuum chuck for credt cards 3D Vacuum chuck Snter metal vacuum chuck wth specal adapter plate for clampng hard metal blanks durng laser machnng process. It has an ntegrated coolng labyrnth whch prevents naccuraces, due to development of warmth whch occurs durng the laser machnng process