DFM. n n n. flow pressure temperature MULTI PARAMETER DIGITAL MASS FLOW METERS. Totalizer. Interface. n n n n n

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1 Multi Parameter flow meters provide accurate data o three differet fluid parameters: flow pressure temperature The flow rate ca be displayed i volumetric flow or mass flow egieerig uits for stadard or actual (temperature, pressure) coditios. Flow meters ca be programmed locally by the four butto keypad ad LCD or remotely via RS-232/RS-485 iterface. flow meters support various fuctios icludig: flow totalizer, flow, temperature, pressure alarms, automatic zero adjustmet, 2 relay outputs, 0-5 Vdc / 0-10 Vdc / 4-20 ma aalog outputs for flow, pressure ad temperature. 's are offered either as Digital Mass Flow Meters, Model Numbers: 26, 36, & 46 or as a Digital Multi-Parameter Meters, Model Numbers, 27, 37 & 47. Model Numbers are displayed i Table 26. THERE ARE 3 VOLTAGE (POWER) OPTIONS: +15Vdc, 12Vdc, & 24Vdc. Iterface All features of the flow meter ca be accessed via the local four butto keypad ad LCD. The digital iterface operates via RS485 (optioal RS-232 is available) ad provides access to applicable iteral data icludig: flow, temperature, pressure readig, auto zero, totalizer ad alarms settigs, gas table, coversio factors ad egieerig uits selectio, dyamic respose compesatio ad liearizatio table adjustmet. The aalog iterface provides 0 to 5Vdc or 0 to 10Vdc or 4 to 20 ma outputs for flow, pressure ad temperature (jumper selectable). Totalizer The total volume of the gas is calculated by itegratig the actual gas flow rate with respect to time. Both keypad meu ad digital iterface commads are provided to: set the totalizer to ZERO. start the totalizer at a preset flow. assig actio at a preset total volume. start/stop totalizig the flow. read totalizer. Totalizer coditios become true, whe the totalizer readig ad the Stop at Total volumes are equal. Flow Alarm 39 Auto Zero High ad Low gas flow ALARM limits ca be preprogrammed via keypad or remotely via digital The supports automatic sesor zero offset iterface. ALARM coditios become true whe the adjustmet which ca be activated locally via the keypad curret flow readig is equal or higher/lower tha or remotely via digital iterface. The auto zero correspodig values of high ad low alarm levels. Alarm feature requires absolutely o flow through the meter actio ca be assiged with preset delay iterval ( durig auto zero process. Provisios are made to secods) to activate the cotact closer (separate for High either start, read, or save the curret auto zero value ad Low alarm). via digital commads ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada BULLETIN EM201305

2 Pressure Alarm High ad Low gas pressure ALARM limits ca be preprogrammed via the keypad or remotely via digital iterface. Pressure alarm coditios become true whe the curret pressure readig is equal or higher tha correspodig values of high pressure alarm settigs or equal or lower tha correspodig values of low pressure alarm settigs. Alarm actio ca be assiged to activate the cotact closer (separate for High ad Low pressure alarm). Temperature Alarm High ad Low gas temperature ALARM limits ca be preprogrammed via the keypad or remotely via digital iterface. Temperature alarm coditios become true whe the curret temperature readig is equal or higher tha correspodig values of high temperature alarm settigs or equal or lower tha correspodig values of low temperature alarm settigs. Alarm actio ca be assiged to activate the cotact closer (separate for High ad Low temperature alarm). TABLE 23 -SPECIFICATIONS BULLETIN EM ACCURACY: CALIBRATIONS: PRESSURE RANGE (MEASUREMENT): PRESSURE ACCURACY: TEMPERATURE RANGE (MEASUREMENT): TEMPERATURE ACCURACY: ±1 F C. REPEATABILITY: RESPONSE TIME: TEMPERATURE COEFFICIENT: PRESSURE COEFFICIENT: OPTIMUM GAS PRESSURE: MAXIMUM GAS PRESSURE: MAXIMUM BURST PRESSURE: ±1% of FS at calibratio temperature ad pressure. Performed at stadard coditios [14.7 psia (101.4 kpa) ad 70 F F (21.1 F C)] uless otherwise stated. 5 to 100 psia (0.34 to 6.8 bars). ±1% of FS. 32 F F to 122 F F (0 F C to 50 F C). ±0.25% of full scale. 0.6 to 1.0 secod to withi ±2% of set flow over 20% to 100% of full scale. 0.15% / F C or better. 0.01% of full scale/ 1 psi (0.07 bar) or better. 25 psig (1.73 bars). MAXIMUM PRESSURE DROP: See table /36/46: 1000 psig (68 barg, 6895 kpag). 27/37/47: 100 psia (6.8 barabs, 689 kpaabs). 26/36/46: 1000 psig (68 barg, 6895 kpag). 27/37/47: 200 psig (13.6 barg, 1379 kpag). GAS ad AMBIENT TEMP: 32 F F to 122 F F (0 F C to 50 F C). 14 F F to 122 F F (-10 F C to 50 F C) - Dry gases oly. OUTPUT SIGNALS: Liear 0-5 Vdc (3000 ohms mi load impedace); 0-10Vdc (6000 ohms mi impedace); 4-20 ma optioal (500 ohms max loop resistace). Maximum oise 20mV peak to peak. INPUT POWER: May be cofigured for three differet optios: ±15Vdc (±200 ma maximum); +12Vdc (300 ma maximum); +24Vdc (250 ma maximum); Circuit boards have built-i polarity reversal protectio. Resettable fuses provide power iput protectio. **MATERIALS IN FLUID CONTACT: 316 stailess steel, Vito O-rigs. Optioal O-rigs: Bua, EPR ad Kalrez. CONNECTIONS: Model 26/27: Stadard 1/4" compressio fittigs. Optioal: 6mm compressio fittigs, 3/8" or 1/8" compressio fittigs ad 1/4" VCR fittigs. DISPLAY: CALIBRATION OPTIONS: CE COMPLIANCE: ENVIRONMENTAL (PER IEC 664): Model 36/37: Optioal: Model 46/47: Stadard 1/4" compressio fittigs. 6mm compressio fittigs, 3/8" compressio fittigs ad 1/4" VCR fittigs. Stadard 3/8" compressio fittigs. 128 x 64 graphic LCD with backlight (up to 8 lies of text). Stadard oe 10 poits NIST traceable calibratio. Optioal up to 9 additioal calibratios may be ordered for a additioal charge. EN class 1, class B; EN Istallatio Level II; Pollutio Degree II. **The selectio of materials of costructio, is the resposibility of the customer. The compay accepts o liability ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

3 Egieerig Uits TABLE 24 - FLOW RANGES FOR The measured gas flow ad associated totalizer data are scaled directly i egieerig uits via the frot pael keypad or digital iterface. 26 / 27 LOW FLOW MASS METERS ml/mi [N2] THE FOLLOWING UNITS OF MEASURE ARE SUPPORTED: %F.S., L/mi, L/h, ml/mi, ml/h, scuft/h, scuft/mi, lb/h, lb/mi, oe user defied egieerig uit. Multi-Gas Calibratio The is capable of storig primary calibratio data for up to 10 gases. This feature allows the same to be calibrated for multiple gases while maitaiig the rated accuracy o each. Coversio Factors Coversio factors for up to 32 gases are stored i the. I additio provisio is made for a user defied coversio factor. Coversio factors may be applied to ay of the te gas calibratios via keypad or digital iterface commads. Cotact Closure Two sets of dry cotact relay outputs are provided to actuate user supplied equipmet. These are programmable via the local keypad or digital iterface such that the relays ca be made to switch whe a specified evet occurs (e.g. whe a low or high flow, pressure or temperature alarm limit is exceeded or whe the totalizer reaches a specified value) to to to to to to 500 L/mi [N2] 07 0 to to to to / 37 MEDIUM FLOW MASS FLOW METERS L/mi [N2] 11 0 to / 47 HIGH FLOW MASS FLOW METERS L/mi [N2] Leak Itegrity TABLE 25 - PRESSURE DROP FOR 41 1 x 10-9 sml/sec of Helium maximum to the outside eviromet. MODEL FLOW RATE [liters/mi] MAXIMUM PRESSURE DROP FOR [mm H 2 O] [psid] [kpa] 26 /27 up to /37 46 / ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada BULLETIN EM201305

4 Multi Parameter Mass Flow Meter with Digital Sigal Processig Desig Features BULLETIN EM Multi-Drop Capability of up to 255 uits (for RS-485 optio). Stores calibratio data for up to 10 differet gases. Supports 10 differet egieerig uits icludig user defied. Programmable 12 digits Totalizer idicates total gas volume. Flow Alarm limits for high ad low gas flow with relay output. Pressure Alarm limits for high ad low gas pressure with relay output. Temperature Alarm limits for high & low gas temp. with relay output. Four butto keypad ad large 128x64 graphical LCD with back light. Digital (RS-232 or RS-485) ad Aalog outputs operate simultaeously. Iteral Coversio factors for up to 32 gases. Automatic Zero Adjustmet. Self-Diagostic Tests ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada

5 25-PIN D-CONNECTOR MALE 5.00 [127.0] 0.50 [12.7] 0.63 [15.9] 1.63 [41.3] 4.25 [108.0] 6.27 [159.3] B 0.15 DEEP 0.28 [7.1] 26 ad [17.5] 0.53 [13.5] 2.69 [68.3] 25-PIN D-CONNECTOR MALE 5.25 [133.4] 0.50 [12.7] 0.63 [15.9] 2.00 [50.8] 5.25 [133.4] 7.27 [184.6] 7.49 [190.2] * B 0.15 DEEP 43 * 36 ad ad 47 FOR HIGH FLOW MASS FLOW METER 0.80 [20.3] 2.69 [68.3] 0.32 [8.3] 0.69 [17.5] - ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada BULLETIN EM201305

6 ORDERING INFORMATION MULTI PARAMETER DIGITAL MASS FLOW METERS MODEL SERIES MAX FLOW (N2) L/mi L/mi L/mi L/mi L/mi L/mi MATERIAL S Stailess Steel SEALS V Vito B Bua E EPR T PTFE / Kalrez FITTINGS MODEL A 1/4" Compressio 26, 27, 36, 37 B 1/8" Compressio 26 & 27 C 1/4" VCR 26, 27, 36, 37 D 3/8" Compressio 26, 27, 36, 37, 46, 47 H 6mm Compressio 26, 27, 36, 37 DISPLAY L LCD readout POWER 2 12 Vdc 4 24 Vdc Vdc OUTPUT SIGNAL A 0-5 Vdc B 4-20 ma C 0-10 Vdc TEMP & PRESSURE OUTPUT SIGNAL (A oly 26, 36, 46) TEMP OUT PRESSURE OUT A.a..a. B 0-5Vdc 0-5Vdc C 0-5Vdc 4-20mA D 0-5Vdc 0-10Vdc E 4-20mA 0-5Vdc F 4-20mA 4-20mA G 4-20mA 0-10Vdc H 0-10Vdc 0-5Vdc I 0-10Vdc 4-20mA J 0-10Vdc 0-10Vdc *.a. = ot applicable. **DIGITAL INTERFACE 2 RS232 5 RS485 **RS485 is stadard. No cost optioal RS232 is selected by chagig the last digit of part umber from 5 to 2. LABELS A Aalborg BULLETIN EM S V A L 5 A A 5 A EXAMPLE: 36S-VAL5-AA5 50 L/mi [N2] 20 psig SPECIFY: FLOW RANGE, GAS ad PRESSURE 36 stailess steel, Vito seals, 1/4" compressio fittigs, LCD readout display, ±15 Vdc power, 0-5Vdc output sigal, RS485 digital iterface ifo@aalborg.com - ( fax Toll Free i U.S.A. ad Caada