from In this issue teamwork... OBSOLESCENCE ALERTS Product Enhancements Akrion Systems News SPECIAL OFFERS!

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Maud Wilkins
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1 from February 5, 2009 ISSUE 1-3 teamwork... that's what it took for the Pittsburgh Steelers to win the NFL Super Bowl. A group of people working together can accomplish great things. We here in Pennsylvania are proud of the Steelers and the way they came together as a team. At Akrion Systems, we think of ourselves as TEAMMATES with our customers. We want you to WIN! This newsletter provides information about a replacement for obsolete Komatsu in-line heaters used in SOM/SPM/SC1/SC2 and PRM modules on the Rearmount, GAMA and V3 platforms. The replacement is less expensive and subsequent replacements take less than 20 minutes. There is also information here about two cost saving Product Enhancements. Marangoni dryer users are strongly encouraged to consider adding IPA concentration monitoring to their system. The fail-safe detection design protects you from product loss due to insufficient drying by absence of IPA. For GAMA and V3 owners, Akrion Systems is offering a new level sensor that costs less to replace and is more reliable than float sensors. In this issue OBSOLESCENCE ALERTS GAMA, Rearmount, & V3: Komatsu in-line heater Product Enhancements AWP: "Marangoni" IPA concentration monitor GAMA & V3: Back-pressure level sensors for QDR modules Akrion Systems News In addition to contacting your local Service Representatives, for emergency situations please send an message to alert@akrionsystems.com. You will receive a response from Senior Management along with a tracking number for follow-up within 24 hours. This will insure our support escalation process has been put into motion. SPECIAL OFFERS! Free standard shipping on orders over $10,000 placed from February 5 through March 31, Reference special order code: SHIPFREE0309 with your order. Be sure to check out our special REBATE OFFER for parts and services. Look for the link on our home page at Product Alert is published by Akrion Systems. Copyright Akrion Systems All rights reserved.

GAMA Series, Rearmount and V3 Platforms Halogen In-line Heating System PRODUCT OBSOLESCENCE ANNOUNCEMENT Effective Immediately This notice is to inform you that the Komatsu in-line heater used in

2 GAMA Series, Rearmount and V3 Platforms Halogen In-line Heating System PRODUCT OBSOLESCENCE ANNOUNCEMENT Effective Immediately This notice is to inform you that the Komatsu in-line heater used in GAMA, V3 and Rearmount systems is at End of Life obsolescence. Akrion Systems' vendor will no longer manufacture the product. In order to maintain continued operation of your wet station, Akrion Systems has developed a field upgrade kit to replace the existing heater with a new fully supported replacement. Purchasing now (before unit failure) assures that the upgrade can be scheduled so as not to significantly impact production. The new heating system reduces cost of ownership and enhances safety. Please contact your area Service or Sales Manager to purchase. Replaces P/N: PMP1A0028 Applications: SOM/SPM/SC1/SC2 (8 kw); PRM (4.5 kw) Features and Benefits: Uptime/Overall Value Added Bulb change out time of less than 20 minutes compared to more than 8 hours for Komatsu recirculation loop is not disturbed (re-qualification is not needed) Improved heat up time COO (Cost of Ownership) Reductions Lower replacement bulb and heater cost than Komatsu Safety Improvements: No heat build up in compartment (true purge) Improved heat displacement and integrated purge monitor for over-temperature protection Built in Leak Sensor One 8kW (or 4.5 kw for PRM) in-line heater Plumbing upgrade Interconnects and head case upgrade Software : Equipment Down-time during installation (estimated) Approximately 48 hours 2 Regional Field Service or Factory Technicians (subject to factory production availability) 8-12 weeks PRICE: $39,800 (plus installation costs)

Applications: AWP wet stations with Marangoni dryers; OEM Marangoni dryers Benefits: Eliminates misprocessing and potential yield loss caused by absence of IPA If IPA concentration falls below a set

3 Applications: AWP wet stations with Marangoni dryers; OEM Marangoni dryers Benefits: Eliminates misprocessing and potential yield loss caused by absence of IPA If IPA concentration falls below a set level, a system alarm is generated "Steag" AWP Platform Protect Yourself from Product Loss! IPA Concentration Monitoring PRODUCT ENHANCEMENTS Features: True concentration in process chamber is measured Reliable fail safe detection design Easy adjustment and calibration Self-diagnostics and zero calibration function Stable reading and high selectivity IPA sensor, continuous measuring type and sampling piping in separate housing Sampling port for the dryer lid with piping Tool software modification with user adjustable alarm level and concentration trending chart (AWP tools only) Analog output: an analog output (4-20mA) can be used to read the concentration from the IPA concentration monitor Equipment Down-time during installation (estimated): < 6 hours per system 1 Regional Field Service or Factory Technician (lead-time subject to factory production availability) 10 weeks PRICE: $29,500 per dryer (plus installation costs)

GAMA Series and V3 Platforms Back-Pressure Level Sensors for Quick Dump Rinse Tanks PRODUCT ENHANCEMENTS Applications: All GAMA and V3 systems with QDR tanks Benefits: Uptime/Overall Value Added

4 GAMA Series and V3 Platforms Back-Pressure Level Sensors for Quick Dump Rinse Tanks PRODUCT ENHANCEMENTS Applications: All GAMA and V3 systems with QDR tanks Benefits: Uptime/Overall Value Added Eliminate scrap due to rinse tank not filling Non intrusive component replacement All electronic components reside inside head-case for fast replacement/repair (about 2 hours per occurrence) Low cost sensor Back-pressure sensor Back-pressure sensor tube Integration kit / mounting hardware Software reconfiguration Equipment Down-time during installation (estimated): < 6 hours per module 1 Regional Field Service or Factory Technician or Customer self-install (manual provided) (lead-time subject to factory production availability) 4weeks PRICE: First Level Sensor in Tool: $7,000 Each Additional Level Sensor in the Same Tool: $1,500 Installation costs are not included

5 6330 Hedgewood Drive, Suite #150 Allentown, Pennsylvania USA General Spare Parts Stocking Policy: Akrion Systems stocks parts to cover warranty and parts sales based on historical usage. Parts with zero turns in the previous 12 month cycle will not be replenished when used and safety stock levels will go to zero. Parts with less than 5 turns in the previous 12 month cycle will be evaluated for safety stock based on previous cycles and the active install base. When part turns increase we will increase our safety stock levels accordingly. Should you have specific stocking needs please contact us for a personal review and recommendation. This will allow us to insure all your needs are met. OBSOLESCENCE ALERTS Product Enhancements Rearmount: Industrial Grade Computer GAMA: Industrial Grade Computer Gas Mass Flow Controller: SCP 9400 VaporJet Dry MFC SCP E200/9400 Green Dry MFC GAMA/Rearmount/V3 Komatsu in-line heater GAMA/V3/AWP/SCP E200/9400: Controlled Nitride Etch Processing E200/9400: Quartz In-line Heater for wet stations with sulfuric or phosphoric modules "Steag" AWP: Chemical Safe Mode "Marangoni" IPA Concentration Monitor GAMA/V3 Pressure Sensor for QDR Modules

Refrigeration Controller Operator s Manual (HRC) PO Box 6183 Kennewick, WA

Refrigeration Controller Operator s Manual (HRC) PO Box 6183 Kennewick, WA 99336 www.jmcvr.com 1-509-586-9893 Table of Contents TABLE OF FIGURES...1 OVERVIEW OF THE HRC CAPABILITIES...2 INSTALLATION AND